https://wiki.nanofab.ucsb.edu/w/index.php?action=history&feed=atom&title=E-Beam_5_%28Plasys%29 2026-07-26T23:54:13Z Revision history for this page on the wiki MediaWiki 1.43.9 https://wiki.nanofab.ucsb.edu/w/index.php?title=E-Beam_5_(Plasys)&diff=161008&oldid=prev 2023-03-21T17:13:48Z

<p><span class="autocomment">Documentation</span></p> <table style="background-color: #fff; color: #202122;" data-mw="interface"> <col class="diff-marker" /> <col class="diff-content" /> <col class="diff-marker" /> <col class="diff-content" /> <tr class="diff-title" lang="en"> <td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">← Older revision</td> <td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 17:13, 21 March 2023</td> </tr><tr> <td colspan="2" class="diff-lineno">Line 26:</td> <td colspan="2" class="diff-lineno">Line 26:</td> </tr> <tr> <td class="diff-marker"></td> <td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>=Documentation=</div></td> <td class="diff-marker"></td> <td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>=Documentation=</div></td> </tr> <tr> <td class="diff-marker"></td> <td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td> <td class="diff-marker"></td> <td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td> </tr> <tr> <td class="diff-marker" data-marker="−"></td> <td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>*[<del style="font-weight: bold; text-decoration: none;">[</del>EBeam5_-_Operating_Instructions<del style="font-weight: bold; text-decoration: none;">]</del>]</div></td> <td class="diff-marker" data-marker="+"></td> <td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>*[<ins style="font-weight: bold; text-decoration: none;">https://wiki.nanotech.ucsb.edu/w/images/8/82/EBeam5_Operating_Procedures.pdf </ins>EBeam5_-_Operating_Instructions]</div></td> </tr> <tr> <td class="diff-marker"></td> <td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td> <td class="diff-marker"></td> <td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td> </tr> <tr> <td class="diff-marker"></td> <td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>=Recipes=</div></td> <td class="diff-marker"></td> <td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>=Recipes=</div></td> </tr> </table>

Barreraz https://wiki.nanofab.ucsb.edu/w/index.php?title=E-Beam_5_(Plasys)&diff=160779&oldid=prev 2022-12-16T07:23:56Z

<p>inital page and descriptions</p> <p><b>New page</b></p><div>{{tool2|{{PAGENAME}}<br /> |picture=e-beam5.jpg<br /> |type = Vacuum Deposition<br /> |super= Michael Barreraz<br /> |super2= Don Freeborn<br /> |location=Bay 3<br /> |description = Single-wafer motorized evaporator<br /> |manufacturer = Plasys Inc.<br /> |toolid=72<br /> }}<br /> <br /> =About=<br /> <br /> The Plasys is a single-wafer load evaporator with programmable wafer angle, wafer rotation, ion-mill pre-cleaning and oxygen flow capabilities, &#039;&#039;in situ&#039;&#039; while keeping the wafer under vaccuum.<br /> <br /> Only Aluminum is currently installed. <br /> <br /> The system is currently dedicated only to specific use-cases such as superconducting aluminum evap. <br /> <br /> &#039;&#039;&#039;Materials and Recipes allowed are tightly controlled.&#039;&#039;&#039; Please contact the [[Michael_Barreraz|supervisor]] to find out if your application is allowed on this machine.<br /> <br /> =Detailed Specifications=<br /> <br /> *&#039;&#039;To Be Added&#039;&#039;<br /> <br /> =Documentation=<br /> <br /> *[[EBeam5_-_Operating_Instructions]]<br /> <br /> =Recipes=<br /> <br /> *&#039;&#039;To Be Added&#039;&#039;</div>

John d