https://wiki.nanofab.ucsb.edu/w/index.php?action=history&feed=atom&title=PECVD1_Wafer_Coating_Process_Traveler
PECVD1 Wafer Coating Process Traveler - Revision history
2026-04-04T20:56:45Z
Revision history for this page on the wiki
MediaWiki 1.43.6
https://wiki.nanofab.ucsb.edu/w/index.php?title=PECVD1_Wafer_Coating_Process_Traveler&diff=157615&oldid=prev
Biljana: chn
2020-03-30T23:38:03Z
<p>chn</p>
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<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 23:38, 30 March 2020</td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><ins style="font-weight: bold; text-decoration: none;">=</ins>==PECVD1 deposition - 300nm SiN film @250°C<ins style="font-weight: bold; text-decoration: none;">=</ins>==</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>The wafers are ordered from SVM. These are low particle count 4" Si wafers (particle count <100).</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>The wafers are ordered from SVM. These are low particle count 4" Si wafers (particle count <100).</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>j) Load recipe for cleaning. Edit the recipe and enter required time for cleaning.</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><ins style="font-weight: bold; text-decoration: none;">=</ins>==PECVD1 deposition - 300nm SiO2 film @250°C<ins style="font-weight: bold; text-decoration: none;">=</ins>==</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>The wafers are ordered from SVM. These are low particle count 4" Si wafers (particle count <100).</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>The wafers are ordered from SVM. These are low particle count 4" Si wafers (particle count <100).</div></td>
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Biljana
https://wiki.nanofab.ucsb.edu/w/index.php?title=PECVD1_Wafer_Coating_Process_Traveler&diff=157609&oldid=prev
Biljana at 23:32, 30 March 2020
2020-03-30T23:32:42Z
<p></p>
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<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 23:32, 30 March 2020</td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>==<del style="font-weight: bold; text-decoration: none;"> '''</del>PECVD1 deposition - 300nm SiN film @250°C<del style="font-weight: bold; text-decoration: none;">''' </del>==</div></td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>==PECVD1 deposition - 300nm SiN film @250°C==</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>The wafers are ordered from SVM. These are low particle count 4" Si wafers (particle count <100).</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>The wafers are ordered from SVM. These are low particle count 4" Si wafers (particle count <100).</div></td>
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<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>j) Load recipe for cleaning. Edit the recipe and enter required time for cleaning.</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>==<del style="font-weight: bold; text-decoration: none;"> '''PECV1</del> deposition - 300nm SiO2 film @250°C<del style="font-weight: bold; text-decoration: none;">''' </del>==</div></td>
<td class="diff-marker" data-marker="+"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>==<ins style="font-weight: bold; text-decoration: none;">PECVD1</ins> deposition - 300nm SiO2 film @250°C==</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
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<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>The wafers are ordered from SVM. These are low particle count 4" Si wafers (particle count <100).</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>The wafers are ordered from SVM. These are low particle count 4" Si wafers (particle count <100).</div></td>
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Biljana
https://wiki.nanofab.ucsb.edu/w/index.php?title=PECVD1_Wafer_Coating_Process_Traveler&diff=157608&oldid=prev
Biljana at 23:31, 30 March 2020
2020-03-30T23:31:25Z
<p></p>
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<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 23:31, 30 March 2020</td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>== '''PECVD1 deposition - 300nm SiN film @250°C''' ==</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>== '''PECVD1 deposition - 300nm SiN film @250°C''' ==</div></td>
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Biljana
https://wiki.nanofab.ucsb.edu/w/index.php?title=PECVD1_Wafer_Coating_Process_Traveler&diff=157607&oldid=prev
Biljana at 23:29, 30 March 2020
2020-03-30T23:29:49Z
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><br /></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>== '''PECVD1 deposition - 300nm SiN film @250°C''' ==</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>== '''PECVD1 deposition - 300nm SiN film @250°C''' ==</div></td>
