Filmetrics F40-UV Quick Start - Revision history

John d: formatting

2019-05-31T18:13:29Z

formatting

← Older revision		Revision as of 18:13, 31 May 2019
Line 4:		Line 4:
	# Turn on light source to about 12 o'clock		# Turn on light source to about 12 o'clock
	## Optionally wait 1 min for light intensity to stabilize.[[File:Filmetrics F40-UV - light source setting 02.jpg\|thumb\|150x150px\|Set the light source to 12 o'clock\|none]]		## Optionally wait 1 min for light intensity to stabilize.[[File:Filmetrics F40-UV - light source setting 02.jpg\|thumb\|150x150px\|Set the light source to 12 o'clock\|none]]
	# Open Software "'''FILMeasure'''". ~~Activate "'''Live Video'''" Tab.~~		# Open Software "'''FILMeasure'''".
			# Activate the "'''Live Video'''" Tab.
	# Load "Filmetrics Focus/Reference Wafer" onto stage, avoiding hole [[File:Filmetrics F40-UV - wafer placement 03.jpg\|thumb\|200x200px\|Approximate placement of a 4-inch wafer\|none]]		# Load "'''''Filmetrics Focus / Reference Wafer'''''" onto stage, avoiding hole [[File:Filmetrics F40-UV - wafer placement 03.jpg\|thumb\|200x200px\|Approximate placement of a 4-inch wafer\|none]]
	# Rotate uScope turret to desired microscope objective		# Rotate uScope turret to desired microscope objective
	# Focus on wafer - use edge of blue (SiO2) features		# Focus on wafer - use edge of blue (SiO2) features

John d: /* Sample Measurement */ clarified good/bad fit & contatc Ning/Demis for help

2019-05-31T18:11:07Z

Sample Measurement: clarified good/bad fit & contatc Ning/Demis for help

← Older revision		Revision as of 18:11, 31 May 2019
Line 22:		Line 22:
	# '''Re-Select the correct microscope objective''' & Click '''[Measure]'''		# '''Re-Select the correct microscope objective''' & Click '''[Measure]'''
	# Make sure the blue (measured) and red (calc'd) curves have reasonably good agreement. Goodness of fit >90% is pretty good. Refractive Index (n), if calc'd, should be near the expected value for the film.		# Make sure the blue (measured) and red (calc'd) curves have reasonably good agreement. Goodness of fit >90% is pretty good. Refractive Index (n), if calc'd, should be near the expected value for the film.
	## If fit is bad (low GoF) or refractive index is far off, this measurement is inaccurate. If Red curve is much too wavy or too smooth, then your guess of thickness was not close enough - '''[Edit Recipe]''' & '''[Analyze]''' again until you get a good fit. [[File:Filmetrics F40-UV - spectrum curve fit 07.jpg\|alt=example spectrum curve fit\|none\|thumb\|300x300px\|A good fit should show the Calculated (red) curve overlay on top of the Measureed (blue) curve.]]		## If fit is bad (low GoF) or refractive index is far off, this measurement is inaccurate. If Red curve is much too wavy or too smooth, then your guess of thickness was not close enough - '''[Edit Recipe]''' & '''[Analyze]''' again until you get a good fit.
			## Don't hesitate to ask [[Ning Cao\|Ning]] or [[Demis D. John\|Demis]] for help with the curve-fitting, it can be complicated!
			:: [[File:Filmetrics F40-UV - spectrum curve fit 07.jpg\|alt=example spectrum curve fit\|none\|thumb\|300x300px\|A good fit should show the Calculated (red) curve overlay on top of the Measureed (blue) curve.]]

