Step Profilometer (DektakXT) - Revision history

John d: changed image, linked to mfg.

2023-05-11T04:51:15Z

changed image, linked to mfg.

← Older revision		Revision as of 04:51, 11 May 2023
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	'''The Dektak 6M has been replaced by a new Dektak XT. 2023-01'''
	{{tool2\|{{PAGENAME}}		{{tool2\|{{PAGENAME}}
	\|picture=~~Dektak6M~~.jpg		\|picture=DektakXT.jpg
	\|type = Inspection, Test and Characterization		\|type = Inspection, Test and Characterization
	\|super= Aidan Hopkins		\|super= Aidan Hopkins
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	\|email=silva@ece.ucsb.edu		\|email=silva@ece.ucsb.edu
	\|description = Surface Profilometer		\|description = Surface Profilometer
			\|manufacturer = [https://www.bruker.com/en/products-and-solutions/test-and-measurement/stylus-profilometers/dektakxt.html Bruker]
	\|manufacturer = Bruker
	\|materials =		\|materials =
	}}		}}

John d: added date of replacement

2023-02-25T17:17:50Z

added date of replacement

← Older revision		Revision as of 17:17, 25 February 2023
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	'''The Dektak 6M has been replaced by a new Dektak XT.'''		'''The Dektak 6M has been replaced by a new Dektak XT. 2023-01'''
	{{tool2\|{{PAGENAME}}		{{tool2\|{{PAGENAME}}
	\|picture=Dektak6M.jpg		\|picture=Dektak6M.jpg

Hopkins a: /* Tool References */

2023-02-22T23:57:11Z

Tool References

← Older revision		Revision as of 23:57, 22 February 2023
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	*[https://wiki.nanotech.ucsb.edu/w/images/6/6c/DektakXT_Operating_Procedure.pdf DektakXT SOP]		*[https://wiki.nanotech.ucsb.edu/w/images/6/6c/DektakXT_Operating_Procedure.pdf DektakXT SOP]
	*[https://www.youtube.com/watch?v=HINRiQ7XUwE DektakXT Pre-Training Video]		*[https://www.youtube.com/watch?v=HINRiQ7XUwE DektakXT Pre-Training Video]
	*[https://bruker-my.sharepoint.com/:f:/p/nicholas_doroz/Egv0_OjHda5KiF37z9j23DoBYSkZjzUBAw03eUHdPKV2vw?email=ahop21%40ucsb.edu&e=5msWjG Off-line Vision 64 software]

Hopkins a at 14:57, 22 February 2023

2023-02-22T14:57:43Z

← Older revision		Revision as of 14:57, 22 February 2023
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	*[https://wiki.nanotech.ucsb.edu/w/images/6/6c/DektakXT_Operating_Procedure.pdf DektakXT SOP]		*[https://wiki.nanotech.ucsb.edu/w/images/6/6c/DektakXT_Operating_Procedure.pdf DektakXT SOP]
	*[https://www.youtube.com/watch?v=HINRiQ7XUwE DektakXT Pre-Training Video]		*[https://www.youtube.com/watch?v=HINRiQ7XUwE DektakXT Pre-Training Video]
	*[https://bruker-my.sharepoint.com/:f:/p/nicholas_doroz/Egv0_OjHda5KiF37z9j23DoBYSkZjzUBAw03eUHdPKV2vw?email=ahop21%40ucsb.edu&e=5msWjG]		*[https://bruker-my.sharepoint.com/:f:/p/nicholas_doroz/Egv0_OjHda5KiF37z9j23DoBYSkZjzUBAw03eUHdPKV2vw?email=ahop21%40ucsb.edu&e=5msWjG Off-line Vision 64 software]

Hopkins a: /* Tool References */

2023-02-22T14:56:34Z

Tool References

← Older revision		Revision as of 14:56, 22 February 2023
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	*[https://wiki.nanotech.ucsb.edu/w/images/6/6c/DektakXT_Operating_Procedure.pdf DektakXT SOP]		*[https://wiki.nanotech.ucsb.edu/w/images/6/6c/DektakXT_Operating_Procedure.pdf DektakXT SOP]
	*[https://www.youtube.com/watch?v=HINRiQ7XUwE DektakXT Pre-Training Video]		*[https://www.youtube.com/watch?v=HINRiQ7XUwE DektakXT Pre-Training Video]
			*[https://bruker-my.sharepoint.com/:f:/p/nicholas_doroz/Egv0_OjHda5KiF37z9j23DoBYSkZjzUBAw03eUHdPKV2vw?email=ahop21%40ucsb.edu&e=5msWjG]

John d: updated that tool is availabel for training.

