Other Dry Etching Recipes - Revision history

John d: /* CAIBE (Oxford Ion Mill) */ spelling correction

2022-12-09T15:17:29Z

CAIBE (Oxford Ion Mill): spelling correction

← Older revision		Revision as of 15:17, 9 December 2022
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	{{recipes\|Dry Etching}}		{{recipes\|Dry Etching}}
	=[[XeF2 Etch (Xetch)]]=		=[[XeF2 Etch (Xetch)]]=

	*[https://wiki.nanotech.ucsb.edu/w/images/2/25/06-XeF2-etch-recipe.pdf Si Etch Recipe]		*[https://wiki.nanotech.ucsb.edu/w/images/2/25/06-XeF2-etch-recipe.pdf Si Etch Recipe]

	=[[Vapor HF Etch (uETCH)]]=		=[[Vapor HF Etch (uETCH)]]=

	*[https://wiki.nanotech.ucsb.edu/w/images/e/e2/25-Dry_Etch_of_Unaxis_ICP-grown_SiO2_using_Vapor_HF_tool-a.pdf SiO<sub>2</sub> Etch Recipe 1]		*[https://wiki.nanotech.ucsb.edu/w/images/e/e2/25-Dry_Etch_of_Unaxis_ICP-grown_SiO2_using_Vapor_HF_tool-a.pdf SiO<sub>2</sub> Etch Recipe 1]
	*[https://wiki.nanotech.ucsb.edu/w/images/d/d4/26-Dry_Etch_of_Unaxis_ICP-grown_SiO2_using_Vapor_HF_tool-b.pdf SiO<sub>2</sub> Etch Recipe 2]		*[https://wiki.nanotech.ucsb.edu/w/images/d/d4/26-Dry_Etch_of_Unaxis_ICP-grown_SiO2_using_Vapor_HF_tool-b.pdf SiO<sub>2</sub> Etch Recipe 2]

	=[[CAIBE (Oxford Ion Mill)]]=		=[[CAIBE (Oxford Ion Mill)]]=

	*'''~~Remind~~: From now on, one should always use ~~Prf~~=200W! (see ~~Brian~~ ~~Lingg~~ for explanation)'''		*'''Reminder: From now on, one should always use P<sub>RF</sub>=200W! (see [[Bill Millerski\|supervisor]] for explanation)'''
	*[https://wiki.nanotech.ucsb.edu/w/images/2/28/42-Etching_Platinum_using_Oxford_Ion_Mill_Tool-a.pdf Pt Etch Recipe]		*[https://wiki.nanotech.ucsb.edu/w/images/2/28/42-Etching_Platinum_using_Oxford_Ion_Mill_Tool-a.pdf Pt Etch Recipe]
	*[https://wiki.nanotech.ucsb.edu/w/images/e/e3/44-Etching_Gold_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf Au Etch Recipe]		*[https://wiki.nanotech.ucsb.edu/w/images/e/e3/44-Etching_Gold_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf Au Etch Recipe]

Ningcao: add a etch recipe

2020-07-31T22:27:22Z

add a etch recipe

← Older revision		Revision as of 22:27, 31 July 2020
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	*[https://wiki.nanotech.ucsb.edu/w/images/e/e3/44-Etching_Gold_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf Au Etch Recipe]		*[https://wiki.nanotech.ucsb.edu/w/images/e/e3/44-Etching_Gold_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf Au Etch Recipe]
	*[https://wiki.nanotech.ucsb.edu/w/images/f/f1/45-Etching_Nickel_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf Ni Etch Recipe]		*[https://wiki.nanotech.ucsb.edu/w/images/f/f1/45-Etching_Nickel_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf Ni Etch Recipe]
	*[https://wiki.nanotech.ucsb.edu/~~wiki~~/~~File:~~InP_Etching_result-CAIBE.~~docx~~ InP Etch Recipe]		*[https://wiki.nanotech.ucsb.edu/w/images/5/53/InP_Etching_result-CAIBE.pdf InP Etch Recipe]

	=Misc=		=Misc=

Ningcao: /* CAIBE (Oxford Ion Mill) */ add a recipe file

2020-07-31T22:14:13Z

CAIBE (Oxford Ion Mill): add a recipe file

← Older revision		Revision as of 22:14, 31 July 2020
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	*[https://wiki.nanotech.ucsb.edu/w/images/e/e3/44-Etching_Gold_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf Au Etch Recipe]		*[https://wiki.nanotech.ucsb.edu/w/images/e/e3/44-Etching_Gold_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf Au Etch Recipe]
	*[https://wiki.nanotech.ucsb.edu/w/images/f/f1/45-Etching_Nickel_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf Ni Etch Recipe]		*[https://wiki.nanotech.ucsb.edu/w/images/f/f1/45-Etching_Nickel_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf Ni Etch Recipe]
			*[https://wiki.nanotech.ucsb.edu/wiki/File:InP_Etching_result-CAIBE.docx InP Etch Recipe]
	*InP Etch Recipe