	=== ShutDown ===		=== ShutDown ===

John d: moved images to in-line

2018-09-05T05:55:42Z

moved images to in-line

John d: /* Sample Measurement */

2018-07-18T05:07:18Z

Sample Measurement

← Older revision		Revision as of 05:07, 18 July 2018
Line 22:		Line 22:
	=== Sample Measurement ===		=== Sample Measurement ===
	# Focus on your sample/feature of interest & place the black aperture spot on the measurement region. Here we will measure the SiO<sub>2</sub> on the Filmetrics Reference Wafer.		# Focus on your sample/feature of interest & place the black aperture spot on the measurement region. Here we will measure the SiO<sub>2</sub> on the Filmetrics Reference Wafer.
	## It is ok to change the objective, just make sure same calibrated objective is chosen before measuring.		## It is ok to change the objective, just make sure the same calibrated objective is chosen before measuring.
	# Select a recipe from the Dropdown list (ok to ''discard changes''), and Click '''[Edit Recipe…]''' to set the layers to approximately what you expect to measure.		# Select a recipe from the Dropdown list (ok to ''discard changes''), and Click '''[Edit Recipe…]''' to set the layers to approximately what you expect to measure.
	## Enable the checkbox next to the thicknesses you want it to measure/calculate, and Disable checkboxes next to any values you want the software to use pre-programmed values for.		## Enable the checkbox next to the thicknesses you want it to measure/calculate, and Disable checkboxes next to any values you want the software to use pre-programmed values for.
	## Optionally enable the check box next to n & k - but only if you know what refractive index and extinction you expect. If you don't know these values, Disable the "Meas" checkbox for n & k. When enabled, you'll want to make sure the refractive index (n) is close to the expected value.		## Optionally enable the check box next to n & k - but only if you know what refractive index and extinction you expect. If you don't know these values, Disable the "Meas" checkbox for n & k. When enabled, you'll want to make sure the calculated refractive index (n) is close to the expected value.
	# '''Re-Select the correct microscope objective''' & Click '''[Measure]'''		# '''Re-Select the correct microscope objective''' & Click '''[Measure]'''
	# Make sure the blue (measured) and red (calc'd) curves have reasonably good agreement. Goodness of fit >90% is pretty good. Refractive Index (n), if calc'd, should be near the expected value for the film.		# Make sure the blue (measured) and red (calc'd) curves have reasonably good agreement. Goodness of fit >90% is pretty good. Refractive Index (n), if calc'd, should be near the expected value for the film.
	## If fit is bad (low ~~GOF~~) or refractive index is far off, this measurement is inaccurate. If Red curve is much too wavy or too smooth, then your guess of thickness was not close enough - '''[Edit Recipe]''' & '''[Analyze]''' again until you get a good fit. [[File:Filmetrics F40-UV - spectrum curve fit 07.jpg\|alt=example spectrum curve fit\|none\|thumb\|300x300px\|A good fit should show the Calculated (red) curve overlay on top of the Measureed (blue) curve.]]		## If fit is bad (low GoF) or refractive index is far off, this measurement is inaccurate. If Red curve is much too wavy or too smooth, then your guess of thickness was not close enough - '''[Edit Recipe]''' & '''[Analyze]''' again until you get a good fit. [[File:Filmetrics F40-UV - spectrum curve fit 07.jpg\|alt=example spectrum curve fit\|none\|thumb\|300x300px\|A good fit should show the Calculated (red) curve overlay on top of the Measureed (blue) curve.]]

	=== ShutDown ===		=== ShutDown ===

John d: delete header pic

2018-07-18T05:04:07Z

delete header pic

← Older revision		Revision as of 05:04, 18 July 2018
Line 1:		Line 1:
	Demis D. John, UCSB NanoFab, Updated: 2018-07-17		Demis D. John, UCSB NanoFab, Updated: 2018-07-17
			Microscope-mounted Optical Thin-Film Analyzer
	Optical Thin-Film Analyzer, microscope mounted[[File:Filmetrics F40-UV - system pic 01.jpg\|alt=Photo of the Filmetrics F40-UV Measurement System\|none\|thumb\|300x300px\|Photo of the Filmetrics F40-UV Measurement System]]

	=== Startup and Calibration ===		=== Startup and Calibration ===
	# Turn on light source to about 12 o'clock [[File:Filmetrics F40-UV - light source setting 02.jpg\|thumb\|150x150px\|Set the light source to 12 o'clock]]		# Turn on light source to about 12 o'clock [[File:Filmetrics F40-UV - light source setting 02.jpg\|thumb\|150x150px\|Set the light source to 12 o'clock]]

