PECVD1 Recipes - Revision history

Biljana: /* SiN deposition (PECVD #1) */

2015-01-08T23:22:45Z

SiN deposition (PECVD #1)

← Older revision		Revision as of 23:22, 8 January 2015
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	*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dEN6LV93LXlnbUhIWU1adVZWMWlXYnc&usp=drive_web#gid=sharing SiN Data 2014]		*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dEN6LV93LXlnbUhIWU1adVZWMWlXYnc&usp=drive_web#gid=sharing SiN Data 2014]
	*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dElmTXZyOEZsOFdrMVhNLWpKXzVmNWc&usp=sharing SiN 1000A Thickness uniformity 2014]		*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dElmTXZyOEZsOFdrMVhNLWpKXzVmNWc&usp=sharing SiN 1000A Thickness uniformity 2014]
	*[[media:PECVD1-LS ~~SION~~-~~recipe2014~~ LS ~~SION~~ recipe.pdf\|LS SiN Recipe]]		*[[media:New PECVD1-LS SIN-Turner05recipe 2014 LS SIN recipe.pdf\|LS SiN Recipe]]
	*[https://docs.google.com/spreadsheets/d/1Joz0az9TGZWQc4CiMQJZzLBbNFbx_hH2Oc0B4NNJmYk/edit#gid=978933038=sharing LS SiN Data 2014]		*[https://docs.google.com/spreadsheets/d/1Joz0az9TGZWQc4CiMQJZzLBbNFbx_hH2Oc0B4NNJmYk/edit#gid=978933038=sharing LS SiN Data 2014]
	*[https://docs.google.com/spreadsheets/d/1xIzc2CufRYNSfAtsOXpw3IzHreeu42BWrLBV0kzP6kA/edit#gid=481681015=sharing LS SiN 3000A Thickness uniformity 2014]		*[https://docs.google.com/spreadsheets/d/1xIzc2CufRYNSfAtsOXpw3IzHreeu42BWrLBV0kzP6kA/edit#gid=481681015=sharing LS SiN 3000A Thickness uniformity 2014]

Biljana: /* Other recipes (PECVD#1) */

2015-01-08T23:21:12Z

Other recipes (PECVD#1)

← Older revision		Revision as of 23:21, 8 January 2015
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	== Other recipes (PECVD#1)==		== Other recipes (PECVD#1)==
	*
	*[[media:PECVD1-LS SION-recipe2014 LS SION recipe.pdf\|SiO<sub>x</sub>N<sub>y</sub> Recipe]]		*[[media:PECVD1-LS SION-recipe2014 LS SION recipe.pdf\|SiO<sub>x</sub>N<sub>y</sub> Recipe]]
	*[https://docs.google.com/spreadsheets/d/1rixyzAAq6q08M5OwvZiDVoh3K8B566XKM-UZAQIAnsg/edit#gid=sharing SiO<sub>x</sub>N<sub>y</sub> Data 2014]		*[https://docs.google.com/spreadsheets/d/1rixyzAAq6q08M5OwvZiDVoh3K8B566XKM-UZAQIAnsg/edit#gid=sharing SiO<sub>x</sub>N<sub>y</sub> Data 2014]
	*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dEttR2JSTkRoamR0SUZ4bE5QUW9uS2c&usp=sharing SiO<sub>x</sub>N<sub>y</sub> 3000A Thickness uniformity 2014]		*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dEttR2JSTkRoamR0SUZ4bE5QUW9uS2c&usp=sharing SiO<sub>x</sub>N<sub>y</sub> 3000A Thickness uniformity 2014]

	*[[media:PECVD1-LS SION-recipe2014 LS SION recipe.pdf\|LS SiN Recipe]]
	*[https://docs.google.com/spreadsheets/d/1Joz0az9TGZWQc4CiMQJZzLBbNFbx_hH2Oc0B4NNJmYk/edit#gid=978933038=sharing LS SiN Data 2014]
	*[https://docs.google.com/spreadsheets/d/1xIzc2CufRYNSfAtsOXpw3IzHreeu42BWrLBV0kzP6kA/edit#gid=481681015=sharing LS SiN 3000A Thickness uniformity 2014]

Biljana: /* SiN deposition (PECVD #1) */

2015-01-08T23:20:35Z

SiN deposition (PECVD #1)

