Autostep 200 Troubleshooting and Recovery - Revision history

John d: /* What to do if you cannot undo the problem or need some help */ link to each contact, update to use "Report tool issue' button on SUM

2022-01-31T23:55:21Z

What to do if you cannot undo the problem or need some help: link to each contact, update to use "Report tool issue' button on SUM

@@ Line 1: / Line 1: @@
 If there is an issue with the tool that requires troubleshooting and recovery, please follow instructions bellow carefully.
-= Troubleshooting =
+=Troubleshooting=
 Most of the errors are listed on the paper that is attached to the tall cabinet. Here are the most common ones:
-=== What to do in case of computer (monitor) freeze-up ===
+===What to do in case of computer (monitor) freeze-up===
   Please try these things in this order.
-=== What to do for an alignment error ===
+===What to do in case of unplanned power outage.===
-=== What to do in case of the stage limit going too far ===
+===What to do for an alignment error===

Biljana: /* Troubleshooting */

2020-04-07T20:23:11Z

Troubleshooting

← Older revision		Revision as of 20:23, 7 April 2020
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	# contact Lee Sawyer: x.... ( if it is something wrong with the tool/broken )		# contact Lee Sawyer: x.... ( if it is something wrong with the tool/broken )
	# contact Mike Silva (if neither Lee Sawyer or Biljana Stamenic can be reached)		# contact Mike Silva (if neither Lee Sawyer or Biljana Stamenic can be reached)
	# NOTE: If the tool is down, leave a note by tool. Report the issue to '''nanofab@ucsb.edu'''		# NOTE: If the tool is down, leave a note by tool. Report the issue to '''nanofab@ucsb.edu'''

Biljana: /* Troubleshooting */

2020-04-07T20:22:41Z

Troubleshooting

@@ Line 4: / Line 4: @@
 Most of the errors are listed on the paper that is attached to the tall cabinet. Here are the most common ones:
-What to do in case of computer (monitor) freeze-up.  Please try these things in this order.
+=== What to do in case of computer (monitor) freeze-up ===
-# For Reticle Robot Hang Up:  See step 25 of start-up procedure ( tall cabinet, printed paper on the wall).
+# Try CTRL C followed by A and Enter.  This will abort any command that may have hung up. Fallow instructions ( tall cabinet, printed paper on the wall)
 # CR Staff will take care of the system in the morning.
-What to do for alignment error.
+=== What to do for an alignment error ===
-# If you have DFAS alignment marks, perform a MAP job to verify alignment.
+# Verify that correct alignment key offset is being used (check sign convention)
 # Perform a focus (EXPO) job using the same type of wafer that you will use for your real job and use the optimal focus offset determined from this job.  You may need to look at both exposure time and focus.
 # If you have been running the same process and now have issues, run SETUP from the : prompt, following the instructions on the GCA Regular Maintenance Sheet.
 # Press the lit limit switch (lower left corner in the environmental chamber) to release the stage.

John d: moved system restarting procedure to own page

2020-03-30T17:13:50Z

moved system restarting procedure to own page

← Older revision		Revision as of 17:13, 30 March 2020
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	* contact 2) '''3Ctechnical''' (Ask for Matt, Adam or Mike). The contact info bellow:		* contact 2) '''3Ctechnical''' (Ask for Matt, Adam or Mike). The contact info bellow:
	(matt@3ctechnical.com, www.3ctechnical.com, phone: 480-963-4559, fax: 480.212.0932)		(matt@3ctechnical.com, www.3ctechnical.com, phone: 480-963-4559, fax: 480.212.0932)

	=System restarting procedure=
	If there is an error that requires powering down/ powering up components, please follow step by step instructions bellow.

	==How to <u>power down</u> components ==

	1) Press '''“ctrl C & A”''' on '''the upper keyboard''' to abort any currently running process.

	2) If the system is frozen skip to step 3

	If not, press '''“ctrl & ]''' (right bracket) “ on the '''upper keyboard.''' (The main keyboard under the alignment screens)
	[[File:Autostep 200 Upper keyboard.png\|frame\|none]]

	3) Open the lower cabinet and pull out '''the lower keyboard''', quickly press '''“scroll lock”''' twice followed immediately by the '''“up''' arrow key'''”.'''
	[[File:Lower keyboard.png\|none\|thumb]]
	4) On the same lower keyboard, press “'''alt & x'''”.