John d: image reorg

2018-07-18T01:44:07Z

image reorg

← Older revision		Revision as of 01:44, 18 July 2018
Line 9:		Line 9:
	# Rotate uScope turret to desired microscope objective		# Rotate uScope turret to desired microscope objective
	# Focus on wafer - use edge of blue (SiO2) features		# Focus on wafer - use edge of blue (SiO2) features
	# In "'''Live Video'''" tab, make sure wafer is in focus, and black spot (measurement region) is on grey Silicon region only. ~~[[File:Filmetrics F40-UV - focus on bare silicon 04.jpg\|thumb\|200x200px\|Focus on the bare silicon in the FILMeasure software, for Si Reference scan\|alt="Live Video" tab showing focused wafer]]~~		# In "'''Live Video'''" tab, make sure wafer is in focus, and black spot (measurement region) is on grey Silicon region only.
	# Set software to use appropriate Objective calibration from dropdown list, eg. "10x" ~~[[File:Filmetrics F40-UV - objective choice 05.jpg\|thumb\|200x200px\|Choose objective calibration in software]]~~		# Set software to use appropriate Objective calibration from dropdown list, eg. "10x"
	# Click '''[Baseline…]''', set to "'''Si'''" and '''[Take Reflectance Standard]''' & '''[Next-->]'''		# Click '''[Baseline…]''', set to "'''Si'''" and '''[Take Reflectance Standard]''' & '''[Next-->]'''
	## If a warning about intensity change pops up, ignore it and hit '''[OK]'''		## If a warning about intensity change pops up, ignore it and hit '''[OK]'''
	# Move stage so microscope shoots through hole in stage		# Move stage so microscope shoots through hole in stage
	# Click '''[Take Background]''' & '''[Finish]'''		# Click '''[Take Background]''' & '''[Finish]'''
			{\|

			![[File:Filmetrics F40-UV - focus on bare silicon 04.jpg\|thumb\|200x200px\|Focus on the bare silicon in the FILMeasure software, for Si Reference scan\|alt="Live Video" tab showing focused wafer]]
			![[File:Filmetrics F40-UV - objective choice 05.jpg\|thumb\|200x200px\|Choose objective calibration in software]]
			![[File:Filmetrics F40-UV - dark meas thru hole 06.jpg\|alt=microscope aiming through hole in stage\|thumb\|200x200px\|For Background measurement, aim the microscope through the hole in the stage.]]
			\|}

	=== Sample Measurement ===		=== Sample Measurement ===

John d: image reflow editing

2018-07-18T01:40:26Z

image reflow editing

← Older revision		Revision as of 01:40, 18 July 2018
Line 1:		Line 1:
			Demis D. John, UCSB NanoFab, Updated: 2018-07-17
	Thin-Film Analyzer, microscope mounted
	[[File:Filmetrics F40-UV - system pic 01.jpg\|alt=Photo of the Filmetrics F40-UV Measurement System\|none\|thumb\|300x300px\|Photo of the Filmetrics F40-UV Measurement System]]		Optical Thin-Film Analyzer, microscope mounted[[File:Filmetrics F40-UV - system pic 01.jpg\|alt=Photo of the Filmetrics F40-UV Measurement System\|none\|thumb\|300x300px\|Photo of the Filmetrics F40-UV Measurement System]]

