John d at 23:28, 24 August 2022

2022-08-24T23:28:47Z

John d: pasted from gDocs

2022-08-24T23:21:28Z

pasted from gDocs

New page

''If the Warnings Window shows "''Wafer Handling not initialized''<nowiki/>', or the Cassettes are not mapping (cassette may be partly lowered), or you opened the Port cover while robots were moving, you need to reset the Wafer Handler with the following procedure.''

<br />

# ''Queue > Clear,'' to clear the task list
## do not proceed to next step unless Queue is cleared! should say only “''1-PAUSE''” in the task list
## If queue won’t clear, call supervisor! Requires full software reset.
## If you were not in “Task Streaming” screen already, proceed to next step.
# Exit to Main Menu with (''cancel'') & (''exit'')
# DON’T perform Fast Startup
## always choose “''Don’t perform startup''” if it asks!
# Lift black metal cover behind keyboard to expose the “hardware reset buttons”
# Press & hold BOTH “''GLOBAL RESET''” buttons for 1-2sec then release
## '''DO NOT leave the machine at this point!''' It is imperative that the system is not left in this state for more than a few minutes, or the temperature will drift, requiring hours of stabilization.
# The Warnings window will show “''host xyz-8477 unreachable''”
## you may need to use ''[F4] FRONT'' keyboard key to show the warnings window, which is at the bottom of the screen
## wait until all “''host unreachable''” warnings disappear.
## should see “''CT not initialized''” warning, and possibly a “''reinitialize wafer handling''” warning.
# Choose ''Startup/Shutdown > Startup (FULL) > START''
## All robots will reinitialize. Do not open port covers, as robots will be moving!
## When it is done, it will exit to previous screen
# Exit out to ''Main Menu''
# ''(Mat Hdl) material handler > Exchange Reticle Box > (Read All)''
# System is ready for use, exit to main menu and restart your job(s)

''2022-08-23 Demis D John''

← Older revision		Revision as of 23:28, 24 August 2022
Line 3:		Line 3:
	<br />		<br />

	# ''Queue > Clear,'' to clear the task list		#''Queue > Clear,'' to clear the task list
	## do not proceed to next step unless Queue is cleared! ~~should~~ say only “''1-PAUSE''” in the task list		##do not proceed to next step unless Queue is cleared! Should say only “''1-PAUSE''” in the task list
	## If queue won’t clear, call supervisor! Requires full software reset.		##If queue won’t clear, call supervisor! Requires full software reset.
	## If you were not in “Task Streaming” screen already, proceed to next step.		##If you were not in “Task Streaming” screen already, proceed to next step.
	# Exit to Main Menu with (''cancel'') & (''exit'')		#Exit to Main Menu with (''cancel'') & (''exit'')
	# DON’T perform Fast Startup		#DON’T perform Fast Startup
	## always choose “''Don’t perform startup''” if it asks!		##always choose “''Don’t perform startup''” if it asks!
	# Lift black metal cover behind keyboard to expose the “hardware reset buttons”		#Lift black metal cover behind keyboard to expose the “hardware reset buttons”
	# Press & hold BOTH “''GLOBAL RESET''” buttons for 1-2sec then release		#Press & hold BOTH “''GLOBAL RESET''” buttons for 1-2sec then release
	## '''DO NOT leave the machine at this point!''' It is imperative that the system is not left in this state for more than a few minutes, or the temperature will drift, requiring hours of stabilization.		##'''<u>DO NOT leave the machine at this point!</u>''' It is imperative that the system is not left in this state for more than a few minutes, or the temperature will drift, requiring hours of stabilization.
	# The Warnings window will show “''host xyz-8477 unreachable''”		#The Warnings window will show “''host xyz-8477 unreachable''”
	## you may need to use ''[F4] FRONT'' keyboard key to show the warnings window, which is at the bottom of the screen		##you may need to use ''[F4] FRONT'' keyboard key to show the warnings window, which is at the bottom of the screen
	## wait until all “''host unreachable''” warnings disappear.		##wait until all “''host unreachable''” warnings disappear.
	## should see “''CT not initialized''” warning, and possibly a “''reinitialize wafer handling''” warning.		##should see “''CT not initialized''” warning, and possibly a “''reinitialize wafer handling''” warning.
	# Choose ''Startup/Shutdown > Startup (FULL) > START''		#Choose ''Startup/Shutdown > Startup (FULL) > START''
	## All robots will reinitialize. Do not open port covers, as robots will be moving!		##All robots will reinitialize. Do not open port covers, as robots will be moving!
	## When it is done, it will exit to previous screen		##When it is done, it will exit to previous screen
	# Exit out to ''Main Menu''		#Exit out to ''Main Menu''
	# ''(Mat Hdl) material handler > Exchange Reticle Box > (Read All)''		#''(Mat Hdl) material handler > Exchange Reticle Box > (Read All)''
	# System is ready for use, exit to main menu and restart your job(s)		#System is ready for use, exit to main menu and restart your job(s)

ASML Stepper 3: Wafer Handler Reset Procedure - Revision history

John d at 23:28, 24 August 2022

John d: pasted from gDocs