Stepper 3 (ASML DUV) - Revision history

John d at 07:34, 10 April 2026

2026-04-10T07:34:26Z

← Older revision		Revision as of 07:34, 10 April 2026
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	{{~~tool~~\|{{PAGENAME}}		{{tool2\|{{PAGENAME}}
	\|picture=ASML.jpg		\|picture=ASML.jpg
	\|type = Lithography		\|type = Lithography

John d: added millerski as backup super

2026-04-10T07:33:58Z

added millerski as backup super

← Older revision		Revision as of 07:33, 10 April 2026
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	\|type = Lithography		\|type = Lithography
	\|super= Demis D. John		\|super= Demis D. John
			\|super2= Bill Millerski
	\|location=Bay 7		\|location=Bay 7
	\|description = Deep-UV Stepper Photolithography		\|description = Deep-UV Stepper Photolithography

John d: /* Operating Procedures */ link to calibrate lithoj rpocess

2026-02-27T23:01:58Z

Operating Procedures: link to calibrate lithoj rpocess

← Older revision		Revision as of 23:01, 27 February 2026
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	=== [https://docs.google.com/document/d/1T6Bc7A6YjxFyxMR9n35CCsmtJVRQen3m371Vd_Q9dlY/edit?usp=drive_link <u>Troubleshooting & Error Recovery</u>] ===		=== [https://docs.google.com/document/d/1T6Bc7A6YjxFyxMR9n35CCsmtJVRQen3m371Vd_Q9dlY/edit?usp=drive_link <u>Troubleshooting & Error Recovery</u>] ===
	* common issues and fixes (access-restricted)		* common issues and fixes (access-restricted)

			=== [[Stepper 3 (ASML DUV)#Calibrating your Lithography Process\|<u>Calibrate Your Litho Process</u>]] ===
			See this section for the basics on how to do this: [[Stepper 3 (ASML DUV)#Calibrating your Lithography Process\|Stepper 3 (ASML DUV) > Recipes > Calibrating your Lithography Process]]

	=== [https://docs.google.com/document/d/17jPek8P_SF1qRADS09ApoDgUiB_v0NFJsIVpkL-Kdag/edit#heading=h.fmorc9eu8hfz <u>Stepper #3 Training/Reference Videos</u>] ===		=== [https://docs.google.com/document/d/17jPek8P_SF1qRADS09ApoDgUiB_v0NFJsIVpkL-Kdag/edit#heading=h.fmorc9eu8hfz <u>Stepper #3 Training/Reference Videos</u>] ===

John d: /* Operating Procedures */ moved calibrate litho process to recipes

2026-02-27T23:00:16Z

Operating Procedures: moved calibrate litho process to recipes

← Older revision		Revision as of 23:00, 27 February 2026
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	#"Shadow" someone in your group who uses the machine, <u>until you are completely comfortable</u> with (1) wafer cleaning (critical), (2) reticle load/unload and (3) running a pre-made job.		#"Shadow" someone in your group who uses the machine, <u>until you are completely comfortable</u> with (1) wafer cleaning (critical), (2) reticle load/unload and (3) running a pre-made job.
	#When you are ready, request a hands-on check-off on SignupMonkey by clicking this button:{{ToolTrainingButton\|toolid=51}}		#When you are ready, request a hands-on check-off on SignupMonkey by clicking this button:{{ToolTrainingButton\|toolid=51}}

⚫	=== Calibrating your Lithography Process ===
	To calibrate your own Litho processes, you will need to:
⚫	* Find a starter litho close to what you need here: [[Stepper Recipes#Stepper 3 .28ASML DUV.29\|Recipes > Lithography > Stepper Recipes > Stepper #3]]
	* [https://docs.google.com/document/d/1_QIsYtew1uDlbUJCniApLz9_TYG2izwTxNpmoCbSuLI/edit?usp=drive_link Run your own Focus Exposure Matrix with] [https://docs.google.com/document/d/1_QIsYtew1uDlbUJCniApLz9_TYG2izwTxNpmoCbSuLI/edit?usp=drive_link this procedure] (private) - shows how to do an FEM on the ASML software
	* [[Lithography Calibration - Analyzing a Focus-Exposure Matrix]] - how to analyze an FEM & choose the best process

