E-Beam 1 (Sharon) - Revision history

Barreraz: /* Documentation */

2026-06-15T16:41:08Z

Documentation

← Older revision		Revision as of 16:41, 15 June 2026
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	*[https://wiki.nanofab.ucsb.edu/w/images/f/f0/EB-1_operation_instructions_6-6-24.pdf EBeam 1 Operating Procedure]		*[https://wiki.nanofab.ucsb.edu/w/images/f/f0/EB-1_operation_instructions_6-6-24.pdf EBeam 1 Operating Procedure]
		⚫	**[https://wiki.nanofab.ucsb.edu/w/images/8/86/EB1_Rotation_Fixture_SOP_Final.pdf EBeam1 Rotation Fixture SOP]
	**Operating Instructions
⚫	**[~~./Https~~://wiki.nanofab.ucsb.edu/w/images/8/86/EB1_Rotation_Fixture_SOP_Final.pdf EBeam1 Rotation Fixture SOP]
	**[[E-Beam 1 - 4-inch, 4-wafer Fixture SOP\|4-inch, 4-wafer Fixture SOP]]		**[[E-Beam 1 - 4-inch, 4-wafer Fixture SOP\|4-inch, 4-wafer Fixture SOP]]

2026-06-15T16:36:30Z

Documentation

← Older revision		Revision as of 16:36, 15 June 2026
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	*[https://wiki.nanofab.ucsb.edu/w/images/f/f0/EB-1_operation_instructions_6-6-24.pdf EBeam 1 Operating Procedure]		*[https://wiki.nanofab.ucsb.edu/w/images/f/f0/EB-1_operation_instructions_6-6-24.pdf EBeam 1 Operating Procedure]
	**Operating Instructions		**Operating Instructions
	**[./Https://wiki.nanofab.ucsb.edu/w/images/8/86/EB1_Rotation_Fixture_SOP_Final.pdf Rotation Fixture SOP]		**[./Https://wiki.nanofab.ucsb.edu/w/images/8/86/EB1_Rotation_Fixture_SOP_Final.pdf EBeam1 Rotation Fixture SOP]
	**[[E-Beam 1 - 4-inch, 4-wafer Fixture SOP\|4-inch, 4-wafer Fixture SOP]]		**[[E-Beam 1 - 4-inch, 4-wafer Fixture SOP\|4-inch, 4-wafer Fixture SOP]]

2026-06-15T16:34:47Z

Documentation

← Older revision		Revision as of 16:34, 15 June 2026
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	*[https://wiki.nanofab.ucsb.edu/w/images/f/f0/EB-1_operation_instructions_6-6-24.pdf EBeam 1 Operating Procedure]		*[https://wiki.nanofab.ucsb.edu/w/images/f/f0/EB-1_operation_instructions_6-6-24.pdf EBeam 1 Operating Procedure]
	**Operating Instructions		**Operating Instructions
	**[~~https~~://wiki.nanofab.ucsb.edu/w/images/8/86/EB1_Rotation_Fixture_SOP_Final.pdf Rotation Fixture SOP]		**[./Https://wiki.nanofab.ucsb.edu/w/images/8/86/EB1_Rotation_Fixture_SOP_Final.pdf Rotation Fixture SOP]
	**[[E-Beam 1 - 4-inch, 4-wafer Fixture SOP\|4-inch, 4-wafer Fixture SOP]]		**[[E-Beam 1 - 4-inch, 4-wafer Fixture SOP\|4-inch, 4-wafer Fixture SOP]]

2026-06-15T16:33:57Z

Documentation

← Older revision		Revision as of 16:33, 15 June 2026
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	*[https://wiki.nanofab.ucsb.edu/w/images/f/f0/EB-1_operation_instructions_6-6-24.pdf EBeam 1 Operating Procedure]		*[https://wiki.nanofab.ucsb.edu/w/images/f/f0/EB-1_operation_instructions_6-6-24.pdf EBeam 1 Operating Procedure]
	**Operating Instructions		**Operating Instructions
	**[https://wiki.nanofab.ucsb.edu/w/images/1/19/~~EB1_Rotation_Fixture_SOP_6-12-26_Rev45.47~~.pdf Rotation Fixture SOP]		**[https://wiki.nanofab.ucsb.edu/w/images/8/86/EB1_Rotation_Fixture_SOP_Final.pdf Rotation Fixture SOP]
	**[[E-Beam 1 - 4-inch, 4-wafer Fixture SOP\|4-inch, 4-wafer Fixture SOP]]		**[[E-Beam 1 - 4-inch, 4-wafer Fixture SOP\|4-inch, 4-wafer Fixture SOP]]

