Calculators + Utilities - Revision history

John d: /* Contact Aligners */ added screenshot of overlay

2025-07-29T05:29:12Z

Contact Aligners: added screenshot of overlay

← Older revision		Revision as of 05:29, 29 July 2025
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	#2nd layer has cells with both polarities (positive and negative, with window for viewing during alignment)		#2nd layer has cells with both polarities (positive and negative, with window for viewing during alignment)

	:::[[File:Contact-AlignMarks Vernier DemisDJohn v3 Screenshot.png.png\|alt=screenshot of Contact-AlignMarks_Vernier_DemisDJohn_v5.oas\|none\|thumb\|Alignment Mark with Vernier, each version in it's own Cell.\|~~591x591px~~]]		:::[[File:Contact-AlignMarks Vernier DemisDJohn v5 screenshot overlay.png\|alt=screenshot of overlaid alignment marks\|none\|thumb\|308x308px\|Overlay of Lyr1 + Lyr2 ([[Demis D. John]])]][[File:Contact-AlignMarks Vernier DemisDJohn v3 Screenshot.png.png\|alt=screenshot of Contact-AlignMarks_Vernier_DemisDJohn_v5.oas\|none\|thumb\|Alignment Mark with Vernier, each version in it's own Cell. ([[Demis D. John]])\|672x672px]]

	====GCA Stepper====		====GCA Stepper====

John d: /* Contact Aligners */

2025-07-29T05:23:46Z

Contact Aligners

← Older revision		Revision as of 05:23, 29 July 2025
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	#2nd layer has cells with both polarities (positive and negative, with window for viewing during alignment)		#2nd layer has cells with both polarities (positive and negative, with window for viewing during alignment)

	:::[[File:Contact-AlignMarks Vernier DemisDJohn v3 Screenshot.png.png\|alt=screenshot of Contact-AlignMarks_Vernier_DemisDJohn_v5.oas\|none\|thumb\|Alignment Mark with Vernier, each version in it's own Cell.]]		:::[[File:Contact-AlignMarks Vernier DemisDJohn v3 Screenshot.png.png\|alt=screenshot of Contact-AlignMarks_Vernier_DemisDJohn_v5.oas\|none\|thumb\|Alignment Mark with Vernier, each version in it's own Cell.\|591x591px]]

	====GCA Stepper====		====GCA Stepper====

John d: /* CAD Files & Templates */

2025-07-29T05:23:25Z

CAD Files & Templates

← Older revision		Revision as of 05:23, 29 July 2025
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	**[http://www-inst.eecs.berkeley.edu/~ee143/fa10/lab/vernier.pdf How to use a Vernier Scale (UC Berkeley)][[File:Vernier Template v2 screenshot.jpg\|alt=screenshot of vernier_template.gds CAD file\|none\|thumb\|200x200px\|Vernier Template schematic.]]		**[http://www-inst.eecs.berkeley.edu/~ee143/fa10/lab/vernier.pdf How to use a Vernier Scale (UC Berkeley)][[File:Vernier Template v2 screenshot.jpg\|alt=screenshot of vernier_template.gds CAD file\|none\|thumb\|200x200px\|Vernier Template schematic.]]
	*[[Resolution Test structures]] - '''''To Be Added'''''		*[[Resolution Test structures]] - '''''To Be Added'''''

	*Contact Alignment Marks:
			==== Contact Aligners ====
			*Alignment Marks for Contact Aligners:
	*#[https://www.cnfusers.cornell.edu/contact_litho_alignment_keys#:~:text=Standard%20Contact%20Alignment%20Mark CNF Contact Marks] - designed by the Cornell Nanoscale Science & Technology Facility staff.		*#[https://www.cnfusers.cornell.edu/contact_litho_alignment_keys#:~:text=Standard%20Contact%20Alignment%20Mark CNF Contact Marks] - designed by the Cornell Nanoscale Science & Technology Facility staff.
	#"''Polygons are Clear''" polarity, so 2nd layer has transparent region around alignment mark.		#"''Polygons are Clear''" polarity, so 2nd layer has transparent region around alignment mark.

John d: /* CAD Files & Templates */

2025-07-29T05:22:01Z

CAD Files & Templates

← Older revision		Revision as of 05:22, 29 July 2025
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	#"''Polygons are Clear''" polarity, so 2nd layer has transparent region around alignment mark.		#"''Polygons are Clear''" polarity, so 2nd layer has transparent region around alignment mark.
	*#Male/female alignment marks with vernier (step=0.5um): [[Media:Contact-AlignMarks Vernier DemisDJohn v5.oas\|OASIS]] / [[Media:Contact-AlignMarks Vernier DemisDJohn v5.gds\|GDS]] format (Designed by [[Demis D. John]])		*#Male/female alignment marks with vernier (step=0.5um): [[Media:Contact-AlignMarks Vernier DemisDJohn v5.oas\|OASIS]] / [[Media:Contact-AlignMarks Vernier DemisDJohn v5.gds\|GDS]] format (Designed by [[Demis D. John]])
			#Contains 3 separate Cells, as illustrated in the image below.
	#2nd layer has cells with both polarities (positive and negative, with window for viewing during alignment)		#2nd layer has cells with both polarities (positive and negative, with window for viewing during alignment)

