https://wiki.nanofab.ucsb.edu/w/index.php?action=history&feed=atom&title=PECVD_Recipes
PECVD Recipes - Revision history
2026-10-01T06:32:40Z
Revision history for this page on the wiki
MediaWiki 1.43.9
https://wiki.nanofab.ucsb.edu/w/index.php?title=PECVD_Recipes&diff=163998&oldid=prev
Biljana: /* Si3N4 [ICP-PECVD] */ SiN parameters
2026-09-28T21:34:44Z
<p><span class="autocomment">Si3N4 [ICP-PECVD]: </span> SiN parameters</p>
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<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 21:34, 28 September 2026</td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>* [https://docs.google.com/spreadsheets/d/1xvXqgFaKT6vH4ZSAfOaqAYnx_qyEqzNZFqTc-OGENzw/edit?gid=1168016715#gid=1168016715 Si<sub>3</sub>N<sub>4</sub><nowiki> [ICP-PECVD]- Standard Recipe</nowiki>] - ''"SiN 250C-v2- New recipe since April 2026"''</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>**recipe "SiN 250C-v2", sequence "SiN 250C-v2", category "SiN Std."</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>**recipe "SiN 250C-v2", sequence "SiN 250C-v2", category "SiN Std."</div></td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>**this film has a low particle count (good for waveguides)</div></td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>**requires 30sec O2 plasma using PE-II beforehand</div></td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>**dep.rate=90.86nm/min, refractive index at 632.8nm=2.04372, refractive index at 1550nm=2.00804, stress=-183MPa</div></td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>**Cauchy A=2.004+/-0.0013, B=0.00745+/-0.00072928, C=0.00999+/-0.00011018</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>* *[https://docs.google.com/spreadsheets/d/1CuDMKFTTzGLL6CP-FEI_9cOnUaIw-432ppDFssB59wY/edit?gid=1670372499#gid=1670372499 Si<sub>3</sub>N<sub>4</sub><nowiki> [ICP-PECVD] - Current Process Control Data</nowiki>]</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>* *[https://docs.google.com/spreadsheets/d/1CuDMKFTTzGLL6CP-FEI_9cOnUaIw-432ppDFssB59wY/edit?gid=1670372499#gid=1670372499 Si<sub>3</sub>N<sub>4</sub><nowiki> [ICP-PECVD] - Current Process Control Data</nowiki>]</div></td>
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Biljana
https://wiki.nanofab.ucsb.edu/w/index.php?title=PECVD_Recipes&diff=163997&oldid=prev
Biljana: /* Si3N4 [ICP-PECVD] */
2026-09-28T21:12:07Z
<p><span class="autocomment">Si3N4 [ICP-PECVD]</span></p>
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<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 21:12, 28 September 2026</td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Si<sub>3</sub>N<sub>4</sub> [ICP-PECVD]==</div></td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>* [https://docs.google.com/spreadsheets/d/1xvXqgFaKT6vH4ZSAfOaqAYnx_qyEqzNZFqTc-OGENzw/edit?gid=1168016715#gid=1168016715 Si<sub>3</sub>N<sub>4</sub> [ICP-PECVD<del style="font-weight: bold; text-decoration: none;"> </del>- Standard Recipe] - ''"SiN 250C-v2- New recipe since April 2026"''</div></td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>* [https://docs.google.com/spreadsheets/d/1xvXqgFaKT6vH4ZSAfOaqAYnx_qyEqzNZFqTc-OGENzw/edit?gid=1168016715#gid=1168016715 Si<sub>3</sub>N<sub>4</sub<ins style="font-weight: bold; text-decoration: none;">><nowiki</ins>> [ICP-PECVD<ins style="font-weight: bold; text-decoration: none;">]</ins>- Standard Recipe<ins style="font-weight: bold; text-decoration: none;"></nowiki></ins>] - ''"SiN 250C-v2- New recipe since April 2026"''</div></td>
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<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>**recipe "SiN 250C-v2", sequence "SiN 250C-v2", category "SiN Std."</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>**recipe "SiN 250C-v2", sequence "SiN 250C-v2", category "SiN Std."</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
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Biljana
https://wiki.nanofab.ucsb.edu/w/index.php?title=PECVD_Recipes&diff=163996&oldid=prev
Biljana: /* Si3N4 [ICP-PECVD] */
2026-09-28T21:11:46Z
<p><span class="autocomment">Si3N4 [ICP-PECVD]</span></p>
