ASML Stepper 3 - Job Creator - Revision history

John d: /* Instructions for Usage */ link to github issues

2025-12-06T09:36:01Z

Instructions for Usage: link to github issues

← Older revision		Revision as of 09:36, 6 December 2025
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	### You need to scroll up in the Log Window and identify the error, and fix it in your job's python script, then reupload/convert etc.		### You need to scroll up in the Log Window and identify the error, and fix it in your job's python script, then reupload/convert etc.
	### The last lines of the Log file are automatically copied into the FTP folder <code>asml/error-Logs/<YourFile>_<CurrentDate>.txt</code> so the errors are viewable via Nanofiles FTP.		### The last lines of the Log file are automatically copied into the FTP folder <code>asml/error-Logs/<YourFile>_<CurrentDate>.txt</code> so the errors are viewable via Nanofiles FTP.
	### See the GitHub Issues page for common limitations, or send the error log to [[Demis D. John\|Demis]] for advice.		### See [https://github.com/demisjohn/ASML_JobCreator/issues the GitHub Issues page] for common limitations/errors, or send the error log to [[Demis D. John\|Demis]] for advice.

	=== Author Credits ===		=== Author Credits ===

John d: /* Required Files */

2025-12-06T09:32:56Z

Required Files

← Older revision		Revision as of 09:32, 6 December 2025
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	** This is available only to authorized users of the UCSB ASML Stepper, and requires a UCSB Login.		** This is available only to authorized users of the UCSB ASML Stepper, and requires a UCSB Login.
	** Copy this file into the <code>ASML_JobCreator</code> folder.		** Copy this file into the <code>ASML_JobCreator</code> folder.
	** Contact [[Demis D. John\|Demis]] if you need the file or have questions, or want ~~help~~ ~~on creating~~ this file for your own system.		** Contact [[Demis D. John\|Demis]] if you need the file or have questions, or want to get/modify this file for your own system.

	=== Instructions for Usage ===		=== Instructions for Usage ===

John d: /* Instructions for Usage */ listed exposure job location

2025-03-12T20:29:19Z

Instructions for Usage: listed exposure job location

← Older revision		Revision as of 20:29, 12 March 2025
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	# The script will do the following:		# The script will do the following:
	## sync to nanofiles, to download your *.txt file to the ASML		## sync to nanofiles, to download your *.txt file to the ASML
	## convert the *.txt file to a job file, and		## convert the *.txt file to a binary job file ready for exposure, placed inside the <code><<GroupName>>/JobCreator</code> folder, and
	## move your converted *.txt file into <code>completed_TXT/</code>		## move your converted *.txt file into <code>completed_TXT/</code>
	## sync again to push log files to the SFTP server.		## sync again to push log files to the SFTP server.

John d: added TOC

2025-03-12T19:54:56Z

added TOC

← Older revision		Revision as of 19:54, 12 March 2025
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	'''Contact [[Demis D. John\|the supervisor]] if interested in utilizing this capability.'''		'''Contact [[Demis D. John\|the supervisor]] if interested in utilizing this capability.'''

			__TOC__

	=== Use Cases ===		=== Use Cases ===

John d: /* Required Files */

2025-01-04T00:48:39Z

Required Files

← Older revision		Revision as of 00:48, 4 January 2025
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	* The <code>Defaults.py</code> file for the UCSB ASML PAS5500/300 DUV Stepper is here:		* The <code>Defaults.py</code> file for the UCSB ASML PAS5500/300 DUV Stepper is here:
	** [https://drive.google.com/drive/folders/1b28TZwXlOtO3tr0cTpD8ssx--ifYmcbt?usp=drive_link '''Defaults.py'''] (UCSB NetID login required)		** [https://drive.google.com/drive/folders/1b28TZwXlOtO3tr0cTpD8ssx--ifYmcbt?usp=drive_link '''Defaults.py'''] (UCSB NetID login required)
	** This is available ''only'' to authorized users of the UCSB ASML Stepper, and requires a UCSB Login.		** This is available only to authorized users of the UCSB ASML Stepper, and requires a UCSB Login.
			** Copy this file into the <code>ASML_JobCreator</code> folder.
	** Contact [[Demis D. John\|Demis]] if you need the file or have questions, or want help on creating this file for your own system.		** Contact [[Demis D. John\|Demis]] if you need the file or have questions, or want help on creating this file for your own system.

John d: citation

2025-01-04T00:47:31Z

citation

← Older revision		Revision as of 00:47, 4 January 2025
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	=== Author Credits ===		=== Author Credits ===
	Please consider our [https://wiki.nanofab.ucsb.edu/wiki/Frequently_Asked_Questions#Publications_acknowledging_the_Nanofab Publication Policy] if you publish using this code, especially if this code was enabling to your work (for example, enabling highly complex layouts that may have been infeasible otherwise). This module was authored by [[Demis D. John]] at the UCSB Nanofabrication Facility, in addition to any other contributors listed on [https://github.com/demisjohn/ASML_JobCreator the Github page]. You may cite this module using standard formats for referencing open-source software packages. ~~Thank~~ ~~you~~ ~~for~~ ~~understanding!~~		Please consider our [https://wiki.nanofab.ucsb.edu/wiki/Frequently_Asked_Questions#Publications_acknowledging_the_Nanofab Publication Policy] if you publish using this code, especially if this code was enabling to your work (for example, enabling highly complex layouts that may have been infeasible otherwise). This module was authored by [[Demis D. John]] at the UCSB Nanofabrication Facility, in addition to any other contributors listed on [https://github.com/demisjohn/ASML_JobCreator the Github page]. You may cite this module using standard formats for referencing open-source software packages, or clicking '''About > Cite''' '''this repo''' on Github. Current citation:

			<code>D. John, D., UCSB Nanofabrication Facility, Morin, T., & Daal, M. (2024). ASML_JobCreator (Version 1.4.3) [Computer software]. <nowiki>https://github.com/demisjohn/ASML_JobCreator/</nowiki></code>

			Thank you for understanding!