	:::[[File:Contact-AlignMarks Vernier DemisDJohn v3 Screenshot.png.png\|alt=screenshot of Contact-~~AlignMarks_Vernier_DemisDJohn_v3~~.oas\|none\|thumb~~\|200x200px~~\|Alignment Mark with Vernier, each version in it's own Cell.]]		:::[[File:Contact-AlignMarks Vernier DemisDJohn v3 Screenshot.png.png\|alt=screenshot of Contact-AlignMarks_Vernier_DemisDJohn_v5.oas\|none\|thumb\|Alignment Mark with Vernier, each version in it's own Cell.]]

	====GCA Stepper====		====GCA Stepper====

John d: /* CAD Files & Templates */ Uploaded new version of ALignment Mark file, corrected transaprency for Lyr2

2025-07-29T05:18:49Z

CAD Files & Templates: Uploaded new version of ALignment Mark file, corrected transaprency for Lyr2

← Older revision		Revision as of 05:18, 29 July 2025
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	*#[https://www.cnfusers.cornell.edu/contact_litho_alignment_keys#:~:text=Standard%20Contact%20Alignment%20Mark CNF Contact Marks] - designed by the Cornell Nanoscale Science & Technology Facility staff.		*#[https://www.cnfusers.cornell.edu/contact_litho_alignment_keys#:~:text=Standard%20Contact%20Alignment%20Mark CNF Contact Marks] - designed by the Cornell Nanoscale Science & Technology Facility staff.
	#"''Polygons are Clear''" polarity, so 2nd layer has transparent region around alignment mark.		#"''Polygons are Clear''" polarity, so 2nd layer has transparent region around alignment mark.
	*#Male/female alignment marks with vernier (step=0.5um): [[Media:Contact-AlignMarks Vernier DemisDJohn v4.oas\|OASIS]] / [[Media:Contact-AlignMarks Vernier DemisDJohn v4.gds\|GDS]] format (Designed by [[Demis D. John]])		*#Male/female alignment marks with vernier (step=0.5um): [[Media:Contact-AlignMarks Vernier DemisDJohn v5.oas\|OASIS]] / [[Media:Contact-AlignMarks Vernier DemisDJohn v5.gds\|GDS]] format (Designed by [[Demis D. John]])
	#2nd layer has cells with both polarities (positive and negative, with window for viewing during alignment)		#2nd layer has cells with both polarities (positive and negative, with window for viewing during alignment)

		⚫	:::[[File:Contact-AlignMarks Vernier DemisDJohn v3 Screenshot.png.png\|alt=screenshot of Contact-AlignMarks_Vernier_DemisDJohn_v3.oas\|none\|thumb\|200x200px\|Alignment Mark with Vernier, each version in it's own Cell.]]
	:::{\|
⚫	\|[[File:Contact-AlignMarks Vernier DemisDJohn v3 Screenshot.png.png\|alt=screenshot of Contact-AlignMarks_Vernier_DemisDJohn_v3.oas\|none\|thumb\|200x200px\|Alignment Mark with Vernier]]
	\|[[File:Inverted Contact-AlignMarks with Vernier.png\|alt=screenshot of inverted alignment mark\|none\|thumb\|214.2x214.2px\|Inverted 2nd layer, for transparent region around Alignment Marks (easier coarse alignment)]]
	\|}

	====GCA Stepper====		====GCA Stepper====

John d: /* CAD Layout and Mask Design */

2025-06-18T16:36:33Z

CAD Layout and Mask Design

← Older revision		Revision as of 16:36, 18 June 2025
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	*Supports the same core functionality as L-Edit - hierarchical Cell Instances, arrays, programmable Cells (PCells) etc.		*Supports the same core functionality as L-Edit - hierarchical Cell Instances, arrays, programmable Cells (PCells) etc.
	*Scriptable with Python or Ruby, with decent tutorials.		*Scriptable with Python or Ruby, with decent tutorials.
	*[[KLayout Design Tips\|<u>KLayout Design Tips</u>]]: important info on making "valid" CAD files, and setting up the program for efficient use.		*[[KLayout Design Tips\|<u>'''KLayout Design Tips'''</u>]]: important info on making "valid" CAD files, and setting up the program for efficient use.
	*Univ. of Waterloo QNFCF has produced some good [https://www.youtube.com/@qnfcf6093/videos '''''video tutorials on KLayout, here'''''].		*Univ. of Waterloo QNFCF has produced some good [https://www.youtube.com/@qnfcf6093/videos '''''video tutorials on KLayout, here'''''].