	==Design Tools==		==Design Tools==
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	Collaboration with photomask vendor [https://www.photronics.com/ Photronics Inc.]		Collaboration with photomask vendor [https://www.photronics.com/ Photronics Inc.]
	\|-		\|-
	!style="text-align:center;"\|[[File:ASML OPC CAD.png\|191x191px]]		! style="text-align:center;" \|[[File:ASML OPC CAD.png\|191x191px]]
	!style="text-align:center;"\|[[File:ASML SEM DBR without OPC.png\|162x162px]]		! style="text-align:center;" \|[[File:ASML SEM DBR without OPC.png\|162x162px]]
	!style="text-align:center;"\|[[File:ASML SEM DBR With OPC .png\|166x166px]]		! style="text-align:center;" \|[[File:ASML SEM DBR With OPC .png\|166x166px]]
	\|-		\|-
	\|OPC applies serifs to your patterns.		\|OPC applies serifs to your patterns.
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	Fabricated by [https://scholar.google.com/citations?user=9xqXl7sAAAAJ&hl=en Skyler Palatnik], [https://web.physics.ucsb.edu/~maxmb/ Prof. Max Millar-Blanchaer's group] in collaboration with photomask vendor [https://www.photronics.com/ Photronics Inc.]		Fabricated by [https://scholar.google.com/citations?user=9xqXl7sAAAAJ&hl=en Skyler Palatnik], [https://web.physics.ucsb.edu/~maxmb/ Prof. Max Millar-Blanchaer's group] in collaboration with photomask vendor [https://www.photronics.com/ Photronics Inc.]
	\|-		\|-
	\|style="text-align:center;"\|[[File:ASML_OPC_-_Skyler_Palatnik_060224_PR_vtxHvP_15mJOPC_3.png\|alt=SEM image of Meta-optic center\|300x300px]]		\| style="text-align:center;" \|[[File:ASML_OPC_-_Skyler_Palatnik_060224_PR_vtxHvP_15mJOPC_3.png\|alt=SEM image of Meta-optic center\|300x300px]]
	\|style="text-align:center;"\|[[File:ASML_OPC_-_Skyler_Palatnik_060224_PR_vtxHvP_23mJ_NO_OPC_1.png\|alt=SEM of No-OPC meta-optic center\|300x300px]]		\| style="text-align:center;" \|[[File:ASML_OPC_-_Skyler_Palatnik_060224_PR_vtxHvP_23mJ_NO_OPC_1.png\|alt=SEM of No-OPC meta-optic center\|300x300px]]
	\|-		\|-
	\|'''''With OPC''' applied to mask pattern. Squares and circles with small gaps+small posts are resolved in one exposure.''		\|'''''With OPC''' applied to mask pattern. Squares and circles with small gaps+small posts are resolved in one exposure.''
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	* '''[[Stepper Recipes#Stepper 3 .28ASML DUV.29\|Recipes > Lithography > Stepper Recipes > Stepper #3]]''' - starting processes for various DUV photoresists, including Dose/Focus values.		* '''[[Stepper Recipes#Stepper 3 .28ASML DUV.29\|Recipes > Lithography > Stepper Recipes > Stepper #3]]''' - starting processes for various DUV photoresists, including Dose/Focus values.

		⚫	=== Calibrating your Lithography Process ===
	To calibrate your own Litho processes, you will need to:		To calibrate your own Litho processes, you will need to:
		⚫	* Find a starter litho close to what you need here: [[Stepper Recipes#Stepper 3 .28ASML DUV.29\|Recipes > Lithography > Stepper Recipes > Stepper #3]]

	* Run your own Focus Exposure Matrix - [https://docs.google.com/document/d/1_QIsYtew1uDlbUJCniApLz9_TYG2izwTxNpmoCbSuLI/edit?usp=drive_link this procedure] shows how to do ~~this~~ on the ASML software		* [https://docs.google.com/document/d/1_QIsYtew1uDlbUJCniApLz9_TYG2izwTxNpmoCbSuLI/edit?usp=drive_link Run your own Focus Exposure Matrix with] [https://docs.google.com/document/d/1_QIsYtew1uDlbUJCniApLz9_TYG2izwTxNpmoCbSuLI/edit?usp=drive_link this procedure] (private) - shows how to do an FEM on the ASML software
	* [[Lithography Calibration - Analyzing a Focus-Exposure Matrix]] - how to analyze an FEM		* [[Lithography Calibration - Analyzing a Focus-Exposure Matrix]] - how to analyze an FEM & choose the best process

	Litho. recipes for all our photolith. tools can be found on the [[Lithography Recipes#Photolithography Recipes\|Photolithography Recipes]] page.

