Laser Scanning Confocal M-scope (Olympus LEXT) - Revision history

Hopkins a: /* Offline software */

2024-07-30T16:02:50Z

Offline software

← Older revision		Revision as of 16:02, 30 July 2024
Line 31:		Line 31:

	===Offline software===		===Offline software===
	[https://~~drive~~.~~google~~.~~com~~/~~drive~~/~~folders~~/~~1NsTb1UYDkTTvWU2AjfujuqYbKstos3W7?usp=sharing~~ LEXT OLS4000 Offline Software]		[https://wiki.nanofab.ucsb.edu/w/images/0/01/LEXT_OLS4100_InstallManual_Ver.3.1.8_offline.pdf LEXT OLS4000 Offline Software]

	== Other Info ==		==Other Info==
	'''''Equip > Characterization > [[Microscopes]]''''' - ''see a list of all our microscopes''		'''''Equip > Characterization > [[Microscopes]]''''' - ''see a list of all our microscopes''

Silva at 16:30, 30 August 2022

2022-08-30T16:30:36Z

← Older revision		Revision as of 16:30, 30 August 2022
Line 1:		Line 1:
	{{~~tool~~\|{{PAGENAME}}		{{tool2\|{{PAGENAME}}
	\|picture=OlympusLEXT.jpg		\|picture=OlympusLEXT.jpg
	\|type = Inspection, Test and Characterization		\|type = Inspection, Test and Characterization

Silva at 16:20, 30 August 2022

2022-08-30T16:20:05Z

← Older revision		Revision as of 16:20, 30 August 2022
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	\|type = Inspection, Test and Characterization		\|type = Inspection, Test and Characterization
	\|super= Aidan Hopkins		\|super= Aidan Hopkins
			\|super2= Tony Bosch
	\|location=Bay 4		\|location=Bay 4
	\|description = Scanning Laser Confocal Microscope		\|description = Scanning Laser Confocal Microscope

John d: Corrected name spelling, deleted email/phone

2022-08-30T15:43:12Z

Corrected name spelling, deleted email/phone

← Older revision		Revision as of 15:43, 30 August 2022
Line 2:		Line 2:
	\|picture=OlympusLEXT.jpg		\|picture=OlympusLEXT.jpg
	\|type = Inspection, Test and Characterization		\|type = Inspection, Test and Characterization
	\|super= Aidan ~~Hopkings~~		\|super= Aidan Hopkins
	\|phone= (805)839-2343
	\|location=Bay 4		\|location=Bay 4
	\|email=hopkins@ece.ucsb.edu
	\|description = Scanning Laser Confocal Microscope		\|description = Scanning Laser Confocal Microscope
	\|manufacturer = [http://www.olympus-ims.com/en/metrology/ols4000/ Olympus]		\|manufacturer = [http://www.olympus-ims.com/en/metrology/ols4000/ Olympus]

Silva at 14:53, 30 August 2022

2022-08-30T14:53:28Z

← Older revision		Revision as of 14:53, 30 August 2022
Line 3:		Line 3:
	\|type = Inspection, Test and Characterization		\|type = Inspection, Test and Characterization
	\|super= Aidan Hopkings		\|super= Aidan Hopkings
	\|phone=(805)839-2343		\|phone= (805)839-2343
	\|location=Bay 4		\|location=Bay 4
	\|email=hopkins@ece.ucsb.edu		\|email=hopkins@ece.ucsb.edu

Silva at 14:24, 30 August 2022

2022-08-30T14:24:12Z

← Older revision		Revision as of 14:24, 30 August 2022
Line 2:		Line 2:
	\|picture=OlympusLEXT.jpg		\|picture=OlympusLEXT.jpg
	\|type = Inspection, Test and Characterization		\|type = Inspection, Test and Characterization
	\|super= ~~Tony~~ ~~Bosch~~		\|super= Aidan Hopkings
	\|phone=(805)839-~~3918x217~~		\|phone=(805)839-2343
	\|location=Bay 4		\|location=Bay 4
	\|email=~~bosch~~@ece.ucsb.edu		\|email=hopkins@ece.ucsb.edu
	\|description = Scanning Laser Confocal Microscope		\|description = Scanning Laser Confocal Microscope
	\|manufacturer = [http://www.olympus-ims.com/en/metrology/ols4000/ Olympus]		\|manufacturer = [http://www.olympus-ims.com/en/metrology/ols4000/ Olympus]

