https://wiki.nanofab.ucsb.edu/w/index.php?action=history&feed=atom&title=Silicon_Deep_Etcher_%28Plasma-Therm_SLR%29Silicon Deep Etcher (Plasma-Therm SLR) - Revision history2026-07-29T21:51:01ZRevision history for this page on the wikiMediaWiki 1.43.9https://wiki.nanofab.ucsb.edu/w/index.php?title=Silicon_Deep_Etcher_(Plasma-Therm_SLR)&diff=162184&oldid=prevJohn d at 23:04, 6 August 20242024-08-06T23:04:29Z<p></p>
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</table>John dhttps://wiki.nanofab.ucsb.edu/w/index.php?title=Silicon_Deep_Etcher_(Plasma-Therm_SLR)&diff=162183&oldid=prevJohn d: ICP from dry etch recipes2024-08-06T23:04:15Z<p>ICP from dry etch recipes</p>
<p><b>New page</b></p><div>=[[Si Deep RIE (PlasmaTherm/Bosch Etch)|Si Deep RIE (PlasmaTherm/Bosch Etch) - DECOMISSIONED]]=<br />
'''This tool does not exist in this configuration any more, so these recipes are for Reference purposes Only!!!'''<br />
The machine was upgraded to be the new Plasma-Therm Fluorine ICP Etcher - the chamber configuration is now different, making these recipes invalid.<br />
For Deep Silicon Etching, the [[ICP Etching Recipes#High Rate Bosch Etch .28DSEIII.29|Plasma-Therm DSE-iii]] is often used. Some single-step Silicon etching is still performed on the [[ICP Etching Recipes#Si Etching .28Fluorine ICP Etcher.29|SLR Fluorine ICP]], due to the slower etch rate.<br />
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==Bosch and Release Etch (Si Deep RIE)==<br />
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*[//wiki.nanotech.ucsb.edu/wiki/images/0/02/10-Si_Etch_Bosch_Release_DRIE.pdf Bosch and Release Processes]<br />
**Ideal for deep (>>1µm), vertical etching of Silicon. Through-wafer etches are possible (requires carrier wafer).<br />
**Etch rate depends on area of exposed silicon being etched.<br />
**Al<sub>2</sub>O<sub>3</sub> mask (ALD or Sputter) has >9000:1 selectivity<br />
**SiO<sub>2</sub> (PECVD) mask has ~100:1 selectivity<br />
**Thermal SiO<sub>2</sub> has ~300:1 selectivity.<br />
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==Single-step Si Etching (not Bosch Process!) (Si Deep RIE)==<br />
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*[//wiki.nanotech.ucsb.edu/wiki/images/d/d2/10-Si_Etch_using_DRIE_%28single-step%29.pdf Single-step Si Vertical Etch Recipe - SF<sub>6</sub>-C<sub>4</sub>F<sub>8</sub>-Ar]</div>John d