2026-06-12T14:47:12Z

Documentation

← Older revision		Revision as of 14:47, 12 June 2026
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	*[https://wiki.nanofab.ucsb.edu/w/images/f/f0/EB-1_operation_instructions_6-6-24.pdf EBeam 1 Operating Procedure]		*[https://wiki.nanofab.ucsb.edu/w/images/f/f0/EB-1_operation_instructions_6-6-24.pdf EBeam 1 Operating Procedure]
	**Operating Instructions		**Operating Instructions
	**[https://wiki.nanofab.ucsb.edu/w/images/a/a1/~~EB1_Rotation_Fixture_SOP_5~~-16-25.pdf Rotation Fixture SOP]		**[https://wiki.nanofab.ucsb.edu/w/images/1/19/EB1_Rotation_Fixture_SOP_6-12-26_Rev45.47.pdf Rotation Fixture SOP]
	**[[E-Beam 1 - 4-inch, 4-wafer Fixture SOP\|4-inch, 4-wafer Fixture SOP]]		**[[E-Beam 1 - 4-inch, 4-wafer Fixture SOP\|4-inch, 4-wafer Fixture SOP]]

2026-04-22T19:36:20Z

Detailed Specifications: added film limit

← Older revision		Revision as of 19:36, 22 April 2026
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	*Pieces up to Four - 4" wafers in one run.		*Pieces up to Four - 4" wafers in one run.
	*For single wafers: tilt with motorized rotation and sample lowering for higher effective rates, sidewall coverage, angled evaporation.		*For single wafers: tilt with motorized rotation and sample lowering for higher effective rates, sidewall coverage, angled evaporation.
			*Maximum allowed film thickness: 1µm
			**Please ask supervisor if you need to go thicker
			**Please provide justification for your needs (eg. Not “2 µm is a nice round number”)

	=Documentation=		=Documentation=

2025-05-21T18:35:39Z

Recipes: link to process control data

← Older revision		Revision as of 18:35, 21 May 2025
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	*See the [[E-Beam_Evaporation_Recipes#Materials_Table_(E-Beam #1)\|'''<u>E-Beam Recipe Page</u>''']], for the materials tables and deposition parameters for various materials.		*See the [[E-Beam_Evaporation_Recipes#Materials_Table_(E-Beam #1)\|'''<u>E-Beam Recipe Page</u>''']], for the materials tables and deposition parameters for various materials.
			*[[Process Group - Process Control Data#E-Beam 1 (Sharon) - Process Control\|'''Process Control Data''']] - Calibration data for the most utilized metals on this sytem.

2025-05-16T18:18:36Z

Documentation

← Older revision		Revision as of 18:18, 16 May 2025
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	*[https://wiki.nanofab.ucsb.edu/w/images/f/f0/EB-1_operation_instructions_6-6-24.pdf EBeam 1 Operating Procedure]		*[https://wiki.nanofab.ucsb.edu/w/images/f/f0/EB-1_operation_instructions_6-6-24.pdf EBeam 1 Operating Procedure]
	**Operating Instructions		**Operating Instructions
	**[https://wiki.nanofab.ucsb.edu/w/images/e/e3/~~EB1_Rotation_Fixture_SOP_6~~-4-24.pdf Rotation Fixture SOP]		**[https://wiki.nanofab.ucsb.edu/w/images/a/a1/EB1_Rotation_Fixture_SOP_5-16-25.pdf Rotation Fixture SOP]
	**[[E-Beam 1 - 4-inch, 4-wafer Fixture SOP\|4-inch, 4-wafer Fixture SOP]]		**[[E-Beam 1 - 4-inch, 4-wafer Fixture SOP\|4-inch, 4-wafer Fixture SOP]]

2024-12-18T23:07:45Z

fixed link

← Older revision		Revision as of 23:07, 18 December 2024
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	**Operating Instructions		**Operating Instructions
	**[https://wiki.nanofab.ucsb.edu/w/images/e/e3/EB1_Rotation_Fixture_SOP_6-4-24.pdf Rotation Fixture SOP]		**[https://wiki.nanofab.ucsb.edu/w/images/e/e3/EB1_Rotation_Fixture_SOP_6-4-24.pdf Rotation Fixture SOP]
	**[[EB-1 - 4-inch, 4-wafer Fixture SOP\|4-inch, 4-wafer Fixture SOP]]		**[[E-Beam 1 - 4-inch, 4-wafer Fixture SOP\|4-inch, 4-wafer Fixture SOP]]

	=Recipes=		=Recipes=

2024-12-18T22:31:26Z

link to 4-inch, 4-wafer Fixture SOP

← Older revision		Revision as of 22:31, 18 December 2024
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	\|toolid=7		\|toolid=7
	}}		}}
	[[File:EBEAM1 Controls Sept2022.jpeg\|thumb\|EBeam#1]]		[[File:EBEAM1 Controls Sept2022.jpeg\|thumb\|EBeam#1 Deposition + Beam Controllers]]

	=About=		=About=
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	**Operating Instructions		**Operating Instructions
	**[https://wiki.nanofab.ucsb.edu/w/images/e/e3/EB1_Rotation_Fixture_SOP_6-4-24.pdf Rotation Fixture SOP]		**[https://wiki.nanofab.ucsb.edu/w/images/e/e3/EB1_Rotation_Fixture_SOP_6-4-24.pdf Rotation Fixture SOP]
			**[[EB-1 - 4-inch, 4-wafer Fixture SOP\|4-inch, 4-wafer Fixture SOP]]

	=Recipes=		=Recipes=