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<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 21:11, 28 September 2026</td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Si<sub>3</sub>N<sub>4</sub> [ICP-PECVD]==</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>* Si<sub>3</sub>N<sub>4</sub> [ICP-PECVD - Standard Recipe - ''"SiN 250C-v2- New recipe since April 2026"''</div></td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>*<ins style="font-weight: bold; text-decoration: none;"> [https://docs.google.com/spreadsheets/d/1xvXqgFaKT6vH4ZSAfOaqAYnx_qyEqzNZFqTc-OGENzw/edit?gid=1168016715#gid=1168016715</ins> Si<sub>3</sub>N<sub>4</sub> [ICP-PECVD - Standard Recipe<ins style="font-weight: bold; text-decoration: none;">]</ins> - ''"SiN 250C-v2- New recipe since April 2026"''</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>**recipe "SiN 250C-v2", sequence "SiN 250C-v2", category "SiN Std."</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>**recipe "SiN 250C-v2", sequence "SiN 250C-v2", category "SiN Std."</div></td>
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Biljana
https://wiki.nanofab.ucsb.edu/w/index.php?title=PECVD_Recipes&diff=163994&oldid=prev
Biljana: /* Si3N4 [ICP-PECVD] */
2026-09-28T21:09:24Z
<p><span class="autocomment">Si3N4 [ICP-PECVD]</span></p>
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<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 21:09, 28 September 2026</td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Si<sub>3</sub>N<sub>4</sub> [ICP-PECVD]==</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>* <del style="font-weight: bold; text-decoration: none;">Si3N4</del> [ICP-PECVD - Standard Recipe - ''"SiN 250C-v2- New recipe since April 2026"''</div></td>
<td class="diff-marker" data-marker="+"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>* <ins style="font-weight: bold; text-decoration: none;">Si<sub>3</sub>N<sub>4</sub></ins> [ICP-PECVD - Standard Recipe - ''"SiN 250C-v2- New recipe since April 2026"''</div></td>
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<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>**recipe "SiN 250C-v2", sequence "SiN 250C-v2", category "SiN Std."</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>**recipe "SiN 250C-v2", sequence "SiN 250C-v2", category "SiN Std."</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
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Biljana
https://wiki.nanofab.ucsb.edu/w/index.php?title=PECVD_Recipes&diff=163993&oldid=prev
Biljana: /* Si3N4 [ICP-PECVD] */
2026-09-28T21:08:44Z
<p><span class="autocomment">Si3N4 [ICP-PECVD]</span></p>
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<tr>
<td class="diff-marker" data-marker="−"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>* <del style="font-weight: bold; text-decoration: none;">Si3n4</del> [ICP-PECVD - Standard Recipe - ''"SiN 250C-v2- New recipe since April 2026"''</div></td>
<td class="diff-marker" data-marker="+"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>* <ins style="font-weight: bold; text-decoration: none;">Si3N4</ins> [ICP-PECVD - Standard Recipe - ''"SiN 250C-v2- New recipe since April 2026"''</div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>**recipe "SiN 250C-v2", sequence "SiN 250C-v2", category "SiN Std."</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>**recipe "SiN 250C-v2", sequence "SiN 250C-v2", category "SiN Std."</div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
</tr>
</table>
Biljana
https://wiki.nanofab.ucsb.edu/w/index.php?title=PECVD_Recipes&diff=163992&oldid=prev
Biljana: /* Old Data */
2026-09-28T21:08:14Z
<p><span class="autocomment">Old Data</span></p>
<table style="background-color: #fff; color: #202122;" data-mw="interface">
<col class="diff-marker" />
<col class="diff-content" />
<col class="diff-marker" />
<col class="diff-content" />
<tr class="diff-title" lang="en">
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">← Older revision</td>
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 21:08, 28 September 2026</td>
</tr><tr>
<td colspan="2" class="diff-lineno">Line 219:</td>
<td colspan="2" class="diff-lineno">Line 219:</td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>*[https://wiki.nanotech.ucsb.edu/wiki/Old_Deposition_Data_-_2021-12-15#SiN_250C_deposition_.28Unaxis_VLR.29 Si<sub>3</sub>N<sub>4</sub><nowiki> [ICP-PECVD] - Historical Data</nowiki>] - before Oct. 2021</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>*[https://wiki.nanotech.ucsb.edu/wiki/Old_Deposition_Data_-_2021-12-15#SiN_250C_deposition_.28Unaxis_VLR.29 Si<sub>3</sub>N<sub>4</sub><nowiki> [ICP-PECVD] - Historical Data</nowiki>] - before Oct. 2021</div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
</tr>
<tr>
<td class="diff-marker" data-marker="−"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>**Lists film data, such as dep rate, stress, particle count, refractive index etc.</div></td>
