UCSB Nanofab Wiki - Recent changes [en]

RIE 2 (MRC)

John d — Fri, 05 Jun 2026 03:07:04 GMT

added link to recipes

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	*[https://wiki.nanofab.ucsb.edu/w/images/8/84/RIE_2_SOP_Rev_D.pdf RIE #2 Standard Operating Procedure]		*[https://wiki.nanofab.ucsb.edu/w/images/8/84/RIE_2_SOP_Rev_D.pdf RIE #2 Standard Operating Procedure]

			== Recipes ==
			[[RIE Etching Recipes#RIE 2 .28MRC.29\|'''RIE#2 Recipes''']] - lists staff-qualified recipes and results/variations. Contact tool supervisor if you want to try etching unlisted materials.

Lab Rules

John d — Thu, 04 Jun 2026 22:27:54 GMT

Procedure for the Use and Handling of Precious Metals

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	#All precious metals (as well as other materials paid for by the Nanofab) are the property of the Nanofab. They are not to be used for any other purpose than for use within Nanofab systems. The materials must remain in the Nanofab at all times.		#All precious metals (as well as other materials paid for by the Nanofab) are the property of the Nanofab. They are not to be used for any other purpose than for use within Nanofab systems. The materials must remain in the Nanofab at all times.
	#Gold, platinum, palladium, and various alloys of these metals are stocked by the UCSB Nanofab and are provided for in the hourly recharge fee. Each research group can be issued a precious metal supply. You should check with your group first before contacting the Nanofab. Please contact the Nanofab Director for precious metals, thibeault@ece.ucsb.edu.[[File:Lab Rules - 1.15.2 metals lock box.png\|thumb\|121x121px]]		#Gold, platinum, palladium, and various alloys of these metals are stocked by the UCSB Nanofab and are provided for in the hourly recharge fee. Each research group can be issued a precious metal supply. You should check with your group first before contacting the Nanofab. Please contact the Nanofab Director for precious metals, thibeault@ece.ucsb.edu.[[File:Lab Rules - 1.15.2 metals lock box.png\|thumb\|121x121px]]
	#This supply must be stored in a small lockable container, along with a log sheet for recording the use of these metals. Precious metals, the lockable security container, and log sheets will be issued by the Nanofab manager. All use of precious metals must be accurately recorded on the log sheet, and include user name, date, metal type, metal weight before use, and metal weight after use. '''Any discrepancies, such as over use or loss of the precious metals will be invoiced to the responsible group/company. Loss of a precious metal lock box will be reported to the local UCSB police and will elevate the issue as this is may constitute theft.''' Please make sure you are careful with your metal supply as you would be with your own money.		#This supply must be stored in a small lockable container, along with a log sheet for recording the use of these metals. Precious metals, the lockable security container, and log sheets will be issued by the Nanofab manager. All use of precious metals must be accurately recorded on the log sheet, and include user name, date, metal type, metal weight before use, and metal weight after use. '''Any discrepancies, such as over use or loss of the precious metals will be invoiced to the responsible group/company. Loss of a precious metal lock box will be reported to the local UCSB police and will elevate the issue as this is may constitute theft.''' Please make sure you are careful with your metal supply as you would be with your own money. [[File:Lab Rules - 1.15.4 metals weighing scale.png\|thumb\|151x151px]]
	#Every group is responsible for keeping their supply of precious metals up to date and full. But since all users are sharing the same lab supply of provided metals it is fine to share metals between groups if there are extenuating circumstances that prevented a group from having sufficient precious metal supply. It must be correctly noted in the other group’s log sheets that metal was used.		#Every group is responsible for keeping their supply of precious metals up to date and full. But since all users are sharing the same lab supply of provided metals it is fine to share metals between groups if there are extenuating circumstances that prevented a group from having sufficient precious metal supply. It must be correctly noted in the other group’s log sheets that metal was used.
	#To request more metals, email the operational director your request and leave the lockbox in the labeled blue bin located on the wire rack in the gowning room entryway. You will be notified by email when the metal has been replenished and your box has been returned to the blue bin.[[File:Lab Rules - 1.15.4 metals weighing scale.png\|thumb\|151x151px]]
	#Multiple digital scales have been acquired and placed throughout the Nanofab to facilitate weighing of these metals. When requesting additional precious metals, the completed log sheet must be presented to the Nanofab manager. Any discrepancies or loss in recorded precious metal use will result in charges to the principle investigator/company corresponding to the value of the precious metal missing.		#Multiple digital scales have been acquired and placed throughout the Nanofab to facilitate weighing of these metals. When requesting additional precious metals, the completed log sheet must be presented to the Nanofab manager. Any discrepancies or loss in recorded precious metal use will result in charges to the principle investigator/company corresponding to the value of the precious metal missing.
	#Any loose precious metal lock boxes left out or any loose unmarked precious metals found in the lab either in a plastic bags, tins or individually laying on the floor should be returned to the lab manager for reclaim.		#Any loose precious metal lock boxes left out or any loose unmarked precious metals found in the lab either in a plastic bags, tins or individually laying on the floor should be returned to the lab manager for reclaim.

