ASML 5500: Recovering from an Error - Revision history

John d: updated, linked to Error Logs section

2023-09-15T17:41:22Z

updated, linked to Error Logs section

← Older revision		Revision as of 17:41, 15 September 2023
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	#'''Do NOT exit ''Task Streaming''!'''		#'''Do NOT exit ''Task Streaming''!'''
	##If you exit the Task Streaming screen, the batch will not be able to be aborted, usually requiring a software ~~reboot~~.		##If you exit the Task Streaming screen, the batch will not be able to be aborted, usually requiring a software restart.
	#If an "'''Abort Batch'''" Popup window appears:		#If an "'''Abort Batch'''" Popup window appears:
	##Click the "'''Help'''" button, and take photos of the error chain		##Click the "'''Help'''" button, and take photos of the error chain.
			###See [[ASML Stepper 3 Error Recovery, Troubleshooting and Calibration#Error Logs: Finding the root-cause of a failure\|the <u>Error Logs</u> page]] for an example.
	##Click the "'''Help'''" button again, and write down timestamp of error in logbook/take screenshot - this helps an engineer analyze the log file.		##Click the "'''Help'''" button again, and write down timestamp of error in logbook/take screenshot - this helps an engineer analyze the log file.
			##Click either:
⚫	##~~Choose~~ "'''Abort Batch, Clear Litho Cluster'''" -
			###'''"Abort Batch, Clear Stepper"'''
⚫	###This will send all your wafers through the stepper, from Port 1 → Port 2. Thus no wafers will be waiting for exposure. ~~This~~ is the ~~easiest~~ ~~way~~ to ~~make~~ ~~sure~~ ~~all~~ ~~wafers~~ are ~~taken~~ ~~out~~ of the ~~machine~~.
			####This removes only wafers that are in the system and puts them in the Output Port/Cassette #2. You will need to keep track of which wafers were exposed and which were not.
			####Unexposed wafers in Input Port/Cassette #1 will not be picked up.
		⚫	###"'''Abort Batch, Clear Litho Cluster'''"
		⚫	####This will send all your wafers through the stepper, from Port 1 → Port 2. Thus no wafers will be waiting for exposure. Even unexposed wafers in the Input port will be sent ''through'' the system until they are all loaded in the output port. Port 2.
	##Wait for the task status to change from "Aborting" to "Abort'''ed'''"		##Wait for the task status to change from "Aborting" to "Abort'''ed'''"
	#Abort the Batch: Make sure all batches say "Aborted" or "Completed". If not, choose the task from the Task List, click Batch > "Abort". May need to also click '''''Queue > Stop''''', and '''''Queue > Clear'''''.		#Abort the Batch: Make sure all batches say "Aborted" or "Completed". If not, choose the task from the Task List, click Batch > "Abort". May need to also click '''''Queue > Stop''''', and '''''Queue > Clear'''''.