John d: link to all scopes

2022-06-06T17:26:06Z

link to all scopes

← Older revision		Revision as of 17:26, 6 June 2022
Line 11:		Line 11:
	\|toolid=3		\|toolid=3
	}}		}}
	= About =		=About=
	The LEXT OLS4000 3D Laser Measuring Microscope is designed for nanometer level imaging, 3D measurement and roughness measurement. Magnification ranges from 108x - 17,280x satisfy the needs of today's researchers. For a complete description of the tool and its capabilities, please see the above link to the manufacturer’s website.		The LEXT OLS4000 3D Laser Measuring Microscope is designed for nanometer level imaging, 3D measurement and roughness measurement. Magnification ranges from 108x - 17,280x satisfy the needs of today's researchers. For a complete description of the tool and its capabilities, please see the above link to the manufacturer’s website.

	=== Technique & Capabilities ===		===Technique & Capabilities===
	[[File:Olypmus LEXT Example Profile Measurement.png\|alt=Measurement of 5µm wide posts\|thumb\|205x205px\|Example Height/Profile Measurement (click to enlarge)]]		[[File:Olypmus LEXT Example Profile Measurement.png\|alt=Measurement of 5µm wide posts\|thumb\|205x205px\|Example Height/Profile Measurement (click to enlarge)]]
	The LEXT allows you to take height measurements of features too small to reach with a physical Stylus needle, in a non-contact mode that is much faster than engaging an AFM tip. In addition, very large aspect-ratios can be measured - for example, 1mm depth x 50µm width. Confocal microscopy ensures that only surfaces that are in-focus will return a signal to the microscope detector. The LEXT sweeps the focus motor and captures a 2D scan of your sample at each focus step, taken with a blue laser (405 nm). After the scan, the height of each surface is calculated by the focus step which produced the highest laser intensity, and this is constructed into a 3D image by the OLS software.		The LEXT allows you to take height measurements of features too small to reach with a physical Stylus needle, in a non-contact mode that is much faster than engaging an AFM tip. In addition, very large aspect-ratios can be measured - for example, 1mm depth x 50µm width. Confocal microscopy ensures that only surfaces that are in-focus will return a signal to the microscope detector. The LEXT sweeps the focus motor and captures a 2D scan of your sample at each focus step, taken with a blue laser (405 nm). After the scan, the height of each surface is calculated by the focus step which produced the highest laser intensity, and this is constructed into a 3D image by the OLS software.
Line 24:		Line 24:
	Technically the height-resolution is specified as 10 nm (the height resolution of the focus motor), but in practice, noise and optical uncertainties worsen this spec.		Technically the height-resolution is specified as 10 nm (the height resolution of the focus motor), but in practice, noise and optical uncertainties worsen this spec.

	== Operating Procedures ==		==Operating Procedures==
	[[Olympus LEXT OLS4000 Confocal uScope - Quick Start\|LEXT Quick Start]]		[[Olympus LEXT OLS4000 Confocal uScope - Quick Start\|LEXT Quick Start]]

Line 31:		Line 31:
	**'''Important:''' ''This video is for reference only, and does not give you authorization to use the tool. You must be officially authorized by the supervisor before using this machine.''		**'''Important:''' ''This video is for reference only, and does not give you authorization to use the tool. You must be officially authorized by the supervisor before using this machine.''

		⚫	===Offline software===

⚫	=== Offline software ===
	[https://drive.google.com/drive/folders/1NsTb1UYDkTTvWU2AjfujuqYbKstos3W7?usp=sharing LEXT OLS4000 Offline Software]		[https://drive.google.com/drive/folders/1NsTb1UYDkTTvWU2AjfujuqYbKstos3W7?usp=sharing LEXT OLS4000 Offline Software]

			== Other Info ==
			'''''Equip > Characterization > [[Microscopes]]''''' - ''see a list of all our microscopes''