			=== Startup and Calibration ===
	# Turn on light source to about 12 o'clock
	## ~~Optionally~~ ~~wait~~ a ~~few~~ ~~min~~ ~~for~~ ~~light~~ ~~intensity to stabilize.~~ [[File:Filmetrics F40-UV - light source setting 02.jpg~~\|none~~\|thumb\|~~200x200px~~\|Set the light source to 12 o'clock]]		# Turn on light source to about 12 o'clock [[File:Filmetrics F40-UV - light source setting 02.jpg\|thumb\|150x150px\|Set the light source to 12 o'clock]]
			## Optionally wait a few min for light intensity to stabilize.
	# Open Software "FILMeasure". Activate "Live Video" Tab.		# Open Software "'''FILMeasure'''". Activate "'''Live Video'''" Tab.
	# Load "Filmetrics Focus/Reference Wafer" onto stage, avoiding hole
	# [[File:Filmetrics F40-UV - wafer placement 03.jpg~~\|none~~\|thumb\|200x200px\|Approximate placement of a 4-inch wafer]]		# Load "Filmetrics Focus/Reference Wafer" onto stage, avoiding hole [[File:Filmetrics F40-UV - wafer placement 03.jpg\|thumb\|200x200px\|Approximate placement of a 4-inch wafer]]
	# Rotate uScope turret to desired microscope objective		# Rotate uScope turret to desired microscope objective
	# Focus on wafer - use edge of blue (SiO2) features.		# Focus on wafer - use edge of blue (SiO2) features
	# In "Live Video" tab, make sure wafer is in focus, and black spot (measurement region) is on grey Silicon region only.		# In "'''Live Video'''" tab, make sure wafer is in focus, and black spot (measurement region) is on grey Silicon region only. [[File:Filmetrics F40-UV - focus on bare silicon 04.jpg\|thumb\|200x200px\|Focus on the bare silicon in the FILMeasure software, for Si Reference scan\|alt="Live Video" tab showing focused wafer]]
	# [[File:Filmetrics F40-UV - ~~focus~~ on ~~bare silicon 04~~.jpg~~\|none~~\|thumb\|200x200px\|~~Focus~~ on ~~teh bare silicon~~ in ~~the FILMeasure~~ software]]		# Set software to use appropriate Objective calibration from dropdown list, eg. "10x" [[File:Filmetrics F40-UV - objective choice 05.jpg\|thumb\|200x200px\|Choose objective calibration in software]]
		⚫	# Click '''[Baseline…]''', set to "'''Si'''" and '''[Take Reflectance Standard]''' & '''[Next-->]'''
	# Set software Objective to appropriate dropdown, eg. "10x"
		⚫	## If a warning about intensity change pops up, ignore it and hit '''[OK]'''
	# [[File:Filmetrics F40-UV - objective choice 05.jpg\|none\|thumb\|200x200px\|Choose objective calibration in software]]
⚫	# Click [Baseline…], set to "Si" and [Take Reflectance Standard] & [Next-->]
⚫	## If a warning about intensity change pops up, ignore it and hit [OK]
	# Move stage so microscope shoots through hole in stage		# Move stage so microscope shoots through hole in stage
		⚫	# Click '''[Take Background]''' & '''[Finish]'''
	# [[File:Filmetrics F40-UV - dark meas thru hole 06.jpg\|alt=Take Background measurement by aiming objective through the hole in the stage.\|none\|thumb\|200x200px\|Take Background measurement by aiming objective through the hole in the stage.]]

⚫	# Click [Take Background] & [Finish]