John d: /* Example CAD File */ added advanced layout

2025-04-29T15:47:24Z

Example CAD File: added advanced layout

← Older revision		Revision as of 15:47, 29 April 2025
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	**[//wiki.nanotech.ucsb.edu/w/images/3/34/DEMISJAN2020_-_Reticle_Layout_v1.GDS Here is an example GDS file (download)] for submission to the photomask manufacturer, with all objects moved to a single Layer.		**[//wiki.nanotech.ucsb.edu/w/images/3/34/DEMISJAN2020_-_Reticle_Layout_v1.GDS Here is an example GDS file (download)] for submission to the photomask manufacturer, with all objects moved to a single Layer.
	*See the [[Stepper Mask-Making Guidelines (Generic)\|Stepper Mask Making Guidelines page]] for an example of how to program this Reticle into an ASML Stepper job.		*See the [[Stepper Mask-Making Guidelines (Generic)\|Stepper Mask Making Guidelines page]] for an example of how to program this Reticle into an ASML Stepper job.

			==== Advanced Stepper Mask Layout ====
			*[[Media:CAD Tutorial for ASML Reticle v2 DEMIS-DOE.OAS\|CAD_Tutorial_for_ASML_Reticle_v2_DEMIS-DOE.OAS]] - example CAD file for reticle with many design variations.
			**Cell "'''''Reticle_Layout'''''" shows the mask that would be printed by a photomask vendor. You would print '''Layers 1,2 and 3''' onto a single mask plate, with the CAD file origin at the center of the mask plate (no automatic centering).
			**Cell "'''''Wafer_Layout'''''" shows an estimation/"simulation" of design variations to be exposed on the wafer. It is only a "simulation" because the real layout would be programmed on the Stepper tool itself, which may make changes (such as automatically filling to the wafer's edge).
			*[[Media:ASML Reticle Programming Params - DEMIS-DOE v1.xlsx\|ASML_Reticle_Programming_Params_-_DEMIS-DOE_v1.xlsx]] - stepper programming sheet for the above CAD file, for typing in the mask's '''''Images''''' into the Stepper software.

	===CAD Files & Templates===		===CAD Files & Templates===

John d: /* ASML Stepper */ link to Demis-DOE OAS + XLS files

2025-04-29T15:42:40Z

ASML Stepper: link to Demis-DOE OAS + XLS files

← Older revision		Revision as of 15:42, 29 April 2025
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	* [https://docs.google.com/document/d/1b9YT11RPsl-UlLvN74hrQvG01OcYDL16r6I5lPOlBEo/edit?usp=sharing ASML-specific Mask Making Guidelines] - ''Access is restricted to trained users only.''		* [https://docs.google.com/document/d/1b9YT11RPsl-UlLvN74hrQvG01OcYDL16r6I5lPOlBEo/edit?usp=sharing ASML-specific Mask Making Guidelines] - ''Access is restricted to trained users only.''
	*[[Calculators + Utilities#Example%20CAD%20File\|Example Reticle/Mask CAD File]], designed in [[Calculators + Utilities#KLayout\|KLayout]].		*[[Calculators + Utilities#Example%20CAD%20File\|Example Reticle/Mask CAD File]], designed in [[Calculators + Utilities#KLayout\|KLayout]].
			*"DEMIS_DOE" - [https://wiki.nanofab.ucsb.edu/w/images/2/23/CAD_Tutorial_for_ASML_Reticle_v2_DEMIS-DOE.OAS Example Reticle CAD File] for many design variations, and accompanying [https://wiki.nanofab.ucsb.edu/w/images/5/56/ASML_Reticle_Programming_Params_-_DEMIS-DOE_v1.xlsx stepper-programming worksheet].

