Services - Revision history

John d: /* Fabrication Services by NanoFab Staff */ simplifications and minor updates.

2026-07-15T21:11:11Z

Fabrication Services by NanoFab Staff: simplifications and minor updates.

← Older revision		Revision as of 21:11, 15 July 2026
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	*[https://www.nanotech.ucsb.edu/services#comp-k3rx7hk4 '''Rates are listed here'''].		*[https://www.nanotech.ucsb.edu/services#comp-k3rx7hk4 '''Rates are listed here'''].
	**We bill for both "<u>''Use of Facility + Equipment''</u>" '''plus''' "''<u>Dedicated staff support</u>''" time per hour.		**We bill for both "<u>''Use of Facility + Equipment''</u>" '''plus''' "''<u>Dedicated staff support</u>''" time per hour.
		⚫	**We will only apply '''Academic/Gov't rates''' if the technical contact directing the work is at the academic/gov't institution we have a signed service agreement with.
	**This is similar to your own employee using the lab.
		⚫	*You will work directly with [[Demis D. John\|Demis]] or [[Staff List#Process Group\|his staff]] to accept + schedule the work, if the project is accepted.
	**The technical contact for all work performed by UCSB Nanofab staff must be an employee or paid contractor of the institution that has signed the service agreement with UCSB. '''--''' '''New 2025-02'''
⚫	**~~'''~~We will only apply Academic/Gov't rates''' if the technical contact directing the work is at the academic institution we have a signed service agreement with. ~~'''--''' '''New 2025-02'''~~
⚫	*You will work directly with [[Demis D. John\|Demis]] or [[Staff List#Process Group\|his staff]] to schedule the work, if the project is accepted.
	**Any project must first be accepted by our Project Scientists.
	**We have limited staff and are not a foundry, and we will only accept jobs that we are capable of performing with success.		**We have limited staff and are not a foundry, and we will only accept jobs that we are capable of performing with success.
	*~~There is '''''no guarantee''''' of research results or success in fabrication.~~ We may ~~also~~ be able to suggest other ways to get your devices made in our lab if Staff use is not appropriate for your project.		**We may be able to suggest other ways to get your devices made in our lab if Staff use is not appropriate for your project.
			*There is '''''no guarantee''''' of research results or success in fabrication.
	*You will be <u>billed for the Actual time and materials required during the job</u>, regardless of project outcome.		*You will be <u>billed for the Actual time and materials required during the job</u>, regardless of project outcome.
	**We can provide only a rough ''estimate'' of time and cost because it's an hourly service, not a "quote".		**We can provide only a rough ''estimate'' of time and cost because it's an hourly service, not a "quote".
	*We send out bills ~~monthly~~, with payment expected as Net30; Credit card payments are accepted.		*We send out bills at the end of each month, with payment expected as Net30; Credit card payments are accepted.
	*[[Frequently Asked Questions#Publications acknowledging the Nanofab\|Publications Policy]] - fabrication executed by NanoFab Staff is often significant "''intellectual contribution''". Acknowledgement of NanoFab use is required at minimum.		*[[Frequently Asked Questions#Publications acknowledging the Nanofab\|Publications Policy]] - fabrication executed by NanoFab Staff is often significant "''intellectual contribution''". [[Frequently Asked Questions#Publications acknowledging the Nanofab\|Acknowledgement of NanoFab use]] is required at minimum.

	===Request Remote Fabrication Services===		===Request Remote Fabrication Services===
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	====Paperwork for Fabrication Services====		====Paperwork for Fabrication Services====
		⚫	4. Return the [//wiki.nanotech.ucsb.edu/w/images/1/1d/UCSB_Service_Agreement.pdf '''UCSB Service Agreement'''] (download)

		⚫	*Requires signature from your institution - <u>signature authority required</u>, typically ''not'' the professor or graduate student. Business or Contracts Dept., for example.

		⚫	*Only one agreement is needed per institution. Ask us to find out if your inst. already has one in place.
			*'''UC Users:''' this is not NOT needed.
	3. Submit the [//wiki.nanotech.ucsb.edu/w/images/7/79/Nanofabrication_Facility_Project_Description.xlsx '''Project Info and Description Form'''] (download) to [Mailto:nanofab-job-inquiry@ece.ucsb.edu,claudia18@ucsb.edu?subject=Fab+Services+Project+Description Demis D. John and Claudia Gutierrez]		3. Submit the [//wiki.nanotech.ucsb.edu/w/images/7/79/Nanofabrication_Facility_Project_Description.xlsx '''Project Info and Description Form'''] (download) to [Mailto:nanofab-job-inquiry@ece.ucsb.edu,claudia18@ucsb.edu?subject=Fab+Services+Project+Description Demis D. John and Claudia Gutierrez]

	*No signatures required, only project info and contact info for internal billing purposes.		*No signatures required, only project info and contact info for internal billing purposes. A student cal fill this out.
	*'''UC Users''' - in the Project Description, you will have to provide a valid Recharge Account number to bill against.		*'''UC Users''' - in the Project Description, you will have to provide a valid Recharge Account number to bill against.

