<?xml version="1.0"?>
<feed xmlns="http://www.w3.org/2005/Atom" xml:lang="en">
	<id>https://wiki.nanofab.ucsb.edu/w/api.php?action=feedcontributions&amp;feedformat=atom&amp;user=Nplaviola</id>
	<title>UCSB Nanofab Wiki - User contributions [en]</title>
	<link rel="self" type="application/atom+xml" href="https://wiki.nanofab.ucsb.edu/w/api.php?action=feedcontributions&amp;feedformat=atom&amp;user=Nplaviola"/>
	<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/wiki/Special:Contributions/Nplaviola"/>
	<updated>2026-04-04T02:16:09Z</updated>
	<subtitle>User contributions</subtitle>
	<generator>MediaWiki 1.43.6</generator>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:Tool2_NLV&amp;diff=159116</id>
		<title>Template:Tool2 NLV</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:Tool2_NLV&amp;diff=159116"/>
		<updated>2021-09-01T05:33:30Z</updated>

		<summary type="html">&lt;p&gt;Nplaviola: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;20&amp;quot; align=&amp;quot;right&amp;quot; style=&amp;quot;float: right;&amp;quot;&lt;br /&gt;
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|-&lt;br /&gt;
! style=&amp;quot;background:skyblue;&amp;quot; |{{{name|&amp;lt;includeonly&amp;gt;{{PAGENAME}}&amp;lt;/includeonly&amp;gt;}}}&lt;br /&gt;
|-&lt;br /&gt;
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&amp;lt;!-- BORDER AROUND THE IMAGE --&amp;gt;&lt;br /&gt;
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{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;1&amp;quot; style=&amp;quot;background: none; border-top:1px solid #aaaaaa&amp;quot;&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
!width=150|Tool Type&lt;br /&gt;
!width=200|[[:Category:{{{type|NONE}}}|{{{type|NONE}}}]]&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
!width=150|Location&lt;br /&gt;
!width=200|{{{location|}}}&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
&lt;br /&gt;
{{#ifeq: {{{super}}}|Tony Bosch|{{StaffInfo|Tony Bosch|(805) 893-3486||bosch@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Ning Cao|{{StaffInfo|Ning Cao|(805) 893-4689| |ningcao@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Mike Day|{{StaffInfo|Mike Day|(805) 893-3101||day@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Don Freeborn|{{StaffInfo|Don Freeborn|(805) 893-7975| |dfreeborn@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Aidan Hopkins|{{StaffInfo|Aidan Hopkins|(805) 893-2343||hopkins@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Demis D. John|{{StaffInfo|Demis D. John|(805) 893-5934||demis@ucsb.edu}} }}{{#ifeq: {{{super}}}|Brian Lingg|{{StaffInfo|Brian Lingg|(805) 893-8145||lingg_b@ucsb.edu}} }}{{#ifeq: {{{super}}}|Bill Mitchell|{{StaffInfo|Bill Mitchell|(805) 893-4974| |mitchell@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Dan Read|{{StaffInfo|Dan Read|(805) 893-3138||dread@ucsb.edu}} }}{{#ifeq: {{{super}}}|Tom Reynolds|{{StaffInfo|Tom Reynolds|(805) 893-8158||reynolds@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Lee Sawyer|{{StaffInfo|Lee Sawyer|(805) 893-2123||lee_sawyer@ucsb.edu}} }}{{#ifeq: {{{super}}}|Mike Silva|{{StaffInfo|Mike Silva|(805) 893-3096||silva@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Biljana Stamenic|{{StaffInfo|Biljana Stamenic|(805) 893-4002 | |biljana@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Tino Sy|{{StaffInfo|Tino Sy|(805) 893-4796||sy@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Brian Thibeault|{{StaffInfo|Brian Thibeault|(805) 893-2268||thibeault@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Zack Warburg|{{StaffInfo|Zack Warburg|(805) 893-3918x200| |zwarburg@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Jack Whaley|{{StaffInfo|Jack Whaley|(805) 893-8174||whaley@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Luis Zuzunaga|{{StaffInfo|Luis Zuzunaga|(805) 893-8258||luis@ece.ucsb.edu}} }}&lt;br /&gt;
&amp;lt;noinclude&amp;gt;&lt;br /&gt;
{{staffInfoSecondary|{{super2}}}}&lt;br /&gt;
&amp;lt;/noinclude&amp;gt;&lt;br /&gt;
{{#ifeq: {{{super2}}}|Tony Bosch|{{StaffInfoSecondary|Tony Bosch|(805) 893-3486||bosch@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Ning Cao|{{StaffInfoSecondary|Ning Cao|(805) 893-4689| |ningcao@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Mike Day|{{StaffInfoSecondary|Mike Day|(805) 893-3101||day@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Don Freeborn|{{StaffInfoSecondary|Don Freeborn|(805) 893-7975| |dfreeborn@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Aidan Hopkins|{{StaffInfoSecondary|Aidan Hopkins|(805) 893-2343||hopkins@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Demis D. John|{{StaffInfoSecondary|Demis D. John|(805) 893-5934||demis@ucsb.edu}} }}{{#ifeq: {{{super2}}}|Brian Lingg|{{StaffInfoSecondary|Brian Lingg|(805) 893-8145||lingg_b@ucsb.edu}} }}{{#ifeq: {{{super2}}}|Bill Mitchell|{{StaffInfoSecondary|Bill Mitchell|(805) 893-4974| |mitchell@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Dan Read|{{StaffInfoSecondary|Dan Read|(805) 893-3138||dread@ucsb.edu}} }}{{#ifeq: {{{super2}}}|Tom Reynolds|{{StaffInfoSecondary|Tom Reynolds|(805) 893-8158||reynolds@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Lee Sawyer|{{StaffInfoSecondary|Lee Sawyer|(805) 893-2123||lee_sawyer@ucsb.edu}} }}{{#ifeq: {{{super2}}}|Mike Silva|{{StaffInfoSecondary|Mike Silva|(805) 893-3096||silva@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Biljana Stamenic|{{StaffInfoSecondary|Biljana Stamenic|(805) 893-4002 | |biljana@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Tino Sy|{{StaffInfoSecondary|Tino Sy|(805) 893-4796||sy@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Brian Thibeault|{{StaffInfoSecondary|Brian Thibeault|(805) 893-2268||thibeault@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Zack Warburg|{{StaffInfoSecondary|Zack Warburg|(805) 893-3918x200| |zwarburg@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Jack Whaley|{{StaffInfoSecondary|Jack Whaley|(805) 893-8174||whaley@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Luis Zuzunaga|{{StaffInfoSecondary|Luis Zuzunaga|(805) 893-8258||luis@ece.ucsb.edu}} }}&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;1&amp;quot; style=&amp;quot;background: none; border-top:1px solid #aaaaaa&amp;quot;&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
!width=150|Description&lt;br /&gt;
!width=200|{{{description|NONE}}} &lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
!width=150|Manufacturer&lt;br /&gt;
!width=200|{{{manufacturer|NONE}}}&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
{{#if:{{{model|}}} |&lt;br /&gt;
!width=150{{!}}Model&lt;br /&gt;
!width=200{{!}}{{{model|}}}&lt;br /&gt;
}}&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
{{#if:{{{materials|}}} |&lt;br /&gt;
!width=150{{!}}Materials&lt;br /&gt;
!width=200{{!}}{{{materials|}}}&lt;br /&gt;
}}&lt;br /&gt;
|-align=&amp;quot;center&amp;quot;&lt;br /&gt;
{{#ifeq: {{{type}}}|Vacuum Deposition|{{!}}colspan=&amp;quot;2&amp;quot;{{!}}&#039;&#039;&#039;[[Vacuum Deposition Recipes{{!}}{{{type}}} Recipes]]&#039;&#039;&#039;}}{{#ifeq: {{{type}}}|Dry Etch|{{!}}colspan=&amp;quot;2&amp;quot;{{!}}&#039;&#039;&#039;[[Dry Etching Recipes{{!}}{{{type}}} Recipes]]&#039;&#039;&#039;}}{{#if:{{{recipe|}}}|{{!}}colspan=&amp;quot;2&amp;quot;{{!}}&#039;&#039;&#039;[[{{{recipe}}} Recipes{{!}}{{{type}}} Recipes]]&#039;&#039;&#039;}}&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
{{#if:{{{toolid|}}}|&lt;br /&gt;
{{{!}} border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;1&amp;quot; style=&amp;quot;background: none; border-top:1px solid #aaaaaa&amp;quot;&lt;br /&gt;
{{!}}-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
{{!}}width=350 align=center{{!}}[http://signupmonkey.ece.ucsb.edu/cgi-bin/users/{{#ifeq:{{{toolid|}}}|999|tools.cgi|browse.cgi?tool_ID={{{toolid|}}}}} Sign up for this tool]&lt;br /&gt;
{{!}}-&lt;br /&gt;
{{!}}}|[[category:NOID]]&lt;br /&gt;
}}&lt;br /&gt;
|}&lt;br /&gt;
|}&lt;br /&gt;
&amp;lt;includeonly&amp;gt;[[category:Tools]][[Category:{{{type|NONE}}}]]&amp;lt;/includeonly&amp;gt;&lt;br /&gt;
&amp;lt;noinclude&amp;gt;&lt;br /&gt;
[[category:Templates]]&lt;br /&gt;
This template inserts a &amp;quot;Tool Info&amp;quot; panel into a page, including a tool photo, supervisor contact info and other relevant links.&lt;br /&gt;
&lt;br /&gt;
Copy/paste the following code to include this template in a page.  Preferably inserted at the top of the page.&lt;br /&gt;
&lt;br /&gt;
&amp;lt;div style=&amp;quot;width: 70%;&amp;quot;&amp;gt;&amp;lt;pre&amp;gt;&lt;br /&gt;
{{tool&lt;br /&gt;
|super = Tool Supervisor name from the list below&lt;br /&gt;
|picture=Photo_of_the_tool_01.jpg&lt;br /&gt;
|type  = One of the tool types from the list below&lt;br /&gt;
|recipe = One of the process types, from the list below&lt;br /&gt;
|toolid = ### the Tool ID number from SignupMonkey&lt;br /&gt;
|location = Bay #&lt;br /&gt;
|description = This is a machine&lt;br /&gt;
|manufacturer = MfgCorp.&lt;br /&gt;
|model = (if applicable)&lt;br /&gt;
|materials = (If applicable)&lt;br /&gt;
}}&lt;br /&gt;
&amp;lt;/pre&amp;gt;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/noinclude&amp;gt;&lt;br /&gt;
&lt;br /&gt;
&amp;lt;noinclude&amp;gt;&lt;br /&gt;
=== Options ===&lt;br /&gt;
You can add the following &amp;quot;arguments&amp;quot; in the template.&lt;br /&gt;
* &#039;&#039;&#039;Supervisor&#039;&#039;&#039;: The &#039;&#039;&#039;&amp;lt;tt style=&amp;quot;blue&amp;quot;&amp;gt;|super = &amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument must match one of the names listed below, and email/phone will be filled in automatically.  See the section below for available options/how to edit info.&lt;br /&gt;
* &#039;&#039;&#039;picture&#039;&#039;&#039;: A photograph of the tool. You must Upload the image file first (see [[Special:Upload|Upload File]] on the left sidebar), then&amp;lt;br&amp;gt;Copy the resulting filename and Paste it into this argument. No Spaces Allowed in the filename!&lt;br /&gt;
* &#039;&#039;&#039;Type of Tool&#039;&#039;&#039;: The &#039;&#039;&#039;&amp;lt;tt&amp;gt;|type = &amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument must match one of the defined values below.  This will will automatically link to the correct &#039;&#039;Tool Listing&#039;&#039; wiki page (eg. Dry Etching vs. Deposition etc.)&lt;br /&gt;
* &#039;&#039;&#039;Recipe Link&#039;&#039;&#039;: The &#039;&#039;&#039;&amp;lt;tt&amp;gt;|recipes = &amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument must match one of the defined values below.  This will will automatically link to the correct &#039;&#039;Recipes&#039;&#039; wiki page (eg. Dry Etching vs. Deposition etc.)&lt;br /&gt;
* &#039;&#039;&#039;Tool ID on SignupMonkey&#039;&#039;&#039;: The &#039;&#039;&#039;&amp;lt;tt&amp;gt;|toolid = &amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument will create a link to the Signup Monkey page for this tool. This is the number at the end of the url for a tool on SignupMonkey. Using 999 will link to the Main tool list on SignupMonkey.&lt;br /&gt;
* &#039;&#039;&#039;location, description, manufacturer, model, materials&#039;&#039;&#039; : You can type anything you want for these, or leave them out entirely to omit that section.&lt;br /&gt;
* &#039;&#039;&#039;Name&#039;&#039;&#039;: By default, this argument is not included, and the title of the page will be used (which should be the name of the tool).  If you want to change the name printed, add a line like:&lt;br /&gt;
*:&amp;lt;pre&amp;gt;|name = Optional Tool Name&amp;lt;/pre&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== Supervisor Information ===&lt;br /&gt;
The Supervisor information (email, phone) is inserted automatically by the template.  Their info is coded in the template, hence there is no &amp;quot;email&amp;quot; or &amp;quot;phone&amp;quot; argument in the above example. This allows you to change their contact info in this template only, and the change will show up on all of their tool pages automatically.&lt;br /&gt;
&lt;br /&gt;
&amp;lt;b&amp;gt;To edit the Supervisor info listed, you must edit this template in &amp;lt;tt&amp;gt;Edit Source&amp;lt;/tt&amp;gt; mode.&amp;lt;/b&amp;gt;&lt;br /&gt;
&lt;br /&gt;
Then find the line that shows the list of &#039;&#039;&#039;&amp;lt;tt&amp;gt;if equals&amp;lt;/tt&amp;gt;&#039;&#039;&#039; for each supervisor, which looks like this:&lt;br /&gt;
 &amp;lt;nowiki&amp;gt;{{#ifeq: {{{super}}}|Tony Bosch|{{StaffInfo|Tony Bosch|(805) 893-3486||bosch@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Ning Cao|{{StaffInfo|Ning Cao|(805) 893-4689| |ningcao@ece.ucsb.edu}} }} ....&amp;lt;/nowiki&amp;gt;&lt;br /&gt;
&lt;br /&gt;
It is a bit of an eyesore because no newlines or spaces can be inserted between each supervisor&#039;s options.&lt;br /&gt;
&lt;br /&gt;
You can see the First option &#039;&#039;Tony Bosch&#039;&#039; here is the name you type into the Tool Template&#039;s &#039;&#039;&#039;&amp;lt;tt&amp;gt;|super=&amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument.  Then the &#039;&#039;&#039;&amp;lt;tt&amp;gt;&amp;lt;nowiki&amp;gt;{{StaffInfo|&amp;lt;/nowiki&amp;gt;&amp;lt;/tt&amp;gt;&#039;&#039;&#039; section lists the Supervisor&#039;s information that will be inserted.&lt;br /&gt;
&lt;br /&gt;
To make a new supervisor option, copy one of the sections from the first pair of curly brackets &#039;&#039;&#039;&amp;lt;tt&amp;gt;&amp;lt;nowiki&amp;gt;{{&amp;lt;/nowiki&amp;gt;&amp;lt;/tt&amp;gt;&#039;&#039;&#039; to the ending 4 brackets &#039;&#039;&#039;&amp;lt;tt&amp;gt;&amp;lt;nowiki&amp;gt;}} }}&amp;lt;/nowiki&amp;gt;&amp;lt;/tt&amp;gt;&#039;&#039;&#039;, add it to the end of the list and edit the info as needed.&lt;br /&gt;
&lt;br /&gt;
=== Arguments with Specific Values ===&lt;br /&gt;
The following arguments have specific options, only enter one of these values:&lt;br /&gt;
* &#039;&#039;&#039;super&#039;&#039;&#039;: &lt;br /&gt;
*: Tony Bosch&lt;br /&gt;
*: Ning Cao&lt;br /&gt;
*: Mike Day&lt;br /&gt;
*: Don Freeborn&lt;br /&gt;
*: Aidan Hopkins&lt;br /&gt;
*: Demis D. John&lt;br /&gt;
*: Brian Lingg&lt;br /&gt;
*: Bill Mitchell&lt;br /&gt;
*: Dan Read&lt;br /&gt;
*: Tom Reynolds&lt;br /&gt;
*: Lee Sawyer&lt;br /&gt;
*: Mike Silva&lt;br /&gt;
*: Biljana Stamenic&lt;br /&gt;
*: Tino Sy&lt;br /&gt;
*: Brian Thibeault&lt;br /&gt;
*: Zack Warburg&lt;br /&gt;
*: Jack Whaley&lt;br /&gt;
*: Luis Zuzunaga&lt;br /&gt;
* &#039;&#039;&#039;type&#039;&#039;&#039;: &lt;br /&gt;
*: Vacuum Deposition&lt;br /&gt;
*: Dry Etch&lt;br /&gt;
*: Wet Processing&lt;br /&gt;
*: Thermal Processing&lt;br /&gt;
*: Packaging&lt;br /&gt;
*: Inspection, Test and Characterization&lt;br /&gt;
*:: (spaces are ok)&lt;br /&gt;
* &#039;&#039;&#039;recipe&#039;&#039;&#039;: &lt;br /&gt;
*: Lithography&lt;br /&gt;
*: Vacuum Deposition (auto if `type` is set to this)&lt;br /&gt;
*: Dry Etching (auto if `type` is set to this)&lt;br /&gt;
*: Wet Etching&lt;br /&gt;
*: Thermal Processing&lt;br /&gt;
*: Packaging&lt;br /&gt;
&lt;br /&gt;
&amp;lt;/noinclude&amp;gt;&lt;/div&gt;</summary>
		<author><name>Nplaviola</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:Tool2_NLV&amp;diff=159115</id>
		<title>Template:Tool2 NLV</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:Tool2_NLV&amp;diff=159115"/>
		<updated>2021-09-01T05:32:53Z</updated>

		<summary type="html">&lt;p&gt;Nplaviola: &lt;/p&gt;
&lt;hr /&gt;
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|-&lt;br /&gt;
|&lt;br /&gt;
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|-&lt;br /&gt;
! style=&amp;quot;background:skyblue;&amp;quot; |{{{name|&amp;lt;includeonly&amp;gt;{{PAGENAME}}&amp;lt;/includeonly&amp;gt;}}}&lt;br /&gt;
|-&lt;br /&gt;
|&lt;br /&gt;
&amp;lt;!-- BORDER AROUND THE IMAGE --&amp;gt;&lt;br /&gt;
{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;0&amp;quot; style=&amp;quot;background: black; border: 1px solid #aaaaaa&amp;quot; align=&amp;quot;center&amp;quot;&lt;br /&gt;
|-&lt;br /&gt;
![[image:{{{picture|none.jpg}}}|300x350px|center|]]&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
&amp;lt;!-- END OF BORDER AROUND IMAGE --&amp;gt;&lt;br /&gt;
|-&lt;br /&gt;
|&lt;br /&gt;
{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;1&amp;quot; style=&amp;quot;background: none; border-top:1px solid #aaaaaa&amp;quot;&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
!width=150|Tool Type&lt;br /&gt;
!width=200|[[:Category:{{{type|NONE}}}|{{{type|NONE}}}]]&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
!width=150|Location&lt;br /&gt;
!width=200|{{{location|}}}&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
&lt;br /&gt;
{{#ifeq: {{{super}}}|Tony Bosch|{{StaffInfo|Tony Bosch|(805) 893-3486||bosch@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Ning Cao|{{StaffInfo|Ning Cao|(805) 893-4689| |ningcao@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Mike Day|{{StaffInfo|Mike Day|(805) 893-3101||day@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Don Freeborn|{{StaffInfo|Don Freeborn|(805) 893-7975| |dfreeborn@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Aidan Hopkins|{{StaffInfo|Aidan Hopkins|(805) 893-2343||hopkins@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Demis D. John|{{StaffInfo|Demis D. John|(805) 893-5934||demis@ucsb.edu}} }}{{#ifeq: {{{super}}}|Brian Lingg|{{StaffInfo|Brian Lingg|(805) 893-8145||lingg_b@ucsb.edu}} }}{{#ifeq: {{{super}}}|Bill Mitchell|{{StaffInfo|Bill Mitchell|(805) 893-4974| |mitchell@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Dan Read|{{StaffInfo|Dan Read|(805) 893-3138||dread@ucsb.edu}} }}{{#ifeq: {{{super}}}|Tom Reynolds|{{StaffInfo|Tom Reynolds|(805) 893-8158||reynolds@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Lee Sawyer|{{StaffInfo|Lee Sawyer|(805) 893-2123||lee_sawyer@ucsb.edu}} }}{{#ifeq: {{{super}}}|Mike Silva|{{StaffInfo|Mike Silva|(805) 893-3096||silva@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Biljana Stamenic|{{StaffInfo|Biljana Stamenic|(805) 893-4002 | |biljana@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Tino Sy|{{StaffInfo|Tino Sy|(805) 893-4796||sy@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Brian Thibeault|{{StaffInfo|Brian Thibeault|(805) 893-2268||thibeault@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Zack Warburg|{{StaffInfo|Zack Warburg|(805) 893-3918x200| |zwarburg@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Jack Whaley|{{StaffInfo|Jack Whaley|(805) 893-8174||whaley@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Luis Zuzunaga|{{StaffInfo|Luis Zuzunaga|(805) 893-8258||luis@ece.ucsb.edu}} }}&lt;br /&gt;
&lt;br /&gt;
&amp;lt;noinclude&amp;gt;&lt;br /&gt;
{{staffInfoSecondary|{{super2}}}}&lt;br /&gt;
&amp;lt;/noinclude&amp;gt;&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
{{#ifeq: {{{super2}}}|Tony Bosch|{{StaffInfoSecondary|Tony Bosch|(805) 893-3486||bosch@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Ning Cao|{{StaffInfoSecondary|Ning Cao|(805) 893-4689| |ningcao@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Mike Day|{{StaffInfoSecondary|Mike Day|(805) 893-3101||day@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Don Freeborn|{{StaffInfoSecondary|Don Freeborn|(805) 893-7975| |dfreeborn@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Aidan Hopkins|{{StaffInfoSecondary|Aidan Hopkins|(805) 893-2343||hopkins@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Demis D. John|{{StaffInfoSecondary|Demis D. John|(805) 893-5934||demis@ucsb.edu}} }}{{#ifeq: {{{super2}}}|Brian Lingg|{{StaffInfoSecondary|Brian Lingg|(805) 893-8145||lingg_b@ucsb.edu}} }}{{#ifeq: {{{super2}}}|Bill Mitchell|{{StaffInfoSecondary|Bill Mitchell|(805) 893-4974| |mitchell@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Dan Read|{{StaffInfoSecondary|Dan Read|(805) 893-3138||dread@ucsb.edu}} }}{{#ifeq: {{{super2}}}|Tom Reynolds|{{StaffInfoSecondary|Tom Reynolds|(805) 893-8158||reynolds@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Lee Sawyer|{{StaffInfoSecondary|Lee Sawyer|(805) 893-2123||lee_sawyer@ucsb.edu}} }}{{#ifeq: {{{super2}}}|Mike Silva|{{StaffInfoSecondary|Mike Silva|(805) 893-3096||silva@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Biljana Stamenic|{{StaffInfoSecondary|Biljana Stamenic|(805) 893-4002 | |biljana@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Tino Sy|{{StaffInfoSecondary|Tino Sy|(805) 893-4796||sy@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Brian Thibeault|{{StaffInfoSecondary|Brian Thibeault|(805) 893-2268||thibeault@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Zack Warburg|{{StaffInfoSecondary|Zack Warburg|(805) 893-3918x200| |zwarburg@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Jack Whaley|{{StaffInfoSecondary|Jack Whaley|(805) 893-8174||whaley@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Luis Zuzunaga|{{StaffInfoSecondary|Luis Zuzunaga|(805) 893-8258||luis@ece.ucsb.edu}} }}&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;1&amp;quot; style=&amp;quot;background: none; border-top:1px solid #aaaaaa&amp;quot;&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
!width=150|Description&lt;br /&gt;
!width=200|{{{description|NONE}}} &lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
!width=150|Manufacturer&lt;br /&gt;
!width=200|{{{manufacturer|NONE}}}&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
{{#if:{{{model|}}} |&lt;br /&gt;
!width=150{{!}}Model&lt;br /&gt;
!width=200{{!}}{{{model|}}}&lt;br /&gt;
}}&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
{{#if:{{{materials|}}} |&lt;br /&gt;
!width=150{{!}}Materials&lt;br /&gt;
!width=200{{!}}{{{materials|}}}&lt;br /&gt;
}}&lt;br /&gt;
|-align=&amp;quot;center&amp;quot;&lt;br /&gt;
{{#ifeq: {{{type}}}|Vacuum Deposition|{{!}}colspan=&amp;quot;2&amp;quot;{{!}}&#039;&#039;&#039;[[Vacuum Deposition Recipes{{!}}{{{type}}} Recipes]]&#039;&#039;&#039;}}{{#ifeq: {{{type}}}|Dry Etch|{{!}}colspan=&amp;quot;2&amp;quot;{{!}}&#039;&#039;&#039;[[Dry Etching Recipes{{!}}{{{type}}} Recipes]]&#039;&#039;&#039;}}{{#if:{{{recipe|}}}|{{!}}colspan=&amp;quot;2&amp;quot;{{!}}&#039;&#039;&#039;[[{{{recipe}}} Recipes{{!}}{{{type}}} Recipes]]&#039;&#039;&#039;}}&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
{{#if:{{{toolid|}}}|&lt;br /&gt;
{{{!}} border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;1&amp;quot; style=&amp;quot;background: none; border-top:1px solid #aaaaaa&amp;quot;&lt;br /&gt;
{{!}}-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
{{!}}width=350 align=center{{!}}[http://signupmonkey.ece.ucsb.edu/cgi-bin/users/{{#ifeq:{{{toolid|}}}|999|tools.cgi|browse.cgi?tool_ID={{{toolid|}}}}} Sign up for this tool]&lt;br /&gt;
{{!}}-&lt;br /&gt;
{{!}}}|[[category:NOID]]&lt;br /&gt;
}}&lt;br /&gt;
|}&lt;br /&gt;
|}&lt;br /&gt;
&amp;lt;includeonly&amp;gt;[[category:Tools]][[Category:{{{type|NONE}}}]]&amp;lt;/includeonly&amp;gt;&lt;br /&gt;
&amp;lt;noinclude&amp;gt;&lt;br /&gt;
[[category:Templates]]&lt;br /&gt;
This template inserts a &amp;quot;Tool Info&amp;quot; panel into a page, including a tool photo, supervisor contact info and other relevant links.&lt;br /&gt;
&lt;br /&gt;
Copy/paste the following code to include this template in a page.  Preferably inserted at the top of the page.&lt;br /&gt;
&lt;br /&gt;
&amp;lt;div style=&amp;quot;width: 70%;&amp;quot;&amp;gt;&amp;lt;pre&amp;gt;&lt;br /&gt;
{{tool&lt;br /&gt;
|super = Tool Supervisor name from the list below&lt;br /&gt;
|picture=Photo_of_the_tool_01.jpg&lt;br /&gt;
|type  = One of the tool types from the list below&lt;br /&gt;
|recipe = One of the process types, from the list below&lt;br /&gt;
|toolid = ### the Tool ID number from SignupMonkey&lt;br /&gt;
|location = Bay #&lt;br /&gt;
|description = This is a machine&lt;br /&gt;
|manufacturer = MfgCorp.&lt;br /&gt;
|model = (if applicable)&lt;br /&gt;
|materials = (If applicable)&lt;br /&gt;
}}&lt;br /&gt;
&amp;lt;/pre&amp;gt;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/noinclude&amp;gt;&lt;br /&gt;
&lt;br /&gt;
&amp;lt;noinclude&amp;gt;&lt;br /&gt;
=== Options ===&lt;br /&gt;
You can add the following &amp;quot;arguments&amp;quot; in the template.&lt;br /&gt;
* &#039;&#039;&#039;Supervisor&#039;&#039;&#039;: The &#039;&#039;&#039;&amp;lt;tt style=&amp;quot;blue&amp;quot;&amp;gt;|super = &amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument must match one of the names listed below, and email/phone will be filled in automatically.  See the section below for available options/how to edit info.&lt;br /&gt;
* &#039;&#039;&#039;picture&#039;&#039;&#039;: A photograph of the tool. You must Upload the image file first (see [[Special:Upload|Upload File]] on the left sidebar), then&amp;lt;br&amp;gt;Copy the resulting filename and Paste it into this argument. No Spaces Allowed in the filename!&lt;br /&gt;
* &#039;&#039;&#039;Type of Tool&#039;&#039;&#039;: The &#039;&#039;&#039;&amp;lt;tt&amp;gt;|type = &amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument must match one of the defined values below.  This will will automatically link to the correct &#039;&#039;Tool Listing&#039;&#039; wiki page (eg. Dry Etching vs. Deposition etc.)&lt;br /&gt;
* &#039;&#039;&#039;Recipe Link&#039;&#039;&#039;: The &#039;&#039;&#039;&amp;lt;tt&amp;gt;|recipes = &amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument must match one of the defined values below.  This will will automatically link to the correct &#039;&#039;Recipes&#039;&#039; wiki page (eg. Dry Etching vs. Deposition etc.)&lt;br /&gt;
* &#039;&#039;&#039;Tool ID on SignupMonkey&#039;&#039;&#039;: The &#039;&#039;&#039;&amp;lt;tt&amp;gt;|toolid = &amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument will create a link to the Signup Monkey page for this tool. This is the number at the end of the url for a tool on SignupMonkey. Using 999 will link to the Main tool list on SignupMonkey.&lt;br /&gt;
* &#039;&#039;&#039;location, description, manufacturer, model, materials&#039;&#039;&#039; : You can type anything you want for these, or leave them out entirely to omit that section.&lt;br /&gt;
* &#039;&#039;&#039;Name&#039;&#039;&#039;: By default, this argument is not included, and the title of the page will be used (which should be the name of the tool).  If you want to change the name printed, add a line like:&lt;br /&gt;
*:&amp;lt;pre&amp;gt;|name = Optional Tool Name&amp;lt;/pre&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== Supervisor Information ===&lt;br /&gt;
The Supervisor information (email, phone) is inserted automatically by the template.  Their info is coded in the template, hence there is no &amp;quot;email&amp;quot; or &amp;quot;phone&amp;quot; argument in the above example. This allows you to change their contact info in this template only, and the change will show up on all of their tool pages automatically.&lt;br /&gt;
&lt;br /&gt;
&amp;lt;b&amp;gt;To edit the Supervisor info listed, you must edit this template in &amp;lt;tt&amp;gt;Edit Source&amp;lt;/tt&amp;gt; mode.&amp;lt;/b&amp;gt;&lt;br /&gt;
&lt;br /&gt;
Then find the line that shows the list of &#039;&#039;&#039;&amp;lt;tt&amp;gt;if equals&amp;lt;/tt&amp;gt;&#039;&#039;&#039; for each supervisor, which looks like this:&lt;br /&gt;
 &amp;lt;nowiki&amp;gt;{{#ifeq: {{{super}}}|Tony Bosch|{{StaffInfo|Tony Bosch|(805) 893-3486||bosch@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Ning Cao|{{StaffInfo|Ning Cao|(805) 893-4689| |ningcao@ece.ucsb.edu}} }} ....&amp;lt;/nowiki&amp;gt;&lt;br /&gt;
&lt;br /&gt;
It is a bit of an eyesore because no newlines or spaces can be inserted between each supervisor&#039;s options.&lt;br /&gt;
&lt;br /&gt;
You can see the First option &#039;&#039;Tony Bosch&#039;&#039; here is the name you type into the Tool Template&#039;s &#039;&#039;&#039;&amp;lt;tt&amp;gt;|super=&amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument.  Then the &#039;&#039;&#039;&amp;lt;tt&amp;gt;&amp;lt;nowiki&amp;gt;{{StaffInfo|&amp;lt;/nowiki&amp;gt;&amp;lt;/tt&amp;gt;&#039;&#039;&#039; section lists the Supervisor&#039;s information that will be inserted.&lt;br /&gt;
&lt;br /&gt;
To make a new supervisor option, copy one of the sections from the first pair of curly brackets &#039;&#039;&#039;&amp;lt;tt&amp;gt;&amp;lt;nowiki&amp;gt;{{&amp;lt;/nowiki&amp;gt;&amp;lt;/tt&amp;gt;&#039;&#039;&#039; to the ending 4 brackets &#039;&#039;&#039;&amp;lt;tt&amp;gt;&amp;lt;nowiki&amp;gt;}} }}&amp;lt;/nowiki&amp;gt;&amp;lt;/tt&amp;gt;&#039;&#039;&#039;, add it to the end of the list and edit the info as needed.&lt;br /&gt;
&lt;br /&gt;
=== Arguments with Specific Values ===&lt;br /&gt;
The following arguments have specific options, only enter one of these values:&lt;br /&gt;
* &#039;&#039;&#039;super&#039;&#039;&#039;: &lt;br /&gt;
*: Tony Bosch&lt;br /&gt;
*: Ning Cao&lt;br /&gt;
*: Mike Day&lt;br /&gt;
*: Don Freeborn&lt;br /&gt;
*: Aidan Hopkins&lt;br /&gt;
*: Demis D. John&lt;br /&gt;
*: Brian Lingg&lt;br /&gt;
*: Bill Mitchell&lt;br /&gt;
*: Dan Read&lt;br /&gt;
*: Tom Reynolds&lt;br /&gt;
*: Lee Sawyer&lt;br /&gt;
*: Mike Silva&lt;br /&gt;
*: Biljana Stamenic&lt;br /&gt;
*: Tino Sy&lt;br /&gt;
*: Brian Thibeault&lt;br /&gt;
*: Zack Warburg&lt;br /&gt;
*: Jack Whaley&lt;br /&gt;
*: Luis Zuzunaga&lt;br /&gt;
* &#039;&#039;&#039;type&#039;&#039;&#039;: &lt;br /&gt;
*: Vacuum Deposition&lt;br /&gt;
*: Dry Etch&lt;br /&gt;
*: Wet Processing&lt;br /&gt;
*: Thermal Processing&lt;br /&gt;
*: Packaging&lt;br /&gt;
*: Inspection, Test and Characterization&lt;br /&gt;
*:: (spaces are ok)&lt;br /&gt;
* &#039;&#039;&#039;recipe&#039;&#039;&#039;: &lt;br /&gt;
*: Lithography&lt;br /&gt;
*: Vacuum Deposition (auto if `type` is set to this)&lt;br /&gt;
*: Dry Etching (auto if `type` is set to this)&lt;br /&gt;
*: Wet Etching&lt;br /&gt;
*: Thermal Processing&lt;br /&gt;
*: Packaging&lt;br /&gt;
&lt;br /&gt;
&amp;lt;/noinclude&amp;gt;&lt;/div&gt;</summary>
		<author><name>Nplaviola</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:StaffInfoSecondary&amp;diff=159114</id>
		<title>Template:StaffInfoSecondary</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:StaffInfoSecondary&amp;diff=159114"/>
		<updated>2021-09-01T05:32:09Z</updated>

