https://wiki.nanofab.ucsb.edu/w/index.php?action=history&feed=atom&title=E-Beam_Lithography_Recipes 2026-05-09T05:55:11Z Revision history for this page on the wiki MediaWiki 1.43.8 https://wiki.nanofab.ucsb.edu/w/index.php?title=E-Beam_Lithography_Recipes&diff=161030&oldid=prev 2023-04-04T22:33:45Z

<p>changed SEM#1 link and Nabity title in prep for new SEM</p> <table style="background-color: #fff; color: #202122;" data-mw="interface"> <col class="diff-marker" /> <col class="diff-content" /> <col class="diff-marker" /> <col class="diff-content" /> <tr class="diff-title" lang="en"> <td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">← Older revision</td> <td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 22:33, 4 April 2023</td> </tr><tr> <td colspan="2" class="diff-lineno">Line 1:</td> <td colspan="2" class="diff-lineno">Line 1:</td> </tr> <tr> <td class="diff-marker"></td> <td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>{{recipes|Lithography}}</div></td> <td class="diff-marker"></td> <td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>{{recipes|Lithography}}</div></td> </tr> <tr> <td class="diff-marker" data-marker="−"></td> <td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>=<del style="font-weight: bold; text-decoration: none;">[[Field Emission </del>SEM 1 (<del style="font-weight: bold; text-decoration: none;">FEI</del> <del style="font-weight: bold; text-decoration: none;">Sirion</del>)<del style="font-weight: bold; text-decoration: none;">]]</del>=</div></td> <td class="diff-marker" data-marker="+"></td> <td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>=SEM <ins style="font-weight: bold; text-decoration: none;">#</ins>1 (<ins style="font-weight: bold; text-decoration: none;">JEOL</ins> )<ins style="font-weight: bold; text-decoration: none;">: NABITY</ins>=</div></td> </tr> <tr> <td colspan="2" class="diff-empty diff-side-deleted"></td> <td class="diff-marker" data-marker="+"></td> <td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>Recipes for the NABITY lithography system on SEM#1: '''To Be Added'''</div></td> </tr> <tr> <td colspan="2" class="diff-empty diff-side-deleted"></td> <td class="diff-marker" data-marker="+"></td> <td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><br /></td> </tr> <tr> <td class="diff-marker"></td> <td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>=[[E-Beam Lithography System (JEOL JBX-6300FS)]]=</div></td> <td class="diff-marker"></td> <td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>=[[E-Beam Lithography System (JEOL JBX-6300FS)]]=</div></td> </tr> <tr> <td colspan="2" class="diff-empty diff-side-deleted"></td> <td class="diff-marker" data-marker="+"></td> <td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>'''To Be Added'''</div></td> </tr> </table>

John d https://wiki.nanofab.ucsb.edu/w/index.php?title=E-Beam_Lithography_Recipes&diff=2072&oldid=prev 2012-08-21T14:55:28Z

<p>Created page with &quot;{{recipes|Lithography}} =<a href="/w/index.php?title=Field_Emission_SEM_1_(FEI_Sirion)&amp;action=edit&amp;redlink=1" class="new" title="Field Emission SEM 1 (FEI Sirion) (page does not exist)">Field Emission SEM 1 (FEI Sirion)</a>= =<a href="/wiki/E-Beam_Lithography_System_(JEOL_JBX-6300FS)" title="E-Beam Lithography System (JEOL JBX-6300FS)">E-Beam Lithography System (JEOL JBX-6300FS)</a>=&quot;</p> <p><b>New page</b></p><div>{{recipes|Lithography}}<br /> =[[Field Emission SEM 1 (FEI Sirion)]]=<br /> =[[E-Beam Lithography System (JEOL JBX-6300FS)]]=</div>

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