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	<id>https://wiki.nanofab.ucsb.edu/w/index.php?action=history&amp;feed=atom&amp;title=InP_Etch_Test_Result_in_Details</id>
	<title>InP Etch Test Result in Details - Revision history</title>
	<link rel="self" type="application/atom+xml" href="https://wiki.nanofab.ucsb.edu/w/index.php?action=history&amp;feed=atom&amp;title=InP_Etch_Test_Result_in_Details"/>
	<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=InP_Etch_Test_Result_in_Details&amp;action=history"/>
	<updated>2026-05-08T11:59:56Z</updated>
	<subtitle>Revision history for this page on the wiki</subtitle>
	<generator>MediaWiki 1.43.8</generator>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=InP_Etch_Test_Result_in_Details&amp;diff=157794&amp;oldid=prev</id>
		<title>Jcrode: Text replacement - &quot;www.nanotech.ucsb.edu/wiki/&quot; to &quot;wiki.nanotech.ucsb.edu/wiki/&quot;</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=InP_Etch_Test_Result_in_Details&amp;diff=157794&amp;oldid=prev"/>
		<updated>2020-04-07T01:31:28Z</updated>

		<summary type="html">&lt;p&gt;Text replacement - &amp;quot;www.nanotech.ucsb.edu/wiki/&amp;quot; to &amp;quot;wiki.nanotech.ucsb.edu/wiki/&amp;quot;&lt;/p&gt;
&lt;table style=&quot;background-color: #fff; color: #202122;&quot; data-mw=&quot;interface&quot;&gt;
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				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;← Older revision&lt;/td&gt;
				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;Revision as of 01:31, 7 April 2020&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;
  &lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 1:&lt;/td&gt;
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  &lt;td class=&quot;diff-marker&quot; data-marker=&quot;+&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;[https://&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;wiki&lt;/ins&gt;.nanotech.ucsb.edu/wiki/images/e/e6/InP_Etch_using_Unaxis_PM1_at_200_C-5.pdf]&lt;/div&gt;&lt;/td&gt;
&lt;/tr&gt;
&lt;/table&gt;</summary>
		<author><name>Jcrode</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=InP_Etch_Test_Result_in_Details&amp;diff=155932&amp;oldid=prev</id>
		<title>Ningcao: add a file</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=InP_Etch_Test_Result_in_Details&amp;diff=155932&amp;oldid=prev"/>
		<updated>2019-02-01T19:44:53Z</updated>

		<summary type="html">&lt;p&gt;add a file&lt;/p&gt;
&lt;table style=&quot;background-color: #fff; color: #202122;&quot; data-mw=&quot;interface&quot;&gt;
				&lt;col class=&quot;diff-marker&quot; /&gt;
				&lt;col class=&quot;diff-content&quot; /&gt;
				&lt;col class=&quot;diff-marker&quot; /&gt;
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				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;← Older revision&lt;/td&gt;
				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;Revision as of 19:44, 1 February 2019&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;
  &lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 1:&lt;/td&gt;
  &lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 1:&lt;/td&gt;
&lt;/tr&gt;
&lt;tr&gt;
  &lt;td colspan=&quot;2&quot; class=&quot;diff-empty diff-side-deleted&quot;&gt;&lt;/td&gt;
  &lt;td class=&quot;diff-marker&quot; data-marker=&quot;+&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;[https://www.nanotech.ucsb.edu/wiki/images/e/e6/InP_Etch_using_Unaxis_PM1_at_200_C-5.pdf]&lt;/div&gt;&lt;/td&gt;
&lt;/tr&gt;
&lt;/table&gt;</summary>
		<author><name>Ningcao</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=InP_Etch_Test_Result_in_Details&amp;diff=155929&amp;oldid=prev</id>
		<title>Ningcao: Blanked the page</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=InP_Etch_Test_Result_in_Details&amp;diff=155929&amp;oldid=prev"/>
		<updated>2019-02-01T19:39:48Z</updated>

