https://wiki.nanofab.ucsb.edu/w/index.php?action=history&feed=atom&title=LegacyTable LegacyTable - Revision history 2026-05-18T11:51:57Z Revision history for this page on the wiki MediaWiki 1.43.8 https://wiki.nanofab.ucsb.edu/w/index.php?title=LegacyTable&diff=2864&oldid=prev Thibeault: Created page with "== Legacy Table == {{Recipe Table Explanation}} {| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;" class="wikitable" |- bgcolor="#..." 2013-07-19T00:19:03Z <p>Created page with &quot;== Legacy Table == {{Recipe Table Explanation}} {| border=&quot;1&quot; style=&quot;border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;&quot; class=&quot;wikitable&quot; |- bgcolor=&quot;#...&quot;</p> <p><b>New page</b></p><div>== Legacy Table ==<br /> {{Recipe Table Explanation}} <br /> <br /> {| border=&quot;1&quot; style=&quot;border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;&quot; class=&quot;wikitable&quot;<br /> |- bgcolor=&quot;#D0E7FF&quot;<br /> ! height=&quot;45&quot; colspan=&quot;9&quot; | &lt;div style=&quot;font-size: 150%;&quot;&gt;E-Beam Lithography Recipes&lt;/div&gt;<br /> |- bgcolor=&quot;#D0E7FF&quot;<br /> | &lt;!-- INTENTIONALLY LEFT BLANK --&gt; &lt;br&gt; <br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; colspan=&quot;2&quot; | &#039;&#039;&#039;[[Contact Alignment Recipes|Contact Aligners]]&#039;&#039;&#039; <br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; colspan=&quot;3&quot; | &#039;&#039;&#039;[[Stepper Recipes|Steppers]]&#039;&#039;&#039; <br /> ! width=&quot;30&quot; bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | &#039;&#039;&#039;[[Flood Exposure Recipes|Flood Expose]]&#039;&#039;&#039; <br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; colspan=&quot;2&quot; | &#039;&#039;&#039;[[E-Beam Lithography Recipes|E-Beam Lithography]]&#039;&#039;&#039;<br /> |-<br /> ! width=&quot;150&quot; bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | &#039;&#039;&#039;Positive Resists&#039;&#039;&#039; <br /> {{LithRecipe Table v2}} <br /> <br /> |-<br /> | bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | AZ4110 <br /> | bgcolor=&quot;EEFFFF&quot; | {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}} <br /> | bgcolor=&quot;EEFFFF&quot; | {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}} <br /> | bgcolor=&quot;EEFFFF&quot; | A <br /> | bgcolor=&quot;EEFFFF&quot; | A <br /> | bgcolor=&quot;EEFFFF&quot; | <br /> | bgcolor=&quot;EEFFFF&quot; | <br /> | bgcolor=&quot;EEFFFF&quot; | <br /> | bgcolor=&quot;EEFFFF&quot; | <br /> |-<br /> | bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | AZ4210 <br /> | {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}} <br /> | {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}} <br /> | A <br /> | A <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt; <br /> | &lt;br&gt;<br /> |-<br /> | bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | AZ4330RS <br /> | bgcolor=&quot;EEFFFF&quot; | {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}} <br /> | bgcolor=&quot;EEFFFF&quot; 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| <br /> | bgcolor=&quot;EEFFFF&quot; | {{rl|Stepper Recipes|Positive Resist (ASML DUV)}} <br /> | bgcolor=&quot;EEFFFF&quot; | <br /> | bgcolor=&quot;EEFFFF&quot; | <br /> | bgcolor=&quot;EEFFFF&quot; | <br /> |-<br /> | bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | UV210-0.3 <br /> | bgcolor=&quot;EEFFFF&quot; | <br /> | bgcolor=&quot;EEFFFF&quot; | <br /> | bgcolor=&quot;EEFFFF&quot; | <br /> | bgcolor=&quot;EEFFFF&quot; | <br /> | bgcolor=&quot;EEFFFF&quot; | {{rl|Stepper Recipes|Positive Resist (ASML DUV)}} <br /> | bgcolor=&quot;EEFFFF&quot; | <br /> | bgcolor=&quot;EEFFFF&quot; | <br /> | bgcolor=&quot;EEFFFF&quot; | <br /> |-<br /> ! bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | &#039;&#039;&#039;Negative Resists&#039;&#039;&#039; <br /> {{LithRecipe Table v2}} <br /> <br /> |- bgcolor=&quot;EEFFFF&quot;<br /> | bgcolor=&quot;#D0E7FF&quot; align=&quot;center&quot; | AZ5214-EIR <br /> | {{rl|Contact_Alignment_Recipes|Negative Resist (MJB-3)}} <br /> | {{rl|Contact_Alignment_Recipes|Negative Resist (MA-6)}} <br /> | {{rl|Stepper Recipes|Negative Resist (GCA 6300)}} <br /> | {{rl|Stepper Recipes|Negative Resist (AutoStep 200)}} <br /> | <br /> | <br /> | <br /> | <br /> |-<br /> | bgcolor=&quot;#D0E7FF&quot; 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align=&quot;center&quot; | <br /> {{LithRecipe Table v2}} <br /> <br /> |}</div> Thibeault