← Older revision		Revision as of 23:20, 8 January 2015
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	*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dEN6LV93LXlnbUhIWU1adVZWMWlXYnc&usp=drive_web#gid=sharing SiN Data 2014]		*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dEN6LV93LXlnbUhIWU1adVZWMWlXYnc&usp=drive_web#gid=sharing SiN Data 2014]
	*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dElmTXZyOEZsOFdrMVhNLWpKXzVmNWc&usp=sharing SiN 1000A Thickness uniformity 2014]		*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dElmTXZyOEZsOFdrMVhNLWpKXzVmNWc&usp=sharing SiN 1000A Thickness uniformity 2014]
			*[[media:PECVD1-LS SION-recipe2014 LS SION recipe.pdf\|LS SiN Recipe]]
			*[https://docs.google.com/spreadsheets/d/1Joz0az9TGZWQc4CiMQJZzLBbNFbx_hH2Oc0B4NNJmYk/edit#gid=978933038=sharing LS SiN Data 2014]
			*[https://docs.google.com/spreadsheets/d/1xIzc2CufRYNSfAtsOXpw3IzHreeu42BWrLBV0kzP6kA/edit#gid=481681015=sharing LS SiN 3000A Thickness uniformity 2014]
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Biljana: /* Other recipes (PECVD#1) */

2015-01-08T23:20:18Z

Other recipes (PECVD#1)

← Older revision		Revision as of 23:20, 8 January 2015
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	== Other recipes (PECVD#1)==		== Other recipes (PECVD#1)==
			*
	* [[media:PECVD1-SiON-Recipe.pdf\|Low Stress Si<sub>3</sub>N<sub>4</sub> - Variable Stress Recipes]]
	* [[media:PECVD1-SiON-Recipe.pdf\|Low Stress Si<sub>3</sub>N<sub>4</sub> - Variable Stress Plot]]
	*[[media:PECVD1-LS SION-recipe2014 LS SION recipe.pdf\|SiO<sub>x</sub>N<sub>y</sub> Recipe]]		*[[media:PECVD1-LS SION-recipe2014 LS SION recipe.pdf\|SiO<sub>x</sub>N<sub>y</sub> Recipe]]
	*[https://docs.google.com/spreadsheets/d/1rixyzAAq6q08M5OwvZiDVoh3K8B566XKM-UZAQIAnsg/edit#gid=sharing SiO<sub>x</sub>N<sub>y</sub> Data 2014]		*[https://docs.google.com/spreadsheets/d/1rixyzAAq6q08M5OwvZiDVoh3K8B566XKM-UZAQIAnsg/edit#gid=sharing SiO<sub>x</sub>N<sub>y</sub> Data 2014]
	*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dEttR2JSTkRoamR0SUZ4bE5QUW9uS2c&usp=sharing SiO<sub>x</sub>N<sub>y</sub> 3000A Thickness uniformity 2014]		*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dEttR2JSTkRoamR0SUZ4bE5QUW9uS2c&usp=sharing SiO<sub>x</sub>N<sub>y</sub> 3000A Thickness uniformity 2014]

	*[[media:PECVD1-LS SION-recipe2014 LS SION recipe.pdf\|LS SiN Recipe]]		*[[media:PECVD1-LS SION-recipe2014 LS SION recipe.pdf\|LS SiN Recipe]]
	*[https://docs.google.com/spreadsheets/d/1Joz0az9TGZWQc4CiMQJZzLBbNFbx_hH2Oc0B4NNJmYk/edit#gid=978933038=sharing LS SiN Data 2014]		*[https://docs.google.com/spreadsheets/d/1Joz0az9TGZWQc4CiMQJZzLBbNFbx_hH2Oc0B4NNJmYk/edit#gid=978933038=sharing LS SiN Data 2014]

Biljana: /* SiO2 deposition (PECVD #1) */

2014-12-11T21:59:02Z

SiO2 deposition (PECVD #1)

← Older revision		Revision as of 21:59, 11 December 2014
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	== SiO<sub>2</sub> deposition (PECVD #1) ==		== SiO<sub>2</sub> deposition (PECVD #1) ==
	*[[media:~~PECVD1~~-SiO2-standard recipe 2014 ~~SiO2 standard recipe~~.pdf\|SiO<sub>2</sub> Standard Recipe]]		*[[media:NewPECVD1-SiO2-standard recipe 2014.pdf\|SiO<sub>2</sub> Standard Recipe]]
	*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dEw0bjFEdTF2SUhRa25Ca0d0SzBha3c&usp=drive_web#gid=sharing SiO<sub>2</sub> Data 2014]		*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dEw0bjFEdTF2SUhRa25Ca0d0SzBha3c&usp=drive_web#gid=sharing SiO<sub>2</sub> Data 2014]
	*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dDQ3VEtZQVRpdVdlbGtIZHpTNmFzNmc&usp=drive_web#gid=sharing SiO<sub>2</sub> 1000A Thickness uniformity 2014]		*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dDQ3VEtZQVRpdVdlbGtIZHpTNmFzNmc&usp=drive_web#gid=sharing SiO<sub>2</sub> 1000A Thickness uniformity 2014]