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Biljana
https://wiki.nanofab.ucsb.edu/w/index.php?title=PECVD1_Wafer_Coating_Process_Traveler&diff=157606&oldid=prev
Biljana at 23:29, 30 March 2020
2020-03-30T23:29:07Z
<p></p>
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<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 23:29, 30 March 2020</td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>== PECVD1 deposition - 300nm SiN film @250°C ==</div></td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>== <ins style="font-weight: bold; text-decoration: none;">'''</ins>PECVD1 deposition - 300nm SiN film @250°C<ins style="font-weight: bold; text-decoration: none;">'''</ins> ==</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>The wafers are ordered from SVM. These are low particle count 4" Si wafers (particle count <100).</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>The wafers are ordered from SVM. These are low particle count 4" Si wafers (particle count <100).</div></td>
</tr>
<tr>
<td colspan="2" class="diff-lineno">Line 25:</td>
<td colspan="2" class="diff-lineno">Line 25:</td>
</tr>
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<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>j) Load recipe for cleaning. Edit the recipe and enter required time for cleaning.</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>j) Load recipe for cleaning. Edit the recipe and enter required time for cleaning.</div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
</tr>
<tr>
<td class="diff-marker" data-marker="−"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>== PECV1 deposition - 300nm SiO2 film @250°C ==</div></td>
<td class="diff-marker" data-marker="+"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>== <ins style="font-weight: bold; text-decoration: none;">'''</ins>PECV1 deposition - 300nm SiO2 film @250°C<ins style="font-weight: bold; text-decoration: none;">'''</ins> ==</div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>The wafers are ordered from SVM. These are low particle count 4" Si wafers (particle count <100).</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>The wafers are ordered from SVM. These are low particle count 4" Si wafers (particle count <100).</div></td>
</tr>
</table>
Biljana
https://wiki.nanofab.ucsb.edu/w/index.php?title=PECVD1_Wafer_Coating_Process_Traveler&diff=157605&oldid=prev
Biljana: heading
2020-03-30T23:28:36Z
<p>heading</p>
<table style="background-color: #fff; color: #202122;" data-mw="interface">
<col class="diff-marker" />
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<col class="diff-marker" />
<col class="diff-content" />
<tr class="diff-title" lang="en">
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">← Older revision</td>
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 23:28, 30 March 2020</td>
</tr><tr>
<td colspan="2" class="diff-lineno">Line 1:</td>
<td colspan="2" class="diff-lineno">Line 1:</td>
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<td class="diff-marker" data-marker="−"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div><del style="font-weight: bold; text-decoration: none;">=</del>== PECVD1 deposition - 300nm SiN film @250°C <del style="font-weight: bold; text-decoration: none;">=</del>==</div></td>
<td class="diff-marker" data-marker="+"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>== PECVD1 deposition - 300nm SiN film @250°C ==</div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>The wafers are ordered from SVM. These are low particle count 4" Si wafers (particle count <100).</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>The wafers are ordered from SVM. These are low particle count 4" Si wafers (particle count <100).</div></td>
</tr>
<tr>
<td colspan="2" class="diff-lineno">Line 25:</td>
<td colspan="2" class="diff-lineno">Line 25:</td>
</tr>
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<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>j) Load recipe for cleaning. Edit the recipe and enter required time for cleaning.</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>j) Load recipe for cleaning. Edit the recipe and enter required time for cleaning.</div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
</tr>
<tr>
<td class="diff-marker" data-marker="−"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div><del style="font-weight: bold; text-decoration: none;">=</del>== PECV1 deposition - 300nm SiO2 film @250°C <del style="font-weight: bold; text-decoration: none;">=</del>==</div></td>
<td class="diff-marker" data-marker="+"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>== PECV1 deposition - 300nm SiO2 film @250°C ==</div></td>
