https://wiki.nanofab.ucsb.edu/w/api.php?action=feedcontributions&feedformat=atom&user=Prezioso+m UCSB Nanofab Wiki - User contributions [en] 2026-04-05T17:45:27Z User contributions MediaWiki 1.43.6 https://wiki.nanofab.ucsb.edu/w/index.php?title=Atomic_Layer_Deposition_Recipes&diff=2866 Atomic Layer Deposition Recipes 2013-07-25T01:16:50Z <p>Prezioso m: </p> <hr /> <div>{{recipes|Vacuum Deposition}}<br /> =[[Atomic Layer Deposition (Oxford FlexAL)]]=<br /> ==Al{{sub|2}}O{{sub|3}} deposition (ALD)==<br /> <br /> *{{fl|ALD-Al2O3-300-Recipe.pdf|Al{{sub|2}}O{{sub|3}} 300}}<br /> *{{fl|ALD-Al2O3-300-Saturated-Recipe.pdf|Al{{sub|2}}O{{sub|3}} 300 Saturated}}<br /> *{{fl|ALD-Al2O3-Plasma-300C-Recipe.pdf|Al{{sub|2}}O{{sub|3}} plasma 300C}}<br /> *{{fl|ALD-Al2O3-100-Recipe.pdf|Al{{sub|2}}O{{sub|3}} 100}}<br /> <br /> ==AlN deposition (ALD)==<br /> *{{fl|ALD-AlN-300-recipe.pdf|AlN 300}}<br /> <br /> ==HfO{{sub|2}} deposition (ALD)==<br /> *{{fl|ALD-HfO2-100-recipe.pdf|HfO{{sub|2}} 100}}<br /> *{{fl|ALD-HfO2-300-recipe.pdf|HfO{{sub|2}} 300}}<br /> <br /> ==SiO{{sub|2}} deposition (ALD)==<br /> *{{fl|ALD-SiO2-100-recipe.pdf|SiO{{sub|2}} 100}}<br /> *{{fl|ALD-SiO2-300-recipe.pdf|SiO{{sub|2}} 300}}<br /> <br /> ==ZrO{{sub|2}} deposition (ALD)==<br /> *{{fl|ALD-ZrO2-300-recipe.pdf|ZrO{{sub|2}} 300}}<br /> <br /> ==TiO{{sub|2}} deposition (ALD)==<br /> *TiO{{sub|2}} 200 recipe '''WJM_TDMAT_H2O_r2''' water dose 1s (pdf file to be added)gives grow rate 0.9 A/cycle as measured by ellipsometer</div> Prezioso m https://wiki.nanofab.ucsb.edu/w/index.php?title=Atomic_Layer_Deposition_Recipes&diff=2843 Atomic Layer Deposition Recipes 2013-07-16T00:27:02Z <p>Prezioso m: </p> <hr /> <div>{{recipes|Vacuum Deposition}}<br /> =[[Atomic Layer Deposition (Oxford FlexAL)]]=<br /> ==Al{{sub|2}}O{{sub|3}} deposition (ALD)==<br /> <br /> *{{fl|ALD-Al2O3-300-Recipe.pdf|Al{{sub|2}}O{{sub|3}} 300}}<br /> *{{fl|ALD-Al2O3-300-Saturated-Recipe.pdf|Al{{sub|2}}O{{sub|3}} 300 Saturated}}<br /> *{{fl|ALD-Al2O3-Plasma-300C-Recipe.pdf|Al{{sub|2}}O{{sub|3}} plasma 300C}}<br /> *{{fl|ALD-Al2O3-100-Recipe.pdf|Al{{sub|2}}O{{sub|3}} 100}}<br /> <br /> ==AlN deposition (ALD)==<br /> *{{fl|ALD-AlN-300-recipe.pdf|AlN 300}}<br /> <br /> ==HfO{{sub|2}} deposition (ALD)==<br /> *{{fl|ALD-HfO2-100-recipe.pdf|HfO{{sub|2}} 100}}<br /> *{{fl|ALD-HfO2-300-recipe.pdf|HfO{{sub|2}} 300}}<br /> <br /> ==SiO{{sub|2}} deposition (ALD)==<br /> *{{fl|ALD-SiO2-100-recipe.pdf|SiO{{sub|2}} 100}}<br /> *{{fl|ALD-SiO2-300-recipe.pdf|SiO{{sub|2}} 300}}<br /> <br /> ==ZrO{{sub|2}} deposition (ALD)==<br /> *{{fl|ALD-ZrO2-300-recipe.pdf|ZrO{{sub|2}} 300}}<br /> <br /> ==TiO{{sub|2}} deposition (ALD)==<br /> *TiO{{sub|2}} 200 recipe '''WJM_TDMAT_H2O_r2''' water dose 1s (pdf file to be added)gives grow rate 0.11 nm/cy as measured by ellipsometer</div> Prezioso m https://wiki.nanofab.ucsb.edu/w/index.php?title=Vacuum_Deposition_Recipes&diff=2800 Vacuum Deposition Recipes 2013-07-05T00:43:26Z <p>Prezioso m: </p> <hr /> <div>{{Recipe Table Explanation}}<br /> {| border=&quot;1&quot; class=&quot;wikitable&quot; style=&quot;border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;&quot;<br /> |- bgcolor=&quot;#D0E7FF&quot;<br /> ! width=&quot;1675&quot; height=&quot;45&quot; colspan=&quot;18&quot; | &lt;div style=&quot;font-size: 150%;&quot;&gt;Vacuum Deposition Recipes&lt;/div&gt;<br /> |- bgcolor=&quot;#D0E7FF&quot;<br /> | &lt;!