<td class="diff-marker" data-marker="+"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>**<ins style="font-weight: bold; text-decoration: none;"> </ins>Lists film data, such as dep rate, stress, particle count, refractive index etc.</div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Low Stress Si<sub>3</sub>N<sub>4</sub> [ICP-PECVD]==</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Low Stress Si<sub>3</sub>N<sub>4</sub> [ICP-PECVD]==</div></td>
</tr>
</table>
Biljana
https://wiki.nanofab.ucsb.edu/w/index.php?title=PECVD_Recipes&diff=163991&oldid=prev
Biljana: /* Si3N4 [ICP-PECVD] */
2026-09-28T21:07:57Z
<p><span class="autocomment">Si3N4 [ICP-PECVD]</span></p>
<table style="background-color: #fff; color: #202122;" data-mw="interface">
<col class="diff-marker" />
<col class="diff-content" />
<col class="diff-marker" />
<col class="diff-content" />
<tr class="diff-title" lang="en">
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">← Older revision</td>
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 21:07, 28 September 2026</td>
</tr><tr>
<td colspan="2" class="diff-lineno">Line 210:</td>
<td colspan="2" class="diff-lineno">Line 210:</td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>**recipe "SiN 250C-v2", sequence "SiN 250C-v2", category "SiN Std."</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>**recipe "SiN 250C-v2", sequence "SiN 250C-v2", category "SiN Std."</div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
</tr>
<tr>
<td class="diff-marker" data-marker="−"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>* [https://docs.google.com/spreadsheets/d/1CuDMKFTTzGLL6CP-FEI_9cOnUaIw-432ppDFssB59wY/edit#gid=1670372499 Si<sub>3</sub>N<sub>4</sub><del style="font-weight: bold; text-decoration: none;">&lt;</del>nowiki<del style="font-weight: bold; text-decoration: none;">&gt;</del> [ICP-PECVD] - Current Process Control Data</nowiki></div></td>
<td class="diff-marker" data-marker="+"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>* <ins style="font-weight: bold; text-decoration: none;">*</ins>[https://docs.google.com/spreadsheets/d/1CuDMKFTTzGLL6CP-FEI_9cOnUaIw-432ppDFssB59wY/edit<ins style="font-weight: bold; text-decoration: none;">?gid=1670372499</ins>#gid=1670372499 Si<sub>3</sub>N<sub>4</sub><ins style="font-weight: bold; text-decoration: none;"><</ins>nowiki<ins style="font-weight: bold; text-decoration: none;">></ins> [ICP-PECVD] - Current Process Control Data</nowiki><ins style="font-weight: bold; text-decoration: none;">]</ins></div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>** Lists film data, such as dep rate, stress, particle count, refractive index etc.</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>** Lists film data, such as dep rate, stress, particle count, refractive index etc.</div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
</tr>
</table>
Biljana
https://wiki.nanofab.ucsb.edu/w/index.php?title=PECVD_Recipes&diff=163990&oldid=prev
Biljana: /* Old Data */
2026-09-28T21:07:29Z
<p><span class="autocomment">Old Data</span></p>
<table style="background-color: #fff; color: #202122;" data-mw="interface">
<col class="diff-marker" />
<col class="diff-content" />
<col class="diff-marker" />
<col class="diff-content" />
<tr class="diff-title" lang="en">
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">← Older revision</td>
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 21:07, 28 September 2026</td>
</tr><tr>
<td colspan="2" class="diff-lineno">Line 219:</td>
<td colspan="2" class="diff-lineno">Line 219:</td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>*[https://wiki.nanotech.ucsb.edu/wiki/Old_Deposition_Data_-_2021-12-15#SiN_250C_deposition_.28Unaxis_VLR.29 Si<sub>3</sub>N<sub>4</sub><nowiki> [ICP-PECVD] - Historical Data</nowiki>] - before Oct. 2021</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>*[https://wiki.nanotech.ucsb.edu/wiki/Old_Deposition_Data_-_2021-12-15#SiN_250C_deposition_.28Unaxis_VLR.29 Si<sub>3</sub>N<sub>4</sub><nowiki> [ICP-PECVD] - Historical Data</nowiki>] - before Oct. 2021</div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
</tr>
<tr>
<td class="diff-marker" data-marker="−"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>*[https://docs.google.com/spreadsheets/d/1CuDMKFTTzGLL6CP-FEI_9cOnUaIw-432ppDFssB59wY/edit?gid=1670372499#gid=1670372499 Si<sub>3</sub>N<sub>4</sub><nowiki> [ICP-PECVD] - Current Process Control Data</nowiki>]</div></td>
<td colspan="2" class="diff-empty diff-side-added"></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>**Lists film data, such as dep rate, stress, particle count, refractive index etc.</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>**Lists film data, such as dep rate, stress, particle count, refractive index etc.</div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