</tr>
<tr>
<td colspan="2" class="diff-empty diff-side-deleted"></td>
<td class="diff-marker" data-marker="+"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><br /></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>The wafers are ordered from SVM. These are low particle count 4" Si wafers (particle count <100).</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>The wafers are ordered from SVM. These are low particle count 4" Si wafers (particle count <100).</div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
</tr>
</table>
Biljana
https://wiki.nanofab.ucsb.edu/w/index.php?title=PECVD1_Wafer_Coating_Process_Traveler&diff=157604&oldid=prev
Biljana: /* PECVD1 deposition - 300nm SiN film @250°C */ cd
2020-03-30T23:27:37Z
<p><span class="autocomment">PECVD1 deposition - 300nm SiN film @250°C: </span> cd</p>
<table style="background-color: #fff; color: #202122;" data-mw="interface">
<col class="diff-marker" />
<col class="diff-content" />
<col class="diff-marker" />
<col class="diff-content" />
<tr class="diff-title" lang="en">
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">← Older revision</td>
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 23:27, 30 March 2020</td>
</tr><tr>
<td colspan="2" class="diff-lineno">Line 1:</td>
<td colspan="2" class="diff-lineno">Line 1:</td>
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<td class="diff-marker" data-marker="−"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>== PECVD1 deposition - 300nm SiN film @250°C ==</div></td>
<td class="diff-marker" data-marker="+"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><ins style="font-weight: bold; text-decoration: none;">=</ins>== PECVD1 deposition - 300nm SiN film @250°C <ins style="font-weight: bold; text-decoration: none;">=</ins>==</div></td>
</tr>
<tr>
<td colspan="2" class="diff-empty diff-side-deleted"></td>
<td class="diff-marker" data-marker="+"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><br /></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>The wafers are ordered from SVM. These are low particle count 4" Si wafers (particle count <100).</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>The wafers are ordered from SVM. These are low particle count 4" Si wafers (particle count <100).</div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
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<td colspan="2" class="diff-lineno">Line 24:</td>
<td colspan="2" class="diff-lineno">Line 25:</td>
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<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>j) Load recipe for cleaning. Edit the recipe and enter required time for cleaning.</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>j) Load recipe for cleaning. Edit the recipe and enter required time for cleaning.</div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
</tr>
<tr>
<td class="diff-marker" data-marker="−"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>== PECV1 deposition - 300nm SiO2 film @250°C ==</div></td>
<td class="diff-marker" data-marker="+"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><ins style="font-weight: bold; text-decoration: none;">=</ins>== PECV1 deposition - 300nm SiO2 film @250°C <ins style="font-weight: bold; text-decoration: none;">=</ins>==</div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>The wafers are ordered from SVM. These are low particle count 4" Si wafers (particle count <100).</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>The wafers are ordered from SVM. These are low particle count 4" Si wafers (particle count <100).</div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
</tr>
</table>
Biljana
https://wiki.nanofab.ucsb.edu/w/index.php?title=PECVD1_Wafer_Coating_Process_Traveler&diff=157603&oldid=prev
Biljana at 23:26, 30 March 2020
2020-03-30T23:26:57Z
<p></p>
<table style="background-color: #fff; color: #202122;" data-mw="interface">
<col class="diff-marker" />
<col class="diff-content" />
<col class="diff-marker" />
<col class="diff-content" />
<tr class="diff-title" lang="en">
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">← Older revision</td>
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 23:26, 30 March 2020</td>
</tr><tr>
<td colspan="2" class="diff-lineno">Line 1:</td>
<td colspan="2" class="diff-lineno">Line 1:</td>
</tr>
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<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>== PECVD1 deposition - 300nm SiN film @250°C ==</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>== PECVD1 deposition - 300nm SiN film @250°C ==</div></td>
</tr>
<tr>
<td colspan="2" class="diff-empty diff-side-deleted"></td>