2023-02-07T18:06:46Z

updated that tool is availabel for training.

← Older revision		Revision as of 18:06, 7 February 2023
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	'''The Dektak 6M has been ~~removed~~ ~~from the lab, and~~ a new Dektak XT ~~is currently being qualified~~. ~~2023-01-20~~'''		'''The Dektak 6M has been replaced by a new Dektak XT.'''
	{{tool2\|{{PAGENAME}}		{{tool2\|{{PAGENAME}}
	\|picture=Dektak6M.jpg		\|picture=Dektak6M.jpg
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	}}		}}
	=About=		=About=
	The DektakXT is a profilometer for measuring step heights or trench depths on a surface. This is a surface contact measurement technique where a very low force stylus is dragged across a surface. The DektakXT offers Windows based data acquisition, data analysis, and equipment control. The force of the tip on the surface is adjustable from .03 mg to 15 mg, allowing for the measuring of hard and soft surfaces. A stress measurement option is also included with this tool. The profilometer can measure to a depth of over 1 mm, allowing for direct measurement of ~~MEMs~~ type structures. Lateral resolution is tip-shape dependent and vertical resolution is 1A (when using the 6.55 um range). The lateral resolution is limited by the tip shape. A video camera with variable magnification allows for manual placement of the stylus using the manual X, Y, Theta stage. Software analysis can determine roughness, average step height, etc.		The DektakXT is a profilometer for measuring step heights or trench depths on a surface. This is a surface contact measurement technique where a very low force stylus is dragged across a surface. The DektakXT offers Windows based data acquisition, data analysis, and equipment control. The force of the tip on the surface is adjustable from .03 mg to 15 mg, allowing for the measuring of hard and soft surfaces. A stress measurement option is also included with this tool. The profilometer can measure to a depth of over 1 mm, allowing for direct measurement of MEMS type structures. Lateral resolution is tip-shape dependent and vertical resolution is 1A (when using the 6.55 um range). The lateral resolution is limited by the tip shape. A video camera with variable magnification allows for manual placement of the stylus using the manual X, Y, Theta stage. Software analysis can determine roughness, average step height, etc.

	=Detailed Specifications=		=Detailed Specifications=

Hopkins a: /* Tool References */

2023-02-01T15:06:26Z

Tool References

← Older revision		Revision as of 15:06, 1 February 2023
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	=Tool References=		=Tool References=

			*[https://wiki.nanotech.ucsb.edu/w/images/6/6c/DektakXT_Operating_Procedure.pdf DektakXT SOP]
	*DektakXT SOP
	*[https://www.youtube.com/watch?v=HINRiQ7XUwE DektakXT Pre-Training Video]		*[https://www.youtube.com/watch?v=HINRiQ7XUwE DektakXT Pre-Training Video]

Hopkins a: Hopkins a moved page Step Profilometer (Dektak 6M) to Step Profilometer (DektakXT)

2023-01-25T23:34:43Z

Hopkins a moved page Step Profilometer (Dektak 6M) to Step Profilometer (DektakXT)

← Older revision	Revision as of 23:34, 25 January 2023
(No difference)

Hopkins a at 23:33, 25 January 2023

2023-01-25T23:33:57Z

← Older revision		Revision as of 23:33, 25 January 2023
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	*DektakXT SOP		*DektakXT SOP
	*DektakXT Pre-Training Video		*[https://www.youtube.com/watch?v=HINRiQ7XUwE DektakXT Pre-Training Video]

Hopkins a at 23:31, 25 January 2023

2023-01-25T23:31:54Z

← Older revision		Revision as of 23:31, 25 January 2023
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	*Software data leveling and other analysis including stress and roughness		*Software data leveling and other analysis including stress and roughness
	*Full GUI-based Windows control and data storage and exporting capability		*Full GUI-based Windows control and data storage and exporting capability

			=Tool References=

			*DektakXT SOP
			*DektakXT Pre-Training Video