</tr>
</table>
Biljana
https://wiki.nanofab.ucsb.edu/w/index.php?title=PECVD_Recipes&diff=163989&oldid=prev
Biljana: /* Si3N4 [ICP-PECVD] */
2026-09-28T21:07:07Z
<p><span class="autocomment">Si3N4 [ICP-PECVD]</span></p>
<table style="background-color: #fff; color: #202122;" data-mw="interface">
<col class="diff-marker" />
<col class="diff-content" />
<col class="diff-marker" />
<col class="diff-content" />
<tr class="diff-title" lang="en">
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">← Older revision</td>
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 21:07, 28 September 2026</td>
</tr><tr>
<td colspan="2" class="diff-lineno">Line 218:</td>
<td colspan="2" class="diff-lineno">Line 218:</td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>*[https://docs.google.com/spreadsheets/d/1VrgS0cB2OcdZVTCnDAesgQCLRaAgEB_Iajc_OrhXOo0/edit#gid=1199123007 Old Recipe] - 2019</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>*[https://docs.google.com/spreadsheets/d/1VrgS0cB2OcdZVTCnDAesgQCLRaAgEB_Iajc_OrhXOo0/edit#gid=1199123007 Old Recipe] - 2019</div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>*[https://wiki.nanotech.ucsb.edu/wiki/Old_Deposition_Data_-_2021-12-15#SiN_250C_deposition_.28Unaxis_VLR.29 Si<sub>3</sub>N<sub>4</sub><nowiki> [ICP-PECVD] - Historical Data</nowiki>] - before Oct. 2021</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>*[https://wiki.nanotech.ucsb.edu/wiki/Old_Deposition_Data_-_2021-12-15#SiN_250C_deposition_.28Unaxis_VLR.29 Si<sub>3</sub>N<sub>4</sub><nowiki> [ICP-PECVD] - Historical Data</nowiki>] - before Oct. 2021</div></td>
</tr>
<tr>
<td colspan="2" class="diff-empty diff-side-deleted"></td>
<td class="diff-marker" data-marker="+"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><br /></td>
</tr>
<tr>
<td colspan="2" class="diff-empty diff-side-deleted"></td>
<td class="diff-marker" data-marker="+"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>*[https://docs.google.com/spreadsheets/d/1CuDMKFTTzGLL6CP-FEI_9cOnUaIw-432ppDFssB59wY/edit?gid=1670372499#gid=1670372499 Si<sub>3</sub>N<sub>4</sub><nowiki> [ICP-PECVD] - Current Process Control Data</nowiki>]</div></td>
</tr>
<tr>
<td colspan="2" class="diff-empty diff-side-deleted"></td>
<td class="diff-marker" data-marker="+"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>**Lists film data, such as dep rate, stress, particle count, refractive index etc.</div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Low Stress Si<sub>3</sub>N<sub>4</sub> [ICP-PECVD]==</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Low Stress Si<sub>3</sub>N<sub>4</sub> [ICP-PECVD]==</div></td>
</tr>
</table>
Biljana
https://wiki.nanofab.ucsb.edu/w/index.php?title=PECVD_Recipes&diff=163988&oldid=prev
Biljana: /* Si3N4 [ICP-PECVD] */
2026-09-28T20:53:09Z
<p><span class="autocomment">Si3N4 [ICP-PECVD]</span></p>
<table style="background-color: #fff; color: #202122;" data-mw="interface">
<col class="diff-marker" />
<col class="diff-content" />
<col class="diff-marker" />
<col class="diff-content" />
<tr class="diff-title" lang="en">
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">← Older revision</td>
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 20:53, 28 September 2026</td>
</tr><tr>
<td colspan="2" class="diff-lineno">Line 207:</td>
<td colspan="2" class="diff-lineno">Line 207:</td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Si<sub>3</sub>N<sub>4</sub> [ICP-PECVD]==</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Si<sub>3</sub>N<sub>4</sub> [ICP-PECVD]==</div></td>
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<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
</tr>
<tr>
<td class="diff-marker" data-marker="−"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>* [ICP-PECVD - Standard Recipe - ''"SiN 250C-v2- New recipe since April 2026"''</div></td>
<td class="diff-marker" data-marker="+"></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>*<ins style="font-weight: bold; text-decoration: none;"> Si3n4</ins> [ICP-PECVD - Standard Recipe - ''"SiN 250C-v2- New recipe since April 2026"''</div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>**recipe "SiN 250C-v2", sequence "SiN 250C-v2", category "SiN Std."</div></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>**recipe "SiN 250C-v2", sequence "SiN 250C-v2", category "SiN Std."</div></td>
</tr>
<tr>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
<td class="diff-marker"></td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br /></td>
</tr>
</table>
Biljana