<td class="diff-marker"><a class="mw-diff-movedpara-right" title="Paragraph was moved. Click to jump to old location." href="#movedpara_3_0_lhs">⚫</a></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><a name="movedpara_1_0_rhs"></a>The wafers are ordered from SVM. These are low particle count 4" Si wafers (particle count <100).</div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
</tr>
<tr>
<td class="diff-marker"><a class="mw-diff-movedpara-left" title="Paragraph was moved. Click to jump to new location." href="#movedpara_1_0_rhs">⚫</a></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div><a name="movedpara_3_0_lhs"></a><del style="font-weight: bold; text-decoration: none;">== </del>The wafers are ordered from SVM. These are low particle count 4" Si wafers (particle count <100).<del style="font-weight: bold; text-decoration: none;"> ==</del></div></td>
<td colspan="2" class="diff-empty diff-side-added"></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>a) Log in to PECVD #1 (Staff account)</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>a) Log in to PECVD #1 (Staff account)</div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>== PECV1 deposition - 300nm SiO2 film @250°C ==</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>== PECV1 deposition - 300nm SiO2 film @250°C ==</div></td>
</tr>
<tr>
<td colspan="2" class="diff-empty diff-side-deleted"></td>
<td class="diff-marker"><a class="mw-diff-movedpara-right" title="Paragraph was moved. Click to jump to old location." href="#movedpara_7_0_lhs">⚫</a></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><a name="movedpara_5_0_rhs"></a>The wafers are ordered from SVM. These are low particle count 4" Si wafers (particle count <100).</div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
</tr>
<tr>
<td class="diff-marker"><a class="mw-diff-movedpara-left" title="Paragraph was moved. Click to jump to new location." href="#movedpara_5_0_rhs">⚫</a></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div><a name="movedpara_7_0_lhs"></a><del style="font-weight: bold; text-decoration: none;">== </del>The wafers are ordered from SVM. These are low particle count 4" Si wafers (particle count <100).<del style="font-weight: bold; text-decoration: none;"> ==</del></div></td>
<td colspan="2" class="diff-empty diff-side-added"></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>a) Log in to PECVD #1 (Staff account)</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>a) Log in to PECVD #1 (Staff account)</div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
</tr>
</table>
Biljana
https://wiki.nanofab.ucsb.edu/w/index.php?title=PECVD1_Wafer_Coating_Process_Traveler&diff=157602&oldid=prev
Biljana at 23:26, 30 March 2020
2020-03-30T23:26:33Z
<p></p>
<table style="background-color: #fff; color: #202122;" data-mw="interface">
<col class="diff-marker" />
<col class="diff-content" />
<col class="diff-marker" />
<col class="diff-content" />
<tr class="diff-title" lang="en">
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">← Older revision</td>
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 23:26, 30 March 2020</td>
</tr><tr>
<td colspan="2" class="diff-lineno">Line 1:</td>
<td colspan="2" class="diff-lineno">Line 1:</td>
</tr>
<tr>
<td class="diff-marker" data-marker="−"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div><del style="font-weight: bold; text-decoration: none;">=</del>== PECVD1 deposition - 300nm SiN film @250°C <del style="font-weight: bold; text-decoration: none;">=</del>==</div></td>
<td class="diff-marker" data-marker="+"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>== PECVD1 deposition - 300nm SiN film @250°C ==</div></td>
</tr>
<tr>
<td class="diff-marker"><a class="mw-diff-movedpara-left" title="Paragraph was moved. Click to jump to new location." href="#movedpara_3_0_rhs">⚫</a></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div><a name="movedpara_1_0_lhs"></a>The wafers are ordered from SVM. These are low particle count 4" Si wafers (particle count <100).</div></td>
<td colspan="2" class="diff-empty diff-side-added"></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
</tr>
<tr>
<td colspan="2" class="diff-empty diff-side-deleted"></td>
<td class="diff-marker"><a class="mw-diff-movedpara-right" title="Paragraph was moved. Click to jump to old location." href="#movedpara_1_0_lhs">⚫</a></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><a name="movedpara_3_0_rhs"></a><ins style="font-weight: bold; text-decoration: none;">== </ins>The wafers are ordered from SVM. These are low particle count 4" Si wafers (particle count <100).<ins style="font-weight: bold; text-decoration: none;"> ==</ins></div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>a) Log in to PECVD #1 (Staff account)</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>a) Log in to PECVD #1 (Staff account)</div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