		<summary type="html">&lt;p&gt;Blanked the page&lt;/p&gt;
&lt;table style=&quot;background-color: #fff; color: #202122;&quot; data-mw=&quot;interface&quot;&gt;
				&lt;col class=&quot;diff-marker&quot; /&gt;
				&lt;col class=&quot;diff-content&quot; /&gt;
				&lt;col class=&quot;diff-marker&quot; /&gt;
				&lt;col class=&quot;diff-content&quot; /&gt;
				&lt;tr class=&quot;diff-title&quot; lang=&quot;en&quot;&gt;
				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;← Older revision&lt;/td&gt;
				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;Revision as of 19:39, 1 February 2019&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;
  &lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 1:&lt;/td&gt;
  &lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 1:&lt;/td&gt;
&lt;/tr&gt;
&lt;tr&gt;
  &lt;td class=&quot;diff-marker&quot; data-marker=&quot;−&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;[https://www.nanotech.ucsb.edu/wiki/images/a/a4/InP_Etch_using_Unaxis_PM1_at_200_C-4.pdf]&lt;/div&gt;&lt;/td&gt;
  &lt;td colspan=&quot;2&quot; class=&quot;diff-empty diff-side-added&quot;&gt;&lt;/td&gt;
&lt;/tr&gt;
&lt;/table&gt;</summary>
		<author><name>Ningcao</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=InP_Etch_Test_Result_in_Details&amp;diff=155928&amp;oldid=prev</id>
		<title>Ningcao: add a file</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=InP_Etch_Test_Result_in_Details&amp;diff=155928&amp;oldid=prev"/>
		<updated>2019-02-01T19:39:16Z</updated>

		<summary type="html">&lt;p&gt;add a file&lt;/p&gt;
&lt;table style=&quot;background-color: #fff; color: #202122;&quot; data-mw=&quot;interface&quot;&gt;
				&lt;col class=&quot;diff-marker&quot; /&gt;
				&lt;col class=&quot;diff-content&quot; /&gt;
				&lt;col class=&quot;diff-marker&quot; /&gt;
				&lt;col class=&quot;diff-content&quot; /&gt;
				&lt;tr class=&quot;diff-title&quot; lang=&quot;en&quot;&gt;
				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;← Older revision&lt;/td&gt;
				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;Revision as of 19:39, 1 February 2019&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;
  &lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 1:&lt;/td&gt;
  &lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 1:&lt;/td&gt;
&lt;/tr&gt;
&lt;tr&gt;
  &lt;td class=&quot;diff-marker&quot; data-marker=&quot;−&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;[https://www.nanotech.ucsb.edu/wiki/images/a/a4/&lt;del style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;InP_Etch_using_Unaxis_PM1_at_200_C-4.pdf-4.pdf https://www.nanotech.ucsb.edu/wiki/index.php/File:&lt;/del&gt;InP_Etch_using_Unaxis_PM1_at_200_C-4.pdf]&lt;/div&gt;&lt;/td&gt;
  &lt;td class=&quot;diff-marker&quot; data-marker=&quot;+&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;[https://www.nanotech.ucsb.edu/wiki/images/a/a4/InP_Etch_using_Unaxis_PM1_at_200_C-4.pdf]&lt;/div&gt;&lt;/td&gt;
&lt;/tr&gt;
&lt;/table&gt;</summary>
		<author><name>Ningcao</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=InP_Etch_Test_Result_in_Details&amp;diff=155927&amp;oldid=prev</id>
		<title>Ningcao: add a file</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=InP_Etch_Test_Result_in_Details&amp;diff=155927&amp;oldid=prev"/>
		<updated>2019-02-01T19:37:45Z</updated>

		<summary type="html">&lt;p&gt;add a file&lt;/p&gt;
&lt;table style=&quot;background-color: #fff; color: #202122;&quot; data-mw=&quot;interface&quot;&gt;
				&lt;col class=&quot;diff-marker&quot; /&gt;
				&lt;col class=&quot;diff-content&quot; /&gt;
				&lt;col class=&quot;diff-marker&quot; /&gt;
				&lt;col class=&quot;diff-content&quot; /&gt;
				&lt;tr class=&quot;diff-title&quot; lang=&quot;en&quot;&gt;
				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;← Older revision&lt;/td&gt;
				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;Revision as of 19:37, 1 February 2019&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;
  &lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 1:&lt;/td&gt;
  &lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 1:&lt;/td&gt;
&lt;/tr&gt;
&lt;tr&gt;
  &lt;td class=&quot;diff-marker&quot; data-marker=&quot;−&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;[https://www.nanotech.ucsb.edu/wiki/images/a/a4/InP_Etch_using_Unaxis_PM1_at_200_C-4.pdf https://www.nanotech.ucsb.edu/wiki/index.php/File:InP_Etch_using_Unaxis_PM1_at_200_C-4.pdf]&lt;/div&gt;&lt;/td&gt;
  &lt;td class=&quot;diff-marker&quot; data-marker=&quot;+&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;[https://www.nanotech.ucsb.edu/wiki/images/a/a4/InP_Etch_using_Unaxis_PM1_at_200_C&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;-4.pdf&lt;/ins&gt;-4.pdf https://www.nanotech.ucsb.edu/wiki/index.php/File:InP_Etch_using_Unaxis_PM1_at_200_C-4.pdf]&lt;/div&gt;&lt;/td&gt;
&lt;/tr&gt;
&lt;/table&gt;</summary>
		<author><name>Ningcao</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=InP_Etch_Test_Result_in_Details&amp;diff=155894&amp;oldid=prev</id>
		<title>Ningcao: add a file</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=InP_Etch_Test_Result_in_Details&amp;diff=155894&amp;oldid=prev"/>
		<updated>2019-01-31T19:07:49Z</updated>

