https://wiki.nanofab.ucsb.edu/w/index.php?action=history&feed=atom&title=Surfscan_SOP_for_4inch_wafersSurfscan SOP for 4inch wafers - Revision history2026-10-16T03:43:16ZRevision history for this page on the wikiMediaWiki 1.43.9https://wiki.nanofab.ucsb.edu/w/index.php?title=Surfscan_SOP_for_4inch_wafers&diff=162608&oldid=prevBiljana: Surfscan for 4 inch wafers2024-11-20T22:54:23Z<p>Surfscan for 4 inch wafers</p>
<p><b>New page</b></p><div>==== Important Guidelines ====<br />
● '''Wafer Thickness: Do not use wafers thicker than 1 mm.'''<br />
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● '''Log all scans and issues in the logbook.'''<br />
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● '''Always log off after completing your session.'''<br />
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=== Procedure ===<br />
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==== 1. Login Instructions ====<br />
● '''Use the password: fab (new password)'''<br />
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● '''If the keyboard isn’t working, use the virtual keyboard on the monitor.'''<br />
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● '''Double-click the SCAN icon.'''<br />
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==== 3. Loading a Recipe ====<br />
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# '''Click Recipe > Load.'''<br />
# '''Select a standard recipe for 4-inch wafers:'''<br />
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○ '''UCSB GAIN4 0.16-1.6 (for 0.16-1.6 µm).'''<br />
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○ '''UCSB GAIN2 1.6-28 (for 1.6-28 µm).'''<br />
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# '''Click OK. The recipe name will appear at the top.'''<br />
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==== 4. Modify Recipe ====<br />
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# '''Select Recipe > Save as, and rename it (e.g., your name or company name).'''<br />
# '''Go to Recipe/View/Modify to adjust parameters:'''<br />
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○ '''Wafer diameter, edge exclusion, gain, threshold, indexer, etc.'''<br />
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# '''Under Bin Split, click Default Bin to apply changes.'''<br />
# '''Save the modifications.'''<br />
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==== 5. Load Wafers into the Cassette ====<br />
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# '''Use the white cassette for 4-inch wafers (right indexer).'''<br />
# '''Load wafers face up, with the major flat away from you.'''<br />
# '''Place the cassette properly in the right indexer.'''<br />
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==== 6. Start Scanning ====<br />
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# '''On the monitor, select CASS (Cassette) and wait for the tool to detect wafers.'''<br />
# '''Choose one of the following:'''<br />
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○ '''Single Wafer: Select the wafer and click START (upper bar).'''<br />
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○ '''Multiple Wafers: Select AUTO, then click START.'''<br />
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# '''Record the scan results.'''<br />
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==== 7. Completion ====<br />
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# '''Once scanning is complete:'''<br />
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○ '''Press ENTER on the small laptop to save the scan as a photo:'''<br />
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■ '''Location: Desktop/Local Disk(C)/Users/Public/Public Documentation.'''<br />
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○ '''Photos can be accessed/downloaded via the Nanofab server.'''<br />
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○ '''Note: Full data-saving functionality will be available in January 2025.'''<br />
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# '''Click HOME, then select RECIPE/Exit, and log off.'''<br />
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==== 8. Log Book ====<br />
● '''Record details of your scan and any issues in the Log Book.'''</div>Biljana