</tr>
<tr>
<td colspan="2" class="diff-lineno">Line 24:</td>
<td colspan="2" class="diff-lineno">Line 24:</td>
</tr>
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<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>j) Load recipe for cleaning. Edit the recipe and enter required time for cleaning.</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>j) Load recipe for cleaning. Edit the recipe and enter required time for cleaning.</div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
</tr>
<tr>
<td class="diff-marker" data-marker="−"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div><del style="font-weight: bold; text-decoration: none;">=</del>== PECV1 deposition - 300nm SiO2 film @250°C <del style="font-weight: bold; text-decoration: none;">=</del>==</div></td>
<td class="diff-marker" data-marker="+"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>== PECV1 deposition - 300nm SiO2 film @250°C ==</div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
</tr>
<tr>
<td class="diff-marker" data-marker="−"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div><del style="font-weight: bold; text-decoration: none;">=</del>== The wafers are ordered from SVM. These are low particle count 4" Si wafers (particle count <100). <del style="font-weight: bold; text-decoration: none;">=</del>==</div></td>
<td class="diff-marker" data-marker="+"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>== The wafers are ordered from SVM. These are low particle count 4" Si wafers (particle count <100). ==</div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>a) Log in to PECVD #1 (Staff account)</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>a) Log in to PECVD #1 (Staff account)</div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
</tr>
</table>
Biljana
https://wiki.nanofab.ucsb.edu/w/index.php?title=PECVD1_Wafer_Coating_Process_Traveler&diff=157601&oldid=prev
Biljana: sub2
2020-03-30T23:23:20Z
<p>sub2</p>
<table style="background-color: #fff; color: #202122;" data-mw="interface">
<col class="diff-marker" />
<col class="diff-content" />
<col class="diff-marker" />
<col class="diff-content" />
<tr class="diff-title" lang="en">
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">← Older revision</td>
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 23:23, 30 March 2020</td>
</tr><tr>
<td colspan="2" class="diff-lineno">Line 24:</td>
<td colspan="2" class="diff-lineno">Line 24:</td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>j) Load recipe for cleaning. Edit the recipe and enter required time for cleaning.</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>j) Load recipe for cleaning. Edit the recipe and enter required time for cleaning.</div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
</tr>
<tr>
<td class="diff-marker" data-marker="−"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>PECV1 deposition - 300nm SiO2 film @250°C</div></td>
<td class="diff-marker" data-marker="+"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><ins style="font-weight: bold; text-decoration: none;">=== </ins>PECV1 deposition - 300nm SiO2 film @250°C<ins style="font-weight: bold; text-decoration: none;"> ===</ins></div></td>
</tr>
<tr>
<td class="diff-marker" data-marker="−"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td colspan="2" class="diff-empty diff-side-added"></td>
</tr>
<tr>
<td class="diff-marker"><a class="mw-diff-movedpara-left" title="Paragraph was moved. Click to jump to new location." href="#movedpara_4_0_rhs">⚫</a></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div><a name="movedpara_2_1_lhs"></a>The wafers are ordered from SVM. These are low particle count 4" Si wafers (particle count <100).</div></td>
<td colspan="2" class="diff-empty diff-side-added"></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
</tr>
<tr>
<td colspan="2" class="diff-empty diff-side-deleted"></td>
<td class="diff-marker"><a class="mw-diff-movedpara-right" title="Paragraph was moved. Click to jump to old location." href="#movedpara_2_1_lhs">⚫</a></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><a name="movedpara_4_0_rhs"></a><ins style="font-weight: bold; text-decoration: none;">=== </ins>The wafers are ordered from SVM. These are low particle count 4" Si wafers (particle count <100).<ins style="font-weight: bold; text-decoration: none;"> ===</ins></div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>a) Log in to PECVD #1 (Staff account)</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>a) Log in to PECVD #1 (Staff account)</div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
</tr>
</table>
Biljana