Bosch t: /* Operating Procedures */

2022-01-27T13:52:34Z

Operating Procedures

← Older revision		Revision as of 13:52, 27 January 2022
Line 26:		Line 26:
	== Operating Procedures ==		== Operating Procedures ==
	[[Olympus LEXT OLS4000 Confocal uScope - Quick Start\|LEXT Quick Start]]		[[Olympus LEXT OLS4000 Confocal uScope - Quick Start\|LEXT Quick Start]]

			*Online Training Video:
			**[https://gauchocast.hosted.panopto.com/Panopto/Pages/Viewer.aspx?id=c8d43220-e3aa-42b6-a372-ae290113b2c4 <u>LEXT Laser Confocal M-Scope Training</u>]
			**'''Important:''' ''This video is for reference only, and does not give you authorization to use the tool. You must be officially authorized by the supervisor before using this machine.''


	=== Offline software ===		=== Offline software ===

John d: revert back to TonyB's April 2020 revision.

2021-04-09T18:29:06Z

revert back to TonyB's April 2020 revision.

← Older revision		Revision as of 18:29, 9 April 2021
Line 1:		Line 1:
	{{tool\|{{PAGENAME}}		{{tool\|{{PAGENAME}}
	\|picture=~~OlympusDSX1000~~.jpg		\|picture=OlympusLEXT.jpg
	\|type = Inspection, Test and Characterization		\|type = Inspection, Test and Characterization
	\|super= Tony Bosch		\|super= Tony Bosch
			\|phone=(805)839-3918x217
	\|location=Bay 4		\|location=Bay 4
			\|email=bosch@ece.ucsb.edu
	\|description = ~~Digital~~ ~~Optical~~ Microscope		\|description = Scanning Laser Confocal Microscope
	\|manufacturer = [http://www.olympus-ims.com/en/metrology/ols4000/ Olympus]		\|manufacturer = [http://www.olympus-ims.com/en/metrology/ols4000/ Olympus]
	\|materials =		\|materials =
			\|toolid=3
	}}		}}
	= About =		= About =
			The LEXT OLS4000 3D Laser Measuring Microscope is designed for nanometer level imaging, 3D measurement and roughness measurement. Magnification ranges from 108x - 17,280x satisfy the needs of today's researchers. For a complete description of the tool and its capabilities, please see the above link to the manufacturer’s website.
	The Olympus DSX1000...

	=== Technique & Capabilities ===		=== Technique & Capabilities ===
			[[File:Olypmus LEXT Example Profile Measurement.png\|alt=Measurement of 5µm wide posts\|thumb\|205x205px\|Example Height/Profile Measurement (click to enlarge)]]
	Digital only (view through computer)
			The LEXT allows you to take height measurements of features too small to reach with a physical Stylus needle, in a non-contact mode that is much faster than engaging an AFM tip. In addition, very large aspect-ratios can be measured - for example, 1mm depth x 50µm width. Confocal microscopy ensures that only surfaces that are in-focus will return a signal to the microscope detector. The LEXT sweeps the focus motor and captures a 2D scan of your sample at each focus step, taken with a blue laser (405 nm). After the scan, the height of each surface is calculated by the focus step which produced the highest laser intensity, and this is constructed into a 3D image by the OLS software.
	Objectives: 5x, 50x

	Imaging Modes: Bright, Dark Field, DIC (Nomarski),
			Because this is an optical method, films that are optically transparent to blue light and/or have transparent sloping sidewalls can produce non-physical measurements due to optical interference on the sample. In addition, features on the order of the laser wavelength can produce unreliable/non-physical data - for example, the data near (within ~500 nm) very steep slopes, or features ≤ 1.0 µm wide may not be reliable.
	Top Reflected Illumination (Episcopic)

	Camera Capture:
			Surfaces that are opaque to the laser wavelength work best, although measurements on rectangular transparent edges do work relatively well. Edges of steps where light does not reflect in an ideal manner often produce non-physical features, typically manifesting as trenches/spikes right next to the sidewall.

			Technically the height-resolution is specified as 10 nm (the height resolution of the focus motor), but in practice, noise and optical uncertainties worsen this spec.