		<summary type="html">&lt;p&gt;Nplaviola: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;{{!}}-&lt;br /&gt;
!width=150{{!}}Secondary Supervisor&lt;br /&gt;
!width=200{{!}}[[{{{1}}}]]&lt;br /&gt;
&amp;lt;noinclude&amp;gt;[[category:Templates]]&lt;br /&gt;
&amp;lt;noinclude&amp;gt;&lt;br /&gt;
&amp;lt;hr&amp;gt;&lt;br /&gt;
To edit the &#039;&#039;&#039;Contact Information for NanoFab staff&#039;&#039;&#039;, please see the [[Template:Tool|Tool Template page]]&lt;/div&gt;</summary>
		<author><name>Nplaviola</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:Tool2_NLV&amp;diff=159113</id>
		<title>Template:Tool2 NLV</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:Tool2_NLV&amp;diff=159113"/>
		<updated>2021-09-01T05:31:17Z</updated>

		<summary type="html">&lt;p&gt;Nplaviola: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;20&amp;quot; align=&amp;quot;right&amp;quot; style=&amp;quot;float: right;&amp;quot;&lt;br /&gt;
|-&lt;br /&gt;
|&lt;br /&gt;
{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;0&amp;quot; style=&amp;quot;background: whitesmoke; border: 1px solid #aaaaaa&amp;quot; align=&amp;quot;center&amp;quot;&lt;br /&gt;
|-&lt;br /&gt;
! style=&amp;quot;background:skyblue;&amp;quot; |{{{name|&amp;lt;includeonly&amp;gt;{{PAGENAME}}&amp;lt;/includeonly&amp;gt;}}}&lt;br /&gt;
|-&lt;br /&gt;
|&lt;br /&gt;
&amp;lt;!-- BORDER AROUND THE IMAGE --&amp;gt;&lt;br /&gt;
{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;0&amp;quot; style=&amp;quot;background: black; border: 1px solid #aaaaaa&amp;quot; align=&amp;quot;center&amp;quot;&lt;br /&gt;
|-&lt;br /&gt;
![[image:{{{picture|none.jpg}}}|300x350px|center|]]&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
&amp;lt;!-- END OF BORDER AROUND IMAGE --&amp;gt;&lt;br /&gt;
|-&lt;br /&gt;
|&lt;br /&gt;
{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;1&amp;quot; style=&amp;quot;background: none; border-top:1px solid #aaaaaa&amp;quot;&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
!width=150|Tool Type&lt;br /&gt;
!width=200|[[:Category:{{{type|NONE}}}|{{{type|NONE}}}]]&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
!width=150|Location&lt;br /&gt;
!width=200|{{{location|}}}&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
&lt;br /&gt;
{{#ifeq: {{{super}}}|Tony Bosch|{{StaffInfo|Tony Bosch|(805) 893-3486||bosch@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Ning Cao|{{StaffInfo|Ning Cao|(805) 893-4689| |ningcao@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Mike Day|{{StaffInfo|Mike Day|(805) 893-3101||day@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Don Freeborn|{{StaffInfo|Don Freeborn|(805) 893-7975| |dfreeborn@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Aidan Hopkins|{{StaffInfo|Aidan Hopkins|(805) 893-2343||hopkins@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Demis D. John|{{StaffInfo|Demis D. John|(805) 893-5934||demis@ucsb.edu}} }}{{#ifeq: {{{super}}}|Brian Lingg|{{StaffInfo|Brian Lingg|(805) 893-8145||lingg_b@ucsb.edu}} }}{{#ifeq: {{{super}}}|Bill Mitchell|{{StaffInfo|Bill Mitchell|(805) 893-4974| |mitchell@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Dan Read|{{StaffInfo|Dan Read|(805) 893-3138||dread@ucsb.edu}} }}{{#ifeq: {{{super}}}|Tom Reynolds|{{StaffInfo|Tom Reynolds|(805) 893-8158||reynolds@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Lee Sawyer|{{StaffInfo|Lee Sawyer|(805) 893-2123||lee_sawyer@ucsb.edu}} }}{{#ifeq: {{{super}}}|Mike Silva|{{StaffInfo|Mike Silva|(805) 893-3096||silva@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Biljana Stamenic|{{StaffInfo|Biljana Stamenic|(805) 893-4002 | |biljana@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Tino Sy|{{StaffInfo|Tino Sy|(805) 893-4796||sy@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Brian Thibeault|{{StaffInfo|Brian Thibeault|(805) 893-2268||thibeault@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Zack Warburg|{{StaffInfo|Zack Warburg|(805) 893-3918x200| |zwarburg@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Jack Whaley|{{StaffInfo|Jack Whaley|(805) 893-8174||whaley@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Luis Zuzunaga|{{StaffInfo|Luis Zuzunaga|(805) 893-8258||luis@ece.ucsb.edu}} }}&lt;br /&gt;
&lt;br /&gt;
{{staffInfoSecondary|{{super2}}}}&lt;br /&gt;
&lt;br /&gt;
&amp;lt;noinclude&amp;gt;&lt;br /&gt;
{{#ifeq: {{{super2}}}|Tony Bosch|{{StaffInfoSecondary|Tony Bosch|(805) 893-3486||bosch@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Ning Cao|{{StaffInfoSecondary|Ning Cao|(805) 893-4689| |ningcao@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Mike Day|{{StaffInfoSecondary|Mike Day|(805) 893-3101||day@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Don Freeborn|{{StaffInfoSecondary|Don Freeborn|(805) 893-7975| |dfreeborn@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Aidan Hopkins|{{StaffInfoSecondary|Aidan Hopkins|(805) 893-2343||hopkins@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Demis D. John|{{StaffInfoSecondary|Demis D. John|(805) 893-5934||demis@ucsb.edu}} }}{{#ifeq: {{{super2}}}|Brian Lingg|{{StaffInfoSecondary|Brian Lingg|(805) 893-8145||lingg_b@ucsb.edu}} }}{{#ifeq: {{{super2}}}|Bill Mitchell|{{StaffInfoSecondary|Bill Mitchell|(805) 893-4974| |mitchell@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Dan Read|{{StaffInfoSecondary|Dan Read|(805) 893-3138||dread@ucsb.edu}} }}{{#ifeq: {{{super2}}}|Tom Reynolds|{{StaffInfoSecondary|Tom Reynolds|(805) 893-8158||reynolds@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Lee Sawyer|{{StaffInfoSecondary|Lee Sawyer|(805) 893-2123||lee_sawyer@ucsb.edu}} }}{{#ifeq: {{{super2}}}|Mike Silva|{{StaffInfoSecondary|Mike Silva|(805) 893-3096||silva@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Biljana Stamenic|{{StaffInfoSecondary|Biljana Stamenic|(805) 893-4002 | |biljana@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Tino Sy|{{StaffInfoSecondary|Tino Sy|(805) 893-4796||sy@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Brian Thibeault|{{StaffInfoSecondary|Brian Thibeault|(805) 893-2268||thibeault@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Zack Warburg|{{StaffInfoSecondary|Zack Warburg|(805) 893-3918x200| |zwarburg@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Jack Whaley|{{StaffInfoSecondary|Jack Whaley|(805) 893-8174||whaley@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Luis Zuzunaga|{{StaffInfoSecondary|Luis Zuzunaga|(805) 893-8258||luis@ece.ucsb.edu}} }}&lt;br /&gt;
&amp;lt;/noinclude&amp;gt;&lt;br /&gt;
&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;1&amp;quot; style=&amp;quot;background: none; border-top:1px solid #aaaaaa&amp;quot;&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
!width=150|Description&lt;br /&gt;
!width=200|{{{description|NONE}}} &lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
!width=150|Manufacturer&lt;br /&gt;
!width=200|{{{manufacturer|NONE}}}&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
{{#if:{{{model|}}} |&lt;br /&gt;
!width=150{{!}}Model&lt;br /&gt;
!width=200{{!}}{{{model|}}}&lt;br /&gt;
}}&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
{{#if:{{{materials|}}} |&lt;br /&gt;
!width=150{{!}}Materials&lt;br /&gt;
!width=200{{!}}{{{materials|}}}&lt;br /&gt;
}}&lt;br /&gt;
|-align=&amp;quot;center&amp;quot;&lt;br /&gt;
{{#ifeq: {{{type}}}|Vacuum Deposition|{{!}}colspan=&amp;quot;2&amp;quot;{{!}}&#039;&#039;&#039;[[Vacuum Deposition Recipes{{!}}{{{type}}} Recipes]]&#039;&#039;&#039;}}{{#ifeq: {{{type}}}|Dry Etch|{{!}}colspan=&amp;quot;2&amp;quot;{{!}}&#039;&#039;&#039;[[Dry Etching Recipes{{!}}{{{type}}} Recipes]]&#039;&#039;&#039;}}{{#if:{{{recipe|}}}|{{!}}colspan=&amp;quot;2&amp;quot;{{!}}&#039;&#039;&#039;[[{{{recipe}}} Recipes{{!}}{{{type}}} Recipes]]&#039;&#039;&#039;}}&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
{{#if:{{{toolid|}}}|&lt;br /&gt;
{{{!}} border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;1&amp;quot; style=&amp;quot;background: none; border-top:1px solid #aaaaaa&amp;quot;&lt;br /&gt;
{{!}}-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
{{!}}width=350 align=center{{!}}[http://signupmonkey.ece.ucsb.edu/cgi-bin/users/{{#ifeq:{{{toolid|}}}|999|tools.cgi|browse.cgi?tool_ID={{{toolid|}}}}} Sign up for this tool]&lt;br /&gt;
{{!}}-&lt;br /&gt;
{{!}}}|[[category:NOID]]&lt;br /&gt;
}}&lt;br /&gt;
|}&lt;br /&gt;
|}&lt;br /&gt;
&amp;lt;includeonly&amp;gt;[[category:Tools]][[Category:{{{type|NONE}}}]]&amp;lt;/includeonly&amp;gt;&lt;br /&gt;
&amp;lt;noinclude&amp;gt;&lt;br /&gt;
[[category:Templates]]&lt;br /&gt;
This template inserts a &amp;quot;Tool Info&amp;quot; panel into a page, including a tool photo, supervisor contact info and other relevant links.&lt;br /&gt;
&lt;br /&gt;
Copy/paste the following code to include this template in a page.  Preferably inserted at the top of the page.&lt;br /&gt;
&lt;br /&gt;
&amp;lt;div style=&amp;quot;width: 70%;&amp;quot;&amp;gt;&amp;lt;pre&amp;gt;&lt;br /&gt;
{{tool&lt;br /&gt;
|super = Tool Supervisor name from the list below&lt;br /&gt;
|picture=Photo_of_the_tool_01.jpg&lt;br /&gt;
|type  = One of the tool types from the list below&lt;br /&gt;
|recipe = One of the process types, from the list below&lt;br /&gt;
|toolid = ### the Tool ID number from SignupMonkey&lt;br /&gt;
|location = Bay #&lt;br /&gt;
|description = This is a machine&lt;br /&gt;
|manufacturer = MfgCorp.&lt;br /&gt;
|model = (if applicable)&lt;br /&gt;
|materials = (If applicable)&lt;br /&gt;
}}&lt;br /&gt;
&amp;lt;/pre&amp;gt;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/noinclude&amp;gt;&lt;br /&gt;
&lt;br /&gt;
&amp;lt;noinclude&amp;gt;&lt;br /&gt;
=== Options ===&lt;br /&gt;
You can add the following &amp;quot;arguments&amp;quot; in the template.&lt;br /&gt;
* &#039;&#039;&#039;Supervisor&#039;&#039;&#039;: The &#039;&#039;&#039;&amp;lt;tt style=&amp;quot;blue&amp;quot;&amp;gt;|super = &amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument must match one of the names listed below, and email/phone will be filled in automatically.  See the section below for available options/how to edit info.&lt;br /&gt;
* &#039;&#039;&#039;picture&#039;&#039;&#039;: A photograph of the tool. You must Upload the image file first (see [[Special:Upload|Upload File]] on the left sidebar), then&amp;lt;br&amp;gt;Copy the resulting filename and Paste it into this argument. No Spaces Allowed in the filename!&lt;br /&gt;
* &#039;&#039;&#039;Type of Tool&#039;&#039;&#039;: The &#039;&#039;&#039;&amp;lt;tt&amp;gt;|type = &amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument must match one of the defined values below.  This will will automatically link to the correct &#039;&#039;Tool Listing&#039;&#039; wiki page (eg. Dry Etching vs. Deposition etc.)&lt;br /&gt;
* &#039;&#039;&#039;Recipe Link&#039;&#039;&#039;: The &#039;&#039;&#039;&amp;lt;tt&amp;gt;|recipes = &amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument must match one of the defined values below.  This will will automatically link to the correct &#039;&#039;Recipes&#039;&#039; wiki page (eg. Dry Etching vs. Deposition etc.)&lt;br /&gt;
* &#039;&#039;&#039;Tool ID on SignupMonkey&#039;&#039;&#039;: The &#039;&#039;&#039;&amp;lt;tt&amp;gt;|toolid = &amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument will create a link to the Signup Monkey page for this tool. This is the number at the end of the url for a tool on SignupMonkey. Using 999 will link to the Main tool list on SignupMonkey.&lt;br /&gt;
* &#039;&#039;&#039;location, description, manufacturer, model, materials&#039;&#039;&#039; : You can type anything you want for these, or leave them out entirely to omit that section.&lt;br /&gt;
* &#039;&#039;&#039;Name&#039;&#039;&#039;: By default, this argument is not included, and the title of the page will be used (which should be the name of the tool).  If you want to change the name printed, add a line like:&lt;br /&gt;
*:&amp;lt;pre&amp;gt;|name = Optional Tool Name&amp;lt;/pre&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== Supervisor Information ===&lt;br /&gt;
The Supervisor information (email, phone) is inserted automatically by the template.  Their info is coded in the template, hence there is no &amp;quot;email&amp;quot; or &amp;quot;phone&amp;quot; argument in the above example. This allows you to change their contact info in this template only, and the change will show up on all of their tool pages automatically.&lt;br /&gt;
&lt;br /&gt;
&amp;lt;b&amp;gt;To edit the Supervisor info listed, you must edit this template in &amp;lt;tt&amp;gt;Edit Source&amp;lt;/tt&amp;gt; mode.&amp;lt;/b&amp;gt;&lt;br /&gt;
&lt;br /&gt;
Then find the line that shows the list of &#039;&#039;&#039;&amp;lt;tt&amp;gt;if equals&amp;lt;/tt&amp;gt;&#039;&#039;&#039; for each supervisor, which looks like this:&lt;br /&gt;
 &amp;lt;nowiki&amp;gt;{{#ifeq: {{{super}}}|Tony Bosch|{{StaffInfo|Tony Bosch|(805) 893-3486||bosch@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Ning Cao|{{StaffInfo|Ning Cao|(805) 893-4689| |ningcao@ece.ucsb.edu}} }} ....&amp;lt;/nowiki&amp;gt;&lt;br /&gt;
&lt;br /&gt;
It is a bit of an eyesore because no newlines or spaces can be inserted between each supervisor&#039;s options.&lt;br /&gt;
&lt;br /&gt;
You can see the First option &#039;&#039;Tony Bosch&#039;&#039; here is the name you type into the Tool Template&#039;s &#039;&#039;&#039;&amp;lt;tt&amp;gt;|super=&amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument.  Then the &#039;&#039;&#039;&amp;lt;tt&amp;gt;&amp;lt;nowiki&amp;gt;{{StaffInfo|&amp;lt;/nowiki&amp;gt;&amp;lt;/tt&amp;gt;&#039;&#039;&#039; section lists the Supervisor&#039;s information that will be inserted.&lt;br /&gt;
&lt;br /&gt;
To make a new supervisor option, copy one of the sections from the first pair of curly brackets &#039;&#039;&#039;&amp;lt;tt&amp;gt;&amp;lt;nowiki&amp;gt;{{&amp;lt;/nowiki&amp;gt;&amp;lt;/tt&amp;gt;&#039;&#039;&#039; to the ending 4 brackets &#039;&#039;&#039;&amp;lt;tt&amp;gt;&amp;lt;nowiki&amp;gt;}} }}&amp;lt;/nowiki&amp;gt;&amp;lt;/tt&amp;gt;&#039;&#039;&#039;, add it to the end of the list and edit the info as needed.&lt;br /&gt;
&lt;br /&gt;
=== Arguments with Specific Values ===&lt;br /&gt;
The following arguments have specific options, only enter one of these values:&lt;br /&gt;
* &#039;&#039;&#039;super&#039;&#039;&#039;: &lt;br /&gt;
*: Tony Bosch&lt;br /&gt;
*: Ning Cao&lt;br /&gt;
*: Mike Day&lt;br /&gt;
*: Don Freeborn&lt;br /&gt;
*: Aidan Hopkins&lt;br /&gt;
*: Demis D. John&lt;br /&gt;
*: Brian Lingg&lt;br /&gt;
*: Bill Mitchell&lt;br /&gt;
*: Dan Read&lt;br /&gt;
*: Tom Reynolds&lt;br /&gt;
*: Lee Sawyer&lt;br /&gt;
*: Mike Silva&lt;br /&gt;
*: Biljana Stamenic&lt;br /&gt;
*: Tino Sy&lt;br /&gt;
*: Brian Thibeault&lt;br /&gt;
*: Zack Warburg&lt;br /&gt;
*: Jack Whaley&lt;br /&gt;
*: Luis Zuzunaga&lt;br /&gt;
* &#039;&#039;&#039;type&#039;&#039;&#039;: &lt;br /&gt;
*: Vacuum Deposition&lt;br /&gt;
*: Dry Etch&lt;br /&gt;
*: Wet Processing&lt;br /&gt;
*: Thermal Processing&lt;br /&gt;
*: Packaging&lt;br /&gt;
*: Inspection, Test and Characterization&lt;br /&gt;
*:: (spaces are ok)&lt;br /&gt;
* &#039;&#039;&#039;recipe&#039;&#039;&#039;: &lt;br /&gt;
*: Lithography&lt;br /&gt;
*: Vacuum Deposition (auto if `type` is set to this)&lt;br /&gt;
*: Dry Etching (auto if `type` is set to this)&lt;br /&gt;
*: Wet Etching&lt;br /&gt;
*: Thermal Processing&lt;br /&gt;
*: Packaging&lt;br /&gt;
&lt;br /&gt;
&amp;lt;/noinclude&amp;gt;&lt;/div&gt;</summary>
		<author><name>Nplaviola</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:StaffInfoSecondary&amp;diff=159112</id>
		<title>Template:StaffInfoSecondary</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:StaffInfoSecondary&amp;diff=159112"/>
		<updated>2021-09-01T05:30:19Z</updated>

		<summary type="html">&lt;p&gt;Nplaviola: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;{{!}}-&lt;br /&gt;
!width=150{{!}}Secondary Supervisor&lt;br /&gt;
!width=200{{!}}[[{{StaffDirectory|character={{{1|}}}}}]]&lt;br /&gt;
&amp;lt;noinclude&amp;gt;[[category:Templates]]&lt;br /&gt;
&amp;lt;noinclude&amp;gt;&lt;br /&gt;
&amp;lt;hr&amp;gt;&lt;br /&gt;
To edit the &#039;&#039;&#039;Contact Information for NanoFab staff&#039;&#039;&#039;, please see the [[Template:Tool|Tool Template page]]&lt;/div&gt;</summary>
		<author><name>Nplaviola</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:Tool2_NLV&amp;diff=159111</id>
		<title>Template:Tool2 NLV</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:Tool2_NLV&amp;diff=159111"/>
		<updated>2021-09-01T05:27:11Z</updated>

		<summary type="html">&lt;p&gt;Nplaviola: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;20&amp;quot; align=&amp;quot;right&amp;quot; style=&amp;quot;float: right;&amp;quot;&lt;br /&gt;
|-&lt;br /&gt;
|&lt;br /&gt;
{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;0&amp;quot; style=&amp;quot;background: whitesmoke; border: 1px solid #aaaaaa&amp;quot; align=&amp;quot;center&amp;quot;&lt;br /&gt;
|-&lt;br /&gt;
! style=&amp;quot;background:skyblue;&amp;quot; |{{{name|&amp;lt;includeonly&amp;gt;{{PAGENAME}}&amp;lt;/includeonly&amp;gt;}}}&lt;br /&gt;
|-&lt;br /&gt;
|&lt;br /&gt;
&amp;lt;!-- BORDER AROUND THE IMAGE --&amp;gt;&lt;br /&gt;
{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;0&amp;quot; style=&amp;quot;background: black; border: 1px solid #aaaaaa&amp;quot; align=&amp;quot;center&amp;quot;&lt;br /&gt;
|-&lt;br /&gt;
![[image:{{{picture|none.jpg}}}|300x350px|center|]]&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
&amp;lt;!-- END OF BORDER AROUND IMAGE --&amp;gt;&lt;br /&gt;
|-&lt;br /&gt;
|&lt;br /&gt;
{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;1&amp;quot; style=&amp;quot;background: none; border-top:1px solid #aaaaaa&amp;quot;&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
!width=150|Tool Type&lt;br /&gt;
!width=200|[[:Category:{{{type|NONE}}}|{{{type|NONE}}}]]&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
!width=150|Location&lt;br /&gt;
!width=200|{{{location|}}}&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
&lt;br /&gt;
{{#ifeq: {{{super}}}|Tony Bosch|{{StaffInfo|Tony Bosch|(805) 893-3486||bosch@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Ning Cao|{{StaffInfo|Ning Cao|(805) 893-4689| |ningcao@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Mike Day|{{StaffInfo|Mike Day|(805) 893-3101||day@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Don Freeborn|{{StaffInfo|Don Freeborn|(805) 893-7975| |dfreeborn@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Aidan Hopkins|{{StaffInfo|Aidan Hopkins|(805) 893-2343||hopkins@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Demis D. John|{{StaffInfo|Demis D. John|(805) 893-5934||demis@ucsb.edu}} }}{{#ifeq: {{{super}}}|Brian Lingg|{{StaffInfo|Brian Lingg|(805) 893-8145||lingg_b@ucsb.edu}} }}{{#ifeq: {{{super}}}|Bill Mitchell|{{StaffInfo|Bill Mitchell|(805) 893-4974| |mitchell@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Dan Read|{{StaffInfo|Dan Read|(805) 893-3138||dread@ucsb.edu}} }}{{#ifeq: {{{super}}}|Tom Reynolds|{{StaffInfo|Tom Reynolds|(805) 893-8158||reynolds@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Lee Sawyer|{{StaffInfo|Lee Sawyer|(805) 893-2123||lee_sawyer@ucsb.edu}} }}{{#ifeq: {{{super}}}|Mike Silva|{{StaffInfo|Mike Silva|(805) 893-3096||silva@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Biljana Stamenic|{{StaffInfo|Biljana Stamenic|(805) 893-4002 | |biljana@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Tino Sy|{{StaffInfo|Tino Sy|(805) 893-4796||sy@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Brian Thibeault|{{StaffInfo|Brian Thibeault|(805) 893-2268||thibeault@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Zack Warburg|{{StaffInfo|Zack Warburg|(805) 893-3918x200| |zwarburg@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Jack Whaley|{{StaffInfo|Jack Whaley|(805) 893-8174||whaley@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Luis Zuzunaga|{{StaffInfo|Luis Zuzunaga|(805) 893-8258||luis@ece.ucsb.edu}} }}&lt;br /&gt;
&lt;br /&gt;
{{staffInfoSecondary|{{super2}}&lt;br /&gt;
&lt;br /&gt;
&amp;lt;noinclude&amp;gt;&lt;br /&gt;
{{#ifeq: {{{super2}}}|Tony Bosch|{{StaffInfoSecondary|Tony Bosch|(805) 893-3486||bosch@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Ning Cao|{{StaffInfoSecondary|Ning Cao|(805) 893-4689| |ningcao@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Mike Day|{{StaffInfoSecondary|Mike Day|(805) 893-3101||day@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Don Freeborn|{{StaffInfoSecondary|Don Freeborn|(805) 893-7975| |dfreeborn@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Aidan Hopkins|{{StaffInfoSecondary|Aidan Hopkins|(805) 893-2343||hopkins@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Demis D. John|{{StaffInfoSecondary|Demis D. John|(805) 893-5934||demis@ucsb.edu}} }}{{#ifeq: {{{super2}}}|Brian Lingg|{{StaffInfoSecondary|Brian Lingg|(805) 893-8145||lingg_b@ucsb.edu}} }}{{#ifeq: {{{super2}}}|Bill Mitchell|{{StaffInfoSecondary|Bill Mitchell|(805) 893-4974| |mitchell@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Dan Read|{{StaffInfoSecondary|Dan Read|(805) 893-3138||dread@ucsb.edu}} }}{{#ifeq: {{{super2}}}|Tom Reynolds|{{StaffInfoSecondary|Tom Reynolds|(805) 893-8158||reynolds@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Lee Sawyer|{{StaffInfoSecondary|Lee Sawyer|(805) 893-2123||lee_sawyer@ucsb.edu}} }}{{#ifeq: {{{super2}}}|Mike Silva|{{StaffInfoSecondary|Mike Silva|(805) 893-3096||silva@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Biljana Stamenic|{{StaffInfoSecondary|Biljana Stamenic|(805) 893-4002 | |biljana@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Tino Sy|{{StaffInfoSecondary|Tino Sy|(805) 893-4796||sy@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Brian Thibeault|{{StaffInfoSecondary|Brian Thibeault|(805) 893-2268||thibeault@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Zack Warburg|{{StaffInfoSecondary|Zack Warburg|(805) 893-3918x200| |zwarburg@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Jack Whaley|{{StaffInfoSecondary|Jack Whaley|(805) 893-8174||whaley@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Luis Zuzunaga|{{StaffInfoSecondary|Luis Zuzunaga|(805) 893-8258||luis@ece.ucsb.edu}} }}&lt;br /&gt;
&amp;lt;/noinclude&amp;gt;&lt;br /&gt;
&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;1&amp;quot; style=&amp;quot;background: none; border-top:1px solid #aaaaaa&amp;quot;&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
!width=150|Description&lt;br /&gt;
!width=200|{{{description|NONE}}} &lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
!width=150|Manufacturer&lt;br /&gt;
!width=200|{{{manufacturer|NONE}}}&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
{{#if:{{{model|}}} |&lt;br /&gt;
!width=150{{!}}Model&lt;br /&gt;
!width=200{{!}}{{{model|}}}&lt;br /&gt;
}}&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
{{#if:{{{materials|}}} |&lt;br /&gt;
!width=150{{!}}Materials&lt;br /&gt;
!width=200{{!}}{{{materials|}}}&lt;br /&gt;
}}&lt;br /&gt;
|-align=&amp;quot;center&amp;quot;&lt;br /&gt;
{{#ifeq: {{{type}}}|Vacuum Deposition|{{!}}colspan=&amp;quot;2&amp;quot;{{!}}&#039;&#039;&#039;[[Vacuum Deposition Recipes{{!}}{{{type}}} Recipes]]&#039;&#039;&#039;}}{{#ifeq: {{{type}}}|Dry Etch|{{!}}colspan=&amp;quot;2&amp;quot;{{!}}&#039;&#039;&#039;[[Dry Etching Recipes{{!}}{{{type}}} Recipes]]&#039;&#039;&#039;}}{{#if:{{{recipe|}}}|{{!}}colspan=&amp;quot;2&amp;quot;{{!}}&#039;&#039;&#039;[[{{{recipe}}} Recipes{{!}}{{{type}}} Recipes]]&#039;&#039;&#039;}}&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
{{#if:{{{toolid|}}}|&lt;br /&gt;
{{{!}} border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;1&amp;quot; style=&amp;quot;background: none; border-top:1px solid #aaaaaa&amp;quot;&lt;br /&gt;
{{!}}-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
{{!}}width=350 align=center{{!}}[http://signupmonkey.ece.ucsb.edu/cgi-bin/users/{{#ifeq:{{{toolid|}}}|999|tools.cgi|browse.cgi?tool_ID={{{toolid|}}}}} Sign up for this tool]&lt;br /&gt;
{{!}}-&lt;br /&gt;
{{!}}}|[[category:NOID]]&lt;br /&gt;
}}&lt;br /&gt;
|}&lt;br /&gt;
|}&lt;br /&gt;
&amp;lt;includeonly&amp;gt;[[category:Tools]][[Category:{{{type|NONE}}}]]&amp;lt;/includeonly&amp;gt;&lt;br /&gt;
&amp;lt;noinclude&amp;gt;&lt;br /&gt;
[[category:Templates]]&lt;br /&gt;
This template inserts a &amp;quot;Tool Info&amp;quot; panel into a page, including a tool photo, supervisor contact info and other relevant links.&lt;br /&gt;
&lt;br /&gt;
Copy/paste the following code to include this template in a page.  Preferably inserted at the top of the page.&lt;br /&gt;
&lt;br /&gt;
&amp;lt;div style=&amp;quot;width: 70%;&amp;quot;&amp;gt;&amp;lt;pre&amp;gt;&lt;br /&gt;
{{tool&lt;br /&gt;
|super = Tool Supervisor name from the list below&lt;br /&gt;
|picture=Photo_of_the_tool_01.jpg&lt;br /&gt;
|type  = One of the tool types from the list below&lt;br /&gt;
|recipe = One of the process types, from the list below&lt;br /&gt;
|toolid = ### the Tool ID number from SignupMonkey&lt;br /&gt;
|location = Bay #&lt;br /&gt;
|description = This is a machine&lt;br /&gt;
|manufacturer = MfgCorp.&lt;br /&gt;
|model = (if applicable)&lt;br /&gt;
|materials = (If applicable)&lt;br /&gt;
}}&lt;br /&gt;
&amp;lt;/pre&amp;gt;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/noinclude&amp;gt;&lt;br /&gt;
&lt;br /&gt;
&amp;lt;noinclude&amp;gt;&lt;br /&gt;
=== Options ===&lt;br /&gt;
You can add the following &amp;quot;arguments&amp;quot; in the template.&lt;br /&gt;
* &#039;&#039;&#039;Supervisor&#039;&#039;&#039;: The &#039;&#039;&#039;&amp;lt;tt style=&amp;quot;blue&amp;quot;&amp;gt;|super = &amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument must match one of the names listed below, and email/phone will be filled in automatically.  See the section below for available options/how to edit info.&lt;br /&gt;
* &#039;&#039;&#039;picture&#039;&#039;&#039;: A photograph of the tool. You must Upload the image file first (see [[Special:Upload|Upload File]] on the left sidebar), then&amp;lt;br&amp;gt;Copy the resulting filename and Paste it into this argument. No Spaces Allowed in the filename!&lt;br /&gt;
* &#039;&#039;&#039;Type of Tool&#039;&#039;&#039;: The &#039;&#039;&#039;&amp;lt;tt&amp;gt;|type = &amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument must match one of the defined values below.  This will will automatically link to the correct &#039;&#039;Tool Listing&#039;&#039; wiki page (eg. Dry Etching vs. Deposition etc.)&lt;br /&gt;
* &#039;&#039;&#039;Recipe Link&#039;&#039;&#039;: The &#039;&#039;&#039;&amp;lt;tt&amp;gt;|recipes = &amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument must match one of the defined values below.  This will will automatically link to the correct &#039;&#039;Recipes&#039;&#039; wiki page (eg. Dry Etching vs. Deposition etc.)&lt;br /&gt;
* &#039;&#039;&#039;Tool ID on SignupMonkey&#039;&#039;&#039;: The &#039;&#039;&#039;&amp;lt;tt&amp;gt;|toolid = &amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument will create a link to the Signup Monkey page for this tool. This is the number at the end of the url for a tool on SignupMonkey. Using 999 will link to the Main tool list on SignupMonkey.&lt;br /&gt;
* &#039;&#039;&#039;location, description, manufacturer, model, materials&#039;&#039;&#039; : You can type anything you want for these, or leave them out entirely to omit that section.&lt;br /&gt;
* &#039;&#039;&#039;Name&#039;&#039;&#039;: By default, this argument is not included, and the title of the page will be used (which should be the name of the tool).  If you want to change the name printed, add a line like:&lt;br /&gt;
*:&amp;lt;pre&amp;gt;|name = Optional Tool Name&amp;lt;/pre&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== Supervisor Information ===&lt;br /&gt;
The Supervisor information (email, phone) is inserted automatically by the template.  Their info is coded in the template, hence there is no &amp;quot;email&amp;quot; or &amp;quot;phone&amp;quot; argument in the above example. This allows you to change their contact info in this template only, and the change will show up on all of their tool pages automatically.&lt;br /&gt;
&lt;br /&gt;
&amp;lt;b&amp;gt;To edit the Supervisor info listed, you must edit this template in &amp;lt;tt&amp;gt;Edit Source&amp;lt;/tt&amp;gt; mode.&amp;lt;/b&amp;gt;&lt;br /&gt;
&lt;br /&gt;
Then find the line that shows the list of &#039;&#039;&#039;&amp;lt;tt&amp;gt;if equals&amp;lt;/tt&amp;gt;&#039;&#039;&#039; for each supervisor, which looks like this:&lt;br /&gt;
 &amp;lt;nowiki&amp;gt;{{#ifeq: {{{super}}}|Tony Bosch|{{StaffInfo|Tony Bosch|(805) 893-3486||bosch@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Ning Cao|{{StaffInfo|Ning Cao|(805) 893-4689| |ningcao@ece.ucsb.edu}} }} ....&amp;lt;/nowiki&amp;gt;&lt;br /&gt;
&lt;br /&gt;
It is a bit of an eyesore because no newlines or spaces can be inserted between each supervisor&#039;s options.&lt;br /&gt;
&lt;br /&gt;
You can see the First option &#039;&#039;Tony Bosch&#039;&#039; here is the name you type into the Tool Template&#039;s &#039;&#039;&#039;&amp;lt;tt&amp;gt;|super=&amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument.  Then the &#039;&#039;&#039;&amp;lt;tt&amp;gt;&amp;lt;nowiki&amp;gt;{{StaffInfo|&amp;lt;/nowiki&amp;gt;&amp;lt;/tt&amp;gt;&#039;&#039;&#039; section lists the Supervisor&#039;s information that will be inserted.&lt;br /&gt;
&lt;br /&gt;
To make a new supervisor option, copy one of the sections from the first pair of curly brackets &#039;&#039;&#039;&amp;lt;tt&amp;gt;&amp;lt;nowiki&amp;gt;{{&amp;lt;/nowiki&amp;gt;&amp;lt;/tt&amp;gt;&#039;&#039;&#039; to the ending 4 brackets &#039;&#039;&#039;&amp;lt;tt&amp;gt;&amp;lt;nowiki&amp;gt;}} }}&amp;lt;/nowiki&amp;gt;&amp;lt;/tt&amp;gt;&#039;&#039;&#039;, add it to the end of the list and edit the info as needed.&lt;br /&gt;
&lt;br /&gt;
=== Arguments with Specific Values ===&lt;br /&gt;
The following arguments have specific options, only enter one of these values:&lt;br /&gt;
* &#039;&#039;&#039;super&#039;&#039;&#039;: &lt;br /&gt;
*: Tony Bosch&lt;br /&gt;
*: Ning Cao&lt;br /&gt;
*: Mike Day&lt;br /&gt;
*: Don Freeborn&lt;br /&gt;
*: Aidan Hopkins&lt;br /&gt;
*: Demis D. John&lt;br /&gt;
*: Brian Lingg&lt;br /&gt;
*: Bill Mitchell&lt;br /&gt;
*: Dan Read&lt;br /&gt;
*: Tom Reynolds&lt;br /&gt;
*: Lee Sawyer&lt;br /&gt;
*: Mike Silva&lt;br /&gt;
*: Biljana Stamenic&lt;br /&gt;
*: Tino Sy&lt;br /&gt;
*: Brian Thibeault&lt;br /&gt;
*: Zack Warburg&lt;br /&gt;
*: Jack Whaley&lt;br /&gt;
*: Luis Zuzunaga&lt;br /&gt;
* &#039;&#039;&#039;type&#039;&#039;&#039;: &lt;br /&gt;
*: Vacuum Deposition&lt;br /&gt;
*: Dry Etch&lt;br /&gt;
*: Wet Processing&lt;br /&gt;
*: Thermal Processing&lt;br /&gt;
*: Packaging&lt;br /&gt;
*: Inspection, Test and Characterization&lt;br /&gt;
*:: (spaces are ok)&lt;br /&gt;
* &#039;&#039;&#039;recipe&#039;&#039;&#039;: &lt;br /&gt;
*: Lithography&lt;br /&gt;
*: Vacuum Deposition (auto if `type` is set to this)&lt;br /&gt;
*: Dry Etching (auto if `type` is set to this)&lt;br /&gt;
*: Wet Etching&lt;br /&gt;
*: Thermal Processing&lt;br /&gt;
*: Packaging&lt;br /&gt;
&lt;br /&gt;
&amp;lt;/noinclude&amp;gt;&lt;/div&gt;</summary>
		<author><name>Nplaviola</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:StaffInfoSecondary&amp;diff=159110</id>
		<title>Template:StaffInfoSecondary</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:StaffInfoSecondary&amp;diff=159110"/>
		<updated>2021-09-01T05:27:03Z</updated>