		<summary type="html">&lt;p&gt;add a file&lt;/p&gt;
&lt;table style=&quot;background-color: #fff; color: #202122;&quot; data-mw=&quot;interface&quot;&gt;
				&lt;col class=&quot;diff-marker&quot; /&gt;
				&lt;col class=&quot;diff-content&quot; /&gt;
				&lt;col class=&quot;diff-marker&quot; /&gt;
				&lt;col class=&quot;diff-content&quot; /&gt;
				&lt;tr class=&quot;diff-title&quot; lang=&quot;en&quot;&gt;
				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;← Older revision&lt;/td&gt;
				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;Revision as of 19:07, 31 January 2019&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;
  &lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 1:&lt;/td&gt;
  &lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 1:&lt;/td&gt;
&lt;/tr&gt;
&lt;tr&gt;
  &lt;td class=&quot;diff-marker&quot; data-marker=&quot;−&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;https://www.nanotech.ucsb.edu/wiki/index.php/File:InP_Etch_using_Unaxis_PM1_at_200_C-4.pdf&lt;/div&gt;&lt;/td&gt;
  &lt;td class=&quot;diff-marker&quot; data-marker=&quot;+&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;[https://www.nanotech.ucsb.edu/wiki/images/a/a4/InP_Etch_using_Unaxis_PM1_at_200_C-4.pdf &lt;/ins&gt;https://www.nanotech.ucsb.edu/wiki/index.php/File:InP_Etch_using_Unaxis_PM1_at_200_C-4.pdf&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;]&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;
&lt;/tr&gt;
&lt;/table&gt;</summary>
		<author><name>Ningcao</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=InP_Etch_Test_Result_in_Details&amp;diff=155554&amp;oldid=prev</id>
		<title>Ningcao: adding a data file</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=InP_Etch_Test_Result_in_Details&amp;diff=155554&amp;oldid=prev"/>
		<updated>2018-10-04T18:24:45Z</updated>

		<summary type="html">&lt;p&gt;adding a data file&lt;/p&gt;
&lt;table style=&quot;background-color: #fff; color: #202122;&quot; data-mw=&quot;interface&quot;&gt;
				&lt;col class=&quot;diff-marker&quot; /&gt;
				&lt;col class=&quot;diff-content&quot; /&gt;
				&lt;col class=&quot;diff-marker&quot; /&gt;
				&lt;col class=&quot;diff-content&quot; /&gt;
				&lt;tr class=&quot;diff-title&quot; lang=&quot;en&quot;&gt;
				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;← Older revision&lt;/td&gt;
				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;Revision as of 18:24, 4 October 2018&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;
  &lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 1:&lt;/td&gt;
  &lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 1:&lt;/td&gt;
&lt;/tr&gt;
&lt;tr&gt;
  &lt;td class=&quot;diff-marker&quot; data-marker=&quot;−&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;del style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;[https://www.nanotech.ucsb.edu/wiki/index.php/File:InP_Etch_using_Unaxis_PM1_at_200_C-3.pdf &lt;/del&gt;https://www.nanotech.ucsb.edu/wiki/index.php/File:InP_Etch_using_Unaxis_PM1_at_200_C-4.pdf&lt;del style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;]&lt;/del&gt;&lt;/div&gt;&lt;/td&gt;
  &lt;td class=&quot;diff-marker&quot; data-marker=&quot;+&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;https://www.nanotech.ucsb.edu/wiki/index.php/File:InP_Etch_using_Unaxis_PM1_at_200_C-4.pdf&lt;/div&gt;&lt;/td&gt;
&lt;/tr&gt;
&lt;/table&gt;</summary>
		<author><name>Ningcao</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=InP_Etch_Test_Result_in_Details&amp;diff=155553&amp;oldid=prev</id>
		<title>Ningcao: add a new data file</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=InP_Etch_Test_Result_in_Details&amp;diff=155553&amp;oldid=prev"/>
		<updated>2018-10-04T18:19:33Z</updated>