	=Misc=		=Misc=

Ningcao: /* CAIBE (Oxford Ion Mill) */ add a recipe

2020-07-31T22:10:12Z

CAIBE (Oxford Ion Mill): add a recipe

← Older revision		Revision as of 22:10, 31 July 2020
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	*[https://wiki.nanotech.ucsb.edu/w/images/e/e3/44-Etching_Gold_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf Au Etch Recipe]		*[https://wiki.nanotech.ucsb.edu/w/images/e/e3/44-Etching_Gold_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf Au Etch Recipe]
	*[https://wiki.nanotech.ucsb.edu/w/images/f/f1/45-Etching_Nickel_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf Ni Etch Recipe]		*[https://wiki.nanotech.ucsb.edu/w/images/f/f1/45-Etching_Nickel_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf Ni Etch Recipe]
			*InP Etch Recipe

	=Misc=		=Misc=

Jcrode: Text replacement - "[//wiki" to "[https://wiki"

2020-04-05T01:24:27Z

Text replacement - "[//wiki" to "[https://wiki"

← Older revision		Revision as of 01:24, 5 April 2020
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	{{recipes\|Dry Etching}}		{{recipes\|Dry Etching}}
	=[[XeF2 Etch (Xetch)]]=		=[[XeF2 Etch (Xetch)]]=
	*[//wiki.nanotech.ucsb.edu/w/images/2/25/06-XeF2-etch-recipe.pdf Si Etch Recipe]		*[https://wiki.nanotech.ucsb.edu/w/images/2/25/06-XeF2-etch-recipe.pdf Si Etch Recipe]

	=[[Vapor HF Etch (uETCH)]]=		=[[Vapor HF Etch (uETCH)]]=
	*[//wiki.nanotech.ucsb.edu/w/images/e/e2/25-Dry_Etch_of_Unaxis_ICP-grown_SiO2_using_Vapor_HF_tool-a.pdf SiO<sub>2</sub> Etch Recipe 1]		*[https://wiki.nanotech.ucsb.edu/w/images/e/e2/25-Dry_Etch_of_Unaxis_ICP-grown_SiO2_using_Vapor_HF_tool-a.pdf SiO<sub>2</sub> Etch Recipe 1]
	*[//wiki.nanotech.ucsb.edu/w/images/d/d4/26-Dry_Etch_of_Unaxis_ICP-grown_SiO2_using_Vapor_HF_tool-b.pdf SiO<sub>2</sub> Etch Recipe 2]		*[https://wiki.nanotech.ucsb.edu/w/images/d/d4/26-Dry_Etch_of_Unaxis_ICP-grown_SiO2_using_Vapor_HF_tool-b.pdf SiO<sub>2</sub> Etch Recipe 2]

	=[[CAIBE (Oxford Ion Mill)]]=		=[[CAIBE (Oxford Ion Mill)]]=
	*'''Remind: From now on, one should always use Prf=200W! (see Brian Lingg for explanation)'''		*'''Remind: From now on, one should always use Prf=200W! (see Brian Lingg for explanation)'''
	*[//wiki.nanotech.ucsb.edu/w/images/2/28/42-Etching_Platinum_using_Oxford_Ion_Mill_Tool-a.pdf Pt Etch Recipe]		*[https://wiki.nanotech.ucsb.edu/w/images/2/28/42-Etching_Platinum_using_Oxford_Ion_Mill_Tool-a.pdf Pt Etch Recipe]
	*[//wiki.nanotech.ucsb.edu/w/images/e/e3/44-Etching_Gold_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf Au Etch Recipe]		*[https://wiki.nanotech.ucsb.edu/w/images/e/e3/44-Etching_Gold_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf Au Etch Recipe]
	*[//wiki.nanotech.ucsb.edu/w/images/f/f1/45-Etching_Nickel_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf Ni Etch Recipe]		*[https://wiki.nanotech.ucsb.edu/w/images/f/f1/45-Etching_Nickel_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf Ni Etch Recipe]

	=Misc=		=Misc=

Ningcao: add a comment

2020-03-06T22:36:09Z

add a comment

← Older revision		Revision as of 22:36, 6 March 2020
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	{{recipes\|Dry Etching}}		{{recipes\|Dry Etching}}
	=[[XeF2 Etch (Xetch)]]=		=[[XeF2 Etch (Xetch)]]=
	*[~~[media:~~06-XeF2-etch-recipe.pdf\|Si Etch Recipe]]		*[//wiki.nanotech.ucsb.edu/w/images/2/25/06-XeF2-etch-recipe.pdf Si Etch Recipe]

	=[[Vapor HF Etch (uETCH)]]=		=[[Vapor HF Etch (uETCH)]]=
	*[~~[media:~~25-Dry_Etch_of_Unaxis_ICP-grown_SiO2_using_Vapor_HF_tool-a.pdf\|SiO<sub>2</sub> Etch Recipe 1]]		*[//wiki.nanotech.ucsb.edu/w/images/e/e2/25-Dry_Etch_of_Unaxis_ICP-grown_SiO2_using_Vapor_HF_tool-a.pdf SiO<sub>2</sub> Etch Recipe 1]
	*[~~[media:~~26-Dry_Etch_of_Unaxis_ICP-grown_SiO2_using_Vapor_HF_tool-b.pdf\|SiO<sub>2</sub> Etch Recipe 2]]		*[//wiki.nanotech.ucsb.edu/w/images/d/d4/26-Dry_Etch_of_Unaxis_ICP-grown_SiO2_using_Vapor_HF_tool-b.pdf SiO<sub>2</sub> Etch Recipe 2]