		<summary type="html">&lt;p&gt;Nplaviola: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;{{!}}-&lt;br /&gt;
!width=150{{!}}Secondary Supervisor&lt;br /&gt;
!width=200{{!}}[[{{StaffDirectory|{{1}}}}]]&lt;br /&gt;
&amp;lt;noinclude&amp;gt;[[category:Templates]]&lt;br /&gt;
&amp;lt;noinclude&amp;gt;&lt;br /&gt;
&amp;lt;hr&amp;gt;&lt;br /&gt;
To edit the &#039;&#039;&#039;Contact Information for NanoFab staff&#039;&#039;&#039;, please see the [[Template:Tool|Tool Template page]]&lt;/div&gt;</summary>
		<author><name>Nplaviola</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:StaffInfoSecondary&amp;diff=159109</id>
		<title>Template:StaffInfoSecondary</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:StaffInfoSecondary&amp;diff=159109"/>
		<updated>2021-09-01T05:19:43Z</updated>

		<summary type="html">&lt;p&gt;Nplaviola: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;{{!}}-&lt;br /&gt;
!width=150{{!}}Secondary Supervisor&lt;br /&gt;
!width=200{{!}}[[{{{1}}}]]&lt;br /&gt;
&amp;lt;noinclude&amp;gt;[[category:Templates]]&lt;br /&gt;
&amp;lt;noinclude&amp;gt;&lt;br /&gt;
&amp;lt;hr&amp;gt;&lt;br /&gt;
To edit the &#039;&#039;&#039;Contact Information for NanoFab staff&#039;&#039;&#039;, please see the [[Template:Tool|Tool Template page]]&lt;/div&gt;</summary>
		<author><name>Nplaviola</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:StaffInfoSecondary&amp;diff=159108</id>
		<title>Template:StaffInfoSecondary</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:StaffInfoSecondary&amp;diff=159108"/>
		<updated>2021-09-01T05:19:08Z</updated>

		<summary type="html">&lt;p&gt;Nplaviola: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;{{!}}-&lt;br /&gt;
!width=150{{!}}Secondary Supervisor&lt;br /&gt;
!width=200{{!}}{{{1}}}&lt;br /&gt;
&amp;lt;noinclude&amp;gt;[[category:Templates]]&lt;br /&gt;
&amp;lt;noinclude&amp;gt;&lt;br /&gt;
&amp;lt;hr&amp;gt;&lt;br /&gt;
To edit the &#039;&#039;&#039;Contact Information for NanoFab staff&#039;&#039;&#039;, please see the [[Template:Tool|Tool Template page]]&lt;/div&gt;</summary>
		<author><name>Nplaviola</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:StaffDirectory&amp;diff=159107</id>
		<title>Template:StaffDirectory</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:StaffDirectory&amp;diff=159107"/>
		<updated>2021-09-01T05:06:56Z</updated>

		<summary type="html">&lt;p&gt;Nplaviola: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;{{#switch: {{{character|}}}&lt;br /&gt;
| Tony Bosch = {{#switch: {{{trait|}}}&lt;br /&gt;
  | phone = (805) 893-3486&lt;br /&gt;
  | email = bosch@ece.ucsb.edu&lt;br /&gt;
  }}&lt;br /&gt;
| Ning Cao = {{#switch: {{{trait|}}}&lt;br /&gt;
  | phone = (805) 893-4689&lt;br /&gt;
  | email = ningcao@ece.ucsb.edu&lt;br /&gt;
  }}&lt;br /&gt;
}}&lt;br /&gt;
&amp;lt;noinclude&amp;gt;&lt;br /&gt;
A directory of users, their phone numbers, and emails that can be called into any template&lt;br /&gt;
&amp;lt;/noinclude&amp;gt;&lt;/div&gt;</summary>
		<author><name>Nplaviola</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:StaffDirectory&amp;diff=159106</id>
		<title>Template:StaffDirectory</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:StaffDirectory&amp;diff=159106"/>
		<updated>2021-09-01T05:06:47Z</updated>

		<summary type="html">&lt;p&gt;Nplaviola: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;{{#switch: {{{character|}}}&lt;br /&gt;
| Tony Bosch = {{#switch: {{{trait|}}}&lt;br /&gt;
  | phone = (805) 893-3486&lt;br /&gt;
  | email = bosch@ece.ucsb.edu&lt;br /&gt;
  }}&lt;br /&gt;
| Ning Cao = {{#switch: {{{trait|}}}&lt;br /&gt;
  | phone = (805) 893-4689&lt;br /&gt;
  | email = ningcao@ece.ucsb.edu&lt;br /&gt;
  }}&lt;br /&gt;
}}&lt;br /&gt;
&amp;lt;noinclude&amp;gt;&lt;br /&gt;
A directory of users, their phone numbers, and emails that can be called into any template&lt;br /&gt;
&amp;lt;/noinclude&lt;/div&gt;</summary>
		<author><name>Nplaviola</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:StaffDirectory&amp;diff=159105</id>
		<title>Template:StaffDirectory</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:StaffDirectory&amp;diff=159105"/>
		<updated>2021-09-01T05:05:47Z</updated>

		<summary type="html">&lt;p&gt;Nplaviola: Created page with &amp;quot;{{#switch: {{{character|}}} | Tony Bosch = {{#switch: {{{trait|}}}   | phone = (805) 893-3486   | email = bosch@ece.ucsb.edu   }} | Ning Cao = {{#switch: {{{trait|}}}   | phon...&amp;quot;&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;{{#switch: {{{character|}}}&lt;br /&gt;
| Tony Bosch = {{#switch: {{{trait|}}}&lt;br /&gt;
  | phone = (805) 893-3486&lt;br /&gt;
  | email = bosch@ece.ucsb.edu&lt;br /&gt;
  }}&lt;br /&gt;
| Ning Cao = {{#switch: {{{trait|}}}&lt;br /&gt;
  | phone = (805) 893-4689&lt;br /&gt;
  | email = ningcao@ece.ucsb.edu&lt;br /&gt;
  }}&lt;br /&gt;
}}&lt;/div&gt;</summary>
		<author><name>Nplaviola</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:Tool2_NLV&amp;diff=159094</id>
		<title>Template:Tool2 NLV</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:Tool2_NLV&amp;diff=159094"/>
		<updated>2021-08-27T05:25:08Z</updated>

		<summary type="html">&lt;p&gt;Nplaviola: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;20&amp;quot; align=&amp;quot;right&amp;quot; style=&amp;quot;float: right;&amp;quot;&lt;br /&gt;
|-&lt;br /&gt;
|&lt;br /&gt;
{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;0&amp;quot; style=&amp;quot;background: whitesmoke; border: 1px solid #aaaaaa&amp;quot; align=&amp;quot;center&amp;quot;&lt;br /&gt;
|-&lt;br /&gt;
! style=&amp;quot;background:skyblue;&amp;quot; |{{{name|&amp;lt;includeonly&amp;gt;{{PAGENAME}}&amp;lt;/includeonly&amp;gt;}}}&lt;br /&gt;
|-&lt;br /&gt;
|&lt;br /&gt;
&amp;lt;!-- BORDER AROUND THE IMAGE --&amp;gt;&lt;br /&gt;
{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;0&amp;quot; style=&amp;quot;background: black; border: 1px solid #aaaaaa&amp;quot; align=&amp;quot;center&amp;quot;&lt;br /&gt;
|-&lt;br /&gt;
![[image:{{{picture|none.jpg}}}|300x350px|center|]]&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
&amp;lt;!-- END OF BORDER AROUND IMAGE --&amp;gt;&lt;br /&gt;
|-&lt;br /&gt;
|&lt;br /&gt;
{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;1&amp;quot; style=&amp;quot;background: none; border-top:1px solid #aaaaaa&amp;quot;&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
!width=150|Tool Type&lt;br /&gt;
!width=200|[[:Category:{{{type|NONE}}}|{{{type|NONE}}}]]&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
!width=150|Location&lt;br /&gt;
!width=200|{{{location|}}}&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
&lt;br /&gt;
{{#ifeq: {{{super}}}|Tony Bosch|{{StaffInfo|Tony Bosch|(805) 893-3486||bosch@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Ning Cao|{{StaffInfo|Ning Cao|(805) 893-4689| |ningcao@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Mike Day|{{StaffInfo|Mike Day|(805) 893-3101||day@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Don Freeborn|{{StaffInfo|Don Freeborn|(805) 893-7975| |dfreeborn@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Aidan Hopkins|{{StaffInfo|Aidan Hopkins|(805) 893-2343||hopkins@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Demis D. John|{{StaffInfo|Demis D. John|(805) 893-5934||demis@ucsb.edu}} }}{{#ifeq: {{{super}}}|Brian Lingg|{{StaffInfo|Brian Lingg|(805) 893-8145||lingg_b@ucsb.edu}} }}{{#ifeq: {{{super}}}|Bill Mitchell|{{StaffInfo|Bill Mitchell|(805) 893-4974| |mitchell@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Dan Read|{{StaffInfo|Dan Read|(805) 893-3138||dread@ucsb.edu}} }}{{#ifeq: {{{super}}}|Tom Reynolds|{{StaffInfo|Tom Reynolds|(805) 893-8158||reynolds@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Lee Sawyer|{{StaffInfo|Lee Sawyer|(805) 893-2123||lee_sawyer@ucsb.edu}} }}{{#ifeq: {{{super}}}|Mike Silva|{{StaffInfo|Mike Silva|(805) 893-3096||silva@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Biljana Stamenic|{{StaffInfo|Biljana Stamenic|(805) 893-4002 | |biljana@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Tino Sy|{{StaffInfo|Tino Sy|(805) 893-4796||sy@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Brian Thibeault|{{StaffInfo|Brian Thibeault|(805) 893-2268||thibeault@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Zack Warburg|{{StaffInfo|Zack Warburg|(805) 893-3918x200| |zwarburg@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Jack Whaley|{{StaffInfo|Jack Whaley|(805) 893-8174||whaley@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Luis Zuzunaga|{{StaffInfo|Luis Zuzunaga|(805) 893-8258||luis@ece.ucsb.edu}} }}&lt;br /&gt;
&lt;br /&gt;
{{#ifeq: {{{super2}}}|Tony Bosch|{{StaffInfoSecondary|Tony Bosch|(805) 893-3486||bosch@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Ning Cao|{{StaffInfoSecondary|Ning Cao|(805) 893-4689| |ningcao@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Mike Day|{{StaffInfoSecondary|Mike Day|(805) 893-3101||day@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Don Freeborn|{{StaffInfoSecondary|Don Freeborn|(805) 893-7975| |dfreeborn@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Aidan Hopkins|{{StaffInfoSecondary|Aidan Hopkins|(805) 893-2343||hopkins@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Demis D. John|{{StaffInfoSecondary|Demis D. John|(805) 893-5934||demis@ucsb.edu}} }}{{#ifeq: {{{super2}}}|Brian Lingg|{{StaffInfoSecondary|Brian Lingg|(805) 893-8145||lingg_b@ucsb.edu}} }}{{#ifeq: {{{super2}}}|Bill Mitchell|{{StaffInfoSecondary|Bill Mitchell|(805) 893-4974| |mitchell@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Dan Read|{{StaffInfoSecondary|Dan Read|(805) 893-3138||dread@ucsb.edu}} }}{{#ifeq: {{{super2}}}|Tom Reynolds|{{StaffInfoSecondary|Tom Reynolds|(805) 893-8158||reynolds@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Lee Sawyer|{{StaffInfoSecondary|Lee Sawyer|(805) 893-2123||lee_sawyer@ucsb.edu}} }}{{#ifeq: {{{super2}}}|Mike Silva|{{StaffInfoSecondary|Mike Silva|(805) 893-3096||silva@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Biljana Stamenic|{{StaffInfoSecondary|Biljana Stamenic|(805) 893-4002 | |biljana@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Tino Sy|{{StaffInfoSecondary|Tino Sy|(805) 893-4796||sy@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Brian Thibeault|{{StaffInfoSecondary|Brian Thibeault|(805) 893-2268||thibeault@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Zack Warburg|{{StaffInfoSecondary|Zack Warburg|(805) 893-3918x200| |zwarburg@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Jack Whaley|{{StaffInfoSecondary|Jack Whaley|(805) 893-8174||whaley@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Luis Zuzunaga|{{StaffInfoSecondary|Luis Zuzunaga|(805) 893-8258||luis@ece.ucsb.edu}} }}&lt;br /&gt;
&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;1&amp;quot; style=&amp;quot;background: none; border-top:1px solid #aaaaaa&amp;quot;&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
!width=150|Description&lt;br /&gt;
!width=200|{{{description|NONE}}} &lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
!width=150|Manufacturer&lt;br /&gt;
!width=200|{{{manufacturer|NONE}}}&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
{{#if:{{{model|}}} |&lt;br /&gt;
!width=150{{!}}Model&lt;br /&gt;
!width=200{{!}}{{{model|}}}&lt;br /&gt;
}}&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
{{#if:{{{materials|}}} |&lt;br /&gt;
!width=150{{!}}Materials&lt;br /&gt;
!width=200{{!}}{{{materials|}}}&lt;br /&gt;
}}&lt;br /&gt;
|-align=&amp;quot;center&amp;quot;&lt;br /&gt;
{{#ifeq: {{{type}}}|Vacuum Deposition|{{!}}colspan=&amp;quot;2&amp;quot;{{!}}&#039;&#039;&#039;[[Vacuum Deposition Recipes{{!}}{{{type}}} Recipes]]&#039;&#039;&#039;}}{{#ifeq: {{{type}}}|Dry Etch|{{!}}colspan=&amp;quot;2&amp;quot;{{!}}&#039;&#039;&#039;[[Dry Etching Recipes{{!}}{{{type}}} Recipes]]&#039;&#039;&#039;}}{{#if:{{{recipe|}}}|{{!}}colspan=&amp;quot;2&amp;quot;{{!}}&#039;&#039;&#039;[[{{{recipe}}} Recipes{{!}}{{{type}}} Recipes]]&#039;&#039;&#039;}}&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
{{#if:{{{toolid|}}}|&lt;br /&gt;
{{{!}} border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;1&amp;quot; style=&amp;quot;background: none; border-top:1px solid #aaaaaa&amp;quot;&lt;br /&gt;
{{!}}-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
{{!}}width=350 align=center{{!}}[http://signupmonkey.ece.ucsb.edu/cgi-bin/users/{{#ifeq:{{{toolid|}}}|999|tools.cgi|browse.cgi?tool_ID={{{toolid|}}}}} Sign up for this tool]&lt;br /&gt;
{{!}}-&lt;br /&gt;
{{!}}}|[[category:NOID]]&lt;br /&gt;
}}&lt;br /&gt;
|}&lt;br /&gt;
|}&lt;br /&gt;
&amp;lt;includeonly&amp;gt;[[category:Tools]][[Category:{{{type|NONE}}}]]&amp;lt;/includeonly&amp;gt;&lt;br /&gt;
&amp;lt;noinclude&amp;gt;&lt;br /&gt;
[[category:Templates]]&lt;br /&gt;
This template inserts a &amp;quot;Tool Info&amp;quot; panel into a page, including a tool photo, supervisor contact info and other relevant links.&lt;br /&gt;
&lt;br /&gt;
Copy/paste the following code to include this template in a page.  Preferably inserted at the top of the page.&lt;br /&gt;
&lt;br /&gt;
&amp;lt;div style=&amp;quot;width: 70%;&amp;quot;&amp;gt;&amp;lt;pre&amp;gt;&lt;br /&gt;
{{tool&lt;br /&gt;
|super = Tool Supervisor name from the list below&lt;br /&gt;
|picture=Photo_of_the_tool_01.jpg&lt;br /&gt;
|type  = One of the tool types from the list below&lt;br /&gt;
|recipe = One of the process types, from the list below&lt;br /&gt;
|toolid = ### the Tool ID number from SignupMonkey&lt;br /&gt;
|location = Bay #&lt;br /&gt;
|description = This is a machine&lt;br /&gt;
|manufacturer = MfgCorp.&lt;br /&gt;
|model = (if applicable)&lt;br /&gt;
|materials = (If applicable)&lt;br /&gt;
}}&lt;br /&gt;
&amp;lt;/pre&amp;gt;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/noinclude&amp;gt;&lt;br /&gt;
&lt;br /&gt;
&amp;lt;noinclude&amp;gt;&lt;br /&gt;
=== Options ===&lt;br /&gt;
You can add the following &amp;quot;arguments&amp;quot; in the template.&lt;br /&gt;
* &#039;&#039;&#039;Supervisor&#039;&#039;&#039;: The &#039;&#039;&#039;&amp;lt;tt style=&amp;quot;blue&amp;quot;&amp;gt;|super = &amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument must match one of the names listed below, and email/phone will be filled in automatically.  See the section below for available options/how to edit info.&lt;br /&gt;
* &#039;&#039;&#039;picture&#039;&#039;&#039;: A photograph of the tool. You must Upload the image file first (see [[Special:Upload|Upload File]] on the left sidebar), then&amp;lt;br&amp;gt;Copy the resulting filename and Paste it into this argument. No Spaces Allowed in the filename!&lt;br /&gt;
* &#039;&#039;&#039;Type of Tool&#039;&#039;&#039;: The &#039;&#039;&#039;&amp;lt;tt&amp;gt;|type = &amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument must match one of the defined values below.  This will will automatically link to the correct &#039;&#039;Tool Listing&#039;&#039; wiki page (eg. Dry Etching vs. Deposition etc.)&lt;br /&gt;
* &#039;&#039;&#039;Recipe Link&#039;&#039;&#039;: The &#039;&#039;&#039;&amp;lt;tt&amp;gt;|recipes = &amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument must match one of the defined values below.  This will will automatically link to the correct &#039;&#039;Recipes&#039;&#039; wiki page (eg. Dry Etching vs. Deposition etc.)&lt;br /&gt;
* &#039;&#039;&#039;Tool ID on SignupMonkey&#039;&#039;&#039;: The &#039;&#039;&#039;&amp;lt;tt&amp;gt;|toolid = &amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument will create a link to the Signup Monkey page for this tool. This is the number at the end of the url for a tool on SignupMonkey. Using 999 will link to the Main tool list on SignupMonkey.&lt;br /&gt;
* &#039;&#039;&#039;location, description, manufacturer, model, materials&#039;&#039;&#039; : You can type anything you want for these, or leave them out entirely to omit that section.&lt;br /&gt;
* &#039;&#039;&#039;Name&#039;&#039;&#039;: By default, this argument is not included, and the title of the page will be used (which should be the name of the tool).  If you want to change the name printed, add a line like:&lt;br /&gt;
*:&amp;lt;pre&amp;gt;|name = Optional Tool Name&amp;lt;/pre&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== Supervisor Information ===&lt;br /&gt;
The Supervisor information (email, phone) is inserted automatically by the template.  Their info is coded in the template, hence there is no &amp;quot;email&amp;quot; or &amp;quot;phone&amp;quot; argument in the above example. This allows you to change their contact info in this template only, and the change will show up on all of their tool pages automatically.&lt;br /&gt;
&lt;br /&gt;
&amp;lt;b&amp;gt;To edit the Supervisor info listed, you must edit this template in &amp;lt;tt&amp;gt;Edit Source&amp;lt;/tt&amp;gt; mode.&amp;lt;/b&amp;gt;&lt;br /&gt;
&lt;br /&gt;
Then find the line that shows the list of &#039;&#039;&#039;&amp;lt;tt&amp;gt;if equals&amp;lt;/tt&amp;gt;&#039;&#039;&#039; for each supervisor, which looks like this:&lt;br /&gt;
 &amp;lt;nowiki&amp;gt;{{#ifeq: {{{super}}}|Tony Bosch|{{StaffInfo|Tony Bosch|(805) 893-3486||bosch@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Ning Cao|{{StaffInfo|Ning Cao|(805) 893-4689| |ningcao@ece.ucsb.edu}} }} ....&amp;lt;/nowiki&amp;gt;&lt;br /&gt;
&lt;br /&gt;
It is a bit of an eyesore because no newlines or spaces can be inserted between each supervisor&#039;s options.&lt;br /&gt;
&lt;br /&gt;
You can see the First option &#039;&#039;Tony Bosch&#039;&#039; here is the name you type into the Tool Template&#039;s &#039;&#039;&#039;&amp;lt;tt&amp;gt;|super=&amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument.  Then the &#039;&#039;&#039;&amp;lt;tt&amp;gt;&amp;lt;nowiki&amp;gt;{{StaffInfo|&amp;lt;/nowiki&amp;gt;&amp;lt;/tt&amp;gt;&#039;&#039;&#039; section lists the Supervisor&#039;s information that will be inserted.&lt;br /&gt;
&lt;br /&gt;
To make a new supervisor option, copy one of the sections from the first pair of curly brackets &#039;&#039;&#039;&amp;lt;tt&amp;gt;&amp;lt;nowiki&amp;gt;{{&amp;lt;/nowiki&amp;gt;&amp;lt;/tt&amp;gt;&#039;&#039;&#039; to the ending 4 brackets &#039;&#039;&#039;&amp;lt;tt&amp;gt;&amp;lt;nowiki&amp;gt;}} }}&amp;lt;/nowiki&amp;gt;&amp;lt;/tt&amp;gt;&#039;&#039;&#039;, add it to the end of the list and edit the info as needed.&lt;br /&gt;
&lt;br /&gt;
=== Arguments with Specific Values ===&lt;br /&gt;
The following arguments have specific options, only enter one of these values:&lt;br /&gt;
* &#039;&#039;&#039;super&#039;&#039;&#039;: &lt;br /&gt;
*: Tony Bosch&lt;br /&gt;
*: Ning Cao&lt;br /&gt;
*: Mike Day&lt;br /&gt;
*: Don Freeborn&lt;br /&gt;
*: Aidan Hopkins&lt;br /&gt;
*: Demis D. John&lt;br /&gt;
*: Brian Lingg&lt;br /&gt;
*: Bill Mitchell&lt;br /&gt;
*: Dan Read&lt;br /&gt;
*: Tom Reynolds&lt;br /&gt;
*: Lee Sawyer&lt;br /&gt;
*: Mike Silva&lt;br /&gt;
*: Biljana Stamenic&lt;br /&gt;
*: Tino Sy&lt;br /&gt;
*: Brian Thibeault&lt;br /&gt;
*: Zack Warburg&lt;br /&gt;
*: Jack Whaley&lt;br /&gt;
*: Luis Zuzunaga&lt;br /&gt;
* &#039;&#039;&#039;type&#039;&#039;&#039;: &lt;br /&gt;
*: Vacuum Deposition&lt;br /&gt;
*: Dry Etch&lt;br /&gt;
*: Wet Processing&lt;br /&gt;
*: Thermal Processing&lt;br /&gt;
*: Packaging&lt;br /&gt;
*: Inspection, Test and Characterization&lt;br /&gt;
*:: (spaces are ok)&lt;br /&gt;
* &#039;&#039;&#039;recipe&#039;&#039;&#039;: &lt;br /&gt;
*: Lithography&lt;br /&gt;
*: Vacuum Deposition (auto if `type` is set to this)&lt;br /&gt;
*: Dry Etching (auto if `type` is set to this)&lt;br /&gt;
*: Wet Etching&lt;br /&gt;
*: Thermal Processing&lt;br /&gt;
*: Packaging&lt;br /&gt;
&lt;br /&gt;
&amp;lt;/noinclude&amp;gt;&lt;/div&gt;</summary>
		<author><name>Nplaviola</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:StaffInfoSecondary&amp;diff=159093</id>
		<title>Template:StaffInfoSecondary</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:StaffInfoSecondary&amp;diff=159093"/>
		<updated>2021-08-27T05:23:09Z</updated>

		<summary type="html">&lt;p&gt;Nplaviola: Created page with &amp;quot;{{!}}- !width=150{{!}}Secondary Supervisor !width=200{{!}}{{{1}}} &amp;lt;noinclude&amp;gt;category:Templates &amp;lt;noinclude&amp;gt; &amp;lt;hr&amp;gt; To edit the &amp;#039;&amp;#039;&amp;#039;Contact Information for NanoFab staff&amp;#039;&amp;#039;...&amp;quot;&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;{{!}}-&lt;br /&gt;
!width=150{{!}}Secondary Supervisor&lt;br /&gt;
!width=200{{!}}[[{{{1}}}]]&lt;br /&gt;
&amp;lt;noinclude&amp;gt;[[category:Templates]]&lt;br /&gt;
&amp;lt;noinclude&amp;gt;&lt;br /&gt;
&amp;lt;hr&amp;gt;&lt;br /&gt;
To edit the &#039;&#039;&#039;Contact Information for NanoFab staff&#039;&#039;&#039;, please see the [[Template:Tool|Tool Template page]]&lt;/div&gt;</summary>
		<author><name>Nplaviola</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:Tool2_NLV&amp;diff=159080</id>
		<title>Template:Tool2 NLV</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:Tool2_NLV&amp;diff=159080"/>
		<updated>2021-08-24T05:19:05Z</updated>