	5) Press “'''enter”'''.

	6) In the lower cabinet, turn off '''the computer (#2)-(smart set)''' below the keyboard. Press the '''power''' button.
	[[File:Computer-2 -smart set.png\|none\|thumb]]
	7) Retrieve the keys on the key chain (located in the lower cabinet in front of the computer).

	8) Open the tall cabinet to the left.
	[[File:Autostep Cabinet .png\|none\|thumb]]
	9) Use the keys to open the locked '''main computer (#1) - (kontron)'''. It is the black flip down module. Turn off this computer.
	[[File:Autostep main computer -1.png\|left\|thumb\|191x191px]]
	[[File:Autostep main computer switch.png\|none\|thumb\|189x189px]]

	10) Go down the rack and turn off each control module. '''Do NOT turn off''' the lamp power supply '''OR''' the '''AC''' interface/ Power interface.

	11) '''DSW/IAS - II''' control module: Should already be '''OFF'''.

	12) '''DSW/AWH Control''' module: Switch it '''OFF'''. (power switch is on the right)

	'''1'''3) '''Stage Control''' module: Switch it '''OFF'''. (power switch is on the right)

	14) '''RMS Control''' module: Switch it '''OFF'''. (power switch is on the left)
	[[File:Autostep DSW.png\|left\|thumb]]
	[[File:Autostep stage control.png\|none\|thumb]]
	[[File:RMS control.png\|thumb\|none]]
	15) '''DO NOT TURN OFF THE LAMP'''


	==How to <u>power up</u> components ==

	Power up the control modules, turning it ON following this order:
	# '''RMS Control''' module: Switch it '''ON'''.
	# '''Stage Control''' module: Switch it '''ON'''.
	# '''DSW/AWH Control''' module: Switch it '''ON'''.
	# '''DSW/IAS - II control''' module: Leave it '''OFF'''.
	# Switch on the '''main computer (#1) - (kontron)''' and lock the cover.
	# Open the upper panel door, above the locked '''computer (#1)'''. '''Press and hold the black reset button for 2 sec'''.
	# Close the tall cabinet door.
	# Put the keys back in front of '''the computer (#2)''' in the lower cabinet.
	# Switch on the computer under the keyboard in the cabinet. Press the '''power''' button.
	# On the '''lower keyboard''' press “'''enter'''” to default to the command prompt, or wait and it will default for you.
	# Press “'''enter'''” twice to clear wait prompts.
	# Press “'''F10'''”.
	# '''Arrow to the right''' <u>twice</u> to the stepper menu.
	# '''Arrow down''' one to highlight the “'''start'''” option. Press “'''enter'''” again.
	# On the '''middle keyboard''' press “'''caps lock'''”.
	# Wait for the '''system to prompt''' you to <u>'''enter the date and time'''</u> on the middle key board. '''HH:MM DD-MMM-YY''' as in '''01:15 27-JUL-20'''. Press “'''enter'''”.
	# Open the lower cabinet and pull out the '''lower keyboard''', quickly press “'''scroll lock'''” <u>twice</u> followed immediately by the “'''up arrow key”. This will switch the upper monitor for setup execution'''.
	# Log in to your account. '''Log In [10, xxx]'''
	# Type “'''RESET'''” and “'''enter'''”. Look at the mask loading robot and make sure it is facing the reticle mask box correctly. It may misalign toward you a little. This is bad. Go to error section (RMS error).
	# If Mask is still on, type “'''RMSR'''” to remove mask.
	# Run “'''INV'''” to inventory the masks in the elevator.
	# “'''SETUP'''” align target and press “'''expose'''”.
	# System is ready to run.

