Film Stress (Tencor Flexus) - Revision history

Silva at 18:58, 30 August 2022

2022-08-30T18:58:50Z

← Older revision		Revision as of 18:58, 30 August 2022
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	{{~~tool~~\|{{PAGENAME}}		{{tool2\|{{PAGENAME}}
	\|picture=Tencor.jpg		\|picture=Tencor.jpg
	\|type = Inspection, Test and Characterization		\|type = Inspection, Test and Characterization
	\|super= Lee Sawyer		\|super= Lee Sawyer
			\|super2= Mike Silva
	\|phone=(805)839-3918x219		\|phone=(805)839-3918x219
	\|location=Bay 1		\|location=Bay 1

2021-04-19T17:31:39Z

Documentation: Added SOP link

← Older revision		Revision as of 17:31, 19 April 2021
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	== Documentation ==		== Documentation ==
	* Tencor Flexus Standard Operating Procedure		* [https://wiki.nanotech.ucsb.edu/w/images/4/4d/Tencor_FLX_SOP_Rev_B.pdf Tencor Flexus Standard Operating Procedure]

2021-04-19T17:29:14Z

Added Documentation Section

← Older revision		Revision as of 17:29, 19 April 2021
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	*Substrates must be round and films must be reflective.		*Substrates must be round and films must be reflective.
	*Fixtures are available for 2, 3, 4, 5, and 6" wafers. 8" wafers can be ran as well without a fixture.		*Fixtures are available for 2, 3, 4, 5, and 6" wafers. 8" wafers can be ran as well without a fixture.

			== Documentation ==
			* Tencor Flexus Standard Operating Procedure

2021-04-19T17:06:02Z

Equipment Specifications

← Older revision		Revision as of 17:06, 19 April 2021
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	*Laser/Detector Scanning Configuration		*Laser/Detector Scanning Configuration
	*Substrates must be round and films must be reflective.		*Substrates must be round and films must be reflective.
	*Fixtures are available for 2", 3"		*Fixtures are available for 2, 3, 4, 5, and 6" wafers. 8" wafers can be ran as well without a fixture.

2021-04-19T16:33:00Z

Updating Equipment Specifications

← Older revision		Revision as of 16:33, 19 April 2021
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	=Equipment Specifications=		=Equipment Specifications=
			*Measurement range is 2E7 to 4E7 dyne/cm2
	*RT to 500°C operation
			*Stress can also be measured as a function of time or temperature. The system has a temperature range from room temperature to 500°C.
			*Measurement results are organized in an easy to read spreadsheet format that can easily be exported to other data handling software such as Excel.
	*Windows 3.xx control and file storing		*Windows 3.xx control and file storing
	*3-D mapping		*3-D mapping
	*4" wafers
	*Laser/Detector Scanning Configuration		*Laser/Detector Scanning Configuration
			*Substrates must be round and films must be reflective.
			*Fixtures are available for 2", 3"

2020-09-30T23:03:59Z

moved to bay 1

← Older revision		Revision as of 23:03, 30 September 2020
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	\|super= Lee Sawyer		\|super= Lee Sawyer
	\|phone=(805)839-3918x219		\|phone=(805)839-3918x219
	\|location=Bay 4		\|location=Bay 1
	\|email=silva@ece.ucsb.edu		\|email=silva@ece.ucsb.edu
	\|description = Film Stress Measurement system		\|description = Film Stress Measurement system

2020-04-15T18:13:18Z

← Older revision		Revision as of 18:13, 15 April 2020
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	\|picture=Tencor.jpg		\|picture=Tencor.jpg
	\|type = Inspection, Test and Characterization		\|type = Inspection, Test and Characterization
	\|super=~~Mike~~ ~~Silva~~		\|super= Lee Sawyer
	\|phone=(805)839-3918x219		\|phone=(805)839-3918x219
	\|location=Bay 4		\|location=Bay 4

2018-01-25T01:56:08Z

Added model

← Older revision		Revision as of 01:56, 25 January 2018
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	\|description = Film Stress Measurement system		\|description = Film Stress Measurement system
	\|manufacturer = Tencor		\|manufacturer = Tencor
			\|model = FLX-2320
	\|materials =		\|materials =
	}}		}}

2012-08-22T18:03:02Z

← Older revision		Revision as of 18:03, 22 August 2012
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	\|super=Mike Silva		\|super=Mike Silva
	\|phone=(805)839-3918x219		\|phone=(805)839-3918x219
	\|location=Bay 5		\|location=Bay 4
	\|email=silva@ece.ucsb.edu		\|email=silva@ece.ucsb.edu
	\|description = Film Stress Measurement system		\|description = Film Stress Measurement system

2012-08-22T18:02:45Z

← Older revision		Revision as of 18:02, 22 August 2012
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	\|super=Mike Silva		\|super=Mike Silva
	\|phone=(805)839-3918x219		\|phone=(805)839-3918x219
	\|location=Bay ?		\|location=Bay 5
	\|email=silva@ece.ucsb.edu		\|email=silva@ece.ucsb.edu
	\|description = Film Stress Measurement system		\|description = Film Stress Measurement system