		<summary type="html">&lt;p&gt;Nplaviola: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;20&amp;quot; align=&amp;quot;right&amp;quot; style=&amp;quot;float: right;&amp;quot;&lt;br /&gt;
|-&lt;br /&gt;
|&lt;br /&gt;
{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;0&amp;quot; style=&amp;quot;background: whitesmoke; border: 1px solid #aaaaaa&amp;quot; align=&amp;quot;center&amp;quot;&lt;br /&gt;
|-&lt;br /&gt;
! style=&amp;quot;background:skyblue;&amp;quot; |{{{name|&amp;lt;includeonly&amp;gt;{{PAGENAME}}&amp;lt;/includeonly&amp;gt;}}}&lt;br /&gt;
|-&lt;br /&gt;
|&lt;br /&gt;
&amp;lt;!-- BORDER AROUND THE IMAGE --&amp;gt;&lt;br /&gt;
{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;0&amp;quot; style=&amp;quot;background: black; border: 1px solid #aaaaaa&amp;quot; align=&amp;quot;center&amp;quot;&lt;br /&gt;
|-&lt;br /&gt;
![[image:{{{picture|none.jpg}}}|300x350px|center|]]&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
&amp;lt;!-- END OF BORDER AROUND IMAGE --&amp;gt;&lt;br /&gt;
|-&lt;br /&gt;
|&lt;br /&gt;
{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;1&amp;quot; style=&amp;quot;background: none; border-top:1px solid #aaaaaa&amp;quot;&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
!width=150|Tool Type&lt;br /&gt;
!width=200|[[:Category:{{{type|NONE}}}|{{{type|NONE}}}]]&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
!width=150|Location&lt;br /&gt;
!width=200|{{{location|}}}&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
{{#ifeq: {{{super}}}|Tony Bosch|{{StaffInfo|Tony Bosch|(805) 893-3486||bosch@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Ning Cao|{{StaffInfo|Ning Cao|(805) 893-4689| |ningcao@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Mike Day|{{StaffInfo|Mike Day|(805) 893-3101||day@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Don Freeborn|{{StaffInfo|Don Freeborn|(805) 893-7975| |dfreeborn@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Aidan Hopkins|{{StaffInfo|Aidan Hopkins|(805) 893-2343||hopkins@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Demis D. John|{{StaffInfo|Demis D. John|(805) 893-5934||demis@ucsb.edu}} }}{{#ifeq: {{{super}}}|Brian Lingg|{{StaffInfo|Brian Lingg|(805) 893-8145||lingg_b@ucsb.edu}} }}{{#ifeq: {{{super}}}|Bill Mitchell|{{StaffInfo|Bill Mitchell|(805) 893-4974| |mitchell@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Dan Read|{{StaffInfo|Dan Read|(805) 893-3138||dread@ucsb.edu}} }}{{#ifeq: {{{super}}}|Tom Reynolds|{{StaffInfo|Tom Reynolds|(805) 893-8158||reynolds@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Lee Sawyer|{{StaffInfo|Lee Sawyer|(805) 893-2123||lee_sawyer@ucsb.edu}} }}{{#ifeq: {{{super}}}|Mike Silva|{{StaffInfo|Mike Silva|(805) 893-3096||silva@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Biljana Stamenic|{{StaffInfo|Biljana Stamenic|(805) 893-4002 | |biljana@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Tino Sy|{{StaffInfo|Tino Sy|(805) 893-4796||sy@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Brian Thibeault|{{StaffInfo|Brian Thibeault|(805) 893-2268||thibeault@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Zack Warburg|{{StaffInfo|Zack Warburg|(805) 893-3918x200| |zwarburg@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Jack Whaley|{{StaffInfo|Jack Whaley|(805) 893-8174||whaley@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Luis Zuzunaga|{{StaffInfo|Luis Zuzunaga|(805) 893-8258||luis@ece.ucsb.edu}} }}&lt;br /&gt;
{{#ifeq: {{{super2}}}|Tony Bosch|{{StaffInfo2|Tony Bosch|(805) 893-3486||bosch@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Ning Cao|{{StaffInfo2|Ning Cao|(805) 893-4689| |ningcao@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Mike Day|{{StaffInfo2|Mike Day|(805) 893-3101||day@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Don Freeborn|{{StaffInfo2|Don Freeborn|(805) 893-7975| |dfreeborn@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Aidan Hopkins|{{StaffInfo2|Aidan Hopkins|(805) 893-2343||hopkins@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Demis D. John|{{StaffInfo2|Demis D. John|(805) 893-5934||demis@ucsb.edu}} }}{{#ifeq: {{{super2}}}|Brian Lingg|{{StaffInfo2|Brian Lingg|(805) 893-8145||lingg_b@ucsb.edu}} }}{{#ifeq: {{{super2}}}|Bill Mitchell|{{StaffInfo2|Bill Mitchell|(805) 893-4974| |mitchell@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Dan Read|{{StaffInfo2|Dan Read|(805) 893-3138||dread@ucsb.edu}} }}{{#ifeq: {{{super2}}}|Tom Reynolds|{{StaffInfo2|Tom Reynolds|(805) 893-8158||reynolds@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Lee Sawyer|{{StaffInfo2|Lee Sawyer|(805) 893-2123||lee_sawyer@ucsb.edu}} }}{{#ifeq: {{{super2}}}|Mike Silva|{{StaffInfo2|Mike Silva|(805) 893-3096||silva@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Biljana Stamenic|{{StaffInfo2|Biljana Stamenic|(805) 893-4002 | |biljana@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Tino Sy|{{StaffInfo2|Tino Sy|(805) 893-4796||sy@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Brian Thibeault|{{StaffInfo2|Brian Thibeault|(805) 893-2268||thibeault@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Zack Warburg|{{StaffInfo2|Zack Warburg|(805) 893-3918x200| |zwarburg@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Jack Whaley|{{StaffInfo2|Jack Whaley|(805) 893-8174||whaley@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Luis Zuzunaga|{{StaffInfo2|Luis Zuzunaga|(805) 893-8258||luis@ece.ucsb.edu}} }}&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;1&amp;quot; style=&amp;quot;background: none; border-top:1px solid #aaaaaa&amp;quot;&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
!width=150|Description&lt;br /&gt;
!width=200|{{{description|NONE}}} &lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
!width=150|Manufacturer&lt;br /&gt;
!width=200|{{{manufacturer|NONE}}}&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
{{#if:{{{model|}}} |&lt;br /&gt;
!width=150{{!}}Model&lt;br /&gt;
!width=200{{!}}{{{model|}}}&lt;br /&gt;
}}&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
{{#if:{{{materials|}}} |&lt;br /&gt;
!width=150{{!}}Materials&lt;br /&gt;
!width=200{{!}}{{{materials|}}}&lt;br /&gt;
}}&lt;br /&gt;
|-align=&amp;quot;center&amp;quot;&lt;br /&gt;
{{#ifeq: {{{type}}}|Vacuum Deposition|{{!}}colspan=&amp;quot;2&amp;quot;{{!}}&#039;&#039;&#039;[[Vacuum Deposition Recipes{{!}}{{{type}}} Recipes]]&#039;&#039;&#039;}}{{#ifeq: {{{type}}}|Dry Etch|{{!}}colspan=&amp;quot;2&amp;quot;{{!}}&#039;&#039;&#039;[[Dry Etching Recipes{{!}}{{{type}}} Recipes]]&#039;&#039;&#039;}}{{#if:{{{recipe|}}}|{{!}}colspan=&amp;quot;2&amp;quot;{{!}}&#039;&#039;&#039;[[{{{recipe}}} Recipes{{!}}{{{type}}} Recipes]]&#039;&#039;&#039;}}&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
{{#if:{{{toolid|}}}|&lt;br /&gt;
{{{!}} border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;1&amp;quot; style=&amp;quot;background: none; border-top:1px solid #aaaaaa&amp;quot;&lt;br /&gt;
{{!}}-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
{{!}}width=350 align=center{{!}}[http://signupmonkey.ece.ucsb.edu/cgi-bin/users/{{#ifeq:{{{toolid|}}}|999|tools.cgi|browse.cgi?tool_ID={{{toolid|}}}}} Sign up for this tool]&lt;br /&gt;
{{!}}-&lt;br /&gt;
{{!}}}|[[category:NOID]]&lt;br /&gt;
}}&lt;br /&gt;
|}&lt;br /&gt;
|}&lt;br /&gt;
&amp;lt;includeonly&amp;gt;[[category:Tools]][[Category:{{{type|NONE}}}]]&amp;lt;/includeonly&amp;gt;&lt;br /&gt;
&amp;lt;noinclude&amp;gt;&lt;br /&gt;
[[category:Templates]]&lt;br /&gt;
This template inserts a &amp;quot;Tool Info&amp;quot; panel into a page, including a tool photo, supervisor contact info and other relevant links.&lt;br /&gt;
&lt;br /&gt;
Copy/paste the following code to include this template in a page.  Preferably inserted at the top of the page.&lt;br /&gt;
&lt;br /&gt;
&amp;lt;div style=&amp;quot;width: 70%;&amp;quot;&amp;gt;&amp;lt;pre&amp;gt;&lt;br /&gt;
{{tool&lt;br /&gt;
|super = Tool Supervisor name from the list below&lt;br /&gt;
|picture=Photo_of_the_tool_01.jpg&lt;br /&gt;
|type  = One of the tool types from the list below&lt;br /&gt;
|recipe = One of the process types, from the list below&lt;br /&gt;
|toolid = ### the Tool ID number from SignupMonkey&lt;br /&gt;
|location = Bay #&lt;br /&gt;
|description = This is a machine&lt;br /&gt;
|manufacturer = MfgCorp.&lt;br /&gt;
|model = (if applicable)&lt;br /&gt;
|materials = (If applicable)&lt;br /&gt;
}}&lt;br /&gt;
&amp;lt;/pre&amp;gt;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/noinclude&amp;gt;&lt;br /&gt;
&lt;br /&gt;
&amp;lt;noinclude&amp;gt;&lt;br /&gt;
=== Options ===&lt;br /&gt;
You can add the following &amp;quot;arguments&amp;quot; in the template.&lt;br /&gt;
* &#039;&#039;&#039;Supervisor&#039;&#039;&#039;: The &#039;&#039;&#039;&amp;lt;tt style=&amp;quot;blue&amp;quot;&amp;gt;|super = &amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument must match one of the names listed below, and email/phone will be filled in automatically.  See the section below for available options/how to edit info.&lt;br /&gt;
* &#039;&#039;&#039;picture&#039;&#039;&#039;: A photograph of the tool. You must Upload the image file first (see [[Special:Upload|Upload File]] on the left sidebar), then&amp;lt;br&amp;gt;Copy the resulting filename and Paste it into this argument. No Spaces Allowed in the filename!&lt;br /&gt;
* &#039;&#039;&#039;Type of Tool&#039;&#039;&#039;: The &#039;&#039;&#039;&amp;lt;tt&amp;gt;|type = &amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument must match one of the defined values below.  This will will automatically link to the correct &#039;&#039;Tool Listing&#039;&#039; wiki page (eg. Dry Etching vs. Deposition etc.)&lt;br /&gt;
* &#039;&#039;&#039;Recipe Link&#039;&#039;&#039;: The &#039;&#039;&#039;&amp;lt;tt&amp;gt;|recipes = &amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument must match one of the defined values below.  This will will automatically link to the correct &#039;&#039;Recipes&#039;&#039; wiki page (eg. Dry Etching vs. Deposition etc.)&lt;br /&gt;
* &#039;&#039;&#039;Tool ID on SignupMonkey&#039;&#039;&#039;: The &#039;&#039;&#039;&amp;lt;tt&amp;gt;|toolid = &amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument will create a link to the Signup Monkey page for this tool. This is the number at the end of the url for a tool on SignupMonkey. Using 999 will link to the Main tool list on SignupMonkey.&lt;br /&gt;
* &#039;&#039;&#039;location, description, manufacturer, model, materials&#039;&#039;&#039; : You can type anything you want for these, or leave them out entirely to omit that section.&lt;br /&gt;
* &#039;&#039;&#039;Name&#039;&#039;&#039;: By default, this argument is not included, and the title of the page will be used (which should be the name of the tool).  If you want to change the name printed, add a line like:&lt;br /&gt;
*:&amp;lt;pre&amp;gt;|name = Optional Tool Name&amp;lt;/pre&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== Supervisor Information ===&lt;br /&gt;
The Supervisor information (email, phone) is inserted automatically by the template.  Their info is coded in the template, hence there is no &amp;quot;email&amp;quot; or &amp;quot;phone&amp;quot; argument in the above example. This allows you to change their contact info in this template only, and the change will show up on all of their tool pages automatically.&lt;br /&gt;
&lt;br /&gt;
&amp;lt;b&amp;gt;To edit the Supervisor info listed, you must edit this template in &amp;lt;tt&amp;gt;Edit Source&amp;lt;/tt&amp;gt; mode.&amp;lt;/b&amp;gt;&lt;br /&gt;
&lt;br /&gt;
Then find the line that shows the list of &#039;&#039;&#039;&amp;lt;tt&amp;gt;if equals&amp;lt;/tt&amp;gt;&#039;&#039;&#039; for each supervisor, which looks like this:&lt;br /&gt;
 &amp;lt;nowiki&amp;gt;{{#ifeq: {{{super}}}|Tony Bosch|{{StaffInfo|Tony Bosch|(805) 893-3486||bosch@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Ning Cao|{{StaffInfo|Ning Cao|(805) 893-4689| |ningcao@ece.ucsb.edu}} }} ....&amp;lt;/nowiki&amp;gt;&lt;br /&gt;
&lt;br /&gt;
It is a bit of an eyesore because no newlines or spaces can be inserted between each supervisor&#039;s options.&lt;br /&gt;
&lt;br /&gt;
You can see the First option &#039;&#039;Tony Bosch&#039;&#039; here is the name you type into the Tool Template&#039;s &#039;&#039;&#039;&amp;lt;tt&amp;gt;|super=&amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument.  Then the &#039;&#039;&#039;&amp;lt;tt&amp;gt;&amp;lt;nowiki&amp;gt;{{StaffInfo|&amp;lt;/nowiki&amp;gt;&amp;lt;/tt&amp;gt;&#039;&#039;&#039; section lists the Supervisor&#039;s information that will be inserted.&lt;br /&gt;
&lt;br /&gt;
To make a new supervisor option, copy one of the sections from the first pair of curly brackets &#039;&#039;&#039;&amp;lt;tt&amp;gt;&amp;lt;nowiki&amp;gt;{{&amp;lt;/nowiki&amp;gt;&amp;lt;/tt&amp;gt;&#039;&#039;&#039; to the ending 4 brackets &#039;&#039;&#039;&amp;lt;tt&amp;gt;&amp;lt;nowiki&amp;gt;}} }}&amp;lt;/nowiki&amp;gt;&amp;lt;/tt&amp;gt;&#039;&#039;&#039;, add it to the end of the list and edit the info as needed.&lt;br /&gt;
&lt;br /&gt;
=== Arguments with Specific Values ===&lt;br /&gt;
The following arguments have specific options, only enter one of these values:&lt;br /&gt;
* &#039;&#039;&#039;super&#039;&#039;&#039;: &lt;br /&gt;
*: Tony Bosch&lt;br /&gt;
*: Ning Cao&lt;br /&gt;
*: Mike Day&lt;br /&gt;
*: Don Freeborn&lt;br /&gt;
*: Aidan Hopkins&lt;br /&gt;
*: Demis D. John&lt;br /&gt;
*: Brian Lingg&lt;br /&gt;
*: Bill Mitchell&lt;br /&gt;
*: Dan Read&lt;br /&gt;
*: Tom Reynolds&lt;br /&gt;
*: Lee Sawyer&lt;br /&gt;
*: Mike Silva&lt;br /&gt;
*: Biljana Stamenic&lt;br /&gt;
*: Tino Sy&lt;br /&gt;
*: Brian Thibeault&lt;br /&gt;
*: Zack Warburg&lt;br /&gt;
*: Jack Whaley&lt;br /&gt;
*: Luis Zuzunaga&lt;br /&gt;
* &#039;&#039;&#039;type&#039;&#039;&#039;: &lt;br /&gt;
*: Vacuum Deposition&lt;br /&gt;
*: Dry Etch&lt;br /&gt;
*: Wet Processing&lt;br /&gt;
*: Thermal Processing&lt;br /&gt;
*: Packaging&lt;br /&gt;
*: Inspection, Test and Characterization&lt;br /&gt;
*:: (spaces are ok)&lt;br /&gt;
* &#039;&#039;&#039;recipe&#039;&#039;&#039;: &lt;br /&gt;
*: Lithography&lt;br /&gt;
*: Vacuum Deposition (auto if `type` is set to this)&lt;br /&gt;
*: Dry Etching (auto if `type` is set to this)&lt;br /&gt;
*: Wet Etching&lt;br /&gt;
*: Thermal Processing&lt;br /&gt;
*: Packaging&lt;br /&gt;
&lt;br /&gt;
&amp;lt;/noinclude&amp;gt;&lt;/div&gt;</summary>
		<author><name>Nplaviola</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=Nick_test&amp;diff=159079</id>
		<title>Nick test</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=Nick_test&amp;diff=159079"/>
		<updated>2021-08-24T05:15:08Z</updated>

		<summary type="html">&lt;p&gt;Nplaviola: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;{{tool2|{{PAGENAME}}&lt;br /&gt;
|picture=PECVD1.jpg&lt;br /&gt;
|type = Vacuum Deposition&lt;br /&gt;
|super= Don Freeborn&lt;br /&gt;
|super2= Tony Bosch&lt;br /&gt;
|phone=(805)839-7975&lt;br /&gt;
|location=Bay 3&lt;br /&gt;
|email=dfreeborn@ucsb.edu&lt;br /&gt;
|description = PECVD Plasma Therm 790 For Oxides And Nitrides&lt;br /&gt;
|manufacturer = Plasma-Therm&lt;br /&gt;
|materials = &lt;br /&gt;
|toolid=16&lt;br /&gt;
}} &lt;br /&gt;
&lt;br /&gt;
__TOC__ &lt;br /&gt;
== About  ==&lt;br /&gt;
&lt;br /&gt;
This is a Plasma-Therm model 790 plasma enhanced chemical vapor deposition system for depositing SiO&amp;lt;sub&amp;gt;2&amp;lt;/sub&amp;gt;, Si&amp;lt;sub&amp;gt;3&amp;lt;/sub&amp;gt;N&amp;lt;sub&amp;gt;4&amp;lt;/sub&amp;gt;, or SiO&amp;lt;sub&amp;gt;x&amp;lt;/sub&amp;gt;N&amp;lt;sub&amp;gt;y&amp;lt;/sub&amp;gt; dielectric films. The system uses a capacitively-coupled 13.56 MHz source excitation to produce the plasma between two parallel aluminum plates. The gas is injected over the sample through a 6” diameter showerhead. The samples are placed on the system anode (to minimize ion damage) which is heated to 250-350°C. SiO&amp;lt;sub&amp;gt;2&amp;lt;/sub&amp;gt; is produced from SiH&amp;lt;sub&amp;gt;4&amp;lt;/sub&amp;gt;/He 2%/98% and N&amp;lt;sub&amp;gt;2&amp;lt;/sub&amp;gt;O at 250°C. The typical deposition rate is 400 A/min. at 300 mT pressure. The typical BOE etch rate of this oxide is about 400 nm/min. Si&amp;lt;sub&amp;gt;3&amp;lt;/sub&amp;gt;N&amp;lt;sub&amp;gt;4&amp;lt;/sub&amp;gt; is produced from SiH&amp;lt;sub&amp;gt;4&amp;lt;/sub&amp;gt;/He 2%/98% and NH&amp;lt;sub&amp;gt;3&amp;lt;/sub&amp;gt; at 250°C or 350°C. The more dense films are produced at 350°C. The stress of the nitride can be altered by adjusting the N&amp;lt;sub&amp;gt;2&amp;lt;/sub&amp;gt;:He ratio of the deposition. CF&amp;lt;sub&amp;gt;4&amp;lt;/sub&amp;gt;/O&amp;lt;sub&amp;gt;2&amp;lt;/sub&amp;gt; plasmas are used to clean the chamber between depositions. &lt;br /&gt;
&lt;br /&gt;
These films are typically used for capacitor dielectrics, chemical passivation layers, electrical insulators, reactive ion etching masks, and optical anti-reflective coatings. The system is fully programmable with windows-based software and has a wide array of pre-defined thicknesses. Custom programs for dielectric stacks or different process parameters can be written and saved. &lt;br /&gt;
&lt;br /&gt;
== Detailed Specifications  ==&lt;br /&gt;
&lt;br /&gt;
*Gases used: NH&amp;lt;sub&amp;gt;3&amp;lt;/sub&amp;gt;, N&amp;lt;sub&amp;gt;2&amp;lt;/sub&amp;gt;O, 2%SiH&amp;lt;sub&amp;gt;4&amp;lt;/sub&amp;gt;/He, N&amp;lt;sub&amp;gt;2&amp;lt;/sub&amp;gt;,CF&amp;lt;sub&amp;gt;4&amp;lt;/sub&amp;gt; and O&amp;lt;sub&amp;gt;2&amp;lt;/sub&amp;gt; &lt;br /&gt;
*~ 10mT ultimate chamber pressure &lt;br /&gt;
*13.56 Mhz excitation freq. &lt;br /&gt;
*Sample size: pieces to 6” wafers &lt;br /&gt;
*Automatic tuning network &lt;br /&gt;
*RF Power control &lt;br /&gt;
*Full computer operation &lt;br /&gt;
*Standard recipes for a variety of film thicknesses&lt;br /&gt;
&lt;br /&gt;
==Documentation==&lt;br /&gt;
*[https://wiki.nanotech.ucsb.edu/w/images/d/d2/PECVD1_Operating_Instructions.pdf Operating Instructions]&lt;br /&gt;
*[[PECVD1 Wafer Coating Process|Wafer Coating Process Traveler]]&lt;br /&gt;
*For particle counting method, see the [https://wiki.nanotech.ucsb.edu/wiki/Wafer_scanning_process_traveler Surfscan Scanning Procedure]&lt;br /&gt;
&lt;br /&gt;
== Recipes &amp;amp; Process Data ==&lt;br /&gt;
* Historical Characterization Data &amp;amp; Standard Recipes can be found at:   [[PECVD Recipes#PECVD 1 .28PlasmaTherm 790.29|&#039;&#039;&#039;Recipes &amp;gt; Deposition &amp;gt; &amp;lt;u&amp;gt;PECVD1&amp;lt;/u&amp;gt;&#039;&#039;&#039;]]&lt;/div&gt;</summary>
		<author><name>Nplaviola</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=Nick_test&amp;diff=159078</id>
		<title>Nick test</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=Nick_test&amp;diff=159078"/>
		<updated>2021-08-24T05:14:52Z</updated>

		<summary type="html">&lt;p&gt;Nplaviola: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;{{tool|{{PAGENAME}}&lt;br /&gt;
|picture=PECVD1.jpg&lt;br /&gt;
|type = Vacuum Deposition&lt;br /&gt;
|super= Don Freeborn&lt;br /&gt;
|super2= Tony Bosch&lt;br /&gt;
|phone=(805)839-7975&lt;br /&gt;
|location=Bay 3&lt;br /&gt;
|email=dfreeborn@ucsb.edu&lt;br /&gt;
|description = PECVD Plasma Therm 790 For Oxides And Nitrides&lt;br /&gt;
|manufacturer = Plasma-Therm&lt;br /&gt;
|materials = &lt;br /&gt;
|toolid=16&lt;br /&gt;
}} &lt;br /&gt;
&lt;br /&gt;
__TOC__ &lt;br /&gt;
== About  ==&lt;br /&gt;
&lt;br /&gt;
This is a Plasma-Therm model 790 plasma enhanced chemical vapor deposition system for depositing SiO&amp;lt;sub&amp;gt;2&amp;lt;/sub&amp;gt;, Si&amp;lt;sub&amp;gt;3&amp;lt;/sub&amp;gt;N&amp;lt;sub&amp;gt;4&amp;lt;/sub&amp;gt;, or SiO&amp;lt;sub&amp;gt;x&amp;lt;/sub&amp;gt;N&amp;lt;sub&amp;gt;y&amp;lt;/sub&amp;gt; dielectric films. The system uses a capacitively-coupled 13.56 MHz source excitation to produce the plasma between two parallel aluminum plates. The gas is injected over the sample through a 6” diameter showerhead. The samples are placed on the system anode (to minimize ion damage) which is heated to 250-350°C. SiO&amp;lt;sub&amp;gt;2&amp;lt;/sub&amp;gt; is produced from SiH&amp;lt;sub&amp;gt;4&amp;lt;/sub&amp;gt;/He 2%/98% and N&amp;lt;sub&amp;gt;2&amp;lt;/sub&amp;gt;O at 250°C. The typical deposition rate is 400 A/min. at 300 mT pressure. The typical BOE etch rate of this oxide is about 400 nm/min. Si&amp;lt;sub&amp;gt;3&amp;lt;/sub&amp;gt;N&amp;lt;sub&amp;gt;4&amp;lt;/sub&amp;gt; is produced from SiH&amp;lt;sub&amp;gt;4&amp;lt;/sub&amp;gt;/He 2%/98% and NH&amp;lt;sub&amp;gt;3&amp;lt;/sub&amp;gt; at 250°C or 350°C. The more dense films are produced at 350°C. The stress of the nitride can be altered by adjusting the N&amp;lt;sub&amp;gt;2&amp;lt;/sub&amp;gt;:He ratio of the deposition. CF&amp;lt;sub&amp;gt;4&amp;lt;/sub&amp;gt;/O&amp;lt;sub&amp;gt;2&amp;lt;/sub&amp;gt; plasmas are used to clean the chamber between depositions. &lt;br /&gt;
&lt;br /&gt;
These films are typically used for capacitor dielectrics, chemical passivation layers, electrical insulators, reactive ion etching masks, and optical anti-reflective coatings. The system is fully programmable with windows-based software and has a wide array of pre-defined thicknesses. Custom programs for dielectric stacks or different process parameters can be written and saved. &lt;br /&gt;
&lt;br /&gt;
== Detailed Specifications  ==&lt;br /&gt;
&lt;br /&gt;
*Gases used: NH&amp;lt;sub&amp;gt;3&amp;lt;/sub&amp;gt;, N&amp;lt;sub&amp;gt;2&amp;lt;/sub&amp;gt;O, 2%SiH&amp;lt;sub&amp;gt;4&amp;lt;/sub&amp;gt;/He, N&amp;lt;sub&amp;gt;2&amp;lt;/sub&amp;gt;,CF&amp;lt;sub&amp;gt;4&amp;lt;/sub&amp;gt; and O&amp;lt;sub&amp;gt;2&amp;lt;/sub&amp;gt; &lt;br /&gt;
*~ 10mT ultimate chamber pressure &lt;br /&gt;
*13.56 Mhz excitation freq. &lt;br /&gt;
*Sample size: pieces to 6” wafers &lt;br /&gt;
*Automatic tuning network &lt;br /&gt;
*RF Power control &lt;br /&gt;
*Full computer operation &lt;br /&gt;
*Standard recipes for a variety of film thicknesses&lt;br /&gt;
&lt;br /&gt;
==Documentation==&lt;br /&gt;
*[https://wiki.nanotech.ucsb.edu/w/images/d/d2/PECVD1_Operating_Instructions.pdf Operating Instructions]&lt;br /&gt;
*[[PECVD1 Wafer Coating Process|Wafer Coating Process Traveler]]&lt;br /&gt;
*For particle counting method, see the [https://wiki.nanotech.ucsb.edu/wiki/Wafer_scanning_process_traveler Surfscan Scanning Procedure]&lt;br /&gt;
&lt;br /&gt;
== Recipes &amp;amp; Process Data ==&lt;br /&gt;
* Historical Characterization Data &amp;amp; Standard Recipes can be found at:   [[PECVD Recipes#PECVD 1 .28PlasmaTherm 790.29|&#039;&#039;&#039;Recipes &amp;gt; Deposition &amp;gt; &amp;lt;u&amp;gt;PECVD1&amp;lt;/u&amp;gt;&#039;&#039;&#039;]]&lt;/div&gt;</summary>
		<author><name>Nplaviola</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:Tool2_NLV&amp;diff=159077</id>
		<title>Template:Tool2 NLV</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:Tool2_NLV&amp;diff=159077"/>
		<updated>2021-08-24T05:14:28Z</updated>