		<summary type="html">&lt;p&gt;add a new data file&lt;/p&gt;
&lt;table style=&quot;background-color: #fff; color: #202122;&quot; data-mw=&quot;interface&quot;&gt;
				&lt;col class=&quot;diff-marker&quot; /&gt;
				&lt;col class=&quot;diff-content&quot; /&gt;
				&lt;col class=&quot;diff-marker&quot; /&gt;
				&lt;col class=&quot;diff-content&quot; /&gt;
				&lt;tr class=&quot;diff-title&quot; lang=&quot;en&quot;&gt;
				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;← Older revision&lt;/td&gt;
				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;Revision as of 18:19, 4 October 2018&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;
  &lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 1:&lt;/td&gt;
  &lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 1:&lt;/td&gt;
&lt;/tr&gt;
&lt;tr&gt;
  &lt;td class=&quot;diff-marker&quot; data-marker=&quot;−&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;[https://www.nanotech.ucsb.edu/wiki/index.php/File:InP_Etch_using_Unaxis_PM1_at_200_C-3.pdf https://www.nanotech.ucsb.edu/wiki/index.php/File:InP_Etch_using_Unaxis_PM1_at_200_C-&lt;del style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;2&lt;/del&gt;.pdf]&lt;/div&gt;&lt;/td&gt;
  &lt;td class=&quot;diff-marker&quot; data-marker=&quot;+&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;[https://www.nanotech.ucsb.edu/wiki/index.php/File:InP_Etch_using_Unaxis_PM1_at_200_C-3.pdf https://www.nanotech.ucsb.edu/wiki/index.php/File:InP_Etch_using_Unaxis_PM1_at_200_C-&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;4&lt;/ins&gt;.pdf]&lt;/div&gt;&lt;/td&gt;
&lt;/tr&gt;
&lt;/table&gt;</summary>
		<author><name>Ningcao</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=InP_Etch_Test_Result_in_Details&amp;diff=155395&amp;oldid=prev</id>
		<title>Ningcao: add a new data file</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=InP_Etch_Test_Result_in_Details&amp;diff=155395&amp;oldid=prev"/>
		<updated>2018-08-13T22:17:09Z</updated>

		<summary type="html">&lt;p&gt;add a new data file&lt;/p&gt;
&lt;table style=&quot;background-color: #fff; color: #202122;&quot; data-mw=&quot;interface&quot;&gt;
				&lt;col class=&quot;diff-marker&quot; /&gt;
				&lt;col class=&quot;diff-content&quot; /&gt;
				&lt;col class=&quot;diff-marker&quot; /&gt;
				&lt;col class=&quot;diff-content&quot; /&gt;
				&lt;tr class=&quot;diff-title&quot; lang=&quot;en&quot;&gt;
				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;← Older revision&lt;/td&gt;
				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;Revision as of 22:17, 13 August 2018&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;
  &lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 1:&lt;/td&gt;
  &lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 1:&lt;/td&gt;
&lt;/tr&gt;
&lt;tr&gt;
  &lt;td class=&quot;diff-marker&quot; data-marker=&quot;−&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;https://www.nanotech.ucsb.edu/wiki/index.php/File:InP_Etch_using_Unaxis_PM1_at_200_C-2.pdf&lt;/div&gt;&lt;/td&gt;
  &lt;td class=&quot;diff-marker&quot; data-marker=&quot;+&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;[https://www.nanotech.ucsb.edu/wiki/index.php/File:InP_Etch_using_Unaxis_PM1_at_200_C-3.pdf &lt;/ins&gt;https://www.nanotech.ucsb.edu/wiki/index.php/File:InP_Etch_using_Unaxis_PM1_at_200_C-2.pdf&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;]&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;
&lt;/tr&gt;
&lt;/table&gt;</summary>
		<author><name>Ningcao</name></author>
	</entry>
	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=InP_Etch_Test_Result_in_Details&amp;diff=155112&amp;oldid=prev</id>
		<title>Ningcao: Created page with &quot;https://www.nanotech.ucsb.edu/wiki/index.php/File:InP_Etch_using_Unaxis_PM1_at_200_C-2.pdf&quot;</title>
		<link rel="alternate" type="text/html" href="https://wiki.nanofab.ucsb.edu/w/index.php?title=InP_Etch_Test_Result_in_Details&amp;diff=155112&amp;oldid=prev"/>
		<updated>2018-05-02T15:48:21Z</updated>

		<summary type="html">&lt;p&gt;Created page with &amp;quot;https://www.nanotech.ucsb.edu/wiki/index.php/File:InP_Etch_using_Unaxis_PM1_at_200_C-2.pdf&amp;quot;&lt;/p&gt;
&lt;p&gt;&lt;b&gt;New page&lt;/b&gt;&lt;/p&gt;&lt;div&gt;https://www.nanotech.ucsb.edu/wiki/index.php/File:InP_Etch_using_Unaxis_PM1_at_200_C-2.pdf&lt;/div&gt;</summary>
		<author><name>Ningcao</name></author>
	</entry>
</feed>