Biljana: /* SiN deposition (PECVD #1) */

2014-12-11T21:57:49Z

SiN deposition (PECVD #1)

← Older revision		Revision as of 21:57, 11 December 2014
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	=[[PECVD 1 (PlasmaTherm 790)]]=		=[[PECVD 1 (PlasmaTherm 790)]]=
	== SiN deposition (PECVD #1) ==		== SiN deposition (PECVD #1) ==
	*[[ media: ~~PECVD1~~-SiN standard recipe 2014.pdf\|SiN Standard Recipe]]		*[[ media: NewPECVD1-SiN-standard recipe 2014.pdf\|SiN Standard Recipe]]
	*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dEN6LV93LXlnbUhIWU1adVZWMWlXYnc&usp=drive_web#gid=sharing SiN Data 2014]		*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dEN6LV93LXlnbUhIWU1adVZWMWlXYnc&usp=drive_web#gid=sharing SiN Data 2014]
	*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dElmTXZyOEZsOFdrMVhNLWpKXzVmNWc&usp=sharing SiN 1000A Thickness uniformity 2014]		*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dElmTXZyOEZsOFdrMVhNLWpKXzVmNWc&usp=sharing SiN 1000A Thickness uniformity 2014]

Biljana: /* Other recipes (PECVD#1) */

2014-12-10T20:14:27Z

Other recipes (PECVD#1)

← Older revision		Revision as of 20:14, 10 December 2014
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	*[https://docs.google.com/spreadsheets/d/1rixyzAAq6q08M5OwvZiDVoh3K8B566XKM-UZAQIAnsg/edit#gid=sharing SiO<sub>x</sub>N<sub>y</sub> Data 2014]		*[https://docs.google.com/spreadsheets/d/1rixyzAAq6q08M5OwvZiDVoh3K8B566XKM-UZAQIAnsg/edit#gid=sharing SiO<sub>x</sub>N<sub>y</sub> Data 2014]
	*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dEttR2JSTkRoamR0SUZ4bE5QUW9uS2c&usp=sharing SiO<sub>x</sub>N<sub>y</sub> 3000A Thickness uniformity 2014]		*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dEttR2JSTkRoamR0SUZ4bE5QUW9uS2c&usp=sharing SiO<sub>x</sub>N<sub>y</sub> 3000A Thickness uniformity 2014]
	*[[media:PECVD1-LS ~~SIN~~ ~~recipe~~ ~~2014~~.pdf\|LS SiN Recipe]]		*[[media:PECVD1-LS SION-recipe2014 LS SION recipe.pdf\|LS SiN Recipe]]
	*[https://docs.google.com/spreadsheets/d/1Joz0az9TGZWQc4CiMQJZzLBbNFbx_hH2Oc0B4NNJmYk/edit#gid=978933038=sharing LS SiN Data 2014]		*[https://docs.google.com/spreadsheets/d/1Joz0az9TGZWQc4CiMQJZzLBbNFbx_hH2Oc0B4NNJmYk/edit#gid=978933038=sharing LS SiN Data 2014]
	*[https://docs.google.com/spreadsheets/d/1xIzc2CufRYNSfAtsOXpw3IzHreeu42BWrLBV0kzP6kA/edit#gid=481681015=sharing LS SiN 3000A Thickness uniformity 2014]		*[https://docs.google.com/spreadsheets/d/1xIzc2CufRYNSfAtsOXpw3IzHreeu42BWrLBV0kzP6kA/edit#gid=481681015=sharing LS SiN 3000A Thickness uniformity 2014]

Biljana: /* Other recipes (PECVD#1) */

2014-12-10T19:17:58Z

Other recipes (PECVD#1)