			==== Procedure to request more metals ====
			# email [mailto:nanofab-metal-refill@ece.ucsb.edu nanofab-metal-refill@ece.ucsb.edu], with the following info:
			# Your group name (labelled on your lockbox)
			# What metals you need refilled
			# The code to your lockbox
			# And leave the lockbox in the labeled blue bin located on the wire rack in the gowning room entryway.
			# You will be notified by email when the metal has been replenished and your box has been returned to the blue bin.

	===Surveillance Cameras===		===Surveillance Cameras===

Tool List

John d — Mon, 01 Jun 2026 18:22:43 GMT

Lithography: deleted Stepper 1

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	=====Steppers (Optical Exposure)=====		=====Steppers (Optical Exposure)=====

	*[[Stepper 1 (GCA 6300)\|Stepper 1 (GCA 6300, i-line)]]
	*[[Stepper 2 (AutoStep 200)\|Stepper 2 (AutoStep 200, i-line)]]		*[[Stepper 2 (AutoStep 200)\|Stepper 2 (AutoStep 200, i-line)]]
	*[[Stepper 3 (ASML DUV)\|Stepper 3 (ASML DUV, Deep-UV)]]		*[[Stepper 3 (ASML DUV)\|Stepper 3 (ASML DUV, Deep-UV)]]

Decomissioned Tools

John d — Mon, 01 Jun 2026 18:22:23 GMT

added Stepepr 1

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	*[[E-Beam Lithography System (JEOL JBX-6300FS)]]		*[[E-Beam Lithography System (JEOL JBX-6300FS)]]
	*[[Nano-Imprint (Nanonex NX2000)]]		*[[Nano-Imprint (Nanonex NX2000)]]
			*[[Stepper 1 (GCA 6300)]]

	==Vacuum Deposition==		==Vacuum Deposition==

Stepper 1 (GCA 6300)

John d — Mon, 01 Jun 2026 18:21:35 GMT

tool removed notice

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 == About ==
 Our GCA wafer stepper is an i-line (365 nm) step and repeat exposure tool for doing lithography that requires high resolution and/or critical alignment. The system has been modified to accept piece parts (down to ~15 mm x 15 mm) up to 6” diameter wafers using manual wafer loading. The maximum square die size is 14.8mm x 14.8mm. The system has an Olympus 2142 (N.A. = 0.42) lens that reduces the mask image by 5 x and gives an ultimate resolution of ~ 0.5 um in the center of the lens field. The system can easily produce 0.7 um isolated lines across the entire field. Autofocus is used to determine the sample surface relative to the lens, making the focus stable and repeatable for different thickness of wafer. The stages are controlled by stepper motors and laser interferometers. Using the global, manual alignment, better than 0.25 um alignment error is achievable. Using the DFAS local alignment system, alignment error better than 0.15 um is achieved. With the 350 W Hg arc lamp, we get approximately 180 mW/cm² of i-line intensity at the wafer.

Nanofab Job Postings

Noahdutra — Mon, 01 Jun 2026 17:02:57 GMT

Closed internship page and edited some details

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	=== Intern - Processing Technician ===		=== Intern - Processing Technician ===
	*'''~~Fall~~ ~~2026~~ ~~positions~~'''		*'''2027-2028 Academic Year Positions'''
	**All positions are currently full through Summer ~~2026~~.		**All positions are currently full through Summer 2027.
	**We will start interviewing for ~~Fall 2026~~ openings in '''April/May ~~2026~~'''.		**We will start interviewing for 2027-2028 openings in '''April/May 2027'''.
	*This position is open to Local High-School students, City College students, UCSB students or non-students.		*This position is open to Local High-School students, City College students, UCSB students or non-students.
	*No Prerequisites nor experience required.		*No Prerequisites nor experience required.
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	**Will transition into Lithography & Plasma-Etch & Vacuum Deposition calibrations over time.		**Will transition into Lithography & Plasma-Etch & Vacuum Deposition calibrations over time.
	**Detailed info here: [[Process Group Internships]]		**Detailed info here: [[Process Group Internships]]
	*To Apply: You can send an email to [[Demis D. John\|Demis]]. We review apps every ~2-4 months, so you will receive a response ~4-6 weeks later once we start looking to fill the next cohort. Ok to ~~followup~~ and make sure we got it. Please send the following info:		*To Apply: You can send an email to [[Noah Dutra\|Noah]] and [[Demis D. John\|Demis]]. We review apps every ~2-4 months, so you will receive a response ~4-6 weeks later once we start looking to fill the next cohort. Ok to follow-up and make sure we got it. Please send the following info:
	**'''Your Résumé.''' List any hands-on and/or technical experience, paid or unpaid (including hobbies).		**'''Your Résumé.''' List any hands-on and/or technical experience, paid or unpaid (including hobbies).
	**'''What grade/year you are in''', if a student, and what school.		**'''What grade/year you are in''', if a student, and what school.
	***Seniors ~~often~~ can't do 6 month-long ~~internships,~~ ~~due to~~ graduation!		***Seniors, please make sure you can do a 6 month-long internship bearing graduation in mind!
	**Can you work during the summer as well? Not required, but helpful.		**Can you work during the summer as well? Not required, but helpful.

	==Filled/Closed Positions==		==Filled/Closed Positions==

	*'''''Internships are FULL through August ~~2026~~.'''''		*'''''Internships are FULL through August 2027.'''''

	==View all Nanofab Job Openings==		==View all Nanofab Job Openings==