Biljana: /* System restarting procedure */

2020-03-26T23:49:19Z

System restarting procedure

← Older revision		Revision as of 23:49, 26 March 2020
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	= Troubleshooting =		= Troubleshooting =
			Most of the errors are listed on the paper that is attached to the tall cabinet. Here are the most common ones:

	What to do in case of computer (monitor) freeze-up. Please try these things in this order.		What to do in case of computer (monitor) freeze-up. Please try these things in this order.
	# Try CTRL C followed by A and Enter. This will abort any command that may have hung up.		# Try CTRL C followed by A and Enter. This will abort any command that may have hung up.

Biljana at 23:47, 26 March 2020

2020-03-26T23:47:32Z

← Older revision		Revision as of 23:47, 26 March 2020
Line 1:		Line 1:
			If there is an issue with the tool that requires troubleshooting and recovery, please follow instructions bellow carefully.
	WIP...

	= Troubleshooting =		= Troubleshooting =

Biljana: /* System restarting procedure */

2020-03-26T23:44:26Z

System restarting procedure

← Older revision		Revision as of 23:44, 26 March 2020
Line 25:		Line 25:
	If there is an error that requires powering down/ powering up components, please follow step by step instructions bellow.		If there is an error that requires powering down/ powering up components, please follow step by step instructions bellow.

	~~====~~==How to <u>power down</u> components ~~====~~==		==How to <u>power down</u> components ==

	1) Press '''“ctrl C & A”''' on '''the upper keyboard''' to abort any currently running process.		1) Press '''“ctrl C & A”''' on '''the upper keyboard''' to abort any currently running process.
Line 65:		Line 65:


	==~~'''~~How to <u>power up</u> components~~'''~~ ==		==How to <u>power up</u> components ==

	Power up the control modules, turning it ON following this order:		Power up the control modules, turning it ON following this order:

Biljana: /* Troubleshooting */

2020-03-26T23:43:22Z

Troubleshooting

← Older revision		Revision as of 23:43, 26 March 2020
Line 22:		Line 22:
	(matt@3ctechnical.com, www.3ctechnical.com, phone: 480-963-4559, fax: 480.212.0932)		(matt@3ctechnical.com, www.3ctechnical.com, phone: 480-963-4559, fax: 480.212.0932)

	==System restarting procedure==		=System restarting procedure=
	If there is an error that requires powering down/ powering up components, please follow step by step instructions bellow.		If there is an error that requires powering down/ powering up components, please follow step by step instructions bellow.

	==~~'''~~How to <u>power down</u> components~~'''~~ ==		======How to <u>power down</u> components ======

	1) Press '''“ctrl C & A”''' on '''the upper keyboard''' to abort any currently running process.		1) Press '''“ctrl C & A”''' on '''the upper keyboard''' to abort any currently running process.

Biljana: /* Restarting procedure */

2020-03-26T23:41:29Z

Restarting procedure

← Older revision		Revision as of 23:41, 26 March 2020
Line 22:		Line 22:
	(matt@3ctechnical.com, www.3ctechnical.com, phone: 480-963-4559, fax: 480.212.0932)		(matt@3ctechnical.com, www.3ctechnical.com, phone: 480-963-4559, fax: 480.212.0932)

	==~~Restarting~~ procedure==		==System restarting procedure==
	If there is an error that requires powering down/ powering up components, please follow step by step instructions bellow.		If there is an error that requires powering down/ powering up components, please follow step by step instructions bellow.

Biljana at 23:40, 26 March 2020

2020-03-26T23:40:35Z

← Older revision		Revision as of 23:40, 26 March 2020
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	# Press the lit limit switch (lower left corner in the environmental chamber) to release the stage.		# Press the lit limit switch (lower left corner in the environmental chamber) to release the stage.
	What to do if you cannot undo the problem or something is wrong with the tool:		What to do if you cannot undo the problem or something is wrong with the tool:
	* send e-mail to nanofab@~~ece~~.edu and report the problem		* send e-mail to '''nanofab@ucsb.edu''' and report the problem
	* contact 1) '''Mike Silva''' : x 3918 x 219 Work, 2) '''Biljana Stamenic''':x4002 Work, or '''Lee Sawyer''': Work)		* contact 1) '''Mike Silva''' : x 3918 x 219 Work, 2) '''Biljana Stamenic''':x4002 Work, or '''Lee Sawyer''': Work)