Molecular Vapor Deposition - Revision history

Silva at 17:34, 30 August 2022

2022-08-30T17:34:42Z

← Older revision		Revision as of 17:34, 30 August 2022
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	{{~~tool~~\|{{PAGENAME}}		{{tool2\|{{PAGENAME}}
	\|picture=MVD.jpg		\|picture=MVD.jpg
	\|type = Vacuum Deposition		\|type = Vacuum Deposition
	\|super= Lee Sawyer		\|super= Lee Sawyer
			\|super2= Aidan Hopkins
	\|phone=(805) 893-2123		\|phone=(805) 893-2123
	\|location=Bay 4		\|location=Bay 4

Jcrode: Text replacement - "/wiki/index.php" to "/w/index.php"

2021-09-04T19:52:11Z

Text replacement - "/wiki/index.php" to "/w/index.php"

← Older revision		Revision as of 19:52, 4 September 2021
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	==Recipes==		==Recipes==

	*[https://wiki.nanotech.ucsb.edu/~~wiki~~/index.php?title=Lithography_Recipes#Nanoimprinting_Recipes Nanoimprinting recipes] using FDTS non-stick layer		*[https://wiki.nanotech.ucsb.edu/w/index.php?title=Lithography_Recipes#Nanoimprinting_Recipes Nanoimprinting recipes] using FDTS non-stick layer
	*[https://signupmonkey.ece.ucsb.edu/wiki/images/3/3c/MVD_Standard_Recipes.pdf MVD Standard Recipes]		*[https://signupmonkey.ece.ucsb.edu/wiki/images/3/3c/MVD_Standard_Recipes.pdf MVD Standard Recipes]

Jcrode: Text replacement - "/wiki/index.php/" to "/wiki/index.php?title="

2021-09-04T19:47:13Z

Text replacement - "/wiki/index.php/" to "/wiki/index.php?title="

← Older revision		Revision as of 19:47, 4 September 2021
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	==Recipes==		==Recipes==

	*[https://wiki.nanotech.ucsb.edu/wiki/index.php/Lithography_Recipes#Nanoimprinting_Recipes Nanoimprinting recipes] using FDTS non-stick layer		*[https://wiki.nanotech.ucsb.edu/wiki/index.php?title=Lithography_Recipes#Nanoimprinting_Recipes Nanoimprinting recipes] using FDTS non-stick layer
	*[https://signupmonkey.ece.ucsb.edu/wiki/images/3/3c/MVD_Standard_Recipes.pdf MVD Standard Recipes]		*[https://signupmonkey.ece.ucsb.edu/wiki/images/3/3c/MVD_Standard_Recipes.pdf MVD Standard Recipes]

John d: /* Recipes */ link to new process traveler

2020-07-23T17:15:42Z

Recipes: link to new process traveler

← Older revision		Revision as of 17:15, 23 July 2020
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	*[https://signupmonkey.ece.ucsb.edu/wiki/images/f/f4/MVD_SOP.pdf MVD Standard Operating Procedure]		*[https://signupmonkey.ece.ucsb.edu/wiki/images/f/f4/MVD_SOP.pdf MVD Standard Operating Procedure]
			*[[MVD - Wafer Coating - Process Traveler\|Wafer Coating - Process Traveler]]

Jcrode: Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/"

2020-04-07T01:26:51Z

Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/"

← Older revision		Revision as of 01:26, 7 April 2020
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	==Recipes==		==Recipes==

	*[https://~~www~~.nanotech.ucsb.edu/wiki/index.php/Lithography_Recipes#Nanoimprinting_Recipes Nanoimprinting recipes] using FDTS non-stick layer		*[https://wiki.nanotech.ucsb.edu/wiki/index.php/Lithography_Recipes#Nanoimprinting_Recipes Nanoimprinting recipes] using FDTS non-stick layer
	*[https://signupmonkey.ece.ucsb.edu/wiki/images/3/3c/MVD_Standard_Recipes.pdf MVD Standard Recipes]		*[https://signupmonkey.ece.ucsb.edu/wiki/images/3/3c/MVD_Standard_Recipes.pdf MVD Standard Recipes]

Sawyer l: added recipe link

2019-09-11T22:18:11Z

added recipe link

← Older revision		Revision as of 22:18, 11 September 2019
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	*[https://www.nanotech.ucsb.edu/wiki/index.php/Lithography_Recipes#Nanoimprinting_Recipes Nanoimprinting recipes] using FDTS non-stick layer		*[https://www.nanotech.ucsb.edu/wiki/index.php/Lithography_Recipes#Nanoimprinting_Recipes Nanoimprinting recipes] using FDTS non-stick layer
	*MVD Standard Recipes		*[https://signupmonkey.ece.ucsb.edu/wiki/images/3/3c/MVD_Standard_Recipes.pdf MVD Standard Recipes]