		<summary type="html">&lt;p&gt;Nplaviola: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;20&amp;quot; align=&amp;quot;right&amp;quot; style=&amp;quot;float: right;&amp;quot;&lt;br /&gt;
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|&lt;br /&gt;
{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;0&amp;quot; style=&amp;quot;background: whitesmoke; border: 1px solid #aaaaaa&amp;quot; align=&amp;quot;center&amp;quot;&lt;br /&gt;
|-&lt;br /&gt;
! style=&amp;quot;background:skyblue;&amp;quot; |{{{name|&amp;lt;includeonly&amp;gt;{{PAGENAME}}&amp;lt;/includeonly&amp;gt;}}}&lt;br /&gt;
|-&lt;br /&gt;
|&lt;br /&gt;
&amp;lt;!-- BORDER AROUND THE IMAGE --&amp;gt;&lt;br /&gt;
{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;0&amp;quot; style=&amp;quot;background: black; border: 1px solid #aaaaaa&amp;quot; align=&amp;quot;center&amp;quot;&lt;br /&gt;
|-&lt;br /&gt;
![[image:{{{picture|none.jpg}}}|300x350px|center|]]&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
&amp;lt;!-- END OF BORDER AROUND IMAGE --&amp;gt;&lt;br /&gt;
|-&lt;br /&gt;
|&lt;br /&gt;
{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;1&amp;quot; style=&amp;quot;background: none; border-top:1px solid #aaaaaa&amp;quot;&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
!width=150|Tool Type&lt;br /&gt;
!width=200|[[:Category:{{{type|NONE}}}|{{{type|NONE}}}]]&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
!width=150|Location&lt;br /&gt;
!width=200|{{{location|}}}&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
{{#ifeq: {{{super}}}|Tony Bosch|{{StaffInfo|Tony Bosch|(805) 893-3486||bosch@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Ning Cao|{{StaffInfo|Ning Cao|(805) 893-4689| |ningcao@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Mike Day|{{StaffInfo|Mike Day|(805) 893-3101||day@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Don Freeborn|{{StaffInfo|Don Freeborn|(805) 893-7975| |dfreeborn@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Aidan Hopkins|{{StaffInfo|Aidan Hopkins|(805) 893-2343||hopkins@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Demis D. John|{{StaffInfo|Demis D. John|(805) 893-5934||demis@ucsb.edu}} }}{{#ifeq: {{{super}}}|Brian Lingg|{{StaffInfo|Brian Lingg|(805) 893-8145||lingg_b@ucsb.edu}} }}{{#ifeq: {{{super}}}|Bill Mitchell|{{StaffInfo|Bill Mitchell|(805) 893-4974| |mitchell@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Dan Read|{{StaffInfo|Dan Read|(805) 893-3138||dread@ucsb.edu}} }}{{#ifeq: {{{super}}}|Tom Reynolds|{{StaffInfo|Tom Reynolds|(805) 893-8158||reynolds@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Lee Sawyer|{{StaffInfo|Lee Sawyer|(805) 893-2123||lee_sawyer@ucsb.edu}} }}{{#ifeq: {{{super}}}|Mike Silva|{{StaffInfo|Mike Silva|(805) 893-3096||silva@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Biljana Stamenic|{{StaffInfo|Biljana Stamenic|(805) 893-4002 | |biljana@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Tino Sy|{{StaffInfo|Tino Sy|(805) 893-4796||sy@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Brian Thibeault|{{StaffInfo|Brian Thibeault|(805) 893-2268||thibeault@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Zack Warburg|{{StaffInfo|Zack Warburg|(805) 893-3918x200| |zwarburg@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Jack Whaley|{{StaffInfo|Jack Whaley|(805) 893-8174||whaley@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Luis Zuzunaga|{{StaffInfo|Luis Zuzunaga|(805) 893-8258||luis@ece.ucsb.edu}} }}&lt;br /&gt;
{{#ifeq: {{{super2}}}|Tony Bosch|{{StaffInfo|Tony Bosch|(805) 893-3486||bosch@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Ning Cao|{{StaffInfo|Ning Cao|(805) 893-4689| |ningcao@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Mike Day|{{StaffInfo|Mike Day|(805) 893-3101||day@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Don Freeborn|{{StaffInfo|Don Freeborn|(805) 893-7975| |dfreeborn@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Aidan Hopkins|{{StaffInfo|Aidan Hopkins|(805) 893-2343||hopkins@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Demis D. John|{{StaffInfo|Demis D. John|(805) 893-5934||demis@ucsb.edu}} }}{{#ifeq: {{{super2}}}|Brian Lingg|{{StaffInfo|Brian Lingg|(805) 893-8145||lingg_b@ucsb.edu}} }}{{#ifeq: {{{super2}}}|Bill Mitchell|{{StaffInfo|Bill Mitchell|(805) 893-4974| |mitchell@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Dan Read|{{StaffInfo|Dan Read|(805) 893-3138||dread@ucsb.edu}} }}{{#ifeq: {{{super2}}}|Tom Reynolds|{{StaffInfo|Tom Reynolds|(805) 893-8158||reynolds@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Lee Sawyer|{{StaffInfo|Lee Sawyer|(805) 893-2123||lee_sawyer@ucsb.edu}} }}{{#ifeq: {{{super2}}}|Mike Silva|{{StaffInfo|Mike Silva|(805) 893-3096||silva@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Biljana Stamenic|{{StaffInfo|Biljana Stamenic|(805) 893-4002 | |biljana@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Tino Sy|{{StaffInfo|Tino Sy|(805) 893-4796||sy@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Brian Thibeault|{{StaffInfo|Brian Thibeault|(805) 893-2268||thibeault@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Zack Warburg|{{StaffInfo|Zack Warburg|(805) 893-3918x200| |zwarburg@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Jack Whaley|{{StaffInfo|Jack Whaley|(805) 893-8174||whaley@ece.ucsb.edu}} }}{{#ifeq: {{{super2}}}|Luis Zuzunaga|{{StaffInfo|Luis Zuzunaga|(805) 893-8258||luis@ece.ucsb.edu}} }}&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;1&amp;quot; style=&amp;quot;background: none; border-top:1px solid #aaaaaa&amp;quot;&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
!width=150|Description&lt;br /&gt;
!width=200|{{{description|NONE}}} &lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
!width=150|Manufacturer&lt;br /&gt;
!width=200|{{{manufacturer|NONE}}}&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
{{#if:{{{model|}}} |&lt;br /&gt;
!width=150{{!}}Model&lt;br /&gt;
!width=200{{!}}{{{model|}}}&lt;br /&gt;
}}&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
{{#if:{{{materials|}}} |&lt;br /&gt;
!width=150{{!}}Materials&lt;br /&gt;
!width=200{{!}}{{{materials|}}}&lt;br /&gt;
}}&lt;br /&gt;
|-align=&amp;quot;center&amp;quot;&lt;br /&gt;
{{#ifeq: {{{type}}}|Vacuum Deposition|{{!}}colspan=&amp;quot;2&amp;quot;{{!}}&#039;&#039;&#039;[[Vacuum Deposition Recipes{{!}}{{{type}}} Recipes]]&#039;&#039;&#039;}}{{#ifeq: {{{type}}}|Dry Etch|{{!}}colspan=&amp;quot;2&amp;quot;{{!}}&#039;&#039;&#039;[[Dry Etching Recipes{{!}}{{{type}}} Recipes]]&#039;&#039;&#039;}}{{#if:{{{recipe|}}}|{{!}}colspan=&amp;quot;2&amp;quot;{{!}}&#039;&#039;&#039;[[{{{recipe}}} Recipes{{!}}{{{type}}} Recipes]]&#039;&#039;&#039;}}&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
{{#if:{{{toolid|}}}|&lt;br /&gt;
{{{!}} border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;1&amp;quot; style=&amp;quot;background: none; border-top:1px solid #aaaaaa&amp;quot;&lt;br /&gt;
{{!}}-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
{{!}}width=350 align=center{{!}}[http://signupmonkey.ece.ucsb.edu/cgi-bin/users/{{#ifeq:{{{toolid|}}}|999|tools.cgi|browse.cgi?tool_ID={{{toolid|}}}}} Sign up for this tool]&lt;br /&gt;
{{!}}-&lt;br /&gt;
{{!}}}|[[category:NOID]]&lt;br /&gt;
}}&lt;br /&gt;
|}&lt;br /&gt;
|}&lt;br /&gt;
&amp;lt;includeonly&amp;gt;[[category:Tools]][[Category:{{{type|NONE}}}]]&amp;lt;/includeonly&amp;gt;&lt;br /&gt;
&amp;lt;noinclude&amp;gt;&lt;br /&gt;
[[category:Templates]]&lt;br /&gt;
This template inserts a &amp;quot;Tool Info&amp;quot; panel into a page, including a tool photo, supervisor contact info and other relevant links.&lt;br /&gt;
&lt;br /&gt;
Copy/paste the following code to include this template in a page.  Preferably inserted at the top of the page.&lt;br /&gt;
&lt;br /&gt;
&amp;lt;div style=&amp;quot;width: 70%;&amp;quot;&amp;gt;&amp;lt;pre&amp;gt;&lt;br /&gt;
{{tool&lt;br /&gt;
|super = Tool Supervisor name from the list below&lt;br /&gt;
|picture=Photo_of_the_tool_01.jpg&lt;br /&gt;
|type  = One of the tool types from the list below&lt;br /&gt;
|recipe = One of the process types, from the list below&lt;br /&gt;
|toolid = ### the Tool ID number from SignupMonkey&lt;br /&gt;
|location = Bay #&lt;br /&gt;
|description = This is a machine&lt;br /&gt;
|manufacturer = MfgCorp.&lt;br /&gt;
|model = (if applicable)&lt;br /&gt;
|materials = (If applicable)&lt;br /&gt;
}}&lt;br /&gt;
&amp;lt;/pre&amp;gt;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/noinclude&amp;gt;&lt;br /&gt;
&lt;br /&gt;
&amp;lt;noinclude&amp;gt;&lt;br /&gt;
=== Options ===&lt;br /&gt;
You can add the following &amp;quot;arguments&amp;quot; in the template.&lt;br /&gt;
* &#039;&#039;&#039;Supervisor&#039;&#039;&#039;: The &#039;&#039;&#039;&amp;lt;tt style=&amp;quot;blue&amp;quot;&amp;gt;|super = &amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument must match one of the names listed below, and email/phone will be filled in automatically.  See the section below for available options/how to edit info.&lt;br /&gt;
* &#039;&#039;&#039;picture&#039;&#039;&#039;: A photograph of the tool. You must Upload the image file first (see [[Special:Upload|Upload File]] on the left sidebar), then&amp;lt;br&amp;gt;Copy the resulting filename and Paste it into this argument. No Spaces Allowed in the filename!&lt;br /&gt;
* &#039;&#039;&#039;Type of Tool&#039;&#039;&#039;: The &#039;&#039;&#039;&amp;lt;tt&amp;gt;|type = &amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument must match one of the defined values below.  This will will automatically link to the correct &#039;&#039;Tool Listing&#039;&#039; wiki page (eg. Dry Etching vs. Deposition etc.)&lt;br /&gt;
* &#039;&#039;&#039;Recipe Link&#039;&#039;&#039;: The &#039;&#039;&#039;&amp;lt;tt&amp;gt;|recipes = &amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument must match one of the defined values below.  This will will automatically link to the correct &#039;&#039;Recipes&#039;&#039; wiki page (eg. Dry Etching vs. Deposition etc.)&lt;br /&gt;
* &#039;&#039;&#039;Tool ID on SignupMonkey&#039;&#039;&#039;: The &#039;&#039;&#039;&amp;lt;tt&amp;gt;|toolid = &amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument will create a link to the Signup Monkey page for this tool. This is the number at the end of the url for a tool on SignupMonkey. Using 999 will link to the Main tool list on SignupMonkey.&lt;br /&gt;
* &#039;&#039;&#039;location, description, manufacturer, model, materials&#039;&#039;&#039; : You can type anything you want for these, or leave them out entirely to omit that section.&lt;br /&gt;
* &#039;&#039;&#039;Name&#039;&#039;&#039;: By default, this argument is not included, and the title of the page will be used (which should be the name of the tool).  If you want to change the name printed, add a line like:&lt;br /&gt;
*:&amp;lt;pre&amp;gt;|name = Optional Tool Name&amp;lt;/pre&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== Supervisor Information ===&lt;br /&gt;
The Supervisor information (email, phone) is inserted automatically by the template.  Their info is coded in the template, hence there is no &amp;quot;email&amp;quot; or &amp;quot;phone&amp;quot; argument in the above example. This allows you to change their contact info in this template only, and the change will show up on all of their tool pages automatically.&lt;br /&gt;
&lt;br /&gt;
&amp;lt;b&amp;gt;To edit the Supervisor info listed, you must edit this template in &amp;lt;tt&amp;gt;Edit Source&amp;lt;/tt&amp;gt; mode.&amp;lt;/b&amp;gt;&lt;br /&gt;
&lt;br /&gt;
Then find the line that shows the list of &#039;&#039;&#039;&amp;lt;tt&amp;gt;if equals&amp;lt;/tt&amp;gt;&#039;&#039;&#039; for each supervisor, which looks like this:&lt;br /&gt;
 &amp;lt;nowiki&amp;gt;{{#ifeq: {{{super}}}|Tony Bosch|{{StaffInfo|Tony Bosch|(805) 893-3486||bosch@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Ning Cao|{{StaffInfo|Ning Cao|(805) 893-4689| |ningcao@ece.ucsb.edu}} }} ....&amp;lt;/nowiki&amp;gt;&lt;br /&gt;
&lt;br /&gt;
It is a bit of an eyesore because no newlines or spaces can be inserted between each supervisor&#039;s options.&lt;br /&gt;
&lt;br /&gt;
You can see the First option &#039;&#039;Tony Bosch&#039;&#039; here is the name you type into the Tool Template&#039;s &#039;&#039;&#039;&amp;lt;tt&amp;gt;|super=&amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument.  Then the &#039;&#039;&#039;&amp;lt;tt&amp;gt;&amp;lt;nowiki&amp;gt;{{StaffInfo|&amp;lt;/nowiki&amp;gt;&amp;lt;/tt&amp;gt;&#039;&#039;&#039; section lists the Supervisor&#039;s information that will be inserted.&lt;br /&gt;
&lt;br /&gt;
To make a new supervisor option, copy one of the sections from the first pair of curly brackets &#039;&#039;&#039;&amp;lt;tt&amp;gt;&amp;lt;nowiki&amp;gt;{{&amp;lt;/nowiki&amp;gt;&amp;lt;/tt&amp;gt;&#039;&#039;&#039; to the ending 4 brackets &#039;&#039;&#039;&amp;lt;tt&amp;gt;&amp;lt;nowiki&amp;gt;}} }}&amp;lt;/nowiki&amp;gt;&amp;lt;/tt&amp;gt;&#039;&#039;&#039;, add it to the end of the list and edit the info as needed.&lt;br /&gt;
&lt;br /&gt;
=== Arguments with Specific Values ===&lt;br /&gt;
The following arguments have specific options, only enter one of these values:&lt;br /&gt;
* &#039;&#039;&#039;super&#039;&#039;&#039;: &lt;br /&gt;
*: Tony Bosch&lt;br /&gt;
*: Ning Cao&lt;br /&gt;
*: Mike Day&lt;br /&gt;
*: Don Freeborn&lt;br /&gt;
*: Aidan Hopkins&lt;br /&gt;
*: Demis D. John&lt;br /&gt;
*: Brian Lingg&lt;br /&gt;
*: Bill Mitchell&lt;br /&gt;
*: Dan Read&lt;br /&gt;
*: Tom Reynolds&lt;br /&gt;
*: Lee Sawyer&lt;br /&gt;
*: Mike Silva&lt;br /&gt;
*: Biljana Stamenic&lt;br /&gt;
*: Tino Sy&lt;br /&gt;
*: Brian Thibeault&lt;br /&gt;
*: Zack Warburg&lt;br /&gt;
*: Jack Whaley&lt;br /&gt;
*: Luis Zuzunaga&lt;br /&gt;
* &#039;&#039;&#039;type&#039;&#039;&#039;: &lt;br /&gt;
*: Vacuum Deposition&lt;br /&gt;
*: Dry Etch&lt;br /&gt;
*: Wet Processing&lt;br /&gt;
*: Thermal Processing&lt;br /&gt;
*: Packaging&lt;br /&gt;
*: Inspection, Test and Characterization&lt;br /&gt;
*:: (spaces are ok)&lt;br /&gt;
* &#039;&#039;&#039;recipe&#039;&#039;&#039;: &lt;br /&gt;
*: Lithography&lt;br /&gt;
*: Vacuum Deposition (auto if `type` is set to this)&lt;br /&gt;
*: Dry Etching (auto if `type` is set to this)&lt;br /&gt;
*: Wet Etching&lt;br /&gt;
*: Thermal Processing&lt;br /&gt;
*: Packaging&lt;br /&gt;
&lt;br /&gt;
&amp;lt;/noinclude&amp;gt;&lt;/div&gt;</summary>
		<author><name>Nplaviola</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=Nick_test&amp;diff=159076</id>
		<title>Nick test</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=Nick_test&amp;diff=159076"/>
		<updated>2021-08-24T04:21:29Z</updated>

		<summary type="html">&lt;p&gt;Nplaviola: Created page with &amp;quot;{{tool|{{PAGENAME}} |picture=PECVD1.jpg |type = Vacuum Deposition |super= Don Freeborn |phone=(805)839-7975 |location=Bay 3 |email=dfreeborn@ucsb.edu |description = PECVD Plas...&amp;quot;&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;{{tool|{{PAGENAME}}&lt;br /&gt;
|picture=PECVD1.jpg&lt;br /&gt;
|type = Vacuum Deposition&lt;br /&gt;
|super= Don Freeborn&lt;br /&gt;
|phone=(805)839-7975&lt;br /&gt;
|location=Bay 3&lt;br /&gt;
|email=dfreeborn@ucsb.edu&lt;br /&gt;
|description = PECVD Plasma Therm 790 For Oxides And Nitrides&lt;br /&gt;
|manufacturer = Plasma-Therm&lt;br /&gt;
|materials = &lt;br /&gt;
|toolid=16&lt;br /&gt;
}} &lt;br /&gt;
&lt;br /&gt;
__TOC__ &lt;br /&gt;
== About  ==&lt;br /&gt;
&lt;br /&gt;
This is a Plasma-Therm model 790 plasma enhanced chemical vapor deposition system for depositing SiO&amp;lt;sub&amp;gt;2&amp;lt;/sub&amp;gt;, Si&amp;lt;sub&amp;gt;3&amp;lt;/sub&amp;gt;N&amp;lt;sub&amp;gt;4&amp;lt;/sub&amp;gt;, or SiO&amp;lt;sub&amp;gt;x&amp;lt;/sub&amp;gt;N&amp;lt;sub&amp;gt;y&amp;lt;/sub&amp;gt; dielectric films. The system uses a capacitively-coupled 13.56 MHz source excitation to produce the plasma between two parallel aluminum plates. The gas is injected over the sample through a 6” diameter showerhead. The samples are placed on the system anode (to minimize ion damage) which is heated to 250-350°C. SiO&amp;lt;sub&amp;gt;2&amp;lt;/sub&amp;gt; is produced from SiH&amp;lt;sub&amp;gt;4&amp;lt;/sub&amp;gt;/He 2%/98% and N&amp;lt;sub&amp;gt;2&amp;lt;/sub&amp;gt;O at 250°C. The typical deposition rate is 400 A/min. at 300 mT pressure. The typical BOE etch rate of this oxide is about 400 nm/min. Si&amp;lt;sub&amp;gt;3&amp;lt;/sub&amp;gt;N&amp;lt;sub&amp;gt;4&amp;lt;/sub&amp;gt; is produced from SiH&amp;lt;sub&amp;gt;4&amp;lt;/sub&amp;gt;/He 2%/98% and NH&amp;lt;sub&amp;gt;3&amp;lt;/sub&amp;gt; at 250°C or 350°C. The more dense films are produced at 350°C. The stress of the nitride can be altered by adjusting the N&amp;lt;sub&amp;gt;2&amp;lt;/sub&amp;gt;:He ratio of the deposition. CF&amp;lt;sub&amp;gt;4&amp;lt;/sub&amp;gt;/O&amp;lt;sub&amp;gt;2&amp;lt;/sub&amp;gt; plasmas are used to clean the chamber between depositions. &lt;br /&gt;
&lt;br /&gt;
These films are typically used for capacitor dielectrics, chemical passivation layers, electrical insulators, reactive ion etching masks, and optical anti-reflective coatings. The system is fully programmable with windows-based software and has a wide array of pre-defined thicknesses. Custom programs for dielectric stacks or different process parameters can be written and saved. &lt;br /&gt;
&lt;br /&gt;
== Detailed Specifications  ==&lt;br /&gt;
&lt;br /&gt;
*Gases used: NH&amp;lt;sub&amp;gt;3&amp;lt;/sub&amp;gt;, N&amp;lt;sub&amp;gt;2&amp;lt;/sub&amp;gt;O, 2%SiH&amp;lt;sub&amp;gt;4&amp;lt;/sub&amp;gt;/He, N&amp;lt;sub&amp;gt;2&amp;lt;/sub&amp;gt;,CF&amp;lt;sub&amp;gt;4&amp;lt;/sub&amp;gt; and O&amp;lt;sub&amp;gt;2&amp;lt;/sub&amp;gt; &lt;br /&gt;
*~ 10mT ultimate chamber pressure &lt;br /&gt;
*13.56 Mhz excitation freq. &lt;br /&gt;
*Sample size: pieces to 6” wafers &lt;br /&gt;
*Automatic tuning network &lt;br /&gt;
*RF Power control &lt;br /&gt;
*Full computer operation &lt;br /&gt;
*Standard recipes for a variety of film thicknesses&lt;br /&gt;
&lt;br /&gt;
==Documentation==&lt;br /&gt;
*[https://wiki.nanotech.ucsb.edu/w/images/d/d2/PECVD1_Operating_Instructions.pdf Operating Instructions]&lt;br /&gt;
*[[PECVD1 Wafer Coating Process|Wafer Coating Process Traveler]]&lt;br /&gt;
*For particle counting method, see the [https://wiki.nanotech.ucsb.edu/wiki/Wafer_scanning_process_traveler Surfscan Scanning Procedure]&lt;br /&gt;
&lt;br /&gt;
== Recipes &amp;amp; Process Data ==&lt;br /&gt;
* Historical Characterization Data &amp;amp; Standard Recipes can be found at:   [[PECVD Recipes#PECVD 1 .28PlasmaTherm 790.29|&#039;&#039;&#039;Recipes &amp;gt; Deposition &amp;gt; &amp;lt;u&amp;gt;PECVD1&amp;lt;/u&amp;gt;&#039;&#039;&#039;]]&lt;/div&gt;</summary>
		<author><name>Nplaviola</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:Tool2_NLV&amp;diff=159074</id>
		<title>Template:Tool2 NLV</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:Tool2_NLV&amp;diff=159074"/>
		<updated>2021-08-24T03:50:03Z</updated>

		<summary type="html">&lt;p&gt;Nplaviola: Created page with &amp;quot;{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;20&amp;quot; align=&amp;quot;right&amp;quot; style=&amp;quot;float: right;&amp;quot; |- | {| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;0&amp;quot; style=&amp;quot;background: whitesmoke; border: 1px solid #aaaaaa&amp;quot;...&amp;quot;&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;20&amp;quot; align=&amp;quot;right&amp;quot; style=&amp;quot;float: right;&amp;quot;&lt;br /&gt;
|-&lt;br /&gt;
|&lt;br /&gt;
{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;0&amp;quot; style=&amp;quot;background: whitesmoke; border: 1px solid #aaaaaa&amp;quot; align=&amp;quot;center&amp;quot;&lt;br /&gt;
|-&lt;br /&gt;
! style=&amp;quot;background:skyblue;&amp;quot; |{{{name|&amp;lt;includeonly&amp;gt;{{PAGENAME}}&amp;lt;/includeonly&amp;gt;}}}&lt;br /&gt;
|-&lt;br /&gt;
|&lt;br /&gt;
&amp;lt;!-- BORDER AROUND THE IMAGE --&amp;gt;&lt;br /&gt;
{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;0&amp;quot; style=&amp;quot;background: black; border: 1px solid #aaaaaa&amp;quot; align=&amp;quot;center&amp;quot;&lt;br /&gt;
|-&lt;br /&gt;
![[image:{{{picture|none.jpg}}}|300x350px|center|]]&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
&amp;lt;!-- END OF BORDER AROUND IMAGE --&amp;gt;&lt;br /&gt;
|-&lt;br /&gt;
|&lt;br /&gt;
{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;1&amp;quot; style=&amp;quot;background: none; border-top:1px solid #aaaaaa&amp;quot;&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
!width=150|Tool Type&lt;br /&gt;
!width=200|[[:Category:{{{type|NONE}}}|{{{type|NONE}}}]]&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
!width=150|Location&lt;br /&gt;
!width=200|{{{location|}}}&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
{{#ifeq: {{{super}}}|Tony Bosch|{{StaffInfo|Tony Bosch|(805) 893-3486||bosch@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Ning Cao|{{StaffInfo|Ning Cao|(805) 893-4689| |ningcao@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Mike Day|{{StaffInfo|Mike Day|(805) 893-3101||day@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Don Freeborn|{{StaffInfo|Don Freeborn|(805) 893-7975| |dfreeborn@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Aidan Hopkins|{{StaffInfo|Aidan Hopkins|(805) 893-2343||hopkins@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Demis D. John|{{StaffInfo|Demis D. John|(805) 893-5934||demis@ucsb.edu}} }}{{#ifeq: {{{super}}}|Brian Lingg|{{StaffInfo|Brian Lingg|(805) 893-8145||lingg_b@ucsb.edu}} }}{{#ifeq: {{{super}}}|Bill Mitchell|{{StaffInfo|Bill Mitchell|(805) 893-4974| |mitchell@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Dan Read|{{StaffInfo|Dan Read|(805) 893-3138||dread@ucsb.edu}} }}{{#ifeq: {{{super}}}|Tom Reynolds|{{StaffInfo|Tom Reynolds|(805) 893-8158||reynolds@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Lee Sawyer|{{StaffInfo|Lee Sawyer|(805) 893-2123||lee_sawyer@ucsb.edu}} }}{{#ifeq: {{{super}}}|Mike Silva|{{StaffInfo|Mike Silva|(805) 893-3096||silva@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Biljana Stamenic|{{StaffInfo|Biljana Stamenic|(805) 893-4002 | |biljana@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Tino Sy|{{StaffInfo|Tino Sy|(805) 893-4796||sy@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Brian Thibeault|{{StaffInfo|Brian Thibeault|(805) 893-2268||thibeault@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Zack Warburg|{{StaffInfo|Zack Warburg|(805) 893-3918x200| |zwarburg@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Jack Whaley|{{StaffInfo|Jack Whaley|(805) 893-8174||whaley@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Luis Zuzunaga|{{StaffInfo|Luis Zuzunaga|(805) 893-8258||luis@ece.ucsb.edu}} }}&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
{| border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;1&amp;quot; style=&amp;quot;background: none; border-top:1px solid #aaaaaa&amp;quot;&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
!width=150|Description&lt;br /&gt;
!width=200|{{{description|NONE}}} &lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
!width=150|Manufacturer&lt;br /&gt;
!width=200|{{{manufacturer|NONE}}}&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
{{#if:{{{model|}}} |&lt;br /&gt;
!width=150{{!}}Model&lt;br /&gt;
!width=200{{!}}{{{model|}}}&lt;br /&gt;
}}&lt;br /&gt;
|-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
{{#if:{{{materials|}}} |&lt;br /&gt;
!width=150{{!}}Materials&lt;br /&gt;
!width=200{{!}}{{{materials|}}}&lt;br /&gt;
}}&lt;br /&gt;
|-align=&amp;quot;center&amp;quot;&lt;br /&gt;
{{#ifeq: {{{type}}}|Vacuum Deposition|{{!}}colspan=&amp;quot;2&amp;quot;{{!}}&#039;&#039;&#039;[[Vacuum Deposition Recipes{{!}}{{{type}}} Recipes]]&#039;&#039;&#039;}}{{#ifeq: {{{type}}}|Dry Etch|{{!}}colspan=&amp;quot;2&amp;quot;{{!}}&#039;&#039;&#039;[[Dry Etching Recipes{{!}}{{{type}}} Recipes]]&#039;&#039;&#039;}}{{#if:{{{recipe|}}}|{{!}}colspan=&amp;quot;2&amp;quot;{{!}}&#039;&#039;&#039;[[{{{recipe}}} Recipes{{!}}{{{type}}} Recipes]]&#039;&#039;&#039;}}&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
{{#if:{{{toolid|}}}|&lt;br /&gt;
{{{!}} border=&amp;quot;0&amp;quot; cellpadding=&amp;quot;2&amp;quot; cellspacing=&amp;quot;1&amp;quot; style=&amp;quot;background: none; border-top:1px solid #aaaaaa&amp;quot;&lt;br /&gt;
{{!}}-valign=&amp;quot;top&amp;quot;&lt;br /&gt;
{{!}}width=350 align=center{{!}}[http://signupmonkey.ece.ucsb.edu/cgi-bin/users/{{#ifeq:{{{toolid|}}}|999|tools.cgi|browse.cgi?tool_ID={{{toolid|}}}}} Sign up for this tool]&lt;br /&gt;
{{!}}-&lt;br /&gt;
{{!}}}|[[category:NOID]]&lt;br /&gt;
}}&lt;br /&gt;
|}&lt;br /&gt;
|}&lt;br /&gt;
&amp;lt;includeonly&amp;gt;[[category:Tools]][[Category:{{{type|NONE}}}]]&amp;lt;/includeonly&amp;gt;&lt;br /&gt;
&amp;lt;noinclude&amp;gt;&lt;br /&gt;
[[category:Templates]]&lt;br /&gt;
This template inserts a &amp;quot;Tool Info&amp;quot; panel into a page, including a tool photo, supervisor contact info and other relevant links.&lt;br /&gt;
&lt;br /&gt;
Copy/paste the following code to include this template in a page.  Preferably inserted at the top of the page.&lt;br /&gt;
&lt;br /&gt;
&amp;lt;div style=&amp;quot;width: 70%;&amp;quot;&amp;gt;&amp;lt;pre&amp;gt;&lt;br /&gt;
{{tool&lt;br /&gt;
|super = Tool Supervisor name from the list below&lt;br /&gt;
|picture=Photo_of_the_tool_01.jpg&lt;br /&gt;
|type  = One of the tool types from the list below&lt;br /&gt;
|recipe = One of the process types, from the list below&lt;br /&gt;
|toolid = ### the Tool ID number from SignupMonkey&lt;br /&gt;
|location = Bay #&lt;br /&gt;
|description = This is a machine&lt;br /&gt;
|manufacturer = MfgCorp.&lt;br /&gt;
|model = (if applicable)&lt;br /&gt;
|materials = (If applicable)&lt;br /&gt;
}}&lt;br /&gt;
&amp;lt;/pre&amp;gt;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/noinclude&amp;gt;&lt;br /&gt;
&lt;br /&gt;
&amp;lt;noinclude&amp;gt;&lt;br /&gt;
=== Options ===&lt;br /&gt;
You can add the following &amp;quot;arguments&amp;quot; in the template.&lt;br /&gt;
* &#039;&#039;&#039;Supervisor&#039;&#039;&#039;: The &#039;&#039;&#039;&amp;lt;tt style=&amp;quot;blue&amp;quot;&amp;gt;|super = &amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument must match one of the names listed below, and email/phone will be filled in automatically.  See the section below for available options/how to edit info.&lt;br /&gt;
* &#039;&#039;&#039;picture&#039;&#039;&#039;: A photograph of the tool. You must Upload the image file first (see [[Special:Upload|Upload File]] on the left sidebar), then&amp;lt;br&amp;gt;Copy the resulting filename and Paste it into this argument. No Spaces Allowed in the filename!&lt;br /&gt;
* &#039;&#039;&#039;Type of Tool&#039;&#039;&#039;: The &#039;&#039;&#039;&amp;lt;tt&amp;gt;|type = &amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument must match one of the defined values below.  This will will automatically link to the correct &#039;&#039;Tool Listing&#039;&#039; wiki page (eg. Dry Etching vs. Deposition etc.)&lt;br /&gt;
* &#039;&#039;&#039;Recipe Link&#039;&#039;&#039;: The &#039;&#039;&#039;&amp;lt;tt&amp;gt;|recipes = &amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument must match one of the defined values below.  This will will automatically link to the correct &#039;&#039;Recipes&#039;&#039; wiki page (eg. Dry Etching vs. Deposition etc.)&lt;br /&gt;
* &#039;&#039;&#039;Tool ID on SignupMonkey&#039;&#039;&#039;: The &#039;&#039;&#039;&amp;lt;tt&amp;gt;|toolid = &amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument will create a link to the Signup Monkey page for this tool. This is the number at the end of the url for a tool on SignupMonkey. Using 999 will link to the Main tool list on SignupMonkey.&lt;br /&gt;
* &#039;&#039;&#039;location, description, manufacturer, model, materials&#039;&#039;&#039; : You can type anything you want for these, or leave them out entirely to omit that section.&lt;br /&gt;
* &#039;&#039;&#039;Name&#039;&#039;&#039;: By default, this argument is not included, and the title of the page will be used (which should be the name of the tool).  If you want to change the name printed, add a line like:&lt;br /&gt;
*:&amp;lt;pre&amp;gt;|name = Optional Tool Name&amp;lt;/pre&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== Supervisor Information ===&lt;br /&gt;
The Supervisor information (email, phone) is inserted automatically by the template.  Their info is coded in the template, hence there is no &amp;quot;email&amp;quot; or &amp;quot;phone&amp;quot; argument in the above example. This allows you to change their contact info in this template only, and the change will show up on all of their tool pages automatically.&lt;br /&gt;
&lt;br /&gt;
&amp;lt;b&amp;gt;To edit the Supervisor info listed, you must edit this template in &amp;lt;tt&amp;gt;Edit Source&amp;lt;/tt&amp;gt; mode.&amp;lt;/b&amp;gt;&lt;br /&gt;
&lt;br /&gt;
Then find the line that shows the list of &#039;&#039;&#039;&amp;lt;tt&amp;gt;if equals&amp;lt;/tt&amp;gt;&#039;&#039;&#039; for each supervisor, which looks like this:&lt;br /&gt;
 &amp;lt;nowiki&amp;gt;{{#ifeq: {{{super}}}|Tony Bosch|{{StaffInfo|Tony Bosch|(805) 893-3486||bosch@ece.ucsb.edu}} }}{{#ifeq: {{{super}}}|Ning Cao|{{StaffInfo|Ning Cao|(805) 893-4689| |ningcao@ece.ucsb.edu}} }} ....&amp;lt;/nowiki&amp;gt;&lt;br /&gt;
&lt;br /&gt;
It is a bit of an eyesore because no newlines or spaces can be inserted between each supervisor&#039;s options.&lt;br /&gt;
&lt;br /&gt;
You can see the First option &#039;&#039;Tony Bosch&#039;&#039; here is the name you type into the Tool Template&#039;s &#039;&#039;&#039;&amp;lt;tt&amp;gt;|super=&amp;lt;/tt&amp;gt;&#039;&#039;&#039; argument.  Then the &#039;&#039;&#039;&amp;lt;tt&amp;gt;&amp;lt;nowiki&amp;gt;{{StaffInfo|&amp;lt;/nowiki&amp;gt;&amp;lt;/tt&amp;gt;&#039;&#039;&#039; section lists the Supervisor&#039;s information that will be inserted.&lt;br /&gt;
&lt;br /&gt;
To make a new supervisor option, copy one of the sections from the first pair of curly brackets &#039;&#039;&#039;&amp;lt;tt&amp;gt;&amp;lt;nowiki&amp;gt;{{&amp;lt;/nowiki&amp;gt;&amp;lt;/tt&amp;gt;&#039;&#039;&#039; to the ending 4 brackets &#039;&#039;&#039;&amp;lt;tt&amp;gt;&amp;lt;nowiki&amp;gt;}} }}&amp;lt;/nowiki&amp;gt;&amp;lt;/tt&amp;gt;&#039;&#039;&#039;, add it to the end of the list and edit the info as needed.&lt;br /&gt;
&lt;br /&gt;
=== Arguments with Specific Values ===&lt;br /&gt;
The following arguments have specific options, only enter one of these values:&lt;br /&gt;
* &#039;&#039;&#039;super&#039;&#039;&#039;: &lt;br /&gt;
*: Tony Bosch&lt;br /&gt;
*: Ning Cao&lt;br /&gt;
*: Mike Day&lt;br /&gt;
*: Don Freeborn&lt;br /&gt;
*: Aidan Hopkins&lt;br /&gt;
*: Demis D. John&lt;br /&gt;
*: Brian Lingg&lt;br /&gt;
*: Bill Mitchell&lt;br /&gt;
*: Dan Read&lt;br /&gt;
*: Tom Reynolds&lt;br /&gt;
*: Lee Sawyer&lt;br /&gt;
*: Mike Silva&lt;br /&gt;
*: Biljana Stamenic&lt;br /&gt;
*: Tino Sy&lt;br /&gt;
*: Brian Thibeault&lt;br /&gt;
*: Zack Warburg&lt;br /&gt;
*: Jack Whaley&lt;br /&gt;
*: Luis Zuzunaga&lt;br /&gt;
* &#039;&#039;&#039;type&#039;&#039;&#039;: &lt;br /&gt;
*: Vacuum Deposition&lt;br /&gt;
*: Dry Etch&lt;br /&gt;
*: Wet Processing&lt;br /&gt;
*: Thermal Processing&lt;br /&gt;
*: Packaging&lt;br /&gt;
*: Inspection, Test and Characterization&lt;br /&gt;
*:: (spaces are ok)&lt;br /&gt;
* &#039;&#039;&#039;recipe&#039;&#039;&#039;: &lt;br /&gt;
*: Lithography&lt;br /&gt;
*: Vacuum Deposition (auto if `type` is set to this)&lt;br /&gt;
*: Dry Etching (auto if `type` is set to this)&lt;br /&gt;
*: Wet Etching&lt;br /&gt;
*: Thermal Processing&lt;br /&gt;
*: Packaging&lt;br /&gt;
&lt;br /&gt;
&amp;lt;/noinclude&amp;gt;&lt;/div&gt;</summary>
		<author><name>Nplaviola</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=Tool_List&amp;diff=158716</id>
		<title>Tool List</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=Tool_List&amp;diff=158716"/>
		<updated>2021-01-27T06:14:12Z</updated>