⚫	# Focus on your sample/feature of interest & place the black aperture spot on the measurement region. Here we will measure the ~~SiO2~~ on the Filmetrics Reference Wafer. ~~It is ok to change the objective, just make sure same calibrated objective is chosen before measuring.~~
			=== Sample Measurement ===
⚫	# Select a recipe from the Dropdown list (ok to discard changes), and Click [Edit Recipe…] to set the layers to approximately what you expect to measure.
		⚫	# Focus on your sample/feature of interest & place the black aperture spot on the measurement region. Here we will measure the SiO<sub>2</sub> on the Filmetrics Reference Wafer.
			## It is ok to change the objective, just make sure same calibrated objective is chosen before measuring.
		⚫	# Select a recipe from the Dropdown list (ok to ''discard changes''), and Click '''[Edit Recipe…]''' to set the layers to approximately what you expect to measure.
	## Enable the checkbox next to the thicknesses you want it to measure/calculate, and Disable checkboxes next to any values you want the software to use pre-programmed values for.		## Enable the checkbox next to the thicknesses you want it to measure/calculate, and Disable checkboxes next to any values you want the software to use pre-programmed values for.
	## Optionally enable the check box next to n & k - but only if you know what refractive index and extinction you expect. If you don't know these values, Disable the "Meas" checkbox for n & k. When enabled, you'll want to make sure the refractive index (n) is close to the expected value.		## Optionally enable the check box next to n & k - but only if you know what refractive index and extinction you expect. If you don't know these values, Disable the "Meas" checkbox for n & k. When enabled, you'll want to make sure the refractive index (n) is close to the expected value.
	# '''Re-Select the correct microscope objective''' & Click [Measure]		# '''Re-Select the correct microscope objective''' & Click '''[Measure]'''
	# Make sure the blue (measured) and red (calc'd) curves have reasonably good agreement. Goodness of fit >90% is pretty good. Refractive Index (n), if calc'd, should be near the expected value for the film.		# Make sure the blue (measured) and red (calc'd) curves have reasonably good agreement. Goodness of fit >90% is pretty good. Refractive Index (n), if calc'd, should be near the expected value for the film.
	## If fit is bad (low GOF) or refractive index is far off, this measurement is inaccurate. If Red curve is much too wavy or too smooth, then your guess of thickness was not close enough - [Edit Recipe] & [Analyze] again until you get a good fit.		## If fit is bad (low GOF) or refractive index is far off, this measurement is inaccurate. If Red curve is much too wavy or too smooth, then your guess of thickness was not close enough - '''[Edit Recipe]''' & '''[Analyze]''' again until you get a good fit. [[File:Filmetrics F40-UV - spectrum curve fit 07.jpg\|alt=example spectrum curve fit\|none\|thumb\|300x300px\|A good fit should show the Calculated (red) curve overlay on top of the Measureed (blue) curve.]]

	# [[File:Filmetrics F40-UV - spectrum curve fit 07.jpg\|alt=example spectrum curve fit\|none\|thumb\|300x300px\|A good fit should show the Calculated (red) curve overlay on top of the Measureed (blue) curve.]]
			=== ShutDown ===
	# Set objective to 10x & Remove Sample		# Set objective to 10x & Remove Sample
	# '''TURN OFF THE LIGHT SOURCE'''		# '''TURN OFF THE LIGHT SOURCE'''

John d: initial quick start. numbering is kinda messe dup, wrote in 10 min!

2018-07-18T01:08:02Z

initial quick start. numbering is kinda messe dup, wrote in 10 min!

New page

Thin-Film Analyzer, microscope mounted
[[File:Filmetrics F40-UV - system pic 01.jpg|alt=Photo of the Filmetrics F40-UV Measurement System|none|thumb|300x300px|Photo of the Filmetrics F40-UV Measurement System]]

