https://wiki.nanofab.ucsb.edu/w/index.php?action=history&feed=atom&title=CDE_ResMap_Quick-Start_instructions 2026-04-04T20:21:54Z Revision history for this page on the wiki MediaWiki 1.43.6 https://wiki.nanofab.ucsb.edu/w/index.php?title=CDE_ResMap_Quick-Start_instructions&diff=155021&oldid=prev 2018-04-17T20:01:37Z

<p>photo of measurement locations</p> <table style="background-color: #fff; color: #202122;" data-mw="interface"> <col class="diff-marker" /> <col class="diff-content" /> <col class="diff-marker" /> <col class="diff-content" /> <tr class="diff-title" lang="en"> <td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">← Older revision</td> <td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 20:01, 17 April 2018</td> </tr><tr> <td colspan="2" class="diff-lineno">Line 4:</td> <td colspan="2" class="diff-lineno">Line 4:</td> </tr> <tr> <td class="diff-marker"></td> <td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>## Programs for Quarter wafers will measure opposite the white stick. See image below.</div></td> <td class="diff-marker"></td> <td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>## Programs for Quarter wafers will measure opposite the white stick. See image below.</div></td> </tr> <tr> <td class="diff-marker"></td> <td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>## You can always load a 6" wafer (eg. from teh discarded ICP carriers) and run a program to see where it is going to measure.</div></td> <td class="diff-marker"></td> <td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>## You can always load a 6" wafer (eg. from teh discarded ICP carriers) and run a program to see where it is going to measure.</div></td> </tr> <tr> <td colspan="2" class="diff-empty diff-side-deleted"></td> <td class="diff-marker" data-marker="+"></td> <td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>{| class="wikitable"</div></td> </tr> <tr> <td colspan="2" class="diff-empty diff-side-deleted"></td> <td class="diff-marker" data-marker="+"></td> <td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>|+Measurement locations for Full- and Quarter-Wafer programs</div></td> </tr> <tr> <td colspan="2" class="diff-empty diff-side-deleted"></td> <td class="diff-marker" data-marker="+"></td> <td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>![[File:CDE ResMap Full Wafer meas location - IMG 0112 - 800px annot.png|none|thumb|200x200px|Full Wafer centered on stage]]</div></td> </tr> <tr> <td colspan="2" class="diff-empty diff-side-deleted"></td> <td class="diff-marker" data-marker="+"></td> <td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>![[File:CDE ResMap Quarter Wafer meas location - 800px annot quarterwf.png|none|thumb|200x200px|Quarter Wafer recipe measurement location]]</div></td> </tr> <tr> <td colspan="2" class="diff-empty diff-side-deleted"></td> <td class="diff-marker" data-marker="+"></td> <td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>|}</div></td> </tr> <tr> <td colspan="2" class="diff-empty diff-side-deleted"></td> <td class="diff-marker" data-marker="+"></td> <td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><br /></td> </tr> <tr> <td colspan="2" class="diff-empty diff-side-deleted"></td> <td class="diff-marker" data-marker="+"></td> <td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>== Quick Measurement Procedure ==</div></td> </tr> <tr> <td class="diff-marker"></td> <td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div># Select Operator &gt; Run Recipe</div></td> <td class="diff-marker"></td> <td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div># Select Operator &gt; Run Recipe</div></td> </tr> <tr> <td class="diff-marker"></td> <td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div># Choose a recipe in "UCSB Users"</div></td> <td class="diff-marker"></td> <td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div># Choose a recipe in "UCSB Users"</div></td> </tr> </table>

John d https://wiki.nanofab.ucsb.edu/w/index.php?title=CDE_ResMap_Quick-Start_instructions&diff=155018&oldid=prev 2018-04-17T19:55:45Z

<p>initial instrucitons</p> <p><b>New page</b></p><div># Depending on the program you run, your sample location may be different.<br /> ## In general, programs for full 4-inch wafers require the wafer to be centered on the stage.<br /> ## Wafer flat should face the white sticker on the stage.<br /> ## Programs for Quarter wafers will measure opposite the white stick. See image below.<br /> ## You can always load a 6&quot; wafer (eg. from teh discarded ICP carriers) and run a program to see where it is going to measure.<br /> # Select Operator &gt; Run Recipe<br /> # Choose a recipe in &quot;UCSB Users&quot;<br /> ## Filename indicates whether it will measure a Full or quarter wafer, number of points, wafer diameter etc.<br /> # Choose a &quot;Filename&quot; for your data. Enable &quot;Auto Plot&quot; to show a contour plot.<br /> # [Run] to perform the scan.<br /> ## You can Abort the scan by pressing Any key, and click [Abort] at the top.<br /> # Sheet resistance of every measured point is shown on the next screen.<br /> ## &quot;Rs&quot; is sheet resistance, &quot;RsAvg&quot; is Average of all measured points.</div>

John d