SEM Sample Coater (Hummer) - Revision history

John d: /* Operating Procedures */ fixed bullet points, listed approx film thickness

2024-08-02T00:17:55Z

Operating Procedures: fixed bullet points, listed approx film thickness

← Older revision		Revision as of 00:17, 2 August 2024
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	==Operating Procedures==		==Operating Procedures==

		⚫	* [https://wiki.nanotech.ucsb.edu/w/images/5/5d/SEM_sample_coater_%28hummer%29_instructions.pdf SEM Sample Coater (Hummer) Instructions]

⚫	[https://wiki.nanotech.ucsb.edu/w/images/5/5d/SEM_sample_coater_%28hummer%29_instructions.pdf SEM Sample Coater (Hummer) Instructions]

	*[[Hummer SEM Sample Coater - Techniques to reduce charging in SEMs\|Techniques to reduce charging in SEMs using Hummer Coater]]		*[[Hummer SEM Sample Coater - Techniques to reduce charging in SEMs\|Techniques to reduce charging in SEMs using Hummer Coater]]

John d: /* About */

2024-08-02T00:17:26Z

About

← Older revision		Revision as of 00:17, 2 August 2024
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	}}		}}
	=About=		=About=
	This system is for coating ~~Pd/Au~~ thin layers onto samples that will ~~charge~~ during FESEM inspection.		This system is for coating thin (1-10nm) AuPd layers onto samples that will reduce charging during FESEM inspection.

	===When to use===		===When to use===
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	[https://wiki.nanotech.ucsb.edu/w/images/5/5d/SEM_sample_coater_%28hummer%29_instructions.pdf SEM Sample Coater (Hummer) Instructions]		[https://wiki.nanotech.ucsb.edu/w/images/5/5d/SEM_sample_coater_%28hummer%29_instructions.pdf SEM Sample Coater (Hummer) Instructions]

	*[[Hummer SEM Sample Coater - Techniques to reduce charging in SEMs\|Techniques to reduce charging in SEMs]]		*[[Hummer SEM Sample Coater - Techniques to reduce charging in SEMs\|Techniques to reduce charging in SEMs using Hummer Coater]]

	<br />		<br />

Barreraz: Instructions

2022-09-21T22:10:30Z

Instructions

← Older revision		Revision as of 22:10, 21 September 2022
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	==Operating Procedures==		==Operating Procedures==

	{{Operating instructions}}

	[https://wiki.nanotech.ucsb.edu/w/images/5/5d/SEM_sample_coater_%28hummer%29_instructions.pdf SEM Sample Coater (Hummer) Instructions]		[https://wiki.nanotech.ucsb.edu/w/images/5/5d/SEM_sample_coater_%28hummer%29_instructions.pdf SEM Sample Coater (Hummer) Instructions]

Barreraz: /* Operating Procedures */

2022-09-21T22:09:07Z

Operating Procedures

← Older revision		Revision as of 22:09, 21 September 2022
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	This system is for coating Pd/Au thin layers onto samples that will charge during FESEM inspection.		This system is for coating Pd/Au thin layers onto samples that will charge during FESEM inspection.

	=== When to use ===		===When to use===
	If you tried SEM'ing a sample, and the sample appears to drift/move during imaging/capture, or astigmatism is constantly changing, then your sample may be charging up and deflecting the electron beams. This is common for imaging insulators such as substrates made of glass (SiO2), or substrates coated in glass (SiO2, SiN) or thick photoresist (≥1µm). Thin layers (<<1µm) on top of conductive substrates (eg. 200nm SiO2 on Silicon substrate) can often allow electron beams and fields to penetrate to the conductor, possibly not requiring AuPd coating.		If you tried SEM'ing a sample, and the sample appears to drift/move during imaging/capture, or astigmatism is constantly changing, then your sample may be charging up and deflecting the electron beams. This is common for imaging insulators such as substrates made of glass (SiO2), or substrates coated in glass (SiO2, SiN) or thick photoresist (≥1µm). Thin layers (<<1µm) on top of conductive substrates (eg. 200nm SiO2 on Silicon substrate) can often allow electron beams and fields to penetrate to the conductor, possibly not requiring AuPd coating.

	== Operating Procedures ==		==Operating Procedures==
			{{Operating instructions}}
	{{Todo\|Upload SOP. Printouts available at tool.}}

			[https://wiki.nanotech.ucsb.edu/w/images/5/5d/SEM_sample_coater_%28hummer%29_instructions.pdf SEM Sample Coater (Hummer) Instructions]
⚫	* [[Hummer SEM Sample Coater - Techniques to reduce charging in SEMs\|Techniques to reduce charging in SEMs]]

		⚫	*[[Hummer SEM Sample Coater - Techniques to reduce charging in SEMs\|Techniques to reduce charging in SEMs]]

	<br />		<br />

Silva at 17:39, 30 August 2022

2022-08-30T17:39:54Z

← Older revision		Revision as of 17:39, 30 August 2022
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	\|picture=SEMSample.jpg		\|picture=SEMSample.jpg
	\|type = Inspection, Test and Characterization		\|type = Inspection, Test and Characterization
	\|super= ~~Don~~ ~~Freeborn~~		\|super= Michael Barreraz
			\|super2= Tony Bosch
	\|location=Bay 1		\|location=Bay 1
	\|description =		\|description =

John d: trying "tool2" template

2022-06-22T13:48:22Z

trying "tool2" template

← Older revision		Revision as of 13:48, 22 June 2022
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	{{~~tool~~\|{{PAGENAME}}		{{tool2\|{{PAGENAME}}
	\|picture=SEMSample.jpg		\|picture=SEMSample.jpg
	\|type = Inspection, Test and Characterization		\|type = Inspection, Test and Characterization

John d: added more info and placeholder for SOP and link to techniqures to reduce chargign

2022-06-22T13:23:59Z

added more info and placeholder for SOP and link to techniqures to reduce chargign

@@ Line 9: / Line 9: @@
 |toolid=
 }}
-= About =
+=About=
 This system is for coating Pd/Au thin layers onto samples that will charge during FESEM inspection.

Silva at 18:12, 15 April 2020

2020-04-15T18:12:11Z

← Older revision		Revision as of 18:12, 15 April 2020
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	\|picture=SEMSample.jpg		\|picture=SEMSample.jpg
	\|type = Inspection, Test and Characterization		\|type = Inspection, Test and Characterization
	\|super= ~~Tony~~ ~~Bosch~~		\|super= Don Freeborn
	\|location=Bay 1		\|location=Bay 1
	\|description =		\|description =

Thibeault at 21:18, 10 July 2015

2015-07-10T21:18:17Z

← Older revision		Revision as of 21:18, 10 July 2015
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	\|toolid=		\|toolid=
	}}		}}
			= About =
			This system is for coating Pd/Au thin layers onto samples that will charge during FESEM inspection.

Zwarburg: Created page with "{{tool|{{PAGENAME}} |picture=SEMSample.jpg |type = Inspection, Test and Characterization |super= Tony Bosch |location=Bay 1 |description = |manufacturer = Hummer |materials = |…"

2012-07-11T17:30:30Z

Created page with "{{tool|{{PAGENAME}} |picture=SEMSample.jpg |type = Inspection, Test and Characterization |super= Tony Bosch |location=Bay 1 |description = |manufacturer = Hummer |materials = |…"

New page

{{tool|{{PAGENAME}}
|picture=SEMSample.jpg
|type = Inspection, Test and Characterization
|super= Tony Bosch
|location=Bay 1
|description =
|manufacturer = Hummer
|materials =
|toolid=
}}