https://wiki.nanofab.ucsb.edu/w/index.php?action=history&feed=atom&title=ASML_5500%3A_Choose_Marks_for_PrealignmentASML 5500: Choose Marks for Prealignment - Revision history2026-04-08T22:13:03ZRevision history for this page on the wikiMediaWiki 1.43.6https://wiki.nanofab.ucsb.edu/w/index.php?title=ASML_5500:_Choose_Marks_for_Prealignment&diff=155285&oldid=prevJohn d: added global mark updating2018-07-17T21:17:56Z<p>added global mark updating</p>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>## The wafer schematic shows which alignment marks you are choosing.</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>## The alignment marks, defined on a previous layer (usually combined with the first litho), are programmed/named in: ''<to be added: where in the program the AlMks are defined>''</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>## The alignment marks, defined on a previous layer (usually combined with the first litho), are programmed/named in: ''<to be added: where in the program the AlMks are defined>''</div></td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div># Your "Fine" alignment marks will probably also fail if they're set to use the same marks! Fix this by editing your '''Wafer Layout > Alignment Strategy''', and select different alignment marks or set some "backup" marks. Make sure your '''Layer Layout > Strategy Selection''' is using this new/updated strategy.</div></td>
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</table>John dhttps://wiki.nanofab.ucsb.edu/w/index.php?title=ASML_5500:_Choose_Marks_for_Prealignment&diff=154941&oldid=prevJohn d: initial, instructions on how to edit Optical Prealignment alignment choice2018-03-28T16:47:30Z<p>initial, instructions on how to edit Optical Prealignment alignment choice</p>
<p><b>New page</b></p><div>How to edit your job and choose which alignment marks the system will use for optical prealignment, performed on the P-Chuck (before wafer is moved to the exposure E-Chuck).<br />
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# Edit your job with Modify Job<br />
# Go to '''''Layer Layout > Process Data'''''<br />
# Use Layer: '''''(Prev)''''' / '''''(Next)''''' to select the layer you need to change alignment marks for<br />
# Under '''''Prealignment Mode''''': '''''Selection: Mark 1___ & Mark 2___''''' choose the alignment marks to align to, and use a microscope to make sure these alignment marks are (a) present on your wafer and (b) look ok with no defects.<br />
## The wafer schematic shows which alignment marks you are choosing.<br />
## The alignment marks, defined on a previous layer (usually combined with the first litho), are programmed/named in: ''<to be added: where in the program the AlMks are defined>''</div>John d