	__TOC__		__TOC__

John d: added instructions for usage

2025-01-04T00:29:17Z

added instructions for usage

@@ Line 9: / Line 9: @@
 '''Contact [[Demis D. John|the supervisor]] if interested in utilizing this capability.'''
-=== Utility ===
+=== Use Cases ===
 This scripting capability is especially useful for very complex jobs - such as complex stitching wafer-layouts in which a ''for()'' loop and some math can really help.
-Also, for engineers that are routinely writing similar jobs (eg. new masks but otherwise similar layouts), this can be used to upload jobs to to the tool, which your local users can then convert & run.
+For remote engineers that are routinely writing similar jobs with only minor changes (eg. new masks but otherwise similar layouts), this can be used to upload jobs to to the tool, which your local lab-users can then convert & run.
 === Caveats ===
@@ Line 27: / Line 27: @@
 ** This is available ''only'' to authorized users of the UCSB ASML Stepper, and requires a UCSB Login.
 ** Contact [[Demis D. John|Demis]] if you need the file or have questions, or want help on creating this file for your own system.
 === Author Credits ===
-Please consider our [https://wiki.nanofab.ucsb.edu/wiki/Frequently_Asked_Questions#Publications_acknowledging_the_Nanofab Publication Policy] if you publish using this code. This module was authored by [[Demis D. John]] at the UCSB Nanofabrication Facility, in addition to any other contributors listed on [https://github.com/demisjohn/ASML_JobCreator the Github page]. You may cite this module using standard formats for referencing open-source software packages.  Thank you for understanding!
+Please consider our [https://wiki.nanofab.ucsb.edu/wiki/Frequently_Asked_Questions#Publications_acknowledging_the_Nanofab Publication Policy] if you publish using this code, especially if this code was enabling to your work (for example, enabling highly complex layouts that may have been infeasible otherwise). This module was authored by [[Demis D. John]] at the UCSB Nanofabrication Facility, in addition to any other contributors listed on [https://github.com/demisjohn/ASML_JobCreator the Github page]. You may cite this module using standard formats for referencing open-source software packages.  Thank you for understanding!
 __TOC__

John d: /* Required Files */

2025-01-03T02:56:13Z

Required Files

← Older revision		Revision as of 02:56, 3 January 2025
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	** [https://drive.google.com/drive/folders/1b28TZwXlOtO3tr0cTpD8ssx--ifYmcbt?usp=drive_link '''Defaults.py'''] (UCSB NetID login required)		** [https://drive.google.com/drive/folders/1b28TZwXlOtO3tr0cTpD8ssx--ifYmcbt?usp=drive_link '''Defaults.py'''] (UCSB NetID login required)
	** This is available ''only'' to authorized users of the UCSB ASML Stepper, and requires a UCSB Login.		** This is available ''only'' to authorized users of the UCSB ASML Stepper, and requires a UCSB Login.
	** Contact [[Demis D. John\|Demis]] if you need the file or have questions.		** Contact [[Demis D. John\|Demis]] if you need the file or have questions, or want help on creating this file for your own system.

	=== Author Credits ===		=== Author Credits ===

John d: link to github issues, solved valid die problem

2025-01-03T02:44:37Z

link to github issues, solved valid die problem

← Older revision		Revision as of 02:44, 3 January 2025
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	The python script does not include all the error-checking that the ASML GUI contains, so brand-new or complex jobs will likely show some conversion error, which needs to be fixed (in your python script) and re-converted. In this case, you should bring the laptop you ran the Python script on with you, and fix errors and re-upload/convert until the job runs as expected. (Be sure to actually run a test exposure as well - some errors only pop up during exposure.)		The python script does not include all the error-checking that the ASML GUI contains, so brand-new or complex jobs will likely show some conversion error, which needs to be fixed (in your python script) and re-converted. In this case, you should bring the laptop you ran the Python script on with you, and fix errors and re-upload/convert until the job runs as expected. (Be sure to actually run a test exposure as well - some errors only pop up during exposure.)

			Some current limitations are listed in the [https://github.com/demisjohn/ASML_JobCreator/issues GitHub Issues]. Users are welcome to contribute solutions to the codebase!
	There is (currently) no function to return the "allowed" on-wafer die. If your uploaded job includes illegal die exposures – for example, off the wafer – the conversion will fail. A workaround is to distribute only a small portion of the die, and then use the ASML '''''Modify Job''''' GUI to distribute the Images across the wafer correctly. Users are welcome to contribute such a function to the codebase! Please see [https://github.com/demisjohn/ASML_JobCreator/issues/1 this GitHub Issue].

	=== Required Files ===		=== Required Files ===

John d: /* Required Files */ link to demis

2024-12-06T07:23:22Z

Required Files: link to demis

← Older revision		Revision as of 07:23, 6 December 2024
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	** [https://drive.google.com/drive/folders/1b28TZwXlOtO3tr0cTpD8ssx--ifYmcbt?usp=drive_link '''Defaults.py'''] (UCSB NetID login required)		** [https://drive.google.com/drive/folders/1b28TZwXlOtO3tr0cTpD8ssx--ifYmcbt?usp=drive_link '''Defaults.py'''] (UCSB NetID login required)
	** This is available ''only'' to authorized users of the UCSB ASML Stepper, and requires a UCSB Login.		** This is available ''only'' to authorized users of the UCSB ASML Stepper, and requires a UCSB Login.
			** Contact [[Demis D. John\|Demis]] if you need the file or have questions.

	=== Author Credits ===		=== Author Credits ===