⚫	4. Return the [//wiki.nanotech.ucsb.edu/w/images/1/1d/UCSB_Service_Agreement.pdf '''UCSB Service Agreement'''] (download)

⚫	*Requires signature from your institution (<u>signature authority required</u>, typically ''not'' the professor or graduate student. Business or Contracts ~~Bept~~., for example)

⚫	*Only one agreement is needed per institution. Ask us to find out if your inst. already has one in place.
	*NOT needed for '''UC Users'''.
	===='''Statement of Work'''====		===='''Statement of Work'''====
	For each request, please provide a quick PPT/Word/similar doc explaining exactly what you need done ("SOW"), ~~which~~ should include:		For each request, please provide a quick PPT/Word/similar doc explaining ''exactly'' what you need done ("SOW"). We will discuss this with you before starting the work, and our staff may use this document to answer questions that come up during processing. Your SOW should include:

	*~~Please name~~ your file something like: "'''''2024-08~~-21~~''' SiO2 Dep '''v1'''.pptx''"		*Name your file something unique with a date like: "'''''2024-08''' SiO2 Dep '''v1'''.pptx''"
	**We use the approx date as your BatchID		**We use the approx date as your BatchID
	**Revisions will update only the ''v1/2/3'' number, but keep the BatchID the same.		**Revisions will update only the ''v1/2/3'' number, but keep the BatchID the same.
	*How many wafers to run and/or number of samples to be provided.		*How many wafers to run and/or number of samples to be provided.
			**Sample ID's/numbering is highly recommended if appropriate.
	*Size/Shape of samples. Eg. "''4-inch wafers''" or "''irregular ~1cm pieces''"		*Size/Shape of samples. Eg. "''4-inch wafers''" or "''irregular ~1cm pieces''"
	*Exact processing steps to perform. Staff will assist filling in any missing details.		*Exact processing steps to perform. Staff will assist filling in any missing details.
	**Please clearly state which steps UCSB Staff will perform, versus steps your staff will perform, if needed.		**Please clearly state which steps UCSB Staff will perform, versus steps your staff will perform, if needed.
	*Targets and acceptable tolerances for the main steps, eg. "''Deposit 500nm of SiO2, acceptable range 450-550nm (±10% tolerance)''".		*Targets and acceptable tolerances for the main steps, eg. "''Deposit 500nm of SiO2, acceptable range 450-550nm (±10% tolerance)''".
⚫	**Note that tight tolerances (<<10%) will require us to run additional calibrations at your expense, so please choose a tolerance that is ''required'' for your devices to work.
	**It is common to '''not know the tolerance''' for research devices, so just leave that out and a "best effort" is usually acceptable.		**It is common to '''not know the tolerance''' for research devices, so just leave that out and a "best effort" is usually acceptable.
		⚫	**Note that tight tolerances (<<10%) will require us to run additional calibrations at your expense, so please choose a tolerance that you know is ''required'' for your devices to work.

	===== Example SOWs =====		===== Example SOWs =====

John d: /* Paperwork for Fabrication Services */ PD email to Claudia as well.

2025-10-28T10:54:46Z

Paperwork for Fabrication Services: PD email to Claudia as well.

← Older revision		Revision as of 10:54, 28 October 2025
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	====Paperwork for Fabrication Services====		====Paperwork for Fabrication Services====
	3. Submit the [//wiki.nanotech.ucsb.edu/w/images/7/79/Nanofabrication_Facility_Project_Description.xlsx '''Project Info and Description Form'''] (download) to [Mailto:nanofab-job-inquiry@ece.ucsb.edu?subject=Fab~~ ~~Services~~ ~~Project~~ ~~Description Demis D. John and ~~Brian~~ ~~Thibeault~~]		3. Submit the [//wiki.nanotech.ucsb.edu/w/images/7/79/Nanofabrication_Facility_Project_Description.xlsx '''Project Info and Description Form'''] (download) to [Mailto:nanofab-job-inquiry@ece.ucsb.edu,claudia18@ucsb.edu?subject=Fab+Services+Project+Description Demis D. John and Claudia Gutierrez]

	*No signatures required, only project info and contact info for internal billing purposes.		*No signatures required, only project info and contact info for internal billing purposes.