		<summary type="html">&lt;p&gt;Nplaviola: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;__NOTOC__&lt;br /&gt;
=Lithography=&lt;br /&gt;
&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;300&amp;quot; |&lt;br /&gt;
=====Photoresists and Lithography Chemicals=====&lt;br /&gt;
&lt;br /&gt;
*See the [https://wiki.nanotech.ucsb.edu/wiki/index.php/Lithography_Recipes#Chemicals_Stocked_.2B_Datasheets Chemical Datasheets page].&lt;br /&gt;
*[[Automated Coat/Develop System (S-Cubed Flexi)|Auto. Coat/Develop (S-Cubed Flexi)]]&lt;br /&gt;
&lt;br /&gt;
=====Contact Aligners (Optical Exposure)=====&lt;br /&gt;
&lt;br /&gt;
*[[Suss Aligners (SUSS MJB-3)]]&lt;br /&gt;
*[[IR Aligner (SUSS MJB-3 IR)]]&lt;br /&gt;
*[[Contact Aligner (SUSS MA-6)]]&lt;br /&gt;
*[[DUV Flood Expose]]&lt;br /&gt;
&lt;br /&gt;
=====Direct-Write Lithography=====&lt;br /&gt;
&lt;br /&gt;
*[[E-Beam Lithography System (JEOL JBX-6300FS)]]&lt;br /&gt;
*[[Field Emission SEM 1 (FEI Sirion)|E-Beam Lithography (FEI Sirion Nabity v9)]]&lt;br /&gt;
*[[Focused Ion-Beam Lithography (Raith Velion)]]&lt;br /&gt;
*[[Maskless Aligner (Heidelberg MLA150)]]&lt;br /&gt;
&lt;br /&gt;
===== Other Patterning Systems =====&lt;br /&gt;
*[[Nano-Imprint (Nanonex NX2000)]]&lt;br /&gt;
*[[Holographic Lith/PL Setup (Custom)|Holographic Litho/PL Setup (Custom)]]&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
=====Steppers (Optical Exposure)=====&lt;br /&gt;
&lt;br /&gt;
*[[Stepper 1 (GCA 6300)|Stepper 1 (GCA 6300, i-line)]]&lt;br /&gt;
*[[Stepper 2 (AutoStep 200)|Stepper 2 (AutoStep 200, i-line)]]&lt;br /&gt;
*[[Stepper 3 (ASML DUV)|Stepper 3 (ASML DUV, Deep-UV)]]&lt;br /&gt;
&lt;br /&gt;
=====Thermal Processing for Photolithography=====&lt;br /&gt;
&lt;br /&gt;
*[[Ovens - Overview of All Lab Ovens|Ovens - Overview of all lab ovens]]&lt;br /&gt;
*[[Ovens 1, 2 &amp;amp; 3 (Labline)]]&lt;br /&gt;
*[[Oven 4 (Fisher)]]&lt;br /&gt;
*[[Oven 5 (Labline)]]&lt;br /&gt;
*[[High Temp Oven (Blue M)]]&lt;br /&gt;
*[[Vacuum Oven (YES)]]&lt;br /&gt;
&lt;br /&gt;
=====Lithography Support=====&lt;br /&gt;
&lt;br /&gt;
*The [https://wiki.nanotech.ucsb.edu/wiki/index.php/Wet_Benches#Spin_Coat_Benches Spinner Benches] have pre-set hotplates at various temperatures appropriate for common photoresist bakes.&lt;br /&gt;
*[https://signupmonkey.ece.ucsb.edu/wiki/index.php/Wet_Benches#Automated_Wet-processing_Spinners_.28POLOS.29 POLOS spinners] on Develop and Solvent benches&lt;br /&gt;
*[[Spin Rinse Dryer (SemiTool)|Spin/Rinse/Dryer]]&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Vacuum Deposition=&lt;br /&gt;
&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;300&amp;quot; |&lt;br /&gt;
=====Physical Vapor Deposition (PVD)=====&lt;br /&gt;
&lt;br /&gt;
*[[E-Beam 1 (Sharon)]]&lt;br /&gt;
*[[E-Beam 2 (Custom)]]&lt;br /&gt;
*[[E-Beam 3 (Temescal)]]&lt;br /&gt;
*[[E-Beam 4 (CHA)]]&lt;br /&gt;
*[[Thermal Evap 1]]&lt;br /&gt;
*[[Thermal Evap 2 (Solder)]]&lt;br /&gt;
&lt;br /&gt;
=====Sputter Deposition=====&lt;br /&gt;
&lt;br /&gt;
*[[Sputter 3 (AJA ATC 2000-F)]]&lt;br /&gt;
*[[Sputter 4 (AJA ATC 2200-V)]]&lt;br /&gt;
*[[Sputter 5 (AJA ATC 2200-V)]]&lt;br /&gt;
*[[Ion Beam Deposition (Veeco NEXUS)]]&lt;br /&gt;
&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
=====Chemical Vapor Deposition (CVD)=====&lt;br /&gt;
&lt;br /&gt;
*[[PECVD 1 (PlasmaTherm 790)]]&lt;br /&gt;
*[[PECVD 2 (Advanced Vacuum)]]&lt;br /&gt;
*[[ICP-PECVD (Unaxis VLR)]]&lt;br /&gt;
*[[Molecular Vapor Deposition]]&lt;br /&gt;
*[[Atomic Layer Deposision (Oxford FlexAL)|Atomic Layer Deposition (Oxford FlexAL)]]&lt;br /&gt;
&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Dry Etch=&lt;br /&gt;
&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;300&amp;quot; |&lt;br /&gt;
=====Reactive Ion Etching (RIE)=====&lt;br /&gt;
&lt;br /&gt;
*[[RIE 2 (MRC)]]&lt;br /&gt;
*[[RIE 3 (MRC)]]&lt;br /&gt;
*[[RIE 5 (PlasmaTherm)]]&lt;br /&gt;
&lt;br /&gt;
=====Plasma Etching and Cleaning=====&lt;br /&gt;
&lt;br /&gt;
*[[Plasma Clean (Gasonics 2000)]]&lt;br /&gt;
*[[Plasma Clean (YES EcoClean)]]&lt;br /&gt;
*[[Plasma Activation (EVG 810)]]&lt;br /&gt;
*[[Ashers (Technics PEII)]]&lt;br /&gt;
&lt;br /&gt;
=====Etch Monitoring=====&lt;br /&gt;
&lt;br /&gt;
*[[Laser Etch Monitoring]] (Endpoint Detection)&lt;br /&gt;
*Optical Emission Spectra&lt;br /&gt;
*Residual Gas Analyzer (RGA)&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
=====ICP-RIE=====&lt;br /&gt;
&lt;br /&gt;
*[[ICP Etch 1 (Panasonic E626I)]]&lt;br /&gt;
*[[ICP Etch 2 (Panasonic E640)]]&lt;br /&gt;
*[[ICP-Etch (Unaxis VLR)]]&lt;br /&gt;
*[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)|Plasma-Therm SLR: Fluorine ICP (PlasmaTherm/SLR Fluorine Etcher)]]&lt;br /&gt;
*[[DSEIII (PlasmaTherm/Deep Silicon Etcher)|Plasma-Therm DSE-iii (PlasmaTherm/Deep Silicon Etcher)]]&lt;br /&gt;
&lt;br /&gt;
=====Ion Milling and Reactive Ion Beam Etching=====&lt;br /&gt;
&lt;br /&gt;
*[[CAIBE (Oxford Ion Mill)]]&lt;br /&gt;
&lt;br /&gt;
=====Other Dry Etching=====&lt;br /&gt;
&lt;br /&gt;
*[[UV Ozone Reactor]]&lt;br /&gt;
*[[XeF2 Etch (Xetch)|XeF&amp;lt;sub&amp;gt;2&amp;lt;/sub&amp;gt; Etch (Xetch)]]&lt;br /&gt;
*[[Vapor HF Etch]]&lt;br /&gt;
&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Wet Processing=&lt;br /&gt;
See the [[Chemical List|Chemical List page]] for stocked chemicals such as Developers, Etchants, Solvents etc.&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;300&amp;quot; |&lt;br /&gt;
*[[Wet Benches]]&lt;br /&gt;
**[[Solvent Cleaning Benches]]&lt;br /&gt;
**[[Spin Coat Benches]]&lt;br /&gt;
**[[Develop Benches]]&lt;br /&gt;
**[[Toxic Corrosive Benches]]&lt;br /&gt;
**[[HF/TMAH Processing Benches]]&lt;br /&gt;
**[[Plating Bench]]&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
*[[Gold Plating Bench]]&lt;br /&gt;
*[[Critical Point Dryer]]&lt;br /&gt;
*[[Spin Rinse Dryer (SemiTool)]]&lt;br /&gt;
*[[Chemical-Mechanical Polisher (Logitech)]]&lt;br /&gt;
*[[Automated Coat/Develop System (S-Cubed Flexi)|Auto. Coat/Develop (S-Cubed Flexi)]]&lt;br /&gt;
*[https://signupmonkey.ece.ucsb.edu/wiki/index.php/Wet_Benches#Automated_Wet-processing_Spinners_.28POLOS.29 Auto. Wet-Processing Spinners (POLOS)]&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Thermal Processing=&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
*[[Rapid Thermal Processor (AET RX6)|Rapid Thermal Annealer/Processor &amp;quot;RTA&amp;quot; (AET RX6)]]&lt;br /&gt;
*[[Rapid Thermal Processor (SSI Solaris 150)]]&lt;br /&gt;
*[[Tube Furnace (Tystar 8300)]]&lt;br /&gt;
*[[Tube Furnace Wafer Bonding (Thermco)]]&lt;br /&gt;
*[[Tube Furnace AlGaAs Oxidation (Lindberg)]]&lt;br /&gt;
*[[Wafer Bonder (SUSS SB6-8E)]]&lt;br /&gt;
*[[Wafer Bonder (Logitech WBS7)|Wafer Bonder/Wax Mounting (Logitech WBS2)]]&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
*[[Ovens - Overview of All Lab Ovens|Ovens - Overview of all Lab Ovens]]&lt;br /&gt;
**[[Ovens 1, 2 &amp;amp; 3 (Labline)]]&lt;br /&gt;
**[[Oven 4 (Thermo-Fisher HeraTherm)]]&lt;br /&gt;
**[[Oven 5 (Labline)]]&lt;br /&gt;
**[[Vacuum Oven (YES)]]&lt;br /&gt;
**[[High Temp Oven (Blue M)]]&lt;br /&gt;
|&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Packaging=&lt;br /&gt;
&lt;br /&gt;
*[[Dicing Saw (ADT)]]&lt;br /&gt;
*[[Flip-Chip Bonder (Finetech)]]&lt;br /&gt;
*[[Vacuum Sealer]]&lt;br /&gt;
*[[Wire Saw (Takatori)]]&lt;br /&gt;
&lt;br /&gt;
=Inspection, Test and Characterization=&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;300&amp;quot; |&lt;br /&gt;
=====Optical Microscopy=====&lt;br /&gt;
&lt;br /&gt;
*[[Microscopes|Optical Microscopes]]&lt;br /&gt;
*[[Fluorescence Microscope (Olympus MX51)]]&lt;br /&gt;
*[[Deep UV Optical Microscope (Olympus)]]&lt;br /&gt;
*[[Laser Scanning Confocal M-scope (Olympus LEXT)]]&lt;br /&gt;
*[[Photo-emission &amp;amp; IR Microscope (QFI)|Photo-emission &amp;amp; Thermal IR Microscope (QFI)]]&lt;br /&gt;
&lt;br /&gt;
===== Electron Microscopy =====&lt;br /&gt;
*[[Field Emission SEM 1 (FEI Sirion)]]&lt;br /&gt;
*[[Field Emission SEM 2 (JEOL 7600F)]]&lt;br /&gt;
*[[SEM Sample Coater (Hummer)]]&lt;br /&gt;
&lt;br /&gt;
=====Topographical Metrology=====&lt;br /&gt;
&lt;br /&gt;
*[[Step Profilometer (KLA Tencor P-7)]]&lt;br /&gt;
*[[Step Profilometer (Dektak 6M)]]&lt;br /&gt;
*[[Atomic Force Microscope (Bruker ICON)|Atomic Force Microsope (Bruker ICON)]]&lt;br /&gt;
*[[Surface Analysis (KLA/Tencor Surfscan)]]&lt;br /&gt;
**&#039;&#039;Sub-micron Particle Counter&#039;&#039;&lt;br /&gt;
*[[Laser Scanning Confocal M-scope (Olympus LEXT)]]&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
=====Thin-Film/Material Analysis=====&lt;br /&gt;
&lt;br /&gt;
====== Thickness + Optical Constants ======&lt;br /&gt;
*[[Ellipsometer (Woollam)]]&lt;br /&gt;
*[[Optical Film Thickness (Filmetrics)|Optical Film Thickness (Filmetrics F20)]]&lt;br /&gt;
*[[Filmetrics F40-UV Microscope-Mounted|Optical Film Thickness (Microscope-Mounted Filmetrics F-40-UV)]]&lt;br /&gt;
*[[Optical Film Thickness (Nanometric)]]&lt;br /&gt;
*[[Optical Film Thickness &amp;amp; Wafer-Mapping (Filmetrics F50)]]&lt;br /&gt;
*[[Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX)|Reflection/Transmission Spectra &amp;amp; Optical Film Thickness (Filmetrics F10-RT-UVX)]]&lt;br /&gt;
&lt;br /&gt;
====== Other Properties ======&lt;br /&gt;
*[[Film Stress (Tencor Flexus)]]&lt;br /&gt;
*[[Photoluminescence PL Setup (Custom)]]&lt;br /&gt;
&lt;br /&gt;
====== Electrical Analysis ======&lt;br /&gt;
*[[Resistivity Mapper (CDE RESMAP)]]&lt;br /&gt;
*[[Probe Station &amp;amp; Curve Tracer]]&lt;br /&gt;
&lt;br /&gt;
=====Other Tools=====&lt;br /&gt;
&lt;br /&gt;
*[[Goniometer (Rame-Hart A-100)|Goniometer (Ramé-Hart A-100)]]&lt;br /&gt;
**&#039;&#039;Surface hydrophobicity&#039;&#039;&lt;br /&gt;
|-&lt;br /&gt;
|&lt;br /&gt;
|&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;/div&gt;</summary>
		<author><name>Nplaviola</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=Tool_List&amp;diff=158715</id>
		<title>Tool List</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=Tool_List&amp;diff=158715"/>
		<updated>2021-01-27T06:13:41Z</updated>

		<summary type="html">&lt;p&gt;Nplaviola: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;__NOTOC__&lt;br /&gt;
=Lithography=&lt;br /&gt;
&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;300&amp;quot; |&lt;br /&gt;
=====Photoresists and Lithography Chemicals=====&lt;br /&gt;
&lt;br /&gt;
*See the [https://wiki.nanotech.ucsb.edu/wiki/index.php/Lithography_Recipes#Chemicals_Stocked_.2B_Datasheets Chemical Datasheets page].&lt;br /&gt;
*[[Automated Coat/Develop System (S-Cubed Flexi)|Auto. Coat/Develop (S-Cubed Flexi)]]&lt;br /&gt;
&lt;br /&gt;
=====Contact Aligners (Optical Exposure)=====&lt;br /&gt;
&lt;br /&gt;
*[[Suss Aligners (SUSS MJB-3)]]&lt;br /&gt;
*[[IR Aligner (SUSS MJB-3 IR)]]&lt;br /&gt;
*[[Contact Aligner (SUSS MA-6)]]&lt;br /&gt;
*[[DUV Flood Expose]]&lt;br /&gt;
&lt;br /&gt;
=====Direct-Write Lithography=====&lt;br /&gt;
&lt;br /&gt;
*[[E-Beam Lithography System (JEOL JBX-6300FS)]]&lt;br /&gt;
*[[Field Emission SEM 1 (FEI Sirion)|E-Beam Lithography (FEI Sirion Nabity v9)]]&lt;br /&gt;
*[[Focused Ion-Beam Lithography (Raith Velion)]]&lt;br /&gt;
*[[Maskless Aligner (Heidelberg MLA150)]]&lt;br /&gt;
&lt;br /&gt;
===== Other Patterning Systems =====&lt;br /&gt;
*[[Nano-Imprint (Nanonex NX2000)]]&lt;br /&gt;
*[[Holographic Lith/PL Setup (Custom)|Holographic Litho/PL Setup (Custom)]]&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
=====Steppers (Optical Exposure)=====&lt;br /&gt;
&lt;br /&gt;
*[[Stepper 1 (GCA 6300)|Stepper 1 (GCA 6300, i-line)]]&lt;br /&gt;
*[[Stepper 2 (AutoStep 200)|Stepper 2 (AutoStep 200, i-line)]]&lt;br /&gt;
*[[Stepper 3 (ASML DUV)|Stepper 3 (ASML DUV, Deep-UV)]]&lt;br /&gt;
&lt;br /&gt;
=====Thermal Processing for Photolithography=====&lt;br /&gt;
&lt;br /&gt;
*[[Ovens - Overview of All Lab Ovens|Ovens - Overview of all lab ovens]]&lt;br /&gt;
*[[Ovens 1, 2 &amp;amp; 3 (Labline)]]&lt;br /&gt;
*[[Oven 4 (Fisher)]]&lt;br /&gt;
*[[Oven 5 (Labline)]]&lt;br /&gt;
*[[High Temp Oven (Blue M)]]&lt;br /&gt;
*[[Vacuum Oven (YES)]]&lt;br /&gt;
&lt;br /&gt;
=====Lithography Support=====&lt;br /&gt;
&lt;br /&gt;
*The [https://wiki.nanotech.ucsb.edu/wiki/index.php/Wet_Benches#Spin_Coat_Benches Spinner Benches] have pre-set hotplates at various temperatures appropriate for common photoresist bakes.&lt;br /&gt;
*[https://signupmonkey.ece.ucsb.edu/wiki/index.php/Wet_Benches#Automated_Wet-processing_Spinners_.28POLOS.29 POLOS spinners] on Develop and Solvent benches&lt;br /&gt;
*[[Spin Rinse Dryer (SemiTool)|Spin/Rinse/Dryer]]&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Vacuum Deposition=&lt;br /&gt;
&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;300&amp;quot; |&lt;br /&gt;
=====Physical Vapor Deposition (PVD)=====&lt;br /&gt;
&lt;br /&gt;
*[[E-Beam 1 (Sharon)]]&lt;br /&gt;
*[[E-Beam 2 (Custom)]]&lt;br /&gt;
*[[E-Beam 3 (Temescal)]]&lt;br /&gt;
*[[E-Beam 4 (CHA)]]&lt;br /&gt;
*[[Thermal Evap 1]]&lt;br /&gt;
*[[Thermal Evap 2 (Solder)]]&lt;br /&gt;
&lt;br /&gt;
=====Sputter Deposition=====&lt;br /&gt;
&lt;br /&gt;
*[[Sputter 3 (AJA ATC 2000-F)]]&lt;br /&gt;
*[[Sputter 4 (AJA ATC 2200-V)]]&lt;br /&gt;
*[[Sputter 5 (AJA ATC 2200-V)]]&lt;br /&gt;
*[[Ion Beam Deposition (Veeco NEXUS)]]&lt;br /&gt;
&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
=====Chemical Vapor Deposition (CVD)=====&lt;br /&gt;
&lt;br /&gt;
*[[PECVD 1 (PlasmaTherm 790)]]&lt;br /&gt;
*[[PECVD 2 (Advanced Vacuum)]]&lt;br /&gt;
*[[ICP-PECVD (Unaxis VLR)]]&lt;br /&gt;
*[[Molecular Vapor Deposition]]&lt;br /&gt;
*[[Atomic Layer Deposision (Oxford FlexAL)|Atomic Layer Deposition (Oxford FlexAL)]]&lt;br /&gt;
&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Dry Etch=&lt;br /&gt;
&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;300&amp;quot; |&lt;br /&gt;
=====Reactive Ion Etching (RIE)=====&lt;br /&gt;
&lt;br /&gt;
*[[RIE 2 (MRC)]]&lt;br /&gt;
*[[RIE 3 (MRC)]]&lt;br /&gt;
*[[RIE 5 (PlasmaTherm)]]&lt;br /&gt;
&lt;br /&gt;
=====Plasma Etching and Cleaning=====&lt;br /&gt;
&lt;br /&gt;
*[[Plasma Clean (Gasonics 2000)]]&lt;br /&gt;
*[[Plasma Clean (YES EcoClean)]]&lt;br /&gt;
*[[Plasma Activation (EVG 810)]]&lt;br /&gt;
*[[Ashers (Technics PEII)]]&lt;br /&gt;
&lt;br /&gt;
=====Etch Monitoring=====&lt;br /&gt;
&lt;br /&gt;
*[[Laser Etch Monitoring]] (Endpoint Detection)&lt;br /&gt;
*Optical Emission Spectra&lt;br /&gt;
*Residual Gas Analyzer (RGA)&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
=====ICP-RIE=====&lt;br /&gt;
&lt;br /&gt;
*[[ICP Etch 1 (Panasonic E626I)]]&lt;br /&gt;
*[[ICP Etch 2 (Panasonic E640)]]&lt;br /&gt;
*[[ICP-Etch (Unaxis VLR)]]&lt;br /&gt;
*[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)|Plasma-Therm SLR: Fluorine ICP (PlasmaTherm/SLR Fluorine Etcher)]]&lt;br /&gt;
*[[DSEIII (PlasmaTherm/Deep Silicon Etcher)|Plasma-Therm DSE-iii (PlasmaTherm/Deep Silicon Etcher)]]&lt;br /&gt;
&lt;br /&gt;
=====Ion Milling and Reactive Ion Beam Etching=====&lt;br /&gt;
&lt;br /&gt;
*[[CAIBE (Oxford Ion Mill)]]&lt;br /&gt;
&lt;br /&gt;
=====Other Dry Etching=====&lt;br /&gt;
&lt;br /&gt;
*[[UV Ozone Reactor]]&lt;br /&gt;
*[[XeF2 Etch (Xetch)|XeF&amp;lt;sub&amp;gt;2&amp;lt;/sub&amp;gt; Etch (Xetch)]]&lt;br /&gt;
*[[Vapor HF Etch]]&lt;br /&gt;
&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Wet Processing=&lt;br /&gt;
See the [[Chemical List|Chemical List page]] for stocked chemicals such as Developers, Etchants, Solvents etc.&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;300&amp;quot; |&lt;br /&gt;
*[[Wet Benches]]&lt;br /&gt;
**[[Solvent Cleaning Benches]]&lt;br /&gt;
**[[Spin Coat Benches]]&lt;br /&gt;
**[[Develop Benches]]&lt;br /&gt;
**[[Toxic Corrosive Benches]]&lt;br /&gt;
**[[HF/TMAH Processing Benches]]&lt;br /&gt;
**[[Plating Bench]]&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
*[[Gold Plating Bench]]&lt;br /&gt;
*[[Critical Point Dryer]]&lt;br /&gt;
*[[Spin Rinse Dryer (SemiTool)]]&lt;br /&gt;
*[[Chemical-Mechanical Polisher (Logitech)]]&lt;br /&gt;
*[[Automated Coat/Develop System (S-Cubed Flexi)|Auto. Coat/Develop (S-Cubed Flexi)]]&lt;br /&gt;
*[https://signupmonkey.ece.ucsb.edu/wiki/index.php/Wet_Benches#Automated_Wet-processing_Spinners_.28POLOS.29 Auto. Wet-Processing Spinners (POLOS)]&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Thermal Processing=&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
*[[Rapid Thermal Processor (AET RX6)|Rapid Thermal Annealer/Processor &amp;quot;RTA&amp;quot; (AET RX6)]]&lt;br /&gt;
*[[Rapid Thermal Processor (SSI Solaris 150)]]&lt;br /&gt;
*[[Tube Furnace (Tystar 8300)]]&lt;br /&gt;
*[[Tube Furnace Wafer Bonding (Thermco)]]&lt;br /&gt;
*[[Tube Furnace AlGaAs Oxidation (Lindberg)]]&lt;br /&gt;
*[[Wafer Bonder (SUSS SB6-8E)]]&lt;br /&gt;
*[[Wafer Bonder (Logitech WBS7)|Wafer Bonder/Wax Mounting (Logitech WBS2)]]&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
*[[Ovens - Overview of All Lab Ovens|Ovens - Overview of all Lab Ovens]]&lt;br /&gt;
**[[Ovens 1, 2 &amp;amp; 3 (Labline)]]&lt;br /&gt;
**[[Oven 4 (Thermo-Fisher HeraTherm)]]&lt;br /&gt;
**[[Oven 5 (Labline)]]&lt;br /&gt;
**[[Vacuum Oven (YES)]]&lt;br /&gt;
**[[High Temp Oven (Blue M)]]&lt;br /&gt;
|&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Packaging=&lt;br /&gt;
&lt;br /&gt;
*[[Dicing Saw (ADT)]]&lt;br /&gt;
*[[Flip-Chip Bonder (Finetech)]]&lt;br /&gt;
*[[Vacuum Sealer]]&lt;br /&gt;
*[[Wire Saw (Takatori)]]&lt;br /&gt;
&lt;br /&gt;
=Inspection, Test and Characterization=&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;300&amp;quot; |&lt;br /&gt;
=====Optical Microscopy=====&lt;br /&gt;
&lt;br /&gt;
*[[Microscopes|Optical Microscopes]]&lt;br /&gt;
*[[Fluorescence Microscope (Olympus MX51)]]&lt;br /&gt;
*[[Deep UV Optical Microscope (Olympus)]]&lt;br /&gt;
*[[Laser Scanning Confocal M-scope (Olympus LEXT)]]&lt;br /&gt;
*[[Photo-emission &amp;amp; IR Microscope (QFI)|Photo-emission &amp;amp; Thermal IR Microscope (QFI)]]&lt;br /&gt;
&lt;br /&gt;
===== Electron Microscopy =====&lt;br /&gt;
*[[Field Emission SEM 1 (FEI Sirion)]]&lt;br /&gt;
*[[Field Emission SEM 2 (JEOL 7600F)]]&lt;br /&gt;
*[[SEM Sample Coater (Hummer)]]&lt;br /&gt;
&lt;br /&gt;
=====Topographical Metrology=====&lt;br /&gt;
&lt;br /&gt;
*[[Step Profilometer (KLA Tencor P-7)]]&lt;br /&gt;
*[[Step Profilometer (Dektak 6M)]]&lt;br /&gt;
*[[Atomic Force Microscope (Bruker ICON)|Atomic Force Microsope (Bruker ICON)]]&lt;br /&gt;
*[[Surface Analysis (KLA/Tencor Surfscan)]]&lt;br /&gt;
**&#039;&#039;Sub-micron Particle Counter&#039;&#039;&lt;br /&gt;
*[[Laser Scanning Confocal M-scope (Olympus LEXT)]]&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
=====Thin-Film/Material Analysis=====&lt;br /&gt;
&lt;br /&gt;
====== Thickness + Optical Constants ======&lt;br /&gt;
*[[Ellipsometer (Woollam)]]&lt;br /&gt;
*[[Optical Film Thickness (Filmetrics)|Optical Film Thickness (Filmetrics F20)]]&lt;br /&gt;
*[[Filmetrics F40-UV Microscope-Mounted|Optical Film Thickness (Microscope-Mounted Filmetrics F-40-UV)]]&lt;br /&gt;
*[[Optical Film Thickness (Nanometric)]]&lt;br /&gt;
*[[Optical Film Thickness &amp;amp; Wafer-Mapping (Filmetrics F50)]]&lt;br /&gt;
*[[Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX)|Reflection/Transmission Spectra &amp;amp; Optical Film Thickness (Filmetrics F10-RT-UVX)]]&lt;br /&gt;
&lt;br /&gt;
====== Other Properties ======&lt;br /&gt;
*[[Film Stress (Tencor Flexus)]]&lt;br /&gt;
*[[Photoluminescence PL Setup (Custom)]]&lt;br /&gt;
&lt;br /&gt;
====== Electrical Analysis ======&lt;br /&gt;
*[[Resistivity Mapper (CDE RESMAP)]]&lt;br /&gt;
*[[Probe Station &amp;amp; Curve Tracer]]&lt;br /&gt;
&lt;br /&gt;
=====Other Tools=====&lt;br /&gt;
&lt;br /&gt;
*[[Goniometer (Rame-Hart A-100)|Goniometer (Ramé-Hart A-100)]]&lt;br /&gt;
**&#039;&#039;Surface hydrophobicity&#039;&#039;&lt;br /&gt;
|-&lt;br /&gt;
|&lt;br /&gt;
|&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Test=&lt;/div&gt;</summary>
		<author><name>Nplaviola</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=Tool_List&amp;diff=158714</id>
		<title>Tool List</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=Tool_List&amp;diff=158714"/>
		<updated>2021-01-27T06:13:31Z</updated>