	====Heidelberg MLA150====		====Heidelberg MLA150====

John d: /* KLayout */

2025-04-24T05:56:22Z

KLayout

← Older revision		Revision as of 05:56, 24 April 2025
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	*Fast viewing of layer overlay, overlay multiple files, cell hierarchy, large (>1GB) files etc.		*Fast viewing of layer overlay, overlay multiple files, cell hierarchy, large (>1GB) files etc.
	*Supports the same core functionality as L-Edit - hierarchical Cell Instances, arrays, programmable Cells (PCells) etc.		*Supports the same core functionality as L-Edit - hierarchical Cell Instances, arrays, programmable Cells (PCells) etc.
	*~~Easily scriptable~~ with Python or Ruby, with decent tutorials.		*Scriptable with Python or Ruby, with decent tutorials.
	*[[KLayout Design Tips\|<u>KLayout Design Tips</u>]]: important info on making "valid" CAD files, and setting up the program for efficient use.		*[[KLayout Design Tips\|<u>KLayout Design Tips</u>]]: important info on making "valid" CAD files, and setting up the program for efficient use.
	*Univ. of Waterloo QNFCF has produced some good [https://www.youtube.com/@qnfcf6093/videos '''''video tutorials on KLayout, here'''''].		*Univ. of Waterloo QNFCF has produced some good [https://www.youtube.com/@qnfcf6093/videos '''''video tutorials on KLayout, here'''''].
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	====AutoCAD====		====AutoCAD====
	Many photomask vendors can accept AutoCAD DWG files, but these can only be opened in AutoCAD (not KLayout or other layout programs). Although AutoCAD can produce a cross-compatible DXF file, we see many design/conversion issues with these files. This is because many shapes and line-types (Curves and Line/polyline/LWLine for example) used in AutoCAD don't convert as expected into the polygons needed for printing. Also the DXF file format itself often creates problems, such as incorrect scaling or badly-filled/unclosed polygons.		Many photomask vendors can accept AutoCAD DWG files, but these can only be opened in AutoCAD (not KLayout or other layout programs). Although AutoCAD can produce a cross-compatible DXF file, we see many design/conversion issues with these files. This is because many shapes and line-types (Curves and Line/polyline/LWLine for example) used in AutoCAD don't convert as expected into the polygons needed for printing. Also the DXF file format itself often creates problems, such as incorrect scaling (undefined units: mm or µm?) or badly-filled/unclosed polygons.

	===CAD Design Tips===		===CAD Design Tips===

John d: /* CAD Files & Templates */ indent figure

2024-10-03T05:15:25Z

CAD Files & Templates: indent figure

← Older revision		Revision as of 05:15, 3 October 2024
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	#2nd layer has cells with both polarities (positive and negative, with window for viewing during alignment)		#2nd layer has cells with both polarities (positive and negative, with window for viewing during alignment)

	{\|		:::{\|
	\|[[File:Contact-AlignMarks Vernier DemisDJohn v3 Screenshot.png.png\|alt=screenshot of Contact-AlignMarks_Vernier_DemisDJohn_v3.oas\|none\|thumb\|200x200px\|Alignment Mark with Vernier]]		\|[[File:Contact-AlignMarks Vernier DemisDJohn v3 Screenshot.png.png\|alt=screenshot of Contact-AlignMarks_Vernier_DemisDJohn_v3.oas\|none\|thumb\|200x200px\|Alignment Mark with Vernier]]
	\|[[File:Inverted Contact-AlignMarks with Vernier.png\|alt=screenshot of inverted alignment mark\|none\|thumb\|214.2x214.2px\|Inverted 2nd layer, for transparent region around Alignment Marks (easier coarse alignment)]]		\|[[File:Inverted Contact-AlignMarks with Vernier.png\|alt=screenshot of inverted alignment mark\|none\|thumb\|214.2x214.2px\|Inverted 2nd layer, for transparent region around Alignment Marks (easier coarse alignment)]]
	\|}		\|}

	::

	====GCA Stepper====		====GCA Stepper====

← Older revision		Revision as of 05:22, 29 July 2025
Line 146:		Line 146:
	#"''Polygons are Clear''" polarity, so 2nd layer has transparent region around alignment mark.		#"''Polygons are Clear''" polarity, so 2nd layer has transparent region around alignment mark.
	*#Male/female alignment marks with vernier (step=0.5um): [[Media:Contact-AlignMarks Vernier DemisDJohn v5.oas\|OASIS]] / [[Media:Contact-AlignMarks Vernier DemisDJohn v5.gds\|GDS]] format (Designed by [[Demis D. John]])		*#Male/female alignment marks with vernier (step=0.5um): [[Media:Contact-AlignMarks Vernier DemisDJohn v5.oas\|OASIS]] / [[Media:Contact-AlignMarks Vernier DemisDJohn v5.gds\|GDS]] format (Designed by [[Demis D. John]])
			#Contains 3 separate Cells, as illustrated in the image below.
	#2nd layer has cells with both polarities (positive and negative, with window for viewing during alignment)		#2nd layer has cells with both polarities (positive and negative, with window for viewing during alignment)

	:::[[File:Contact-AlignMarks Vernier DemisDJohn v3 Screenshot.png.png\|alt=screenshot of Contact-~~AlignMarks_Vernier_DemisDJohn_v3~~.oas\|none\|thumb~~\|200x200px~~\|Alignment Mark with Vernier, each version in it's own Cell.]]		:::[[File:Contact-AlignMarks Vernier DemisDJohn v3 Screenshot.png.png\|alt=screenshot of Contact-AlignMarks_Vernier_DemisDJohn_v5.oas\|none\|thumb\|Alignment Mark with Vernier, each version in it's own Cell.]]

	====GCA Stepper====		====GCA Stepper====