John d: /* Fabrication Services by NanoFab Staff */ linked to basic SOW

2025-09-15T23:20:28Z

Fabrication Services by NanoFab Staff: linked to basic SOW

← Older revision		Revision as of 23:20, 15 September 2025
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	*No signatures required, only project info and contact info for internal billing purposes.		*No signatures required, only project info and contact info for internal billing purposes.
		⚫	*'''UC Users''' - in the Project Description, you will have to provide a valid Recharge Account number to bill against.

	4. Return the [//wiki.nanotech.ucsb.edu/w/images/1/1d/UCSB_Service_Agreement.pdf '''UCSB Service Agreement'''] (download)		4. Return the [//wiki.nanotech.ucsb.edu/w/images/1/1d/UCSB_Service_Agreement.pdf '''UCSB Service Agreement'''] (download)
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	*Only one agreement is needed per institution. Ask us to find out if your inst. already has one in place.		*Only one agreement is needed per institution. Ask us to find out if your inst. already has one in place.
			*NOT needed for '''UC Users'''.
	5. University of California users only:
⚫	*UC Users - in the Project Description, you will have to provide a valid Recharge Account number to bill against.
	*If you are a '''UCSB Group''', we ''don't'' need the Service Agreement from you, only the '''''Project Info & Description Form''''' (above).
	*If you are a '''group from another UC''', we don't need the Service Agreement, instead we need a different form: [[Media:Facility-Use-MOU---Intercampus-UC-User.pdf\|The Inter-Campus MOU]] signed by the User submitting the job (here is [https://wiki.nanotech.ucsb.edu/w/images/7/7c/Attachment_A_-_UCSB_Master_Facilities_Use_Agreement_Labs.pdf Attachment A] listing included UCSB facilities.).

	===='''Statement of Work'''====		===='''Statement of Work'''====
	For each request, please provide a quick PPT/Word/similar doc explaining exactly what you need done ("SOW"), which should include:		For each request, please provide a quick PPT/Word/similar doc explaining exactly what you need done ("SOW"), which should include:
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	===== Example SOWs =====		===== Example SOWs =====
	For some tools the programming/instructions can be fairly complex - below are examples for tools that require more detailed instructions:		For some tools the programming/instructions can be fairly complex - below are examples for tools that require more detailed instructions:
			*[https://docs.google.com/presentation/d/1mx8Jxu_4v2PnNiwqXvni8I1i4NWoCFMb?rtpof=true&usp=drive_fs Basic SOW example PPT: "''2025-09-15 InP Deep Etch v1.pptx''"].
	*An example PPT for Stepper lithography jobs can be found here: [[Media:UCSB ASML DUV Stepper - Programming Worksheet.pptx\|UCSB_Stepper_-_Programming_Worksheet.pptx]]		*An example PPT for Stepper lithography jobs can be found here: [[Media:UCSB ASML DUV Stepper - Programming Worksheet.pptx\|UCSB_Stepper_-_Programming_Worksheet.pptx]]
	*An example PPT for Dicing (die singulation) can be found here: [[Media:Dicing - Example Dicing Instructions for UC Santa Barbara v2.pptx\|Dicing - Example Dicing Instructions for UC Santa Barbara v2.pptx]]		*An example PPT for Dicing (die singulation) can be found here: [[Media:Dicing - Example Dicing Instructions for UC Santa Barbara v2.pptx\|Dicing - Example Dicing Instructions for UC Santa Barbara v2.pptx]]

John d: /* Paperwork for new Institutions (Non-UC) */

2025-03-19T19:24:04Z

Paperwork for new Institutions (Non-UC)

← Older revision		Revision as of 19:24, 19 March 2025
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	For new institutions to gain access to the UCSB Nanofabrication Facility, please provide the following documents. Email the docs to both [[Claudia Gutierrez]] and the [[Brian Thibeault\|Lab Director]].		For new institutions to gain access to the UCSB Nanofabrication Facility, please provide the following documents. Email the docs to both [[Claudia Gutierrez]] and the [[Brian Thibeault\|Lab Director]].