John d: addl info on unload wafers + reticles

2022-08-24T23:34:20Z

addl info on unload wafers + reticles

← Older revision		Revision as of 23:34, 24 August 2022
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	# '''Do NOT exit ''Task Streaming''!'''		#'''Do NOT exit ''Task Streaming''!'''
	## If you exit the Task Streaming screen, the batch will not be able to be aborted, usually requiring a software reboot.		##If you exit the Task Streaming screen, the batch will not be able to be aborted, usually requiring a software reboot.
	# If an "'''Abort Batch'''" Popup window appears:		#If an "'''Abort Batch'''" Popup window appears:
	## Click the "'''Help'''" button, and take photos of the error chain		##Click the "'''Help'''" button, and take photos of the error chain
	## Click the "'''Help'''" button again, and write down timestamp of error in logbook/take screenshot - this helps an engineer analyze the log file.		##Click the "'''Help'''" button again, and write down timestamp of error in logbook/take screenshot - this helps an engineer analyze the log file.
	## Choose "'''Abort Batch, Clear Litho Cluster'''" -		##Choose "'''Abort Batch, Clear Litho Cluster'''" -
	### This will send all your wafers through the stepper, from Port 1 → Port 2. Thus no wafers will be waiting for exposure. This is the easiest way to make sure all wafers are taken out of the machine.		###This will send all your wafers through the stepper, from Port 1 → Port 2. Thus no wafers will be waiting for exposure. This is the easiest way to make sure all wafers are taken out of the machine.
	## Wait for the task status to change from "Aborting" to "Abort'''ed'''"		##Wait for the task status to change from "Aborting" to "Abort'''ed'''"
	# Abort the Batch: Make sure all batches say "Aborted" or "Completed". If not, choose the task from the Task List, click Batch > "Abort". May need to also click '''''Queue: Stop'''''.		#Abort the Batch: Make sure all batches say "Aborted" or "Completed". If not, choose the task from the Task List, click Batch > "Abort". May need to also click '''''Queue > Stop''''', and '''''Queue > Clear'''''.
	# ~~Make~~ ~~sure~~ ~~the~~ ~~reticle~~ ~~was~~ ~~unloaded:~~ (MAT HDL) > Remove ~~Reticles~~ From Machine		#If wafers are left in the machine, try ''(MAT HDL) > Remove Wafers From Machine''
			#Make sure the reticle was unloaded: ''(MAT HDL) > Remove Reticles From Machine''
⚫	Your wafer(s) should be removed to Port #2, and the task should state "Aborted" on the task list. Only ~~then~~ is it safe to exit the ''Task Streaming'' screen.
			##Make sure the System reticle "45440..." goes back into Box #1!
			##UNCHECK "Unlock Boxes"

		⚫	Your wafer(s) should be removed to Port #2, and the task should state "Aborted" on the task list. Only once no Tasks are trying to run is it safe to exit the ''Task Streaming'' screen.
⚫	Please make sure there are no tasks in the "''Waiting''" state - please abort/cancel these tasks before leaving the system, or the next user's wafers will be shot with your job!

		⚫	Please make sure there are no tasks in the "''Waiting''" state - please abort/cancel these tasks before leaving the system, or the next user's wafers will be shot with your job! You can do '''''Queue > Clear''''' to be sure.

John d: Remove reticle

2020-03-17T21:46:16Z

Remove reticle

← Older revision		Revision as of 21:46, 17 March 2020
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	## Wait for the task status to change from "Aborting" to "Abort'''ed'''"		## Wait for the task status to change from "Aborting" to "Abort'''ed'''"
	# Abort the Batch: Make sure all batches say "Aborted" or "Completed". If not, choose the task from the Task List, click Batch > "Abort". May need to also click '''''Queue: Stop'''''.		# Abort the Batch: Make sure all batches say "Aborted" or "Completed". If not, choose the task from the Task List, click Batch > "Abort". May need to also click '''''Queue: Stop'''''.
			# Make sure the reticle was unloaded: (MAT HDL) > Remove Reticles From Machine
	Your wafer(s) should be removed to Port #2, and the task should state "Aborted" on the task list. Only then is it safe to exit the ''Task Streaming'' screen.		Your wafer(s) should be removed to Port #2, and the task should state "Aborted" on the task list. Only then is it safe to exit the ''Task Streaming'' screen.

John d: minor formats

2018-12-08T16:24:23Z

minor formats

← Older revision		Revision as of 16:24, 8 December 2018
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	# Do NOT exit ~~task~~ ~~streaming~~!		# '''Do NOT exit ''Task Streaming''!'''
	## If you exit the Task Streaming screen, the batch will not be able to be aborted, usually requiring a software reboot.		## If you exit the Task Streaming screen, the batch will not be able to be aborted, usually requiring a software reboot.
	# If an "'''Abort Batch'''" Popup window appears:		# If an "'''Abort Batch'''" Popup window appears:
	## Click the "'''Help'''" button, and take photos of the error chain		## Click the "'''Help'''" button, and take photos of the error chain
	## Click the "'''Help'''" button again, and write down timestamp of error in logbook/take screenshot - this helps engineer analyze the log file.		## Click the "'''Help'''" button again, and write down timestamp of error in logbook/take screenshot - this helps an engineer analyze the log file.
	## Choose "'''Abort Batch, Clear Litho Cluster'''" -		## Choose "'''Abort Batch, Clear Litho Cluster'''" -
	### This will send all your wafers through the stepper, from Port 1 → Port 2. Thus no wafers will be waiting for exposure. This is the easiest way to make sure all wafers are taken out of the machine.		### This will send all your wafers through the stepper, from Port 1 → Port 2. Thus no wafers will be waiting for exposure. This is the easiest way to make sure all wafers are taken out of the machine.
	## Wait for the task status to change from "Aborting" to "~~Aborted~~"		## Wait for the task status to change from "Aborting" to "Abort'''ed'''"
	# Abort the Batch: Make sure all batches say "Aborted" or "Completed". If not, choose the task from the Task List, click Batch > "Abort". May need to also click '''''Queue: Stop'''''.		# Abort the Batch: Make sure all batches say "Aborted" or "Completed". If not, choose the task from the Task List, click Batch > "Abort". May need to also click '''''Queue: Stop'''''.
	Your wafer(s) should be removed to Port #2, and the task should state "Aborted" on the task list. Only then is it safe to exit the ''Task Streaming'' screen.		Your wafer(s) should be removed to Port #2, and the task should state "Aborted" on the task list. Only then is it safe to exit the ''Task Streaming'' screen.

