Deep UV Optical Microscope (Olympus) - Revision history

John d: link to LEXT wiki page

2025-11-06T00:09:08Z

link to LEXT wiki page

← Older revision		Revision as of 00:09, 6 November 2025
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	\|model= MX61A-DUV		\|model= MX61A-DUV
	}}		}}
	'''DUV Camera is non-operational and unable to be repaired. ~~Visible camera is still functional. 2022-02~~'''		'''DUV Camera is non-operational and unable to be repaired.'''
			'''Please use the ~450nm Blue Laser scanning scope, the [[Laser Scanning Confocal M-scope (Olympus LEXT)\|Olympus LEXT]] instead.'''

	==About==		==About==

2022-08-31T14:24:34Z

← Older revision		Revision as of 14:24, 31 August 2022
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	\|type = Inspection, Test and Characterization		\|type = Inspection, Test and Characterization
	\|super= Tony Bosch		\|super= Tony Bosch
	\|super2= Demis John		\|super2= Demis D. John
	\|location=Bay 7		\|location=Bay 7
	\|description = Deep-Ultraviolet (250nm) Microscope		\|description = Deep-Ultraviolet (250nm) Microscope

2022-08-30T18:33:53Z

← Older revision		Revision as of 18:33, 30 August 2022
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	{{~~tool~~\|{{PAGENAME}}		{{tool2\|{{PAGENAME}}
	\|picture=UVOlympus.jpg		\|picture=UVOlympus.jpg
	\|type = Inspection, Test and Characterization		\|type = Inspection, Test and Characterization
	\|super= Tony Bosch		\|super= Tony Bosch
			\|super2= Demis John
	\|location=Bay 7		\|location=Bay 7
	\|description = Deep-Ultraviolet (250nm) Microscope		\|description = Deep-Ultraviolet (250nm) Microscope

2022-06-06T17:29:22Z

Other Info

← Older revision		Revision as of 17:29, 6 June 2022
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	[[File:Olympus MX61A-DUV res test 100x DUV v1.png\|alt=DUV microscope image with 1µm scale bar\|none\|thumb\|504x504px\|100x DUV image taken with the Olympus MX61A-DUV, showing sub-micron resolution.]]		[[File:Olympus MX61A-DUV res test 100x DUV v1.png\|alt=DUV microscope image with 1µm scale bar\|none\|thumb\|504x504px\|100x DUV image taken with the Olympus MX61A-DUV, showing sub-micron resolution.]]

	== Other Info ==		==Other Info==
	'''''Equip > Characterization > [[Microscopes]]''''' - ''see a list of all our microscopes''		'''''Equip > Characterization > <u>[[Microscopes]]</u>''''' - ''see a list of all our microscopes''

2022-06-06T17:27:00Z

note that DUV camera is non-funcitonal

@@ Line 10: / Line 10: @@
 |model= MX61A-DUV
 }}
 This system does general purpose imaging in the visible and also has high resolution/high magnification DUV imaging using 250 nm light.  Surface features less than 100nm can be resolved.
@@ Line 17: / Line 19: @@
 A Good system for CD measurements on wafer (250nm and above) without entry into the SEM.
-== Detailed Specifications ==
+==Detailed Specifications==
 [[File:Olympus MX61A-DUV res test 100x DUV v1.png|alt=DUV microscope image with 1µm scale bar|none|thumb|504x504px|100x DUV image taken with the Olympus MX61A-DUV, showing sub-micron resolution.]]

2019-06-26T17:46:13Z

detailed specs - first pass

← Older revision		Revision as of 17:46, 26 June 2019
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	\|model= MX61A-DUV		\|model= MX61A-DUV
	}}		}}
	= About =		== About ==
	This system does general purpose imaging in the visible and also has high resolution/high magnification DUV imaging using 250 nm light. Surface features less than 100nm can be resolved.		This system does general purpose imaging in the visible and also has high resolution/high magnification DUV imaging using 250 nm light. Surface features less than 100nm can be resolved.

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	A Good system for CD measurements on wafer (250nm and above) without entry into the SEM.		A Good system for CD measurements on wafer (250nm and above) without entry into the SEM.

			== Detailed Specifications ==
			* Microscope Objectives:
			** 5x, 10x, 20x, 50x, 100x, DUV-100x
			* Software Control:
			** Motorized Stage & Objective Turret
			** Calibrated Measurements (calibrations fixed)
			** Z-motor (focus height) measurement
			* Filters:
			** Bright Field / Dark Field (visible only)

			== Examples ==
	[[File:Olympus MX61A-DUV res test 100x DUV v1.png\|alt=DUV microscope image with 1µm scale bar\|none\|thumb\|504x504px\|100x DUV image taken with the Olympus MX61A-DUV, showing sub-micron resolution.]]		[[File:Olympus MX61A-DUV res test 100x DUV v1.png\|alt=DUV microscope image with 1µm scale bar\|none\|thumb\|504x504px\|100x DUV image taken with the Olympus MX61A-DUV, showing sub-micron resolution.]]

2018-09-01T08:02:23Z

added calibration image

← Older revision		Revision as of 08:02, 1 September 2018
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	}}		}}
	= About =		= About =
	This system does general purpose imaging in the visible and also has high resolution/high magnification DUV imaging using ~~250nm~~ light. Surface features less than 100nm can be resolved. The system has precision stage control and is fully computer controlled for image capture and sample manipulation. A Good system for CD measurements on wafer (250nm and above) without entry into the SEM.		This system does general purpose imaging in the visible and also has high resolution/high magnification DUV imaging using 250 nm light. Surface features less than 100nm can be resolved.

			The system has precision motorized stage control and is fully computer controlled for image capture and sample manipulation.

			A Good system for CD measurements on wafer (250nm and above) without entry into the SEM.
			[[File:Olympus MX61A-DUV res test 100x DUV v1.png\|alt=DUV microscope image with 1µm scale bar\|none\|thumb\|504x504px\|100x DUV image taken with the Olympus MX61A-DUV, showing sub-micron resolution.]]

2018-09-01T06:04:09Z

added description field

← Older revision		Revision as of 06:04, 1 September 2018
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	\|super= Tony Bosch		\|super= Tony Bosch
	\|location=Bay 7		\|location=Bay 7
	\|description =		\|description = Deep-Ultraviolet (250nm) Microscope
	\|manufacturer = Olympus		\|manufacturer = Olympus
	\|materials =		\|materials =

2018-09-01T06:03:29Z

added model field

2015-07-10T21:26:45Z

About

← Older revision		Revision as of 21:26, 10 July 2015
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	}}		}}
	= About =		= About =
	This system does general purpose imaging in the visible and also has high resolution/high magnification DUV imaging using 250nm light. Surface features less than 100nm can be resolved.		This system does general purpose imaging in the visible and also has high resolution/high magnification DUV imaging using 250nm light. Surface features less than 100nm can be resolved. The system has precision stage control and is fully computer controlled for image capture and sample manipulation. A Good system for CD measurements on wafer (250nm and above) without entry into the SEM.