-- INTENTIONALLY LEFT BLANK --&gt; &lt;br&gt; <br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; colspan=&quot;4&quot; | '''[[E-Beam Evaporation Recipes|E-Beam Evaporation]]''' <br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; colspan=&quot;6&quot; | '''[[Sputtering Recipes|Sputtering]]''' <br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; colspan=&quot;2&quot; | '''[[Thermal Evaporation Recipes|Thermal Evaporation]]''' <br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; colspan=&quot;3&quot; | '''[[PECVD Recipes|Plasma Enhanced Chemical&lt;br&gt;Vapor Deposition (PECVD)]]''' <br /> ! width=&quot;90&quot; bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | '''[[Atomic Layer Deposition Recipes|Atomic Layer Deposition]]''' <br /> ! width=&quot;80&quot; bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | '''[[Molecular Vapor Deposition Recipes|Molecular Vapor Deposition]]'''<br /> |-<br /> ! width=&quot;20&quot; bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | '''Material''' <br /> | width=&quot;65&quot; bgcolor=&quot;#DAF1FF&quot; | [[E-Beam Evaporation Recipes#E-Beam_1_.28Sharon.29|E-Beam 1 (Sharon)]] <br /> | width=&quot;65&quot; bgcolor=&quot;#DAF1FF&quot; | [[E-Beam Evaporation Recipes#E-Beam_2_.28Custom.29|E-Beam 2 (Custom)]] <br /> | width=&quot;65&quot; bgcolor=&quot;#DAF1FF&quot; | [[E-Beam Evaporation Recipes#E-Beam_3_.28Temescal.29|E-Beam 3 (Temescal)]] <br /> | width=&quot;65&quot; bgcolor=&quot;#DAF1FF&quot; | [[E-Beam Evaporation Recipes#E-Beam_4_.28CHA.29|E-Beam 4 (CHA)]] <br /> | width=&quot;65&quot; bgcolor=&quot;#DAF1FF&quot; | [[Sputtering Recipes#Sputter_1_.28Custom.29|Sputter 1 (Custom)]] <br /> | width=&quot;65&quot; bgcolor=&quot;#DAF1FF&quot; | [[Sputtering Recipes#Sputter_2_.28SFI_Endeavor.29|Sputter 2&lt;br&gt;(SFI Endeavor)]] <br /> | width=&quot;65&quot; bgcolor=&quot;#DAF1FF&quot; | [[Sputtering Recipes#Sputter_3_.28ATC_2000-F.29|Sputter 3&lt;br&gt;(ATC 2000-F)]] <br /> | width=&quot;65&quot; bgcolor=&quot;#DAF1FF&quot; | [[Sputtering Recipes#Sputter_4_.28ATC_2200-V.29|Sputter 4&lt;br&gt;(ATC 2200-V)]] <br /> | width=&quot;65&quot; bgcolor=&quot;#DAF1FF&quot; | [[Sputtering Recipes#Sputter_5_.28Lesker_AXXIS.29|Sputter 5 (Lesker AXXIS)]] <br /> | width=&quot;55&quot; bgcolor=&quot;#DAF1FF&quot; | [[Ion Beam Deposition (Veeco NEXUS)|Ion Beam&lt;br&gt;Deposition (Tool)]] <br /> | width=&quot;45&quot; bgcolor=&quot;#DAF1FF&quot; | [[Thermal Evaporation Recipes#Thermal_Evap_1|Thermal&lt;br&gt;Evap 1]] <br /> | width=&quot;65&quot; bgcolor=&quot;#DAF1FF&quot; | [[Thermal Evaporation Recipes#Thermal_Evap_2_.28Solder.29|Thermal Evap 2 (Solder)]] <br /> | width=&quot;65&quot; bgcolor=&quot;#DAF1FF&quot; | [[PECVD Recipes#PECVD_1_.28PlasmaTherm_790.29|PECVD 1&lt;br&gt;(PlasmaTherm 790)]] <br /> | width=&quot;65&quot; bgcolor=&quot;#DAF1FF&quot; | [[PECVD Recipes#PECVD_2_.28Advanced_Vacuum.29|PECVD 2&lt;br&gt;(Advanced Vacuum)]] <br /> | width=&quot;65&quot; bgcolor=&quot;#DAF1FF&quot; | [[PECVD Recipes#Unaxis_VLR_ICP-PECVD|Unaxis VLR ICP-PECVD]] <br /> | width=&quot;65&quot; bgcolor=&quot;#DAF1FF&quot; | [[Atomic Layer Deposition (Oxford FlexAL)|Atomic Layer Deposition (Tool)]] <br /> | width=&quot;65&quot; bgcolor=&quot;#DAF1FF&quot; | [[Molecular Vapor Deposition|Molecular Vapor Deposition (Tool)]]<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | Ag <br /> | bgcolor=&quot;EEFFFF&quot; | {{Al/E1}} <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | {{Al/E3}} <br /> | bgcolor=&quot;EEFFFF&quot; | {{Al/E4}} <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | Al <br /> | {{Al/E1}} <br /> | &lt;br&gt; <br /> | {{Al/E3}} <br /> | {{Al/E4}} <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | Al&lt;sub&gt;2&lt;/sub&gt;O&lt;sub&gt;3&lt;/sub&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | {{Al/E1}} <br /> | bgcolor=&quot;EEFFFF&quot; | {{Al/E2}} <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | {{rl|Atomic Layer Deposition Recipes|Al2O3 deposition (ALD)}} <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | AlN <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | {{rl|Atomic Layer Deposition Recipes|AlN deposition (ALD)}} <br /> | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | Au <br /> | bgcolor=&quot;EEFFFF&quot; | {{Al/E1}} <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | {{Al/E3}} <br /> | bgcolor=&quot;EEFFFF&quot; | {{Al/E4}} <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | B <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | Co <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | {{Al/E4}} <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | Cr <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | {{Al/E4}} <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | Cu <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | Fe <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | {{Al/E4}} <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | Ge <br /> | bgcolor=&quot;EEFFFF&quot; | {{Al/E1}} <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | {{Al/E3}} <br /> | bgcolor=&quot;EEFFFF&quot; | {{Al/E4}} <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | GeO&lt;sub&gt;2&lt;/sub&gt;<br /> | <br /> | {{Al/E2}} <br /> | <br /> | <br /> | <br /> | <br /> | <br /> | <br /> | <br /> | <br /> | <br /> | <br /> | <br /> | <br /> | <br /> | <br /> | <br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | Hf <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | {{Al/E4}} <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | HfO&lt;sub&gt;2&lt;/sub&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | {{rl|Atomic Layer Deposition Recipes|HfO2 deposition (ALD)}} <br /> | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | In <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | Ir <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | {{Al/E4}} <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | ITO <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | {{Al/E2}} <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | MgO<br /> | <br /> | {{Al/E2}} <br /> | <br /> | <br /> | <br /> | <br /> | <br /> | <br /> | <br /> | <br /> | <br /> | <br /> | <br /> | <br /> | <br /> | <br /> | <br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | Mo <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | Nb <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | Ni <br /> | bgcolor=&quot;EEFFFF&quot; | {{Al/E1}} <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | {{Al/E3}} <br /> | bgcolor=&quot;EEFFFF&quot; | {{Al/E4}} <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | NiCr<br /> | <br /> | <br /> | <br /> | {{Al/E4}} <br /> | <br /> | <br /> | <br /> | <br /> | <br /> | <br /> | <br /> | <br /> | <br /> | <br /> | <br /> | <br /> | <br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | NiFe<br /> | bgcolor=&quot;EEFFFF&quot; | <br /> | bgcolor=&quot;EEFFFF&quot; | <br /> | bgcolor=&quot;EEFFFF&quot; | <br /> | bgcolor=&quot;EEFFFF&quot; | {{Al/E4}}<br /> | bgcolor=&quot;EEFFFF&quot; | <br /> | bgcolor=&quot;EEFFFF&quot; | <br /> | bgcolor=&quot;EEFFFF&quot; | <br /> | bgcolor=&quot;EEFFFF&quot; | <br /> | bgcolor=&quot;EEFFFF&quot; | <br /> | bgcolor=&quot;EEFFFF&quot; | <br /> | bgcolor=&quot;EEFFFF&quot; | <br /> | bgcolor=&quot;EEFFFF&quot; | <br /> | bgcolor=&quot;EEFFFF&quot; | <br /> | bgcolor=&quot;EEFFFF&quot; | <br /> | bgcolor=&quot;EEFFFF&quot; | <br /> | bgcolor=&quot;EEFFFF&quot; | <br /> | bgcolor=&quot;EEFFFF&quot; | <br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | Pd <br /> | {{Al/E1}} <br /> | &lt;br&gt; <br /> | {{Al/E3}} <br /> | {{Al/E4}} <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | Pt <br /> | bgcolor=&quot;EEFFFF&quot; | {{Al/E1}} <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | {{Al/E3}} <br /> | bgcolor=&quot;EEFFFF&quot; | {{Al/E4}} <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | Ru <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | {{Al/E4}} <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | Si <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | {{Al/E2}} <br /> | bgcolor=&quot;EEFFFF&quot; | {{Al/E3}} <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | SiN <br /> | {{Al/E1}} <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | {{rl|Sputtering Recipes|SiN deposition (IBD)}} <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | {{rl|PECVD Recipes|SiN deposition (PECVD #1)}} <br /> | {{rl|PECVD Recipes|SiN deposition (PECVD #2)}} <br /> | {{rl|PECVD Recipes|SiN deposition (Unaxis VLR)}} <br /> | &lt;br&gt; <br /> | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | SiO&lt;sub&gt;2&lt;/sub&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | {{Al/E2}} <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | {{rl|Sputtering Recipes|SiO2 deposition (IBD)}} <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | {{rl|PECVD Recipes|SiO2 deposition (PECVD #1)}} <br /> | bgcolor=&quot;EEFFFF&quot; | {{rl|PECVD Recipes|SiO2 deposition (PECVD #2)}} <br /> | bgcolor=&quot;EEFFFF&quot; | {{rl|PECVD Recipes|SiO2 deposition (Unaxis VLR)}} <br /> | bgcolor=&quot;EEFFFF&quot; | {{rl|Atomic Layer Deposition Recipes|SiO2 deposition (ALD)}} <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | SiO&lt;sub&gt;x&lt;/sub&gt;N&lt;sub&gt;y&lt;/sub&gt; <br /> | &lt;br&gt; <br /> | {{Al/E2}} <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | Sn <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | SrF&lt;sub&gt;2&lt;/sub&gt; <br /> | &lt;br&gt; <br /> | {{Al/E2}} <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | Ta <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | Ta&lt;sub&gt;2&lt;/sub&gt;O&lt;sub&gt;5&lt;/sub&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | {{Al/E2}} <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | {{rl|Sputtering Recipes|Ta2O5 deposition (IBD)}} <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | Ti <br /> | bgcolor=&quot;EEFFFF&quot; | {{Al/E1}} <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | {{Al/E3}} <br /> | bgcolor=&quot;EEFFFF&quot; | {{Al/E4}} <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | TiN <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | TiO&lt;sub&gt;2&lt;/sub&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | {{Al/E2}} <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | {{Rl|Sputtering Recipes|TiO2 deposition (IBD)}}<br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | {{rl|Atomic Layer Deposition Recipes|TiO2 deposition (ALD)}} <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | V <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | W <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | Zn <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | ZnO&lt;sub&gt;2&lt;/sub&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | Zr <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | {{Al/E4}} <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt;<br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | ZrO&lt;sub&gt;2&lt;/sub&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt; <br /> | bgcolor=&quot;EEFFFF&quot; | {{rl|Atomic Layer Deposition Recipes|ZrO2 deposition (ALD)}} <br /> | bgcolor=&quot;EEFFFF&quot; | &lt;br&gt;<br /> |-<br /> ! width=&quot;20&quot; bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | '''Material''' <br /> | width=&quot;65&quot; bgcolor=&quot;#DAF1FF&quot; | [[E-Beam Evaporation Recipes#E-Beam_1_.28Sharon.29|E-Beam 1 (Sharon)]] <br /> | width=&quot;65&quot; bgcolor=&quot;#DAF1FF&quot; | [[E-Beam Evaporation Recipes#E-Beam_2_.28Custom.29|E-Beam 2 (Custom)]] <br /> | width=&quot;65&quot; bgcolor=&quot;#DAF1FF&quot; | [[E-Beam Evaporation Recipes#E-Beam_3_.28Temescal.29|E-Beam 3 (Temescal)]] <br /> | width=&quot;65&quot; bgcolor=&quot;#DAF1FF&quot; | [[E-Beam Evaporation Recipes#E-Beam_4_.28CHA.29|E-Beam 4 (CHA)]] <br /> | width=&quot;65&quot; bgcolor=&quot;#DAF1FF&quot; | [[Sputtering Recipes#Sputter_1_.28Custom.29|Sputter 1 (Custom)]] <br /> | width=&quot;65&quot; bgcolor=&quot;#DAF1FF&quot; | [[Sputtering Recipes#Sputter_2_.28SFI_Endeavor.29|Sputter 2&lt;br&gt;(SFI Endeavor)]] <br /> | width=&quot;65&quot; bgcolor=&quot;#DAF1FF&quot; | [[Sputtering Recipes#Sputter_3_.28ATC_2000-F.29|Sputter 3&lt;br&gt;(ATC 2000-F)]] <br /> | width=&quot;65&quot; bgcolor=&quot;#DAF1FF&quot; | [[Sputtering Recipes#Sputter_4_.28ATC_2200-V.29|Sputter 4&lt;br&gt;(ATC 2200-V)]] <br /> | width=&quot;65&quot; bgcolor=&quot;#DAF1FF&quot; | [[Sputtering Recipes#Sputter_5_.28Lesker_AXXIS.29|Sputter 5 (Lesker AXXIS)]] <br /> | width=&quot;55&quot; bgcolor=&quot;#DAF1FF&quot; | [[Ion Beam Deposition (Veeco NEXUS)|Ion Beam&lt;br&gt;Deposition (Tool)]] <br /> | width=&quot;45&quot; bgcolor=&quot;#DAF1FF&quot; | [[Thermal Evaporation