John d: minor wording

2018-10-05T20:51:03Z

minor wording

← Older revision		Revision as of 20:51, 5 October 2018
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	## Wait for the task status to change from "Aborting" to "Aborted"		## Wait for the task status to change from "Aborting" to "Aborted"
	# Abort the Batch: Make sure all batches say "Aborted" or "Completed". If not, choose the task from the Task List, click Batch > "Abort". May need to also click '''''Queue: Stop'''''.		# Abort the Batch: Make sure all batches say "Aborted" or "Completed". If not, choose the task from the Task List, click Batch > "Abort". May need to also click '''''Queue: Stop'''''.
	Your wafer(s) should be removed to Port #2, and the task should state "Aborted" on the task list.		Your wafer(s) should be removed to Port #2, and the task should state "Aborted" on the task list. Only then is it safe to exit the ''Task Streaming'' screen.

	Please make sure there are no tasks in the "Waiting" state - please abort these tasks before leaving the system, or the next user's wafers will be shot with your job!		Please make sure there are no tasks in the "''Waiting''" state - please abort/cancel these tasks before leaving the system, or the next user's wafers will be shot with your job!

John d: added instruciton to hit Help button

2018-10-05T14:56:45Z

added instruciton to hit Help button

@@ Line 1: / Line 1: @@
 # Do NOT exit task streaming!
 ## If you exit the Task Streaming screen, the batch will not be able to be aborted, usually requiring a software reboot.
 Your wafer(s) should be removed to Port #2, and the task should state "Aborted" on the task list.

John d: explained that wafers will be transferred thru stepper

2018-03-21T06:58:04Z

explained that wafers will be transferred thru stepper

← Older revision		Revision as of 06:58, 21 March 2018
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	## If you exit the Task Streaming screen, the batch will not be able to be aborted, usually requiring a software reboot.		## If you exit the Task Streaming screen, the batch will not be able to be aborted, usually requiring a software reboot.
	# Abort the Batch: Choose the task from the Task List, click Batch > "Abort"		# Abort the Batch: Choose the task from the Task List, click Batch > "Abort"
	# In the following popup window, click "Remove ~~Wafer~~ from Litho Cluster"		# In the following popup window, click "Remove Wafers from Litho Cluster"
			## This will send all your wafers through the stepper, from Port 1 → Port 2. Thus no wafers will be waiting for exposure.
	# Wait for the task status to change from "Aborting" to "Aborted"		# Wait for the task status to change from "Aborting" to "Aborted"
	Your wafer should be removed to Port #2, and the task should state "Aborted" on the task list.		Your wafer(s) should be removed to Port #2, and the task should state "Aborted" on the task list.

			Please make sure there are no tasks in the "Waiting" state - please abort these tasks before leaving the system, or the next user's wafers will be shot with your job!

John d: initial, copied from "recover from reticle ID typo"

2018-03-19T20:33:40Z

initial, copied from "recover from reticle ID typo"

New page

# Do NOT exit task streaming!
## If you exit the Task Streaming screen, the batch will not be able to be aborted, usually requiring a software reboot.
# Abort the Batch: Choose the task from the Task List, click Batch > "Abort"
# In the following popup window, click "Remove Wafer from Litho Cluster"
# Wait for the task status to change from "Aborting" to "Aborted"
Your wafer should be removed to Port #2, and the task should state "Aborted" on the task list.