	== Operating Procedures ==		== Operating Procedures ==
	[[Olympus ~~DSX1000~~ - Quick Start\|~~Olympus DSX1000~~ Quick Start~~.pdf~~]]		[[Olympus LEXT OLS4000 Confocal uScope - Quick Start\|LEXT Quick Start]]

	=== Offline software ===		=== Offline software ===
	[~~www~~.google.com ~~Olympus~~ ~~Stream Desktop~~ Offline Software ~~(TEMP)~~]		[https://drive.google.com/drive/folders/1NsTb1UYDkTTvWU2AjfujuqYbKstos3W7?usp=sharing LEXT OLS4000 Offline Software]

John d: initial page

2021-04-09T18:25:34Z

initial page

← Older revision		Revision as of 18:25, 9 April 2021
Line 1:		Line 1:
	{{tool\|{{PAGENAME}}		{{tool\|{{PAGENAME}}
	\|picture=~~OlympusLEXT~~.jpg		\|picture=OlympusDSX1000.jpg
	\|type = Inspection, Test and Characterization		\|type = Inspection, Test and Characterization
	\|super= Tony Bosch		\|super= Tony Bosch
	\|phone=(805)839-3918x217
	\|location=Bay 4		\|location=Bay 4
		⚫	\|description = Digital Optical Microscope
	\|email=bosch@ece.ucsb.edu
⚫	\|description = ~~Scanning~~ ~~Laser Confocal~~ Microscope
	\|manufacturer = [http://www.olympus-ims.com/en/metrology/ols4000/ Olympus]		\|manufacturer = [http://www.olympus-ims.com/en/metrology/ols4000/ Olympus]
	\|materials =		\|materials =
	\|toolid=3
	}}		}}
	= About =		= About =
			The Olympus DSX1000...
	The LEXT OLS4000 3D Laser Measuring Microscope is designed for nanometer level imaging, 3D measurement and roughness measurement. Magnification ranges from 108x - 17,280x satisfy the needs of today's researchers. For a complete description of the tool and its capabilities, please see the above link to the manufacturer’s website.

	=== Technique & Capabilities ===		=== Technique & Capabilities ===
			Digital only (view through computer)
	[[File:Olypmus LEXT Example Profile Measurement.png\|alt=Measurement of 5µm wide posts\|thumb\|205x205px\|Example Height/Profile Measurement (click to enlarge)]]
			Objectives: 5x, 50x
	The LEXT allows you to take height measurements of features too small to reach with a physical Stylus needle, in a non-contact mode that is much faster than engaging an AFM tip. In addition, very large aspect-ratios can be measured - for example, 1mm depth x 50µm width. Confocal microscopy ensures that only surfaces that are in-focus will return a signal to the microscope detector. The LEXT sweeps the focus motor and captures a 2D scan of your sample at each focus step, taken with a blue laser (405 nm). After the scan, the height of each surface is calculated by the focus step which produced the highest laser intensity, and this is constructed into a 3D image by the OLS software.
			Imaging Modes: Bright, Dark Field, DIC (Nomarski),

			Top Reflected Illumination (Episcopic)
	Because this is an optical method, films that are optically transparent to blue light and/or have transparent sloping sidewalls can produce non-physical measurements due to optical interference on the sample. In addition, features on the order of the laser wavelength can produce unreliable/non-physical data - for example, the data near (within ~500 nm) very steep slopes, or features ≤ 1.0 µm wide may not be reliable.
			Camera Capture:

	Surfaces that are opaque to the laser wavelength work best, although measurements on rectangular transparent edges do work relatively well. Edges of steps where light does not reflect in an ideal manner often produce non-physical features, typically manifesting as trenches/spikes right next to the sidewall.

	Technically the height-resolution is specified as 10 nm (the height resolution of the focus motor), but in practice, noise and optical uncertainties worsen this spec.

	== Operating Procedures ==		== Operating Procedures ==
	[[Olympus ~~LEXT OLS4000 Confocal uScope~~ - Quick Start\|~~LEXT~~ Quick Start]]		[[Olympus DSX1000 - Quick Start\|Olympus DSX1000 Quick Start.pdf]]

	=== Offline software ===		=== Offline software ===
	[~~https://drive~~.google.com~~/drive/folders/1NsTb1UYDkTTvWU2AjfujuqYbKstos3W7?usp=sharing~~ ~~LEXT~~ ~~OLS4000~~ Offline Software]		[www.google.com Olympus Stream Desktop Offline Software (TEMP)]