Recipes#Thermal_Evap_1|Thermal&lt;br&gt;Evap 1]] <br /> | width=&quot;65&quot; bgcolor=&quot;#DAF1FF&quot; | [[Thermal Evaporation Recipes#Thermal_Evap_2_.28Solder.29|Thermal Evap 2 (Solder)]] <br /> | width=&quot;65&quot; bgcolor=&quot;#DAF1FF&quot; | [[PECVD Recipes#PECVD_1_.28PlasmaTherm_790.29|PECVD 1&lt;br&gt;(PlasmaTherm 790)]] <br /> | width=&quot;65&quot; bgcolor=&quot;#DAF1FF&quot; | [[PECVD Recipes#PECVD_2_.28Advanced_Vacuum.29|PECVD 2&lt;br&gt;(Advanced Vacuum)]] <br /> | width=&quot;65&quot; bgcolor=&quot;#DAF1FF&quot; | [[PECVD Recipes#Unaxis_VLR_ICP-PECVD|Unaxis VLR ICP-PECVD]] <br /> | width=&quot;65&quot; bgcolor=&quot;#DAF1FF&quot; | [[Atomic Layer Deposition (Oxford FlexAL)|Atomic Layer Deposition (Tool)]] <br /> | width=&quot;65&quot; bgcolor=&quot;#DAF1FF&quot; | [[Molecular Vapor Deposition|Molecular Vapor Deposition (Tool)]]<br /> |}</div> Prezioso m https://wiki.nanofab.ucsb.edu/w/index.php?title=Atomic_Layer_Deposition_Recipes&diff=2799 Atomic Layer Deposition Recipes 2013-07-05T00:41:50Z <p>Prezioso m: </p> <hr /> <div>{{recipes|Vacuum Deposition}}<br /> =[[Atomic Layer Deposition (Oxford FlexAL)]]=<br /> ==Al{{sub|2}}O{{sub|3}} deposition (ALD)==<br /> <br /> *{{fl|ALD-Al2O3-300-Recipe.pdf|Al{{sub|2}}O{{sub|3}} 300}}<br /> *{{fl|ALD-Al2O3-300-Saturated-Recipe.pdf|Al{{sub|2}}O{{sub|3}} 300 Saturated}}<br /> *{{fl|ALD-Al2O3-Plasma-300C-Recipe.pdf|Al{{sub|2}}O{{sub|3}} plasma 300C}}<br /> *{{fl|ALD-Al2O3-100-Recipe.pdf|Al{{sub|2}}O{{sub|3}} 100}}<br /> <br /> ==AlN deposition (ALD)==<br /> *{{fl|ALD-AlN-300-recipe.pdf|AlN 300}}<br /> <br /> ==HfO{{sub|2}} deposition (ALD)==<br /> *{{fl|ALD-HfO2-100-recipe.pdf|HfO{{sub|2}} 100}}<br /> *{{fl|ALD-HfO2-300-recipe.pdf|HfO{{sub|2}} 300}}<br /> <br /> ==SiO{{sub|2}} deposition (ALD)==<br /> *{{fl|ALD-SiO2-100-recipe.pdf|SiO{{sub|2}} 100}}<br /> *{{fl|ALD-SiO2-300-recipe.pdf|SiO{{sub|2}} 300}}<br /> <br /> ==ZrO{{sub|2}} deposition (ALD)==<br /> *{{fl|ALD-ZrO2-300-recipe.pdf|ZrO{{sub|2}} 300}}<br /> <br /> ==TiO{{sub|2}} deposition (ALD)==<br /> TiO{{sub|2}} recipe '''WJM_TDMAT_H2O_r2''' water dose 1s (pdf file to be added), at 200C, gives grow rate 0.11 nm/cy as measured by ellipsometer</div> Prezioso m https://wiki.nanofab.ucsb.edu/w/index.php?title=Atomic_Layer_Deposition_Recipes&diff=2798 Atomic Layer Deposition Recipes 2013-07-05T00:40:11Z <p>Prezioso m: </p> <hr /> <div>{{recipes|Vacuum Deposition}}<br /> =[[Atomic Layer Deposition (Oxford FlexAL)]]=<br /> ==Al{{sub|2}}O{{sub|3}} deposition (ALD)==<br /> <br /> *{{fl|ALD-Al2O3-300-Recipe.pdf|Al{{sub|2}}O{{sub|3}} 300}}<br /> *{{fl|ALD-Al2O3-300-Saturated-Recipe.pdf|Al{{sub|2}}O{{sub|3}} 300 Saturated}}<br /> *{{fl|ALD-Al2O3-Plasma-300C-Recipe.pdf|Al{{sub|2}}O{{sub|3}} plasma 300C}}<br /> *{{fl|ALD-Al2O3-100-Recipe.pdf|Al{{sub|2}}O{{sub|3}} 100}}<br /> <br /> ==AlN deposition (ALD)==<br /> *{{fl|ALD-AlN-300-recipe.pdf|AlN 300}}<br /> <br /> ==HfO{{sub|2}} deposition (ALD)==<br /> *{{fl|ALD-HfO2-100-recipe.pdf|HfO{{sub|2}} 100}}<br /> *{{fl|ALD-HfO2-300-recipe.pdf|HfO{{sub|2}} 300}}<br /> <br /> ==SiO{{sub|2}} deposition (ALD)==<br /> *{{fl|ALD-SiO2-100-recipe.pdf|SiO{{sub|2}} 100}}<br /> *{{fl|ALD-SiO2-300-recipe.pdf|SiO{{sub|2}} 300}}<br /> <br /> ==ZrO{{sub|2}} deposition (ALD)==<br /> *{{fl|ALD-ZrO2-300-recipe.pdf|ZrO{{sub|2}} 300}}<br /> <br /> ==TiO{{sub|2}} deposition (ALD)==<br /> TiO{{sub|2}} recipe '''WJM_TDMAT_H2O_r2''' water dose 1s, at 200C, gives grow rate 0.11 nm/cy as measured by ellipsometer (pdf file to be added)</div> Prezioso m https://wiki.nanofab.ucsb.edu/w/index.php?title=Atomic_Layer_Deposition_Recipes&diff=2797 Atomic Layer Deposition Recipes 2013-07-05T00:32:27Z <p>Prezioso m: </p> <hr /> <div>{{recipes|Vacuum Deposition}}<br /> =[[Atomic Layer Deposition (Oxford FlexAL)]]=<br /> ==Al{{sub|2}}O{{sub|3}} deposition (ALD)==<br /> <br /> *{{fl|ALD-Al2O3-300-Recipe.pdf|Al{{sub|2}}O{{sub|3}} 300}}<br /> *{{fl|ALD-Al2O3-300-Saturated-Recipe.pdf|Al{{sub|2}}O{{sub|3}} 300 Saturated}}<br /> *{{fl|ALD-Al2O3-Plasma-300C-Recipe.pdf|Al{{sub|2}}O{{sub|3}} plasma 300C}}<br /> *{{fl|ALD-Al2O3-100-Recipe.pdf|Al{{sub|2}}O{{sub|3}} 100}}<br /> <br /> ==AlN deposition (ALD)==<br /> *{{fl|ALD-AlN-300-recipe.pdf|AlN 300}}<br /> <br /> ==HfO{{sub|2}} deposition (ALD)==<br /> *{{fl|ALD-HfO2-100-recipe.pdf|HfO{{sub|2}} 100}}<br /> *{{fl|ALD-HfO2-300-recipe.pdf|HfO{{sub|2}} 300}}<br /> <br /> ==SiO{{sub|2}} deposition (ALD)==<br /> *{{fl|ALD-SiO2-100-recipe.pdf|SiO{{sub|2}} 100}}<br /> *{{fl|ALD-SiO2-300-recipe.pdf|SiO{{sub|2}} 300}}<br /> <br /> ==ZrO{{sub|2}} deposition (ALD)==<br /> *{{fl|ALD-ZrO2-300-recipe.pdf|ZrO{{sub|2}} 300}}<br /> <br /> ==TiO{{sub|2}} deposition (ALD)==<br /> TiO{{sub|2}} recipe '''WJM_TDMAT_H2O_r2''' water dose 1s, at 200C, gives grow rate 0.11 nm/cy (pdf file to be added)</div> Prezioso m https://wiki.nanofab.ucsb.edu/w/index.php?title=Atomic_Layer_Deposition_(Oxford_FlexAL)&diff=2796 Atomic Layer Deposition (Oxford FlexAL) 2013-07-05T00:20:01Z <p>Prezioso m: </p> <hr /> <div>{{tool|{{PAGENAME}}<br /> |picture=FlexAL.jpg<br /> |type = Vacuum Deposition<br /> |super= Brian Lingg<br /> |phone=(805)839-3918x210<br /> |location=Bay 2<br /> |email=lingg@ece.ucsb.edu<br /> |description = Oxford FlexAL Atomic Layer Deposition<br /> |manufacturer = [http://www.oxford-instruments.com/businesses/plasma-technology/Pages/plasma-technology.aspx Oxford Instruments Plasma Technologies]<br /> |materials = <br /> |toolid=6<br /> }} <br /> = About =<br /> The Oxford Instruments FlexAL Atomic Layer Deposition system at UCSB is a plasma-enhanced ALD system for the precise growth of ultra-thin oxides and nitrides. Self-limiting layer by layer growth ensures precise control, film conformality, and repeatability of the films. The system currently has metallorganic precursors for Aluminum, Hafnium, Zirconium, and Silicon oxides and nitrides. Water is available for thermal oxides and Oxygen, Nitrogen, and Hydrogen are available for plasma assisted oxides and nitrides. Remote ICP plasma powers up to 600W are possible. The system is load-locked and can accommodate sample temperatures up to 550°C. Processing temperature windows are defined for each material based on growth limitations. The system is step-by-step programmable through a flexible GUI interface. In-situ ellipsometry between growth cycles and mass spectrometry during growth are both available.<br /> <br /> =Documentation=<br /> *[[media:ALD-Operating-Instrucitons.pdf|Operating Instructions]]</div> Prezioso m