# Turn on light source to about 12 o'clock
## Optionally wait a few min for light intensity to stabilize. [[File:Filmetrics F40-UV - light source setting 02.jpg|none|thumb|200x200px|Set the light source to 12 o'clock]]
# Open Software "FILMeasure". Activate "Live Video" Tab.
# Load "Filmetrics Focus/Reference Wafer" onto stage, avoiding hole
# [[File:Filmetrics F40-UV - wafer placement 03.jpg|none|thumb|200x200px|Approximate placement of a 4-inch wafer]]
# Rotate uScope turret to desired microscope objective
# Focus on wafer - use edge of blue (SiO2) features.
# In "Live Video" tab, make sure wafer is in focus, and black spot (measurement region) is on grey Silicon region only.
# [[File:Filmetrics F40-UV - focus on bare silicon 04.jpg|none|thumb|200x200px|Focus on teh bare silicon in the FILMeasure software]]
# Set software Objective to appropriate dropdown, eg. "10x"
# [[File:Filmetrics F40-UV - objective choice 05.jpg|none|thumb|200x200px|Choose objective calibration in software]]
# Click [Baseline…], set to "Si" and [Take Reflectance Standard] & [Next-->]
## If a warning about intensity change pops up, ignore it and hit [OK]
# Move stage so microscope shoots through hole in stage
# [[File:Filmetrics F40-UV - dark meas thru hole 06.jpg|alt=Take Background measurement by aiming objective through the hole in the stage.|none|thumb|200x200px|Take Background measurement by aiming objective through the hole in the stage.]]
# Click [Take Background] & [Finish]
# Focus on your sample/feature of interest & place the black aperture spot on the measurement region. Here we will measure the SiO2 on the Filmetrics Reference Wafer. It is ok to change the objective, just make sure same calibrated objective is chosen before measuring.
# Select a recipe from the Dropdown list (ok to discard changes), and Click [Edit Recipe…] to set the layers to approximately what you expect to measure.
## Enable the checkbox next to the thicknesses you want it to measure/calculate, and Disable checkboxes next to any values you want the software to use pre-programmed values for.
## Optionally enable the check box next to n & k - but only if you know what refractive index and extinction you expect.  If you don't know these values, Disable the "Meas" checkbox for n & k.  When enabled, you'll want to make sure the refractive index (n) is close to the expected value.
# '''Re-Select the correct microscope objective''' & Click [Measure]
# Make sure the blue (measured) and red (calc'd) curves have reasonably good agreement.  Goodness of fit >90% is pretty good.  Refractive Index (n), if calc'd, should be near the expected value for the film.
## If fit is bad (low GOF) or refractive index is far off, this measurement is inaccurate.  If Red curve is much too wavy or too smooth, then your guess of thickness was not close enough - [Edit Recipe] & [Analyze] again until you get a good fit.
# [[File:Filmetrics F40-UV - spectrum curve fit 07.jpg|alt=example spectrum curve fit|none|thumb|300x300px|A good fit should show the Calculated (red) curve overlay on top of the Measureed (blue) curve.]]
# Set objective to 10x & Remove Sample
# '''TURN OFF THE LIGHT SOURCE'''
## The halogen light source does die eventually, so prolong the life by turning off when not in use.
## If doing repeated measurements, leave a note with date/time.

← Older revision		Revision as of 05:55, 5 September 2018
Line 2:		Line 2:
	Microscope-mounted Optical Thin-Film Analyzer		Microscope-mounted Optical Thin-Film Analyzer
	=== Startup and Calibration ===		=== Startup and Calibration ===
	# Turn on light source to about 12 o'clock ~~[[File:Filmetrics F40-UV - light source setting 02.jpg\|thumb\|150x150px\|Set the light source to 12 o'clock]]~~		# Turn on light source to about 12 o'clock
	## Optionally wait ~~a few~~ min for light intensity to stabilize.		## Optionally wait 1 min for light intensity to stabilize.[[File:Filmetrics F40-UV - light source setting 02.jpg\|thumb\|150x150px\|Set the light source to 12 o'clock\|none]]
	# Open Software "'''FILMeasure'''". Activate "'''Live Video'''" Tab.		# Open Software "'''FILMeasure'''". Activate "'''Live Video'''" Tab.
	# Load "Filmetrics Focus/Reference Wafer" onto stage, avoiding hole [[File:Filmetrics F40-UV - wafer placement 03.jpg\|thumb\|200x200px\|Approximate placement of a 4-inch wafer]]		# Load "Filmetrics Focus/Reference Wafer" onto stage, avoiding hole [[File:Filmetrics F40-UV - wafer placement 03.jpg\|thumb\|200x200px\|Approximate placement of a 4-inch wafer\|none]]
	# Rotate uScope turret to desired microscope objective		# Rotate uScope turret to desired microscope objective
	# Focus on wafer - use edge of blue (SiO2) features		# Focus on wafer - use edge of blue (SiO2) features
	# In "'''Live Video'''" tab, make sure wafer is in focus, and black spot (measurement region) is on grey Silicon region only.		# In "'''Live Video'''" tab, make sure wafer is in focus, and black spot (measurement region) is on grey Silicon region only.[[File:Filmetrics F40-UV - focus on bare silicon 04.jpg\|thumb\|200x200px\|Focus on the bare silicon in the FILMeasure software, for Si Reference scan\|alt="Live Video" tab showing focused wafer\|none]]
	# Set software to use appropriate Objective calibration from dropdown list, eg. "10x"		# Set software to use appropriate Objective calibration from dropdown list, eg. "10x"[[File:Filmetrics F40-UV - objective choice 05.jpg\|thumb\|200x200px\|Choose objective calibration in software\|none]]
	# Click '''[Baseline…]''', set to "'''Si'''" and '''[Take Reflectance Standard]''' & '''[Next-->]'''		# Click '''[Baseline…]''', set to "'''Si'''" and '''[Take Reflectance Standard]''' & '''[Next-->]'''
	## If a warning about intensity change pops up, ignore it and hit '''[OK]'''		## If a warning about intensity change pops up, ignore it and hit '''[OK]'''
	# Move stage so microscope shoots through hole in stage		# Move stage so microscope shoots through hole in stage
		⚫	# Click '''[Take Background]''' & '''[Finish]'''[[File:Filmetrics F40-UV - dark meas thru hole 06.jpg\|alt=microscope aiming through hole in stage\|thumb\|200x200px\|For Background measurement, aim the microscope through the hole in the stage.\|none]]
	# Click '''[Take Background]''' & '''[Finish]'''
	{\|
	![[File:Filmetrics F40-UV - focus on bare silicon 04.jpg\|thumb\|200x200px\|Focus on the bare silicon in the FILMeasure software, for Si Reference scan\|alt="Live Video" tab showing focused wafer]]
	![[File:Filmetrics F40-UV - objective choice 05.jpg\|thumb\|200x200px\|Choose objective calibration in software]]
⚫	![[File:Filmetrics F40-UV - dark meas thru hole 06.jpg\|alt=microscope aiming through hole in stage\|thumb\|200x200px\|For Background measurement, aim the microscope through the hole in the stage.]]
	\|}