	#Submit a ~~Detailed~~ [//wiki.nanotech.ucsb.edu/w/images/7/79/Nanofabrication_Facility_Project_Description.xlsx ~~project~~ ~~description~~ (download)] to the [[Brian Thibeault\|Lab Director]].		#Submit a [//wiki.nanotech.ucsb.edu/w/images/7/79/Nanofabrication_Facility_Project_Description.xlsx Project Description (download)] (contact info etc.) to the [[Brian Thibeault\|Lab Director]].
	#Nanofab staff acceptance		#Nanofab staff acceptance
	#[//wiki.nanotech.ucsb.edu/w/images/a/a2/UCSB-Facilities-Use-Agreement.pdf UCSB Facility Use Agreement (download)] signed by an official company signatory (attached form)		#[//wiki.nanotech.ucsb.edu/w/images/a/a2/UCSB-Facilities-Use-Agreement.pdf UCSB Facility Use Agreement (download)] signed by an official company signatory (attached form)

John d: /* Paperwork for Fabrication Services */ UC users: request Rechareg acct number

2025-03-09T19:03:53Z

Paperwork for Fabrication Services: UC users: request Rechareg acct number

← Older revision		Revision as of 19:03, 9 March 2025
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	*Only one agreement is needed per institution. Ask us to find out if your inst. already has one in place.		*Only one agreement is needed per institution. Ask us to find out if your inst. already has one in place.
			5. University of California users only:

			*UC Users - in the Project Description, you will have to provide a valid Recharge Account number to bill against.
	*If you are a '''UCSB Group''', we ''don't'' need the Service Agreement from you, only the '''''Project Info & Description Form''''' (above).		*If you are a '''UCSB Group''', we ''don't'' need the Service Agreement from you, only the '''''Project Info & Description Form''''' (above).
	*If you are a '''group from another UC''', we don't need the Service Agreement, instead we need a different form: [[Media:Facility-Use-MOU---Intercampus-UC-User.pdf\|The Inter-Campus MOU]] signed by the User submitting the job (here is [https://wiki.nanotech.ucsb.edu/w/images/7/7c/Attachment_A_-_UCSB_Master_Facilities_Use_Agreement_Labs.pdf Attachment A] listing included UCSB facilities.).		*If you are a '''group from another UC''', we don't need the Service Agreement, instead we need a different form: [[Media:Facility-Use-MOU---Intercampus-UC-User.pdf\|The Inter-Campus MOU]] signed by the User submitting the job (here is [https://wiki.nanotech.ucsb.edu/w/images/7/7c/Attachment_A_-_UCSB_Master_Facilities_Use_Agreement_Labs.pdf Attachment A] listing included UCSB facilities.).

John d: /* Important Info on Fabrication Services */

2025-02-13T19:16:05Z

Important Info on Fabrication Services

← Older revision		Revision as of 19:16, 13 February 2025
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	**This is similar to your own employee using the lab.		**This is similar to your own employee using the lab.
	**The technical contact for all work performed by UCSB Nanofab staff must be an employee or paid contractor of the institution that has signed the service agreement with UCSB. '''--''' '''New 2025-02'''		**The technical contact for all work performed by UCSB Nanofab staff must be an employee or paid contractor of the institution that has signed the service agreement with UCSB. '''--''' '''New 2025-02'''
	**We will only apply Academic/Gov't rates if the technical contact directing the work is at the academic institution we have a signed service agreement with. '''--''' '''New 2025-02'''		**'''We will only apply Academic/Gov't rates''' if the technical contact directing the work is at the academic institution we have a signed service agreement with. '''--''' '''New 2025-02'''
	*You will work directly with [[Demis D. John\|Demis]] or [[Staff List#Process Group\|his staff]] to schedule the work, if the project is accepted.		*You will work directly with [[Demis D. John\|Demis]] or [[Staff List#Process Group\|his staff]] to schedule the work, if the project is accepted.
	**Any project must first be accepted by our Project Scientists.		**Any project must first be accepted by our Project Scientists.

Thibeault: added language to technical contact requirement.

2025-02-12T01:18:21Z

added language to technical contact requirement.

