Optical Film Thickness (Filmetrics) - Revision history

John d: tool decomissioned notice,locaiton="removed from lab"

2022-05-13T14:27:36Z

tool decomissioned notice,locaiton="removed from lab"

← Older revision		Revision as of 14:27, 13 May 2022
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			'''TOOL DECOMISSIONED - Used the [[Optical Film Thickness & Wafer-Mapping (Filmetrics F50)\|<u>Filmetrics F50</u>]] instead. 2022-05-13'''
	{{tool\|{{PAGENAME}}		{{tool\|{{PAGENAME}}
	\|picture=Filmmetrics.jpg		\|picture=Filmmetrics.jpg
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	\|super= Ning Cao		\|super= Ning Cao
	\|phone=(805)839-3918x217		\|phone=(805)839-3918x217
	\|location=~~Bay~~ 6		\|location=REMOVED FROM LAB
	\|email=bosch@ece.ucsb.edu		\|email=bosch@ece.ucsb.edu
	\|description = Thin-Film Reflectometry		\|description = Thin-Film Reflectometry
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	\|materials =		\|materials =
	}}		}}
	= About =		=About=
	This tool is for thickness and optical property measurements of films on substrates. The technique used is white light reflection. Data is taken with normal incidence reflection of white light (400 nm – 850 nm) from the surface. The data is modeled and the optical parameters are adjusted to give a best least-squared fit to the data. The accuracy of the technique will depend on the thickness of the film and the optical models used for the fitting of the data. For a more complete description go to [http://www.filmetrics.com/ Filmetrics].		This tool is for thickness and optical property measurements of films on substrates. The technique used is white light reflection. Data is taken with normal incidence reflection of white light (400 nm – 850 nm) from the surface. The data is modeled and the optical parameters are adjusted to give a best least-squared fit to the data. The accuracy of the technique will depend on the thickness of the film and the optical models used for the fitting of the data. For a more complete description go to [http://www.filmetrics.com/ Filmetrics].

	=Equipment Specifications=		=Equipment Specifications=

	*400-850 nm reflection spectrum		*400-850 nm reflection spectrum
	*150 A to 50 um thickness only measurement		*150 A to 50 um thickness only measurement

Bosch t at 16:54, 20 April 2020

2020-04-20T16:54:44Z

← Older revision		Revision as of 16:54, 20 April 2020
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	\|super= Ning Cao		\|super= Ning Cao
	\|phone=(805)839-3918x217		\|phone=(805)839-3918x217
	\|location=Bay 4		\|location=Bay 6
	\|email=bosch@ece.ucsb.edu		\|email=bosch@ece.ucsb.edu
	\|description = Thin-Film Reflectometry		\|description = Thin-Film Reflectometry

Silva at 18:17, 15 April 2020

2020-04-15T18:17:13Z

← Older revision		Revision as of 18:17, 15 April 2020
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	\|picture=Filmmetrics.jpg		\|picture=Filmmetrics.jpg
	\|type = Inspection, Test and Characterization		\|type = Inspection, Test and Characterization
	\|super= ~~Tony~~ ~~Bosch~~		\|super= Ning Cao
	\|phone=(805)839-3918x217		\|phone=(805)839-3918x217
	\|location=Bay 4		\|location=Bay 4

John d: added model

2018-01-20T21:36:33Z

added model

← Older revision		Revision as of 21:36, 20 January 2018
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	\|description = Thin-Film Reflectometry		\|description = Thin-Film Reflectometry
	\|manufacturer = [http://www.filmetrics.com/ Filmetrics]		\|manufacturer = [http://www.filmetrics.com/ Filmetrics]
			\|model = Filmetrics F20
	\|materials =		\|materials =
	}}		}}

John d: updated tool location & description in template

2018-01-16T21:36:33Z

updated tool location & description in template

← Older revision		Revision as of 21:36, 16 January 2018
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	\|super= Tony Bosch		\|super= Tony Bosch
	\|phone=(805)839-3918x217		\|phone=(805)839-3918x217
	\|location=Bay ?		\|location=Bay 4
	\|email=bosch@ece.ucsb.edu		\|email=bosch@ece.ucsb.edu
	\|description = ?		\|description = Thin-Film Reflectometry
	\|manufacturer = [http://www.filmetrics.com/ Filmetrics]		\|manufacturer = [http://www.filmetrics.com/ Filmetrics]
	\|materials =		\|materials =

Zwarburg: Created page with "{{tool|{{PAGENAME}} |picture=Filmmetrics.jpg |type = Inspection, Test and Characterization |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay ? |email=bosch@ece.ucsb.edu |…"

2012-07-01T16:49:36Z

Created page with "{{tool|{{PAGENAME}} |picture=Filmmetrics.jpg |type = Inspection, Test and Characterization |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay ? |email=bosch@ece.ucsb.edu |…"

New page

{{tool|{{PAGENAME}}
|picture=Filmmetrics.jpg
|type = Inspection, Test and Characterization
|super= Tony Bosch
|phone=(805)839-3918x217
|location=Bay ?
|email=bosch@ece.ucsb.edu
|description = ?
|manufacturer = [http://www.filmetrics.com/ Filmetrics]
|materials =
}}
= About =
This tool is for thickness and optical property measurements of films on substrates. The technique used is white light reflection. Data is taken with normal incidence reflection of white light (400 nm – 850 nm) from the surface. The data is modeled and the optical parameters are adjusted to give a best least-squared fit to the data. The accuracy of the technique will depend on the thickness of the film and the optical models used for the fitting of the data. For a more complete description go to [http://www.filmetrics.com/ Filmetrics].

=Equipment Specifications=
*400-850 nm reflection spectrum
*150 A to 50 um thickness only measurement
*1000 A to 10 um thickness, n, and k measurements
*1 nm accuracy at 500 nm thickness
*Manual wafer placement
*Data can all be saved
*Can model up to three layers