	=== Sample Measurement ===		=== Sample Measurement ===
	# Focus on your sample/feature of interest & place the black aperture spot on the measurement region. Here we will measure the SiO<sub>2</sub> on the Filmetrics Reference Wafer.		# Focus on your sample/feature of interest & place the black aperture spot on the measurement region. Here we will measure the SiO<sub>2</sub> on the Filmetrics Reference Wafer.
Line 25:		Line 19:
	# Select a recipe from the Dropdown list (ok to ''discard changes''), and Click '''[Edit Recipe…]''' to set the layers to approximately what you expect to measure.		# Select a recipe from the Dropdown list (ok to ''discard changes''), and Click '''[Edit Recipe…]''' to set the layers to approximately what you expect to measure.
	## Enable the checkbox next to the thicknesses you want it to measure/calculate, and Disable checkboxes next to any values you want the software to use pre-programmed values for.		## Enable the checkbox next to the thicknesses you want it to measure/calculate, and Disable checkboxes next to any values you want the software to use pre-programmed values for.
	## Optionally enable the check box next to n & k - but only if you know what refractive index and extinction you expect. If you don't know these values, Disable the "Meas" checkbox for n & k. When enabled, you'll want to make sure the calculated refractive index (n) is close to the expected value.		## Optionally enable the check box next to '''n''' & '''k''' - but only if you know what refractive index and extinction you expect. If you don't know these values, Disable the "Meas" checkbox for n & k. When enabled, you'll want to make sure the calculated refractive index (n) is close to the expected value.
	# '''Re-Select the correct microscope objective''' & Click '''[Measure]'''		# '''Re-Select the correct microscope objective''' & Click '''[Measure]'''
	# Make sure the blue (measured) and red (calc'd) curves have reasonably good agreement. Goodness of fit >90% is pretty good. Refractive Index (n), if calc'd, should be near the expected value for the film.		# Make sure the blue (measured) and red (calc'd) curves have reasonably good agreement. Goodness of fit >90% is pretty good. Refractive Index (n), if calc'd, should be near the expected value for the film.