		<summary type="html">&lt;p&gt;Nplaviola: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;__NOTOC__&lt;br /&gt;
=Lithography=&lt;br /&gt;
&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;300&amp;quot; |&lt;br /&gt;
=====Photoresists and Lithography Chemicals=====&lt;br /&gt;
&lt;br /&gt;
*See the [https://wiki.nanotech.ucsb.edu/wiki/index.php/Lithography_Recipes#Chemicals_Stocked_.2B_Datasheets Chemical Datasheets page].&lt;br /&gt;
*[[Automated Coat/Develop System (S-Cubed Flexi)|Auto. Coat/Develop (S-Cubed Flexi)]]&lt;br /&gt;
&lt;br /&gt;
=====Contact Aligners (Optical Exposure)=====&lt;br /&gt;
&lt;br /&gt;
*[[Suss Aligners (SUSS MJB-3)]]&lt;br /&gt;
*[[IR Aligner (SUSS MJB-3 IR)]]&lt;br /&gt;
*[[Contact Aligner (SUSS MA-6)]]&lt;br /&gt;
*[[DUV Flood Expose]]&lt;br /&gt;
&lt;br /&gt;
=====Direct-Write Lithography=====&lt;br /&gt;
&lt;br /&gt;
*[[E-Beam Lithography System (JEOL JBX-6300FS)]]&lt;br /&gt;
*[[Field Emission SEM 1 (FEI Sirion)|E-Beam Lithography (FEI Sirion Nabity v9)]]&lt;br /&gt;
*[[Focused Ion-Beam Lithography (Raith Velion)]]&lt;br /&gt;
*[[Maskless Aligner (Heidelberg MLA150)]]&lt;br /&gt;
&lt;br /&gt;
===== Other Patterning Systems =====&lt;br /&gt;
*[[Nano-Imprint (Nanonex NX2000)]]&lt;br /&gt;
*[[Holographic Lith/PL Setup (Custom)|Holographic Litho/PL Setup (Custom)]]&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
=====Steppers (Optical Exposure)=====&lt;br /&gt;
&lt;br /&gt;
*[[Stepper 1 (GCA 6300)|Stepper 1 (GCA 6300, i-line)]]&lt;br /&gt;
*[[Stepper 2 (AutoStep 200)|Stepper 2 (AutoStep 200, i-line)]]&lt;br /&gt;
*[[Stepper 3 (ASML DUV)|Stepper 3 (ASML DUV, Deep-UV)]]&lt;br /&gt;
&lt;br /&gt;
=====Thermal Processing for Photolithography=====&lt;br /&gt;
&lt;br /&gt;
*[[Ovens - Overview of All Lab Ovens|Ovens - Overview of all lab ovens]]&lt;br /&gt;
*[[Ovens 1, 2 &amp;amp; 3 (Labline)]]&lt;br /&gt;
*[[Oven 4 (Fisher)]]&lt;br /&gt;
*[[Oven 5 (Labline)]]&lt;br /&gt;
*[[High Temp Oven (Blue M)]]&lt;br /&gt;
*[[Vacuum Oven (YES)]]&lt;br /&gt;
&lt;br /&gt;
=====Lithography Support=====&lt;br /&gt;
&lt;br /&gt;
*The [https://wiki.nanotech.ucsb.edu/wiki/index.php/Wet_Benches#Spin_Coat_Benches Spinner Benches] have pre-set hotplates at various temperatures appropriate for common photoresist bakes.&lt;br /&gt;
*[https://signupmonkey.ece.ucsb.edu/wiki/index.php/Wet_Benches#Automated_Wet-processing_Spinners_.28POLOS.29 POLOS spinners] on Develop and Solvent benches&lt;br /&gt;
*[[Spin Rinse Dryer (SemiTool)|Spin/Rinse/Dryer]]&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Vacuum Deposition=&lt;br /&gt;
&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;300&amp;quot; |&lt;br /&gt;
=====Physical Vapor Deposition (PVD)=====&lt;br /&gt;
&lt;br /&gt;
*[[E-Beam 1 (Sharon)]]&lt;br /&gt;
*[[E-Beam 2 (Custom)]]&lt;br /&gt;
*[[E-Beam 3 (Temescal)]]&lt;br /&gt;
*[[E-Beam 4 (CHA)]]&lt;br /&gt;
*[[Thermal Evap 1]]&lt;br /&gt;
*[[Thermal Evap 2 (Solder)]]&lt;br /&gt;
&lt;br /&gt;
=====Sputter Deposition=====&lt;br /&gt;
&lt;br /&gt;
*[[Sputter 3 (AJA ATC 2000-F)]]&lt;br /&gt;
*[[Sputter 4 (AJA ATC 2200-V)]]&lt;br /&gt;
*[[Sputter 5 (AJA ATC 2200-V)]]&lt;br /&gt;
*[[Ion Beam Deposition (Veeco NEXUS)]]&lt;br /&gt;
&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
=====Chemical Vapor Deposition (CVD)=====&lt;br /&gt;
&lt;br /&gt;
*[[PECVD 1 (PlasmaTherm 790)]]&lt;br /&gt;
*[[PECVD 2 (Advanced Vacuum)]]&lt;br /&gt;
*[[ICP-PECVD (Unaxis VLR)]]&lt;br /&gt;
*[[Molecular Vapor Deposition]]&lt;br /&gt;
*[[Atomic Layer Deposision (Oxford FlexAL)|Atomic Layer Deposition (Oxford FlexAL)]]&lt;br /&gt;
&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Dry Etch=&lt;br /&gt;
&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;300&amp;quot; |&lt;br /&gt;
=====Reactive Ion Etching (RIE)=====&lt;br /&gt;
&lt;br /&gt;
*[[RIE 2 (MRC)]]&lt;br /&gt;
*[[RIE 3 (MRC)]]&lt;br /&gt;
*[[RIE 5 (PlasmaTherm)]]&lt;br /&gt;
&lt;br /&gt;
=====Plasma Etching and Cleaning=====&lt;br /&gt;
&lt;br /&gt;
*[[Plasma Clean (Gasonics 2000)]]&lt;br /&gt;
*[[Plasma Clean (YES EcoClean)]]&lt;br /&gt;
*[[Plasma Activation (EVG 810)]]&lt;br /&gt;
*[[Ashers (Technics PEII)]]&lt;br /&gt;
&lt;br /&gt;
=====Etch Monitoring=====&lt;br /&gt;
&lt;br /&gt;
*[[Laser Etch Monitoring]] (Endpoint Detection)&lt;br /&gt;
*Optical Emission Spectra&lt;br /&gt;
*Residual Gas Analyzer (RGA)&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
=====ICP-RIE=====&lt;br /&gt;
&lt;br /&gt;
*[[ICP Etch 1 (Panasonic E626I)]]&lt;br /&gt;
*[[ICP Etch 2 (Panasonic E640)]]&lt;br /&gt;
*[[ICP-Etch (Unaxis VLR)]]&lt;br /&gt;
*[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)|Plasma-Therm SLR: Fluorine ICP (PlasmaTherm/SLR Fluorine Etcher)]]&lt;br /&gt;
*[[DSEIII (PlasmaTherm/Deep Silicon Etcher)|Plasma-Therm DSE-iii (PlasmaTherm/Deep Silicon Etcher)]]&lt;br /&gt;
&lt;br /&gt;
=====Ion Milling and Reactive Ion Beam Etching=====&lt;br /&gt;
&lt;br /&gt;
*[[CAIBE (Oxford Ion Mill)]]&lt;br /&gt;
&lt;br /&gt;
=====Other Dry Etching=====&lt;br /&gt;
&lt;br /&gt;
*[[UV Ozone Reactor]]&lt;br /&gt;
*[[XeF2 Etch (Xetch)|XeF&amp;lt;sub&amp;gt;2&amp;lt;/sub&amp;gt; Etch (Xetch)]]&lt;br /&gt;
*[[Vapor HF Etch]]&lt;br /&gt;
&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Wet Processing=&lt;br /&gt;
See the [[Chemical List|Chemical List page]] for stocked chemicals such as Developers, Etchants, Solvents etc.&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;300&amp;quot; |&lt;br /&gt;
*[[Wet Benches]]&lt;br /&gt;
**[[Solvent Cleaning Benches]]&lt;br /&gt;
**[[Spin Coat Benches]]&lt;br /&gt;
**[[Develop Benches]]&lt;br /&gt;
**[[Toxic Corrosive Benches]]&lt;br /&gt;
**[[HF/TMAH Processing Benches]]&lt;br /&gt;
**[[Plating Bench]]&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
*[[Gold Plating Bench]]&lt;br /&gt;
*[[Critical Point Dryer]]&lt;br /&gt;
*[[Spin Rinse Dryer (SemiTool)]]&lt;br /&gt;
*[[Chemical-Mechanical Polisher (Logitech)]]&lt;br /&gt;
*[[Automated Coat/Develop System (S-Cubed Flexi)|Auto. Coat/Develop (S-Cubed Flexi)]]&lt;br /&gt;
*[https://signupmonkey.ece.ucsb.edu/wiki/index.php/Wet_Benches#Automated_Wet-processing_Spinners_.28POLOS.29 Auto. Wet-Processing Spinners (POLOS)]&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Thermal Processing=&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
*[[Rapid Thermal Processor (AET RX6)|Rapid Thermal Annealer/Processor &amp;quot;RTA&amp;quot; (AET RX6)]]&lt;br /&gt;
*[[Rapid Thermal Processor (SSI Solaris 150)]]&lt;br /&gt;
*[[Tube Furnace (Tystar 8300)]]&lt;br /&gt;
*[[Tube Furnace Wafer Bonding (Thermco)]]&lt;br /&gt;
*[[Tube Furnace AlGaAs Oxidation (Lindberg)]]&lt;br /&gt;
*[[Wafer Bonder (SUSS SB6-8E)]]&lt;br /&gt;
*[[Wafer Bonder (Logitech WBS7)|Wafer Bonder/Wax Mounting (Logitech WBS2)]]&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
*[[Ovens - Overview of All Lab Ovens|Ovens - Overview of all Lab Ovens]]&lt;br /&gt;
**[[Ovens 1, 2 &amp;amp; 3 (Labline)]]&lt;br /&gt;
**[[Oven 4 (Thermo-Fisher HeraTherm)]]&lt;br /&gt;
**[[Oven 5 (Labline)]]&lt;br /&gt;
**[[Vacuum Oven (YES)]]&lt;br /&gt;
**[[High Temp Oven (Blue M)]]&lt;br /&gt;
|&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Packaging=&lt;br /&gt;
&lt;br /&gt;
*[[Dicing Saw (ADT)]]&lt;br /&gt;
*[[Flip-Chip Bonder (Finetech)]]&lt;br /&gt;
*[[Vacuum Sealer]]&lt;br /&gt;
*[[Wire Saw (Takatori)]]&lt;br /&gt;
&lt;br /&gt;
=Inspection, Test and Characterization=&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;300&amp;quot; |&lt;br /&gt;
=====Optical Microscopy=====&lt;br /&gt;
&lt;br /&gt;
*[[Microscopes|Optical Microscopes]]&lt;br /&gt;
*[[Fluorescence Microscope (Olympus MX51)]]&lt;br /&gt;
*[[Deep UV Optical Microscope (Olympus)]]&lt;br /&gt;
*[[Laser Scanning Confocal M-scope (Olympus LEXT)]]&lt;br /&gt;
*[[Photo-emission &amp;amp; IR Microscope (QFI)|Photo-emission &amp;amp; Thermal IR Microscope (QFI)]]&lt;br /&gt;
&lt;br /&gt;
===== Electron Microscopy =====&lt;br /&gt;
*[[Field Emission SEM 1 (FEI Sirion)]]&lt;br /&gt;
*[[Field Emission SEM 2 (JEOL 7600F)]]&lt;br /&gt;
*[[SEM Sample Coater (Hummer)]]&lt;br /&gt;
&lt;br /&gt;
=====Topographical Metrology=====&lt;br /&gt;
&lt;br /&gt;
*[[Step Profilometer (KLA Tencor P-7)]]&lt;br /&gt;
*[[Step Profilometer (Dektak 6M)]]&lt;br /&gt;
*[[Atomic Force Microscope (Bruker ICON)|Atomic Force Microsope (Bruker ICON)]]&lt;br /&gt;
*[[Surface Analysis (KLA/Tencor Surfscan)]]&lt;br /&gt;
**&#039;&#039;Sub-micron Particle Counter&#039;&#039;&lt;br /&gt;
*[[Laser Scanning Confocal M-scope (Olympus LEXT)]]&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
=====Thin-Film/Material Analysis=====&lt;br /&gt;
&lt;br /&gt;
====== Thickness + Optical Constants ======&lt;br /&gt;
*[[Ellipsometer (Woollam)]]&lt;br /&gt;
*[[Optical Film Thickness (Filmetrics)|Optical Film Thickness (Filmetrics F20)]]&lt;br /&gt;
*[[Filmetrics F40-UV Microscope-Mounted|Optical Film Thickness (Microscope-Mounted Filmetrics F-40-UV)]]&lt;br /&gt;
*[[Optical Film Thickness (Nanometric)]]&lt;br /&gt;
*[[Optical Film Thickness &amp;amp; Wafer-Mapping (Filmetrics F50)]]&lt;br /&gt;
*[[Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX)|Reflection/Transmission Spectra &amp;amp; Optical Film Thickness (Filmetrics F10-RT-UVX)]]&lt;br /&gt;
&lt;br /&gt;
====== Other Properties ======&lt;br /&gt;
*[[Film Stress (Tencor Flexus)]]&lt;br /&gt;
*[[Photoluminescence PL Setup (Custom)]]&lt;br /&gt;
&lt;br /&gt;
====== Electrical Analysis ======&lt;br /&gt;
*[[Resistivity Mapper (CDE RESMAP)]]&lt;br /&gt;
*[[Probe Station &amp;amp; Curve Tracer]]&lt;br /&gt;
&lt;br /&gt;
=====Other Tools=====&lt;br /&gt;
&lt;br /&gt;
*[[Goniometer (Rame-Hart A-100)|Goniometer (Ramé-Hart A-100)]]&lt;br /&gt;
**&#039;&#039;Surface hydrophobicity&#039;&#039;&lt;br /&gt;
|-&lt;br /&gt;
|&lt;br /&gt;
|&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Test=&lt;br /&gt;
{{Special:Whatlinkshere}}&lt;/div&gt;</summary>
		<author><name>Nplaviola</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=Tool_List&amp;diff=158713</id>
		<title>Tool List</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=Tool_List&amp;diff=158713"/>
		<updated>2021-01-27T06:12:40Z</updated>

		<summary type="html">&lt;p&gt;Nplaviola: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;__NOTOC__&lt;br /&gt;
=Lithography=&lt;br /&gt;
&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;300&amp;quot; |&lt;br /&gt;
=====Photoresists and Lithography Chemicals=====&lt;br /&gt;
&lt;br /&gt;
*See the [https://wiki.nanotech.ucsb.edu/wiki/index.php/Lithography_Recipes#Chemicals_Stocked_.2B_Datasheets Chemical Datasheets page].&lt;br /&gt;
*[[Automated Coat/Develop System (S-Cubed Flexi)|Auto. Coat/Develop (S-Cubed Flexi)]]&lt;br /&gt;
&lt;br /&gt;
=====Contact Aligners (Optical Exposure)=====&lt;br /&gt;
&lt;br /&gt;
*[[Suss Aligners (SUSS MJB-3)]]&lt;br /&gt;
*[[IR Aligner (SUSS MJB-3 IR)]]&lt;br /&gt;
*[[Contact Aligner (SUSS MA-6)]]&lt;br /&gt;
*[[DUV Flood Expose]]&lt;br /&gt;
&lt;br /&gt;
=====Direct-Write Lithography=====&lt;br /&gt;
&lt;br /&gt;
*[[E-Beam Lithography System (JEOL JBX-6300FS)]]&lt;br /&gt;
*[[Field Emission SEM 1 (FEI Sirion)|E-Beam Lithography (FEI Sirion Nabity v9)]]&lt;br /&gt;
*[[Focused Ion-Beam Lithography (Raith Velion)]]&lt;br /&gt;
*[[Maskless Aligner (Heidelberg MLA150)]]&lt;br /&gt;
&lt;br /&gt;
===== Other Patterning Systems =====&lt;br /&gt;
*[[Nano-Imprint (Nanonex NX2000)]]&lt;br /&gt;
*[[Holographic Lith/PL Setup (Custom)|Holographic Litho/PL Setup (Custom)]]&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
=====Steppers (Optical Exposure)=====&lt;br /&gt;
&lt;br /&gt;
*[[Stepper 1 (GCA 6300)|Stepper 1 (GCA 6300, i-line)]]&lt;br /&gt;
*[[Stepper 2 (AutoStep 200)|Stepper 2 (AutoStep 200, i-line)]]&lt;br /&gt;
*[[Stepper 3 (ASML DUV)|Stepper 3 (ASML DUV, Deep-UV)]]&lt;br /&gt;
&lt;br /&gt;
=====Thermal Processing for Photolithography=====&lt;br /&gt;
&lt;br /&gt;
*[[Ovens - Overview of All Lab Ovens|Ovens - Overview of all lab ovens]]&lt;br /&gt;
*[[Ovens 1, 2 &amp;amp; 3 (Labline)]]&lt;br /&gt;
*[[Oven 4 (Fisher)]]&lt;br /&gt;
*[[Oven 5 (Labline)]]&lt;br /&gt;
*[[High Temp Oven (Blue M)]]&lt;br /&gt;
*[[Vacuum Oven (YES)]]&lt;br /&gt;
&lt;br /&gt;
=====Lithography Support=====&lt;br /&gt;
&lt;br /&gt;
*The [https://wiki.nanotech.ucsb.edu/wiki/index.php/Wet_Benches#Spin_Coat_Benches Spinner Benches] have pre-set hotplates at various temperatures appropriate for common photoresist bakes.&lt;br /&gt;
*[https://signupmonkey.ece.ucsb.edu/wiki/index.php/Wet_Benches#Automated_Wet-processing_Spinners_.28POLOS.29 POLOS spinners] on Develop and Solvent benches&lt;br /&gt;
*[[Spin Rinse Dryer (SemiTool)|Spin/Rinse/Dryer]]&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Vacuum Deposition=&lt;br /&gt;
&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;300&amp;quot; |&lt;br /&gt;
=====Physical Vapor Deposition (PVD)=====&lt;br /&gt;
&lt;br /&gt;
*[[E-Beam 1 (Sharon)]]&lt;br /&gt;
*[[E-Beam 2 (Custom)]]&lt;br /&gt;
*[[E-Beam 3 (Temescal)]]&lt;br /&gt;
*[[E-Beam 4 (CHA)]]&lt;br /&gt;
*[[Thermal Evap 1]]&lt;br /&gt;
*[[Thermal Evap 2 (Solder)]]&lt;br /&gt;
&lt;br /&gt;
=====Sputter Deposition=====&lt;br /&gt;
&lt;br /&gt;
*[[Sputter 3 (AJA ATC 2000-F)]]&lt;br /&gt;
*[[Sputter 4 (AJA ATC 2200-V)]]&lt;br /&gt;
*[[Sputter 5 (AJA ATC 2200-V)]]&lt;br /&gt;
*[[Ion Beam Deposition (Veeco NEXUS)]]&lt;br /&gt;
&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
=====Chemical Vapor Deposition (CVD)=====&lt;br /&gt;
&lt;br /&gt;
*[[PECVD 1 (PlasmaTherm 790)]]&lt;br /&gt;
*[[PECVD 2 (Advanced Vacuum)]]&lt;br /&gt;
*[[ICP-PECVD (Unaxis VLR)]]&lt;br /&gt;
*[[Molecular Vapor Deposition]]&lt;br /&gt;
*[[Atomic Layer Deposision (Oxford FlexAL)|Atomic Layer Deposition (Oxford FlexAL)]]&lt;br /&gt;
&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Dry Etch=&lt;br /&gt;
&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;300&amp;quot; |&lt;br /&gt;
=====Reactive Ion Etching (RIE)=====&lt;br /&gt;
&lt;br /&gt;
*[[RIE 2 (MRC)]]&lt;br /&gt;
*[[RIE 3 (MRC)]]&lt;br /&gt;
*[[RIE 5 (PlasmaTherm)]]&lt;br /&gt;
&lt;br /&gt;
=====Plasma Etching and Cleaning=====&lt;br /&gt;
&lt;br /&gt;
*[[Plasma Clean (Gasonics 2000)]]&lt;br /&gt;
*[[Plasma Clean (YES EcoClean)]]&lt;br /&gt;
*[[Plasma Activation (EVG 810)]]&lt;br /&gt;
*[[Ashers (Technics PEII)]]&lt;br /&gt;
&lt;br /&gt;
=====Etch Monitoring=====&lt;br /&gt;
&lt;br /&gt;
*[[Laser Etch Monitoring]] (Endpoint Detection)&lt;br /&gt;
*Optical Emission Spectra&lt;br /&gt;
*Residual Gas Analyzer (RGA)&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
=====ICP-RIE=====&lt;br /&gt;
&lt;br /&gt;
*[[ICP Etch 1 (Panasonic E626I)]]&lt;br /&gt;
*[[ICP Etch 2 (Panasonic E640)]]&lt;br /&gt;
*[[ICP-Etch (Unaxis VLR)]]&lt;br /&gt;
*[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)|Plasma-Therm SLR: Fluorine ICP (PlasmaTherm/SLR Fluorine Etcher)]]&lt;br /&gt;
*[[DSEIII (PlasmaTherm/Deep Silicon Etcher)|Plasma-Therm DSE-iii (PlasmaTherm/Deep Silicon Etcher)]]&lt;br /&gt;
&lt;br /&gt;
=====Ion Milling and Reactive Ion Beam Etching=====&lt;br /&gt;
&lt;br /&gt;
*[[CAIBE (Oxford Ion Mill)]]&lt;br /&gt;
&lt;br /&gt;
=====Other Dry Etching=====&lt;br /&gt;
&lt;br /&gt;
*[[UV Ozone Reactor]]&lt;br /&gt;
*[[XeF2 Etch (Xetch)|XeF&amp;lt;sub&amp;gt;2&amp;lt;/sub&amp;gt; Etch (Xetch)]]&lt;br /&gt;
*[[Vapor HF Etch]]&lt;br /&gt;
&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Wet Processing=&lt;br /&gt;
See the [[Chemical List|Chemical List page]] for stocked chemicals such as Developers, Etchants, Solvents etc.&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;300&amp;quot; |&lt;br /&gt;
*[[Wet Benches]]&lt;br /&gt;
**[[Solvent Cleaning Benches]]&lt;br /&gt;
**[[Spin Coat Benches]]&lt;br /&gt;
**[[Develop Benches]]&lt;br /&gt;
**[[Toxic Corrosive Benches]]&lt;br /&gt;
**[[HF/TMAH Processing Benches]]&lt;br /&gt;
**[[Plating Bench]]&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
*[[Gold Plating Bench]]&lt;br /&gt;
*[[Critical Point Dryer]]&lt;br /&gt;
*[[Spin Rinse Dryer (SemiTool)]]&lt;br /&gt;
*[[Chemical-Mechanical Polisher (Logitech)]]&lt;br /&gt;
*[[Automated Coat/Develop System (S-Cubed Flexi)|Auto. Coat/Develop (S-Cubed Flexi)]]&lt;br /&gt;
*[https://signupmonkey.ece.ucsb.edu/wiki/index.php/Wet_Benches#Automated_Wet-processing_Spinners_.28POLOS.29 Auto. Wet-Processing Spinners (POLOS)]&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Thermal Processing=&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
*[[Rapid Thermal Processor (AET RX6)|Rapid Thermal Annealer/Processor &amp;quot;RTA&amp;quot; (AET RX6)]]&lt;br /&gt;
*[[Rapid Thermal Processor (SSI Solaris 150)]]&lt;br /&gt;
*[[Tube Furnace (Tystar 8300)]]&lt;br /&gt;
*[[Tube Furnace Wafer Bonding (Thermco)]]&lt;br /&gt;
*[[Tube Furnace AlGaAs Oxidation (Lindberg)]]&lt;br /&gt;
*[[Wafer Bonder (SUSS SB6-8E)]]&lt;br /&gt;
*[[Wafer Bonder (Logitech WBS7)|Wafer Bonder/Wax Mounting (Logitech WBS2)]]&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
*[[Ovens - Overview of All Lab Ovens|Ovens - Overview of all Lab Ovens]]&lt;br /&gt;
**[[Ovens 1, 2 &amp;amp; 3 (Labline)]]&lt;br /&gt;
**[[Oven 4 (Thermo-Fisher HeraTherm)]]&lt;br /&gt;
**[[Oven 5 (Labline)]]&lt;br /&gt;
**[[Vacuum Oven (YES)]]&lt;br /&gt;
**[[High Temp Oven (Blue M)]]&lt;br /&gt;
|&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Packaging=&lt;br /&gt;
&lt;br /&gt;
*[[Dicing Saw (ADT)]]&lt;br /&gt;
*[[Flip-Chip Bonder (Finetech)]]&lt;br /&gt;
*[[Vacuum Sealer]]&lt;br /&gt;
*[[Wire Saw (Takatori)]]&lt;br /&gt;
&lt;br /&gt;
=Inspection, Test and Characterization=&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;300&amp;quot; |&lt;br /&gt;
=====Optical Microscopy=====&lt;br /&gt;
&lt;br /&gt;
*[[Microscopes|Optical Microscopes]]&lt;br /&gt;
*[[Fluorescence Microscope (Olympus MX51)]]&lt;br /&gt;
*[[Deep UV Optical Microscope (Olympus)]]&lt;br /&gt;
*[[Laser Scanning Confocal M-scope (Olympus LEXT)]]&lt;br /&gt;
*[[Photo-emission &amp;amp; IR Microscope (QFI)|Photo-emission &amp;amp; Thermal IR Microscope (QFI)]]&lt;br /&gt;
&lt;br /&gt;
===== Electron Microscopy =====&lt;br /&gt;
*[[Field Emission SEM 1 (FEI Sirion)]]&lt;br /&gt;
*[[Field Emission SEM 2 (JEOL 7600F)]]&lt;br /&gt;
*[[SEM Sample Coater (Hummer)]]&lt;br /&gt;
&lt;br /&gt;
=====Topographical Metrology=====&lt;br /&gt;
&lt;br /&gt;
*[[Step Profilometer (KLA Tencor P-7)]]&lt;br /&gt;
*[[Step Profilometer (Dektak 6M)]]&lt;br /&gt;
*[[Atomic Force Microscope (Bruker ICON)|Atomic Force Microsope (Bruker ICON)]]&lt;br /&gt;
*[[Surface Analysis (KLA/Tencor Surfscan)]]&lt;br /&gt;
**&#039;&#039;Sub-micron Particle Counter&#039;&#039;&lt;br /&gt;
*[[Laser Scanning Confocal M-scope (Olympus LEXT)]]&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
=====Thin-Film/Material Analysis=====&lt;br /&gt;
&lt;br /&gt;
====== Thickness + Optical Constants ======&lt;br /&gt;
*[[Ellipsometer (Woollam)]]&lt;br /&gt;
*[[Optical Film Thickness (Filmetrics)|Optical Film Thickness (Filmetrics F20)]]&lt;br /&gt;
*[[Filmetrics F40-UV Microscope-Mounted|Optical Film Thickness (Microscope-Mounted Filmetrics F-40-UV)]]&lt;br /&gt;
*[[Optical Film Thickness (Nanometric)]]&lt;br /&gt;
*[[Optical Film Thickness &amp;amp; Wafer-Mapping (Filmetrics F50)]]&lt;br /&gt;
*[[Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX)|Reflection/Transmission Spectra &amp;amp; Optical Film Thickness (Filmetrics F10-RT-UVX)]]&lt;br /&gt;
&lt;br /&gt;
====== Other Properties ======&lt;br /&gt;
*[[Film Stress (Tencor Flexus)]]&lt;br /&gt;
*[[Photoluminescence PL Setup (Custom)]]&lt;br /&gt;
&lt;br /&gt;
====== Electrical Analysis ======&lt;br /&gt;
*[[Resistivity Mapper (CDE RESMAP)]]&lt;br /&gt;
*[[Probe Station &amp;amp; Curve Tracer]]&lt;br /&gt;
&lt;br /&gt;
=====Other Tools=====&lt;br /&gt;
&lt;br /&gt;
*[[Goniometer (Rame-Hart A-100)|Goniometer (Ramé-Hart A-100)]]&lt;br /&gt;
**&#039;&#039;Surface hydrophobicity&#039;&#039;&lt;br /&gt;
|-&lt;br /&gt;
|&lt;br /&gt;
|&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Test=&lt;/div&gt;</summary>
		<author><name>Nplaviola</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=Tool_List&amp;diff=158712</id>
		<title>Tool List</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=Tool_List&amp;diff=158712"/>
		<updated>2021-01-27T06:11:45Z</updated>