← Older revision		Revision as of 01:18, 12 February 2025
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	**We bill for both "<u>''Use of Facility + Equipment''</u>" '''plus''' "''<u>Dedicated staff support</u>''" time per hour.		**We bill for both "<u>''Use of Facility + Equipment''</u>" '''plus''' "''<u>Dedicated staff support</u>''" time per hour.
	**This is similar to your own employee using the lab.		**This is similar to your own employee using the lab.
	**We ~~will~~ ~~only~~ ~~apply~~ ~~Academic/Gov't~~ ~~rates~~ if ~~the~~ ~~primary~~ ~~technical~~ ~~contact~~ ~~directing~~ the ~~work~~ is at the ~~academic~~ ~~institution~~. '''--''' '''New 2025-02'''		**The technical contact for all work performed by UCSB Nanofab staff must be an employee or paid contractor of the institution that has signed the service agreement with UCSB. '''--''' '''New 2025-02'''
			**We will only apply Academic/Gov't rates if the technical contact directing the work is at the academic institution we have a signed service agreement with. '''--''' '''New 2025-02'''
	*You will work directly with [[Demis D. John\|Demis]] or [[Staff List#Process Group\|his staff]] to schedule the work, if the project is accepted.		*You will work directly with [[Demis D. John\|Demis]] or [[Staff List#Process Group\|his staff]] to schedule the work, if the project is accepted.
	**Any project must first be accepted by our Project Scientists.		**Any project must first be accepted by our Project Scientists.

John d: /* Fabrication Services by NanoFab Staff */ added academic rates policy for technical contact

2025-02-06T22:09:02Z

Fabrication Services by NanoFab Staff: added academic rates policy for technical contact

← Older revision		Revision as of 22:09, 6 February 2025
Line 90:		Line 90:
	**We bill for both "<u>''Use of Facility + Equipment''</u>" '''plus''' "''<u>Dedicated staff support</u>''" time per hour.		**We bill for both "<u>''Use of Facility + Equipment''</u>" '''plus''' "''<u>Dedicated staff support</u>''" time per hour.
	**This is similar to your own employee using the lab.		**This is similar to your own employee using the lab.
			**We will only apply Academic/Gov't rates if the primary technical contact directing the work is at the academic institution. '''--''' '''New 2025-02'''
	*You will work directly with [[Demis D. John\|Demis]] or [[Staff List#Process Group\|his staff]] to schedule the work, if the project is accepted.		*You will work directly with [[Demis D. John\|Demis]] or [[Staff List#Process Group\|his staff]] to schedule the work, if the project is accepted.
	**Any project must first be accepted by our Project Scientists.		**Any project must first be accepted by our Project Scientists.

John d: /* Statement of Work */

2025-01-21T21:30:07Z

Statement of Work

← Older revision		Revision as of 21:30, 21 January 2025
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	**We use the approx date as your BatchID		**We use the approx date as your BatchID
	**Revisions will update only the ''v1/2/3'' number, but keep the BatchID the same.		**Revisions will update only the ''v1/2/3'' number, but keep the BatchID the same.
	*How many wafers to run and/or number of samples to be provided ~~and size of samples~~.		*How many wafers to run and/or number of samples to be provided.
			*Size/Shape of samples. Eg. "''4-inch wafers''" or "''irregular ~1cm pieces''"
	*Exact processing steps to perform. Staff will assist filling in any missing details.		*Exact processing steps to perform. Staff will assist filling in any missing details.
	**Please clearly state which steps UCSB Staff will perform, versus steps your staff will perform, if needed.		**Please clearly state which steps UCSB Staff will perform, versus steps your staff will perform, if needed.

John d: /* Statement of Work */ link to dicing SOW

2024-12-10T18:18:38Z

Statement of Work: link to dicing SOW

← Older revision		Revision as of 18:18, 10 December 2024
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	**Note that tight tolerances (<<10%) will require us to run additional calibrations at your expense, so please choose a tolerance that is ''required'' for your devices to work.		**Note that tight tolerances (<<10%) will require us to run additional calibrations at your expense, so please choose a tolerance that is ''required'' for your devices to work.
	**It is common to '''not know the tolerance''' for research devices, so just leave that out and a "best effort" is usually acceptable.		**It is common to '''not know the tolerance''' for research devices, so just leave that out and a "best effort" is usually acceptable.

			===== Example SOWs =====
			For some tools the programming/instructions can be fairly complex - below are examples for tools that require more detailed instructions:
	*An example PPT for Stepper lithography jobs can be found here: [[Media:UCSB ASML DUV Stepper - Programming Worksheet.pptx\|UCSB_Stepper_-_Programming_Worksheet.pptx]]		*An example PPT for Stepper lithography jobs can be found here: [[Media:UCSB ASML DUV Stepper - Programming Worksheet.pptx\|UCSB_Stepper_-_Programming_Worksheet.pptx]]
			*An example PPT for Dicing (die singulation) can be found here: [[Media:Dicing - Example Dicing Instructions for UC Santa Barbara v2.pptx\|Dicing - Example Dicing Instructions for UC Santa Barbara v2.pptx]]