	==Documentation==		==Documentation==

Sawyer l: added SOP link

2019-09-11T22:17:18Z

added SOP link

← Older revision		Revision as of 22:17, 11 September 2019
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	*MVD Standard Recipes		*MVD Standard Recipes

	== Documentation ==		==Documentation==

	* MVD Standard Operating Procedure		*[https://signupmonkey.ece.ucsb.edu/wiki/images/f/f4/MVD_SOP.pdf MVD Standard Operating Procedure]

Sawyer l: added recipe and SOP links

2019-09-11T22:16:20Z

added recipe and SOP links

← Older revision		Revision as of 22:16, 11 September 2019
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	\|materials =		\|materials =
	}}		}}
	= About =		==About==
	The Molecular Vapor deposition system is used for deposition of a monolayer-thick fluorocarbon film for producing extremely hydrophobic surfaces used for anti-sticking layers for nanoimprinting or anti-stiction layers for MEMS. The system has integrated Oxygen plasma cleaning for organic removal and surface activation and can be run at temperatures up to 80°C. Multi-step recipes can be created. The system is currently configured for FDTS (perflourodecyltricholorsilane) and water to producing the coatings. Up to 6” wafers can be coated in the system.		The Molecular Vapor deposition system is used for deposition of a monolayer-thick fluorocarbon film for producing extremely hydrophobic surfaces used for anti-sticking layers for nanoimprinting or anti-stiction layers for MEMS. The system has integrated Oxygen plasma cleaning for organic removal and surface activation and can be run at temperatures up to 80°C. Multi-step recipes can be created. The system is currently configured for FDTS (perflourodecyltricholorsilane) and water to producing the coatings. Up to 6” wafers can be coated in the system.

	== Recipes ==		==Recipes==

	* [https://www.nanotech.ucsb.edu/wiki/index.php/Lithography_Recipes#Nanoimprinting_Recipes Nanoimprinting recipes] using FDTS non-stick layer		*[https://www.nanotech.ucsb.edu/wiki/index.php/Lithography_Recipes#Nanoimprinting_Recipes Nanoimprinting recipes] using FDTS non-stick layer
			*MVD Standard Recipes

			== Documentation ==

			* MVD Standard Operating Procedure

Sawyer l: Updated contact info to Lee S.

2019-04-09T18:36:03Z

Updated contact info to Lee S.

← Older revision		Revision as of 18:36, 9 April 2019
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	\|picture=MVD.jpg		\|picture=MVD.jpg
	\|type = Vacuum Deposition		\|type = Vacuum Deposition
	\|super= ~~Aidan~~ ~~Hopkins~~		\|super= Lee Sawyer
	\|phone=(805)~~839~~-~~3918x208~~		\|phone=(805) 893-2123
	\|location=Bay 4		\|location=Bay 4
	\|email=~~hopkins~~@~~ece.~~ucsb.edu		\|email=lee_sawyer@ucsb.edu
	\|description = Molecular Vapor Deposition System		\|description = Molecular Vapor Deposition System
	\|manufacturer = [http://www.appliedmst.com/ Applied Microstructures Inc.]		\|manufacturer = [http://www.appliedmst.com/ Applied Microstructures Inc.]

John d: link to nanoimprint FDTS recipe

2018-05-11T03:25:27Z

link to nanoimprint FDTS recipe

← Older revision		Revision as of 03:25, 11 May 2018
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	= About =		= About =
	The Molecular Vapor deposition system is used for deposition of a monolayer-thick fluorocarbon film for producing extremely hydrophobic surfaces used for anti-sticking layers for nanoimprinting or anti-stiction layers for MEMS. The system has integrated Oxygen plasma cleaning for organic removal and surface activation and can be run at temperatures up to 80°C. Multi-step recipes can be created. The system is currently configured for FDTS (perflourodecyltricholorsilane) and water to producing the coatings. Up to 6” wafers can be coated in the system.		The Molecular Vapor deposition system is used for deposition of a monolayer-thick fluorocarbon film for producing extremely hydrophobic surfaces used for anti-sticking layers for nanoimprinting or anti-stiction layers for MEMS. The system has integrated Oxygen plasma cleaning for organic removal and surface activation and can be run at temperatures up to 80°C. Multi-step recipes can be created. The system is currently configured for FDTS (perflourodecyltricholorsilane) and water to producing the coatings. Up to 6” wafers can be coated in the system.

			== Recipes ==
			* [https://www.nanotech.ucsb.edu/wiki/index.php/Lithography_Recipes#Nanoimprinting_Recipes Nanoimprinting recipes] using FDTS non-stick layer