		<summary type="html">&lt;p&gt;Nplaviola: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;__NOTOC__&lt;br /&gt;
=Lithography=&lt;br /&gt;
&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;300&amp;quot; |&lt;br /&gt;
=====Photoresists and Lithography Chemicals=====&lt;br /&gt;
&lt;br /&gt;
*See the [https://wiki.nanotech.ucsb.edu/wiki/index.php/Lithography_Recipes#Chemicals_Stocked_.2B_Datasheets Chemical Datasheets page].&lt;br /&gt;
*[[Automated Coat/Develop System (S-Cubed Flexi)|Auto. Coat/Develop (S-Cubed Flexi)]]&lt;br /&gt;
&lt;br /&gt;
=====Contact Aligners (Optical Exposure)=====&lt;br /&gt;
&lt;br /&gt;
*[[Suss Aligners (SUSS MJB-3)]]&lt;br /&gt;
*[[IR Aligner (SUSS MJB-3 IR)]]&lt;br /&gt;
*[[Contact Aligner (SUSS MA-6)]]&lt;br /&gt;
*[[DUV Flood Expose]]&lt;br /&gt;
&lt;br /&gt;
=====Direct-Write Lithography=====&lt;br /&gt;
&lt;br /&gt;
*[[E-Beam Lithography System (JEOL JBX-6300FS)]]&lt;br /&gt;
*[[Field Emission SEM 1 (FEI Sirion)|E-Beam Lithography (FEI Sirion Nabity v9)]]&lt;br /&gt;
*[[Focused Ion-Beam Lithography (Raith Velion)]]&lt;br /&gt;
*[[Maskless Aligner (Heidelberg MLA150)]]&lt;br /&gt;
&lt;br /&gt;
===== Other Patterning Systems =====&lt;br /&gt;
*[[Nano-Imprint (Nanonex NX2000)]]&lt;br /&gt;
*[[Holographic Lith/PL Setup (Custom)|Holographic Litho/PL Setup (Custom)]]&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
=====Steppers (Optical Exposure)=====&lt;br /&gt;
&lt;br /&gt;
*[[Stepper 1 (GCA 6300)|Stepper 1 (GCA 6300, i-line)]]&lt;br /&gt;
*[[Stepper 2 (AutoStep 200)|Stepper 2 (AutoStep 200, i-line)]]&lt;br /&gt;
*[[Stepper 3 (ASML DUV)|Stepper 3 (ASML DUV, Deep-UV)]]&lt;br /&gt;
&lt;br /&gt;
=====Thermal Processing for Photolithography=====&lt;br /&gt;
&lt;br /&gt;
*[[Ovens - Overview of All Lab Ovens|Ovens - Overview of all lab ovens]]&lt;br /&gt;
*[[Ovens 1, 2 &amp;amp; 3 (Labline)]]&lt;br /&gt;
*[[Oven 4 (Fisher)]]&lt;br /&gt;
*[[Oven 5 (Labline)]]&lt;br /&gt;
*[[High Temp Oven (Blue M)]]&lt;br /&gt;
*[[Vacuum Oven (YES)]]&lt;br /&gt;
&lt;br /&gt;
=====Lithography Support=====&lt;br /&gt;
&lt;br /&gt;
*The [https://wiki.nanotech.ucsb.edu/wiki/index.php/Wet_Benches#Spin_Coat_Benches Spinner Benches] have pre-set hotplates at various temperatures appropriate for common photoresist bakes.&lt;br /&gt;
*[https://signupmonkey.ece.ucsb.edu/wiki/index.php/Wet_Benches#Automated_Wet-processing_Spinners_.28POLOS.29 POLOS spinners] on Develop and Solvent benches&lt;br /&gt;
*[[Spin Rinse Dryer (SemiTool)|Spin/Rinse/Dryer]]&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Vacuum Deposition=&lt;br /&gt;
&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;300&amp;quot; |&lt;br /&gt;
=====Physical Vapor Deposition (PVD)=====&lt;br /&gt;
&lt;br /&gt;
*[[E-Beam 1 (Sharon)]]&lt;br /&gt;
*[[E-Beam 2 (Custom)]]&lt;br /&gt;
*[[E-Beam 3 (Temescal)]]&lt;br /&gt;
*[[E-Beam 4 (CHA)]]&lt;br /&gt;
*[[Thermal Evap 1]]&lt;br /&gt;
*[[Thermal Evap 2 (Solder)]]&lt;br /&gt;
&lt;br /&gt;
=====Sputter Deposition=====&lt;br /&gt;
&lt;br /&gt;
*[[Sputter 3 (AJA ATC 2000-F)]]&lt;br /&gt;
*[[Sputter 4 (AJA ATC 2200-V)]]&lt;br /&gt;
*[[Sputter 5 (AJA ATC 2200-V)]]&lt;br /&gt;
*[[Ion Beam Deposition (Veeco NEXUS)]]&lt;br /&gt;
&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
=====Chemical Vapor Deposition (CVD)=====&lt;br /&gt;
&lt;br /&gt;
*[[PECVD 1 (PlasmaTherm 790)]]&lt;br /&gt;
*[[PECVD 2 (Advanced Vacuum)]]&lt;br /&gt;
*[[ICP-PECVD (Unaxis VLR)]]&lt;br /&gt;
*[[Molecular Vapor Deposition]]&lt;br /&gt;
*[[Atomic Layer Deposision (Oxford FlexAL)|Atomic Layer Deposition (Oxford FlexAL)]]&lt;br /&gt;
&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Dry Etch=&lt;br /&gt;
&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;300&amp;quot; |&lt;br /&gt;
=====Reactive Ion Etching (RIE)=====&lt;br /&gt;
&lt;br /&gt;
*[[RIE 2 (MRC)]]&lt;br /&gt;
*[[RIE 3 (MRC)]]&lt;br /&gt;
*[[RIE 5 (PlasmaTherm)]]&lt;br /&gt;
&lt;br /&gt;
=====Plasma Etching and Cleaning=====&lt;br /&gt;
&lt;br /&gt;
*[[Plasma Clean (Gasonics 2000)]]&lt;br /&gt;
*[[Plasma Clean (YES EcoClean)]]&lt;br /&gt;
*[[Plasma Activation (EVG 810)]]&lt;br /&gt;
*[[Ashers (Technics PEII)]]&lt;br /&gt;
&lt;br /&gt;
=====Etch Monitoring=====&lt;br /&gt;
&lt;br /&gt;
*[[Laser Etch Monitoring]] (Endpoint Detection)&lt;br /&gt;
*Optical Emission Spectra&lt;br /&gt;
*Residual Gas Analyzer (RGA)&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
=====ICP-RIE=====&lt;br /&gt;
&lt;br /&gt;
*[[ICP Etch 1 (Panasonic E626I)]]&lt;br /&gt;
*[[ICP Etch 2 (Panasonic E640)]]&lt;br /&gt;
*[[ICP-Etch (Unaxis VLR)]]&lt;br /&gt;
*[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)|Plasma-Therm SLR: Fluorine ICP (PlasmaTherm/SLR Fluorine Etcher)]]&lt;br /&gt;
*[[DSEIII (PlasmaTherm/Deep Silicon Etcher)|Plasma-Therm DSE-iii (PlasmaTherm/Deep Silicon Etcher)]]&lt;br /&gt;
&lt;br /&gt;
=====Ion Milling and Reactive Ion Beam Etching=====&lt;br /&gt;
&lt;br /&gt;
*[[CAIBE (Oxford Ion Mill)]]&lt;br /&gt;
&lt;br /&gt;
=====Other Dry Etching=====&lt;br /&gt;
&lt;br /&gt;
*[[UV Ozone Reactor]]&lt;br /&gt;
*[[XeF2 Etch (Xetch)|XeF&amp;lt;sub&amp;gt;2&amp;lt;/sub&amp;gt; Etch (Xetch)]]&lt;br /&gt;
*[[Vapor HF Etch]]&lt;br /&gt;
&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Wet Processing=&lt;br /&gt;
See the [[Chemical List|Chemical List page]] for stocked chemicals such as Developers, Etchants, Solvents etc.&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;300&amp;quot; |&lt;br /&gt;
*[[Wet Benches]]&lt;br /&gt;
**[[Solvent Cleaning Benches]]&lt;br /&gt;
**[[Spin Coat Benches]]&lt;br /&gt;
**[[Develop Benches]]&lt;br /&gt;
**[[Toxic Corrosive Benches]]&lt;br /&gt;
**[[HF/TMAH Processing Benches]]&lt;br /&gt;
**[[Plating Bench]]&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
*[[Gold Plating Bench]]&lt;br /&gt;
*[[Critical Point Dryer]]&lt;br /&gt;
*[[Spin Rinse Dryer (SemiTool)]]&lt;br /&gt;
*[[Chemical-Mechanical Polisher (Logitech)]]&lt;br /&gt;
*[[Automated Coat/Develop System (S-Cubed Flexi)|Auto. Coat/Develop (S-Cubed Flexi)]]&lt;br /&gt;
*[https://signupmonkey.ece.ucsb.edu/wiki/index.php/Wet_Benches#Automated_Wet-processing_Spinners_.28POLOS.29 Auto. Wet-Processing Spinners (POLOS)]&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Thermal Processing=&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
*[[Rapid Thermal Processor (AET RX6)|Rapid Thermal Annealer/Processor &amp;quot;RTA&amp;quot; (AET RX6)]]&lt;br /&gt;
*[[Rapid Thermal Processor (SSI Solaris 150)]]&lt;br /&gt;
*[[Tube Furnace (Tystar 8300)]]&lt;br /&gt;
*[[Tube Furnace Wafer Bonding (Thermco)]]&lt;br /&gt;
*[[Tube Furnace AlGaAs Oxidation (Lindberg)]]&lt;br /&gt;
*[[Wafer Bonder (SUSS SB6-8E)]]&lt;br /&gt;
*[[Wafer Bonder (Logitech WBS7)|Wafer Bonder/Wax Mounting (Logitech WBS2)]]&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
*[[Ovens - Overview of All Lab Ovens|Ovens - Overview of all Lab Ovens]]&lt;br /&gt;
**[[Ovens 1, 2 &amp;amp; 3 (Labline)]]&lt;br /&gt;
**[[Oven 4 (Thermo-Fisher HeraTherm)]]&lt;br /&gt;
**[[Oven 5 (Labline)]]&lt;br /&gt;
**[[Vacuum Oven (YES)]]&lt;br /&gt;
**[[High Temp Oven (Blue M)]]&lt;br /&gt;
|&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Packaging=&lt;br /&gt;
&lt;br /&gt;
*[[Dicing Saw (ADT)]]&lt;br /&gt;
*[[Flip-Chip Bonder (Finetech)]]&lt;br /&gt;
*[[Vacuum Sealer]]&lt;br /&gt;
*[[Wire Saw (Takatori)]]&lt;br /&gt;
&lt;br /&gt;
=Inspection, Test and Characterization=&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;300&amp;quot; |&lt;br /&gt;
=====Optical Microscopy=====&lt;br /&gt;
&lt;br /&gt;
*[[Microscopes|Optical Microscopes]]&lt;br /&gt;
*[[Fluorescence Microscope (Olympus MX51)]]&lt;br /&gt;
*[[Deep UV Optical Microscope (Olympus)]]&lt;br /&gt;
*[[Laser Scanning Confocal M-scope (Olympus LEXT)]]&lt;br /&gt;
*[[Photo-emission &amp;amp; IR Microscope (QFI)|Photo-emission &amp;amp; Thermal IR Microscope (QFI)]]&lt;br /&gt;
&lt;br /&gt;
===== Electron Microscopy =====&lt;br /&gt;
*[[Field Emission SEM 1 (FEI Sirion)]]&lt;br /&gt;
*[[Field Emission SEM 2 (JEOL 7600F)]]&lt;br /&gt;
*[[SEM Sample Coater (Hummer)]]&lt;br /&gt;
&lt;br /&gt;
=====Topographical Metrology=====&lt;br /&gt;
&lt;br /&gt;
*[[Step Profilometer (KLA Tencor P-7)]]&lt;br /&gt;
*[[Step Profilometer (Dektak 6M)]]&lt;br /&gt;
*[[Atomic Force Microscope (Bruker ICON)|Atomic Force Microsope (Bruker ICON)]]&lt;br /&gt;
*[[Surface Analysis (KLA/Tencor Surfscan)]]&lt;br /&gt;
**&#039;&#039;Sub-micron Particle Counter&#039;&#039;&lt;br /&gt;
*[[Laser Scanning Confocal M-scope (Olympus LEXT)]]&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
=====Thin-Film/Material Analysis=====&lt;br /&gt;
&lt;br /&gt;
====== Thickness + Optical Constants ======&lt;br /&gt;
*[[Ellipsometer (Woollam)]]&lt;br /&gt;
*[[Optical Film Thickness (Filmetrics)|Optical Film Thickness (Filmetrics F20)]]&lt;br /&gt;
*[[Filmetrics F40-UV Microscope-Mounted|Optical Film Thickness (Microscope-Mounted Filmetrics F-40-UV)]]&lt;br /&gt;
*[[Optical Film Thickness (Nanometric)]]&lt;br /&gt;
*[[Optical Film Thickness &amp;amp; Wafer-Mapping (Filmetrics F50)]]&lt;br /&gt;
*[[Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX)|Reflection/Transmission Spectra &amp;amp; Optical Film Thickness (Filmetrics F10-RT-UVX)]]&lt;br /&gt;
&lt;br /&gt;
====== Other Properties ======&lt;br /&gt;
*[[Film Stress (Tencor Flexus)]]&lt;br /&gt;
*[[Photoluminescence PL Setup (Custom)]]&lt;br /&gt;
&lt;br /&gt;
====== Electrical Analysis ======&lt;br /&gt;
*[[Resistivity Mapper (CDE RESMAP)]]&lt;br /&gt;
*[[Probe Station &amp;amp; Curve Tracer]]&lt;br /&gt;
&lt;br /&gt;
=====Other Tools=====&lt;br /&gt;
&lt;br /&gt;
*[[Goniometer (Rame-Hart A-100)|Goniometer (Ramé-Hart A-100)]]&lt;br /&gt;
**&#039;&#039;Surface hydrophobicity&#039;&#039;&lt;br /&gt;
|-&lt;br /&gt;
|&lt;br /&gt;
|&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;/div&gt;</summary>
		<author><name>Nplaviola</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=Tool_List&amp;diff=158711</id>
		<title>Tool List</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=Tool_List&amp;diff=158711"/>
		<updated>2021-01-27T06:11:26Z</updated>

		<summary type="html">&lt;p&gt;Nplaviola: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;__NOTOC__&lt;br /&gt;
=Lithography=&lt;br /&gt;
&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;300&amp;quot; |&lt;br /&gt;
=====Photoresists and Lithography Chemicals=====&lt;br /&gt;
&lt;br /&gt;
*See the [https://wiki.nanotech.ucsb.edu/wiki/index.php/Lithography_Recipes#Chemicals_Stocked_.2B_Datasheets Chemical Datasheets page].&lt;br /&gt;
*[[Automated Coat/Develop System (S-Cubed Flexi)|Auto. Coat/Develop (S-Cubed Flexi)]]&lt;br /&gt;
&lt;br /&gt;
=====Contact Aligners (Optical Exposure)=====&lt;br /&gt;
&lt;br /&gt;
*[[Suss Aligners (SUSS MJB-3)]]&lt;br /&gt;
*[[IR Aligner (SUSS MJB-3 IR)]]&lt;br /&gt;
*[[Contact Aligner (SUSS MA-6)]]&lt;br /&gt;
*[[DUV Flood Expose]]&lt;br /&gt;
&lt;br /&gt;
=====Direct-Write Lithography=====&lt;br /&gt;
&lt;br /&gt;
*[[E-Beam Lithography System (JEOL JBX-6300FS)]]&lt;br /&gt;
*[[Field Emission SEM 1 (FEI Sirion)|E-Beam Lithography (FEI Sirion Nabity v9)]]&lt;br /&gt;
*[[Focused Ion-Beam Lithography (Raith Velion)]]&lt;br /&gt;
*[[Maskless Aligner (Heidelberg MLA150)]]&lt;br /&gt;
&lt;br /&gt;
===== Other Patterning Systems =====&lt;br /&gt;
*[[Nano-Imprint (Nanonex NX2000)]]&lt;br /&gt;
*[[Holographic Lith/PL Setup (Custom)|Holographic Litho/PL Setup (Custom)]]&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
=====Steppers (Optical Exposure)=====&lt;br /&gt;
&lt;br /&gt;
*[[Stepper 1 (GCA 6300)|Stepper 1 (GCA 6300, i-line)]]&lt;br /&gt;
*[[Stepper 2 (AutoStep 200)|Stepper 2 (AutoStep 200, i-line)]]&lt;br /&gt;
*[[Stepper 3 (ASML DUV)|Stepper 3 (ASML DUV, Deep-UV)]]&lt;br /&gt;
&lt;br /&gt;
=====Thermal Processing for Photolithography=====&lt;br /&gt;
&lt;br /&gt;
*[[Ovens - Overview of All Lab Ovens|Ovens - Overview of all lab ovens]]&lt;br /&gt;
*[[Ovens 1, 2 &amp;amp; 3 (Labline)]]&lt;br /&gt;
*[[Oven 4 (Fisher)]]&lt;br /&gt;
*[[Oven 5 (Labline)]]&lt;br /&gt;
*[[High Temp Oven (Blue M)]]&lt;br /&gt;
*[[Vacuum Oven (YES)]]&lt;br /&gt;
&lt;br /&gt;
=====Lithography Support=====&lt;br /&gt;
&lt;br /&gt;
*The [https://wiki.nanotech.ucsb.edu/wiki/index.php/Wet_Benches#Spin_Coat_Benches Spinner Benches] have pre-set hotplates at various temperatures appropriate for common photoresist bakes.&lt;br /&gt;
*[https://signupmonkey.ece.ucsb.edu/wiki/index.php/Wet_Benches#Automated_Wet-processing_Spinners_.28POLOS.29 POLOS spinners] on Develop and Solvent benches&lt;br /&gt;
*[[Spin Rinse Dryer (SemiTool)|Spin/Rinse/Dryer]]&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Vacuum Deposition=&lt;br /&gt;
&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;300&amp;quot; |&lt;br /&gt;
=====Physical Vapor Deposition (PVD)=====&lt;br /&gt;
&lt;br /&gt;
*[[E-Beam 1 (Sharon)]]&lt;br /&gt;
*[[E-Beam 2 (Custom)]]&lt;br /&gt;
*[[E-Beam 3 (Temescal)]]&lt;br /&gt;
*[[E-Beam 4 (CHA)]]&lt;br /&gt;
*[[Thermal Evap 1]]&lt;br /&gt;
*[[Thermal Evap 2 (Solder)]]&lt;br /&gt;
&lt;br /&gt;
=====Sputter Deposition=====&lt;br /&gt;
&lt;br /&gt;
*[[Sputter 3 (AJA ATC 2000-F)]]&lt;br /&gt;
*[[Sputter 4 (AJA ATC 2200-V)]]&lt;br /&gt;
*[[Sputter 5 (AJA ATC 2200-V)]]&lt;br /&gt;
*[[Ion Beam Deposition (Veeco NEXUS)]]&lt;br /&gt;
&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
=====Chemical Vapor Deposition (CVD)=====&lt;br /&gt;
&lt;br /&gt;
*[[PECVD 1 (PlasmaTherm 790)]]&lt;br /&gt;
*[[PECVD 2 (Advanced Vacuum)]]&lt;br /&gt;
*[[ICP-PECVD (Unaxis VLR)]]&lt;br /&gt;
*[[Molecular Vapor Deposition]]&lt;br /&gt;
*[[Atomic Layer Deposision (Oxford FlexAL)|Atomic Layer Deposition (Oxford FlexAL)]]&lt;br /&gt;
&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Dry Etch=&lt;br /&gt;
&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;300&amp;quot; |&lt;br /&gt;
=====Reactive Ion Etching (RIE)=====&lt;br /&gt;
&lt;br /&gt;
*[[RIE 2 (MRC)]]&lt;br /&gt;
*[[RIE 3 (MRC)]]&lt;br /&gt;
*[[RIE 5 (PlasmaTherm)]]&lt;br /&gt;
&lt;br /&gt;
=====Plasma Etching and Cleaning=====&lt;br /&gt;
&lt;br /&gt;
*[[Plasma Clean (Gasonics 2000)]]&lt;br /&gt;
*[[Plasma Clean (YES EcoClean)]]&lt;br /&gt;
*[[Plasma Activation (EVG 810)]]&lt;br /&gt;
*[[Ashers (Technics PEII)]]&lt;br /&gt;
&lt;br /&gt;
=====Etch Monitoring=====&lt;br /&gt;
&lt;br /&gt;
*[[Laser Etch Monitoring]] (Endpoint Detection)&lt;br /&gt;
*Optical Emission Spectra&lt;br /&gt;
*Residual Gas Analyzer (RGA)&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
=====ICP-RIE=====&lt;br /&gt;
&lt;br /&gt;
*[[ICP Etch 1 (Panasonic E626I)]]&lt;br /&gt;
*[[ICP Etch 2 (Panasonic E640)]]&lt;br /&gt;
*[[ICP-Etch (Unaxis VLR)]]&lt;br /&gt;
*[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)|Plasma-Therm SLR: Fluorine ICP (PlasmaTherm/SLR Fluorine Etcher)]]&lt;br /&gt;
*[[DSEIII (PlasmaTherm/Deep Silicon Etcher)|Plasma-Therm DSE-iii (PlasmaTherm/Deep Silicon Etcher)]]&lt;br /&gt;
&lt;br /&gt;
=====Ion Milling and Reactive Ion Beam Etching=====&lt;br /&gt;
&lt;br /&gt;
*[[CAIBE (Oxford Ion Mill)]]&lt;br /&gt;
&lt;br /&gt;
=====Other Dry Etching=====&lt;br /&gt;
&lt;br /&gt;
*[[UV Ozone Reactor]]&lt;br /&gt;
*[[XeF2 Etch (Xetch)|XeF&amp;lt;sub&amp;gt;2&amp;lt;/sub&amp;gt; Etch (Xetch)]]&lt;br /&gt;
*[[Vapor HF Etch]]&lt;br /&gt;
&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Wet Processing=&lt;br /&gt;
See the [[Chemical List|Chemical List page]] for stocked chemicals such as Developers, Etchants, Solvents etc.&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;300&amp;quot; |&lt;br /&gt;
*[[Wet Benches]]&lt;br /&gt;
**[[Solvent Cleaning Benches]]&lt;br /&gt;
**[[Spin Coat Benches]]&lt;br /&gt;
**[[Develop Benches]]&lt;br /&gt;
**[[Toxic Corrosive Benches]]&lt;br /&gt;
**[[HF/TMAH Processing Benches]]&lt;br /&gt;
**[[Plating Bench]]&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
*[[Gold Plating Bench]]&lt;br /&gt;
*[[Critical Point Dryer]]&lt;br /&gt;
*[[Spin Rinse Dryer (SemiTool)]]&lt;br /&gt;
*[[Chemical-Mechanical Polisher (Logitech)]]&lt;br /&gt;
*[[Automated Coat/Develop System (S-Cubed Flexi)|Auto. Coat/Develop (S-Cubed Flexi)]]&lt;br /&gt;
*[https://signupmonkey.ece.ucsb.edu/wiki/index.php/Wet_Benches#Automated_Wet-processing_Spinners_.28POLOS.29 Auto. Wet-Processing Spinners (POLOS)]&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Thermal Processing=&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
*[[Rapid Thermal Processor (AET RX6)|Rapid Thermal Annealer/Processor &amp;quot;RTA&amp;quot; (AET RX6)]]&lt;br /&gt;
*[[Rapid Thermal Processor (SSI Solaris 150)]]&lt;br /&gt;
*[[Tube Furnace (Tystar 8300)]]&lt;br /&gt;
*[[Tube Furnace Wafer Bonding (Thermco)]]&lt;br /&gt;
*[[Tube Furnace AlGaAs Oxidation (Lindberg)]]&lt;br /&gt;
*[[Wafer Bonder (SUSS SB6-8E)]]&lt;br /&gt;
*[[Wafer Bonder (Logitech WBS7)|Wafer Bonder/Wax Mounting (Logitech WBS2)]]&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
*[[Ovens - Overview of All Lab Ovens|Ovens - Overview of all Lab Ovens]]&lt;br /&gt;
**[[Ovens 1, 2 &amp;amp; 3 (Labline)]]&lt;br /&gt;
**[[Oven 4 (Thermo-Fisher HeraTherm)]]&lt;br /&gt;
**[[Oven 5 (Labline)]]&lt;br /&gt;
**[[Vacuum Oven (YES)]]&lt;br /&gt;
**[[High Temp Oven (Blue M)]]&lt;br /&gt;
|&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
=Packaging=&lt;br /&gt;
&lt;br /&gt;
*[[Dicing Saw (ADT)]]&lt;br /&gt;
*[[Flip-Chip Bonder (Finetech)]]&lt;br /&gt;
*[[Vacuum Sealer]]&lt;br /&gt;
*[[Wire Saw (Takatori)]]&lt;br /&gt;
&lt;br /&gt;
=Inspection, Test and Characterization=&lt;br /&gt;
{|&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot;&lt;br /&gt;
| width=&amp;quot;300&amp;quot; |&lt;br /&gt;
=====Optical Microscopy=====&lt;br /&gt;
&lt;br /&gt;
*[[Microscopes|Optical Microscopes]]&lt;br /&gt;
*[[Fluorescence Microscope (Olympus MX51)]]&lt;br /&gt;
*[[Deep UV Optical Microscope (Olympus)]]&lt;br /&gt;
*[[Laser Scanning Confocal M-scope (Olympus LEXT)]]&lt;br /&gt;
*[[Photo-emission &amp;amp; IR Microscope (QFI)|Photo-emission &amp;amp; Thermal IR Microscope (QFI)]]&lt;br /&gt;
&lt;br /&gt;
===== Electron Microscopy =====&lt;br /&gt;
*[[Field Emission SEM 1 (FEI Sirion)]]&lt;br /&gt;
*[[Field Emission SEM 2 (JEOL 7600F)]]&lt;br /&gt;
*[[SEM Sample Coater (Hummer)]]&lt;br /&gt;
&lt;br /&gt;
=====Topographical Metrology=====&lt;br /&gt;
&lt;br /&gt;
*[[Step Profilometer (KLA Tencor P-7)]]&lt;br /&gt;
*[[Step Profilometer (Dektak 6M)]]&lt;br /&gt;
*[[Atomic Force Microscope (Bruker ICON)|Atomic Force Microsope (Bruker ICON)]]&lt;br /&gt;
*[[Surface Analysis (KLA/Tencor Surfscan)]]&lt;br /&gt;
**&#039;&#039;Sub-micron Particle Counter&#039;&#039;&lt;br /&gt;
*[[Laser Scanning Confocal M-scope (Olympus LEXT)]]&lt;br /&gt;
| width=&amp;quot;400&amp;quot; |&lt;br /&gt;
=====Thin-Film/Material Analysis=====&lt;br /&gt;
&lt;br /&gt;
====== Thickness + Optical Constants ======&lt;br /&gt;
*[[Ellipsometer (Woollam)]]&lt;br /&gt;
*[[Optical Film Thickness (Filmetrics)|Optical Film Thickness (Filmetrics F20)]]&lt;br /&gt;
*[[Filmetrics F40-UV Microscope-Mounted|Optical Film Thickness (Microscope-Mounted Filmetrics F-40-UV)]]&lt;br /&gt;
*[[Optical Film Thickness (Nanometric)]]&lt;br /&gt;
*[[Optical Film Thickness &amp;amp; Wafer-Mapping (Filmetrics F50)]]&lt;br /&gt;
*[[Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX)|Reflection/Transmission Spectra &amp;amp; Optical Film Thickness (Filmetrics F10-RT-UVX)]]&lt;br /&gt;
&lt;br /&gt;
====== Other Properties ======&lt;br /&gt;
*[[Film Stress (Tencor Flexus)]]&lt;br /&gt;
*[[Photoluminescence PL Setup (Custom)]]&lt;br /&gt;
&lt;br /&gt;
====== Electrical Analysis ======&lt;br /&gt;
*[[Resistivity Mapper (CDE RESMAP)]]&lt;br /&gt;
*[[Probe Station &amp;amp; Curve Tracer]]&lt;br /&gt;
&lt;br /&gt;
=====Other Tools=====&lt;br /&gt;
&lt;br /&gt;
*[[Goniometer (Rame-Hart A-100)|Goniometer (Ramé-Hart A-100)]]&lt;br /&gt;
**&#039;&#039;Surface hydrophobicity&#039;&#039;&lt;br /&gt;
|-&lt;br /&gt;
|&lt;br /&gt;
|&lt;br /&gt;
|-&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
{{Special:Whatlinkshere}}&lt;/div&gt;</summary>
		<author><name>Nplaviola</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=MediaWiki:Common.css&amp;diff=158565</id>
		<title>MediaWiki:Common.css</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=MediaWiki:Common.css&amp;diff=158565"/>
		<updated>2020-10-30T21:38:11Z</updated>

		<summary type="html">&lt;p&gt;Nplaviola: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;/* Site-wide mods */&lt;br /&gt;
&lt;br /&gt;
/* disable &amp;quot;discussion&amp;quot; link on every page */&lt;br /&gt;
li#ca-talk { display:none!important; }&lt;br /&gt;
&lt;br /&gt;
/*-------------------------------*/&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
/* MediaWiki:Sidebar CSS rules */&lt;br /&gt;
&lt;br /&gt;
/* remove the first Section title causing a blank space */&lt;br /&gt;
div#p-InvisibleMenu {&lt;br /&gt;
display:none!important;&lt;br /&gt;
}&lt;br /&gt;
&lt;br /&gt;
/* targets the div holding the logo */&lt;br /&gt;
div#p-logo {&lt;br /&gt;
    /* CSS goes here */&lt;br /&gt;
}&lt;br /&gt;
&lt;br /&gt;
/* targets the link inside the logo div */&lt;br /&gt;
div#plogo a.mw-wiki-logo {&lt;br /&gt;
&lt;br /&gt;
}&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
/* Bold specific sidebar items: */&lt;br /&gt;
li#n-Lab-Rules a {&lt;br /&gt;
   font-weight: bold;&lt;br /&gt;
}&lt;br /&gt;
&lt;br /&gt;
li#n-COVID-19-Protocols a {&lt;br /&gt;
   font-weight: bold;&lt;br /&gt;
}&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
/*-----------------------------------*/&lt;br /&gt;
/* Sidebar title elements */&lt;br /&gt;
&lt;br /&gt;
/* THESE ARE OVERRIDDEN BY ANOTHER RULE `@media screen #mw-panel .portal {}`  */&lt;br /&gt;
&lt;br /&gt;
h3#p-navigation-label {&lt;br /&gt;
&lt;br /&gt;
}&lt;br /&gt;
h3#p-Equipment-label {&lt;br /&gt;
    font-size: 32pt;&lt;br /&gt;
    font-weight: bold;&lt;br /&gt;
}&lt;br /&gt;
h3#p-Recipes_and_Data-label {&lt;br /&gt;
    &lt;br /&gt;
}&lt;br /&gt;
h3#p-Facility_Data-label {&lt;br /&gt;
    &lt;br /&gt;
}&lt;br /&gt;
h3#p-Editing_Tools-label {&lt;br /&gt;
    &lt;br /&gt;
}&lt;br /&gt;
h3#p-p-tb-label {&lt;br /&gt;
    &lt;br /&gt;
}&lt;br /&gt;
&lt;br /&gt;
/* For the spacing between elements, you want to target all li elements inside of the section divs and increase the padding top and bottom on those elements */&lt;br /&gt;
div#p-navigation li {&lt;br /&gt;
&lt;br /&gt;
}&lt;br /&gt;
&lt;br /&gt;
div#p-Equipment li {&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
}&lt;br /&gt;
&lt;br /&gt;
/* etc... */&lt;/div&gt;</summary>
		<author><name>Nplaviola</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=MediaWiki:Common.css&amp;diff=158564</id>
		<title>MediaWiki:Common.css</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=MediaWiki:Common.css&amp;diff=158564"/>
		<updated>2020-10-30T21:37:38Z</updated>

		<summary type="html">&lt;p&gt;Nplaviola: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;/* Site-wide mods */&lt;br /&gt;
&lt;br /&gt;
/* disable &amp;quot;discussion&amp;quot; link on every page */&lt;br /&gt;
li#ca-talk { display:none!important; }&lt;br /&gt;
&lt;br /&gt;
/*-------------------------------*/&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
/* MediaWiki:Sidebar CSS rules */&lt;br /&gt;
&lt;br /&gt;
/* remove the first Section title causing a blank space */&lt;br /&gt;
div#p-InvisibleMenu {&lt;br /&gt;
display:none!important;&lt;br /&gt;
}&lt;br /&gt;
&lt;br /&gt;
/* targets the div holding the logo */&lt;br /&gt;
div#p-logo {&lt;br /&gt;
    /* CSS goes here */&lt;br /&gt;
}&lt;br /&gt;
&lt;br /&gt;
/* targets the link inside the logo div */&lt;br /&gt;
div#plogo a.mw-wiki-logo {&lt;br /&gt;
&lt;br /&gt;
}&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
/* Bold specific sidebar items: */&lt;br /&gt;
li#n-Lab-Rules a {&lt;br /&gt;
   font-weight: bold;&lt;br /&gt;
}&lt;br /&gt;
&lt;br /&gt;
li#n-COVID-19-Protocols a {&lt;br /&gt;
   font-weight: bold;&lt;br /&gt;
}&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
/*-----------------------------------*/&lt;br /&gt;
/* Sidebar title elements */&lt;br /&gt;
&lt;br /&gt;
/* THESE ARE OVERRIDDEN BY ANOTHER RULE `@media screen #mw-panel .portal {}`  */&lt;br /&gt;
&lt;br /&gt;
h3#p-navigation-label {&lt;br /&gt;
&lt;br /&gt;
}&lt;br /&gt;
h3#p-Equipment-label {&lt;br /&gt;
    font-size: 32pt !important;&lt;br /&gt;
    font-weight: bold;&lt;br /&gt;
}&lt;br /&gt;
h3#p-Recipes_and_Data-label {&lt;br /&gt;
    &lt;br /&gt;
}&lt;br /&gt;
h3#p-Facility_Data-label {&lt;br /&gt;
    &lt;br /&gt;
}&lt;br /&gt;
h3#p-Editing_Tools-label {&lt;br /&gt;
    &lt;br /&gt;
}&lt;br /&gt;
h3#p-p-tb-label {&lt;br /&gt;
    &lt;br /&gt;
}&lt;br /&gt;
&lt;br /&gt;
/* For the spacing between elements, you want to target all li elements inside of the section divs and increase the padding top and bottom on those elements */&lt;br /&gt;
div#p-navigation li {&lt;br /&gt;
&lt;br /&gt;
}&lt;br /&gt;
&lt;br /&gt;
div#p-Equipment li {&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
}&lt;br /&gt;
&lt;br /&gt;
/* etc... */&lt;/div&gt;</summary>
		<author><name>Nplaviola</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=MediaWiki:Common.css&amp;diff=158207</id>
		<title>MediaWiki:Common.css</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=MediaWiki:Common.css&amp;diff=158207"/>
		<updated>2020-06-22T04:28:14Z</updated>

		<summary type="html">&lt;p&gt;Nplaviola: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;li#n-Lab-Rules a {&lt;br /&gt;
 &lt;br /&gt;
font-weight: bold;&lt;br /&gt;
&lt;br /&gt;
}&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
/* disable &amp;quot;discussion&amp;quot; link on every page */&lt;br /&gt;
li#ca-talk { display:none!important; }&lt;br /&gt;
&lt;br /&gt;
/* this doesn&#039;t work:  Demis 2020-05-12&lt;br /&gt;
#content h6 {&lt;br /&gt;
text-indent: 0.5pt;&lt;br /&gt;
font-style=&amp;quot;italic&amp;quot;;&lt;br /&gt;
}&lt;br /&gt;
*/&lt;br /&gt;
&lt;br /&gt;
/* Sidebar CSS rules */&lt;br /&gt;
&lt;br /&gt;
/* targets the div holding the logo */&lt;br /&gt;
div#p-logo {&lt;br /&gt;
    /* CSS goes here */&lt;br /&gt;
}&lt;br /&gt;
&lt;br /&gt;
/* targets the link inside the logo div */&lt;br /&gt;
div#plogo a.mw-wiki-logo {&lt;br /&gt;
&lt;br /&gt;
}&lt;br /&gt;
&lt;br /&gt;
/* targets the section title elements */&lt;br /&gt;
h3#p-navigation-label {&lt;br /&gt;
&lt;br /&gt;
}&lt;br /&gt;
h3#p-Equipment-label {&lt;br /&gt;
    &lt;br /&gt;
}&lt;br /&gt;
h3#p-Recipes_and_Data-label {&lt;br /&gt;
    &lt;br /&gt;
}&lt;br /&gt;
h3#p-Facility_Data-label {&lt;br /&gt;
    &lt;br /&gt;
}&lt;br /&gt;
h3#p-Editing_Tools-label {&lt;br /&gt;
    &lt;br /&gt;
}&lt;br /&gt;
h3#p-p-tb-label {&lt;br /&gt;
    &lt;br /&gt;
}&lt;br /&gt;
&lt;br /&gt;
/* For the spacing between elements, you want to target all li elements inside of the section divs and increase the padding top and bottom on those elements */&lt;br /&gt;
div#p-navigation li {&lt;br /&gt;
&lt;br /&gt;
}&lt;br /&gt;
&lt;br /&gt;
div#p-Equipment li {&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
}&lt;br /&gt;
&lt;br /&gt;
/* etc... */&lt;/div&gt;</summary>
		<author><name>Nplaviola</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=MediaWiki:Common.css&amp;diff=158117</id>
		<title>MediaWiki:Common.css</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=MediaWiki:Common.css&amp;diff=158117"/>
		<updated>2020-05-05T04:33:37Z</updated>

		<summary type="html">&lt;p&gt;Nplaviola: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;li#n-Lab-Rules a {&lt;br /&gt;
 &lt;br /&gt;
font-weight: bold;&lt;br /&gt;
&lt;br /&gt;
}&lt;/div&gt;</summary>
		<author><name>Nplaviola</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=MediaWiki:Common.css&amp;diff=158116</id>
		<title>MediaWiki:Common.css</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=MediaWiki:Common.css&amp;diff=158116"/>
		<updated>2020-05-05T04:31:43Z</updated>

		<summary type="html">&lt;p&gt;Nplaviola: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;li#n-Lab-Rules {&lt;br /&gt;
 &lt;br /&gt;
font-weight: bold;&lt;br /&gt;
&lt;br /&gt;
}&lt;/div&gt;</summary>
		<author><name>Nplaviola</name></author>
	</entry>
</feed>