High Temp Oven (Blue M) - Revision history

John d: add toolactions

2025-12-06T08:14:32Z

add toolactions

← Older revision		Revision as of 08:14, 6 December 2025
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	\|manufacturer = Blue M Electric		\|manufacturer = Blue M Electric
	\|toolid=56		\|toolid=56
			}}
			{{ToolActions
			\|toolid = 56
			\|ProcessControlURL =
			\|ProceduresURL =
			\|TrainingURL =
	}}		}}
	The Blue M oven has a Nitrogen purge (manual flow) and is able to be programmed for a series of custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled.		The Blue M oven has a Nitrogen purge (manual flow) and is able to be programmed for a series of custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled.

Barreraz: Added operating procedures

2022-09-08T17:33:48Z

Added operating procedures

← Older revision		Revision as of 17:33, 8 September 2022
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	\|manufacturer = Blue M Electric		\|manufacturer = Blue M Electric
	\|toolid=56		\|toolid=56
			}}
	}}The Blue M oven has a Nitrogen purge (manual flow) and is able to be programmed for a series of custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled.		The Blue M oven has a Nitrogen purge (manual flow) and is able to be programmed for a series of custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled.

	Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide.		Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide.

			<br />

			== Operating Procedures ==


			[https://wiki.nanotech.ucsb.edu/w/images/6/6c/BlueM_Instructions.pdf BlueM Oven Instructions]

Silva at 17:22, 30 August 2022

2022-08-30T17:22:19Z

← Older revision		Revision as of 17:22, 30 August 2022
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	{{~~tool~~\|{{PAGENAME}}		{{tool2\|{{PAGENAME}}
	\|picture=BlueMOven.jpg		\|picture=BlueMOven.jpg
	\|type = Lithography		\|type = Lithography
	\|super= ~~Brian~~ ~~Lingg~~		\|super= Michael Barreraz
			\|super2= Aidan Hopkins
	\|location=Bay 5		\|location=Bay 5
	\|description = High Temperature Oven		\|description = High Temperature Oven

Silva at 17:19, 15 April 2020

2020-04-15T17:19:06Z

← Older revision		Revision as of 17:19, 15 April 2020
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	\|picture=BlueMOven.jpg		\|picture=BlueMOven.jpg
	\|type = Lithography		\|type = Lithography
	\|super= ~~Mike~~ ~~Silva~~		\|super= Brian Lingg
	\|location=Bay 5		\|location=Bay 5
	\|description = High Temperature Oven		\|description = High Temperature Oven

John d: tool id included for SUM link

2019-06-04T17:55:22Z

tool id included for SUM link

← Older revision		Revision as of 17:55, 4 June 2019
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	\|description = High Temperature Oven		\|description = High Temperature Oven
	\|manufacturer = Blue M Electric		\|manufacturer = Blue M Electric
		⚫	\|toolid=56
	\|materials =
		⚫	}}The Blue M oven has a Nitrogen purge (manual flow) and is able to be programmed for a series of custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled.
⚫	\|toolid=
⚫	}}The Blue M oven has a Nitrogen purge and is able to be programmed for a series of custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled.

	Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide.		Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide.

John d: removed "8 steps"

2017-09-09T02:58:33Z

removed "8 steps"

← Older revision		Revision as of 02:58, 9 September 2017
Line 8:		Line 8:
	\|materials =		\|materials =
	\|toolid=		\|toolid=
	}}The Blue M oven has a Nitrogen purge and is ~~programmable~~ for up to 8 custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled.		}}The Blue M oven has a Nitrogen purge and is able to be programmed for a series of custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled.

	Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide.		Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide.

John d: added description of processes etc.

2017-09-09T02:57:39Z

added description of processes etc.

← Older revision		Revision as of 02:57, 9 September 2017
Line 8:		Line 8:
	\|materials =		\|materials =
	\|toolid=		\|toolid=
			}}The Blue M oven has a Nitrogen purge and is programmable for up to 8 custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled.
	}}

			Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide.

Zwarburg: Created page with "{{tool|{{PAGENAME}} |picture=BlueMOven.jpg |type = Lithography |super= Mike Silva |location=Bay 5 |description = High Temperature Oven |manufacturer = Blue M Electric |materials…"

2012-07-11T17:12:33Z

Created page with "{{tool|{{PAGENAME}} |picture=BlueMOven.jpg |type = Lithography |super= Mike Silva |location=Bay 5 |description = High Temperature Oven |manufacturer = Blue M Electric |materials…"

New page

{{tool|{{PAGENAME}}
|picture=BlueMOven.jpg
|type = Lithography
|super= Mike Silva
|location=Bay 5
|description = High Temperature Oven
|manufacturer = Blue M Electric
|materials =
|toolid=
}}