← Older revision		Revision as of 19:17, 10 December 2014
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	* [[media:PECVD1-SiON-Recipe.pdf\|Low Stress Si<sub>3</sub>N<sub>4</sub> - Variable Stress Recipes]]		* [[media:PECVD1-SiON-Recipe.pdf\|Low Stress Si<sub>3</sub>N<sub>4</sub> - Variable Stress Recipes]]
	* [[media:PECVD1-SiON-Recipe.pdf\|Low Stress Si<sub>3</sub>N<sub>4</sub> - Variable Stress Plot]]		* [[media:PECVD1-SiON-Recipe.pdf\|Low Stress Si<sub>3</sub>N<sub>4</sub> - Variable Stress Plot]]
	*[[media:PECVD1-LS SION ~~recipe~~ ~~2014~~.pdf\|SiO<sub>x</sub>N<sub>y</sub> Recipe]]		*[[media:PECVD1-LS SION-recipe2014 LS SION recipe.pdf\|SiO<sub>x</sub>N<sub>y</sub> Recipe]]
	*[https://docs.google.com/spreadsheets/d/1rixyzAAq6q08M5OwvZiDVoh3K8B566XKM-UZAQIAnsg/edit#gid=sharing SiO<sub>x</sub>N<sub>y</sub> Data 2014]		*[https://docs.google.com/spreadsheets/d/1rixyzAAq6q08M5OwvZiDVoh3K8B566XKM-UZAQIAnsg/edit#gid=sharing SiO<sub>x</sub>N<sub>y</sub> Data 2014]
	*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dEttR2JSTkRoamR0SUZ4bE5QUW9uS2c&usp=sharing SiO<sub>x</sub>N<sub>y</sub> 3000A Thickness uniformity 2014]		*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dEttR2JSTkRoamR0SUZ4bE5QUW9uS2c&usp=sharing SiO<sub>x</sub>N<sub>y</sub> 3000A Thickness uniformity 2014]

Biljana: /* SiO2 deposition (PECVD #1) */

2014-12-10T18:43:33Z

SiO2 deposition (PECVD #1)

← Older revision		Revision as of 18:43, 10 December 2014
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	*[[media:PECVD1-SiO2-standard recipe 2014 SiO2 standard recipe.pdf\|SiO<sub>2</sub> Standard Recipe]]		*[[media:PECVD1-SiO2-standard recipe 2014 SiO2 standard recipe.pdf\|SiO<sub>2</sub> Standard Recipe]]
	*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dEw0bjFEdTF2SUhRa25Ca0d0SzBha3c&usp=drive_web#gid=sharing SiO<sub>2</sub> Data 2014]		*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dEw0bjFEdTF2SUhRa25Ca0d0SzBha3c&usp=drive_web#gid=sharing SiO<sub>2</sub> Data 2014]
	*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dDQ3VEtZQVRpdVdlbGtIZHpTNmFzNmc&usp=sharing SiO<sub>2</sub> 1000A Thickness uniformity 2014]		*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dDQ3VEtZQVRpdVdlbGtIZHpTNmFzNmc&usp=drive_web#gid=sharing SiO<sub>2</sub> 1000A Thickness uniformity 2014]

	== Other recipes (PECVD#1)==		== Other recipes (PECVD#1)==

Biljana: /* SiO2 deposition (PECVD #1) */

2014-12-10T18:22:06Z

SiO2 deposition (PECVD #1)

← Older revision		Revision as of 18:22, 10 December 2014
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	== SiO<sub>2</sub> deposition (PECVD #1) ==		== SiO<sub>2</sub> deposition (PECVD #1) ==
	*[[media:PECVD1-SiO2-standard recipe 2014.pdf\|SiO<sub>2</sub> Standard Recipe]]		*[[media:PECVD1-SiO2-standard recipe 2014 SiO2 standard recipe.pdf\|SiO<sub>2</sub> Standard Recipe]]
	*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dEw0bjFEdTF2SUhRa25Ca0d0SzBha3c&usp=drive_web#gid=sharing SiO<sub>2</sub> Data 2014]		*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dEw0bjFEdTF2SUhRa25Ca0d0SzBha3c&usp=drive_web#gid=sharing SiO<sub>2</sub> Data 2014]
	*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dDQ3VEtZQVRpdVdlbGtIZHpTNmFzNmc&usp=sharing SiO<sub>2</sub> 1000A Thickness uniformity 2014]		*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dDQ3VEtZQVRpdVdlbGtIZHpTNmFzNmc&usp=sharing SiO<sub>2</sub> 1000A Thickness uniformity 2014]