	=[[CAIBE (Oxford Ion Mill)]]=		=[[CAIBE (Oxford Ion Mill)]]=
			*'''Remind: From now on, one should always use Prf=200W! (see Brian Lingg for explanation)'''
	*[~~[media:~~42-Etching_Platinum_using_Oxford_Ion_Mill_Tool-a.pdf\|Pt Etch Recipe]]		*[//wiki.nanotech.ucsb.edu/w/images/2/28/42-Etching_Platinum_using_Oxford_Ion_Mill_Tool-a.pdf Pt Etch Recipe]
	*[~~[media:~~44-Etching_Gold_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf\|Au Etch Recipe]]		*[//wiki.nanotech.ucsb.edu/w/images/e/e3/44-Etching_Gold_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf Au Etch Recipe]
	*[~~[media:~~45-Etching_Nickel_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf\|Ni Etch Recipe]]		*[//wiki.nanotech.ucsb.edu/w/images/f/f1/45-Etching_Nickel_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf Ni Etch Recipe]

	=Misc=		=Misc=

Thibeault at 22:35, 16 December 2015

2015-12-16T22:35:18Z

← Older revision		Revision as of 22:35, 16 December 2015
Line 12:		Line 12:
	*[[media:45-Etching_Nickel_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf\|Ni Etch Recipe]]		*[[media:45-Etching_Nickel_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf\|Ni Etch Recipe]]

	=[Misc]=		=Misc=

Thibeault at 22:35, 16 December 2015

2015-12-16T22:35:05Z

← Older revision		Revision as of 22:35, 16 December 2015
Line 11:		Line 11:
	*[[media:44-Etching_Gold_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf\|Au Etch Recipe]]		*[[media:44-Etching_Gold_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf\|Au Etch Recipe]]
	*[[media:45-Etching_Nickel_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf\|Ni Etch Recipe]]		*[[media:45-Etching_Nickel_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf\|Ni Etch Recipe]]

			=[Misc]=

Ningcao: /* CAIBE (Oxford Ion Mill) */

2015-12-01T23:27:39Z

CAIBE (Oxford Ion Mill)

← Older revision		Revision as of 23:27, 1 December 2015
Line 10:		Line 10:
	*[[media:42-Etching_Platinum_using_Oxford_Ion_Mill_Tool-a.pdf\|Pt Etch Recipe]]		*[[media:42-Etching_Platinum_using_Oxford_Ion_Mill_Tool-a.pdf\|Pt Etch Recipe]]
	*[[media:44-Etching_Gold_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf\|Au Etch Recipe]]		*[[media:44-Etching_Gold_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf\|Au Etch Recipe]]
	*[[media:\|Ni Etch Recipe]]		*[[media:45-Etching_Nickel_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf\|Ni Etch Recipe]]

Ningcao: /* CAIBE (Oxford Ion Mill) */

2015-12-01T23:25:08Z

CAIBE (Oxford Ion Mill)

← Older revision		Revision as of 23:25, 1 December 2015
Line 10:		Line 10:
	*[[media:42-Etching_Platinum_using_Oxford_Ion_Mill_Tool-a.pdf\|Pt Etch Recipe]]		*[[media:42-Etching_Platinum_using_Oxford_Ion_Mill_Tool-a.pdf\|Pt Etch Recipe]]
	*[[media:44-Etching_Gold_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf\|Au Etch Recipe]]		*[[media:44-Etching_Gold_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf\|Au Etch Recipe]]
			*[[media:\|Ni Etch Recipe]]

← Older revision		Revision as of 23:27, 1 December 2015
Line 10:		Line 10:
	*[[media:42-Etching_Platinum_using_Oxford_Ion_Mill_Tool-a.pdf\|Pt Etch Recipe]]		*[[media:42-Etching_Platinum_using_Oxford_Ion_Mill_Tool-a.pdf\|Pt Etch Recipe]]
	*[[media:44-Etching_Gold_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf\|Au Etch Recipe]]		*[[media:44-Etching_Gold_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf\|Au Etch Recipe]]
	*[[media:\|Ni Etch Recipe]]		*[[media:45-Etching_Nickel_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf\|Ni Etch Recipe]]

← Older revision		Revision as of 23:25, 1 December 2015
Line 10:		Line 10:
	*[[media:42-Etching_Platinum_using_Oxford_Ion_Mill_Tool-a.pdf\|Pt Etch Recipe]]		*[[media:42-Etching_Platinum_using_Oxford_Ion_Mill_Tool-a.pdf\|Pt Etch Recipe]]
	*[[media:44-Etching_Gold_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf\|Au Etch Recipe]]		*[[media:44-Etching_Gold_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf\|Au Etch Recipe]]
			*[[media:\|Ni Etch Recipe]]