	==Process Control Data==		==Process Control Data==

John d at 09:05, 6 December 2025

2025-12-06T09:05:17Z

← Older revision		Revision as of 09:05, 6 December 2025
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	\|ProcessControlURL = Stepper_3_(ASML_DUV)#Process_Control_Data		\|ProcessControlURL = Stepper_3_(ASML_DUV)#Process_Control_Data
	\|ProceduresURL =		\|ProceduresURL =
	\|TrainingURL = ~~None~~		\|TrainingURL = Stepper_3_(ASML_DUV)#Training_Procedure
	}}		}}

John d at 09:04, 6 December 2025

2025-12-06T09:04:57Z

← Older revision		Revision as of 09:04, 6 December 2025
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	\|ProcessControlURL = Stepper_3_(ASML_DUV)#Process_Control_Data		\|ProcessControlURL = Stepper_3_(ASML_DUV)#Process_Control_Data
	\|ProceduresURL =		\|ProceduresURL =
	\|TrainingURL = ~~Stepper_3_(ASML_DUV)#Training_Procedure~~		\|TrainingURL = None
	}}		}}

John d: /* Training Procedure */ added Request Training button

2025-12-06T04:11:58Z

Training Procedure: added Request Training button

← Older revision		Revision as of 04:11, 6 December 2025
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	#Study the [https://docs.google.com/document/d/17jPek8P_SF1qRADS09ApoDgUiB_v0NFJsIVpkL-Kdag/edit#heading=h.fmorc9eu8hfz training videos].		#Study the [https://docs.google.com/document/d/17jPek8P_SF1qRADS09ApoDgUiB_v0NFJsIVpkL-Kdag/edit#heading=h.fmorc9eu8hfz training videos].
	##If you are a technician and will never program jobs, only Part 1 is necessary.		##If you are a technician and will never program jobs, only Part 1 is necessary.
	#"Shadow" someone in your group who uses the machine, <u>until you are completely comfortable</u> with (1) wafer cleaning (critical), (2) reticle load/unload and (3) running a pre-made job. ~~When you are ready, do step 4:~~		#"Shadow" someone in your group who uses the machine, <u>until you are completely comfortable</u> with (1) wafer cleaning (critical), (2) reticle load/unload and (3) running a pre-made job.
			#When you are ready, request a hands-on check-off on SignupMonkey by clicking this button:{{ToolTrainingButton\|toolid=51}}
	#Contact [[Demis D. John\|the supervisor]] for an short hands-on check-off, after which you'll get [http://signupmonkey.ece.ucsb.edu SignupMonkey] access.

	=== Calibrating your Lithography Process ===		=== Calibrating your Lithography Process ===

John d: fix ToolAcitons link to Trianing procedure

2025-12-06T04:09:18Z

fix ToolAcitons link to Trianing procedure

← Older revision		Revision as of 04:09, 6 December 2025
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	\|ProcessControlURL = Stepper_3_(ASML_DUV)#Process_Control_Data		\|ProcessControlURL = Stepper_3_(ASML_DUV)#Process_Control_Data
	\|ProceduresURL =		\|ProceduresURL =
	\|TrainingURL = Stepper_3_(ASML_DUV)#~~Stepper_%233_Training/Reference_Videos~~		\|TrainingURL = Stepper_3_(ASML_DUV)#Training_Procedure
	}}		}}

John d at 04:08, 6 December 2025

2025-12-06T04:08:08Z

← Older revision		Revision as of 04:08, 6 December 2025
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	{{ToolActions		{{ToolActions
	\|toolid = 51		\|toolid = 51
	\|ProcessControlURL =		\|ProcessControlURL = Stepper_3_(ASML_DUV)#Process_Control_Data
	\|ProceduresURL =		\|ProceduresURL =
	\|TrainingURL = Stepper_3_(ASML_DUV)#Stepper_%233_Training/Reference_Videos		\|TrainingURL = Stepper_3_(ASML_DUV)#Stepper_%233_Training/Reference_Videos

John d: added ToolActions

2025-12-06T04:06:45Z

added ToolActions

← Older revision		Revision as of 04:06, 6 December 2025
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	\|toolid=51		\|toolid=51
	}}		}}
			{{ToolActions
			\|toolid = 51
			\|ProcessControlURL =
			\|ProceduresURL =
			\|TrainingURL = Stepper_3_(ASML_DUV)#Stepper_%233_Training/Reference_Videos
			}}

	==About==		==About==