https://wiki.nanofab.ucsb.edu/w/index.php?action=history&feed=atom&title=Surfscan_SOP_for_6inch_wafersSurfscan SOP for 6inch wafers - Revision history2026-05-12T21:06:04ZRevision history for this page on the wikiMediaWiki 1.43.8https://wiki.nanofab.ucsb.edu/w/index.php?title=Surfscan_SOP_for_6inch_wafers&diff=162613&oldid=prevBiljana: Surfscan 6 inch2024-11-20T22:59:17Z<p>Surfscan 6 inch</p>
<p><b>New page</b></p><div>==== Important Guidelines ====<br />
● '''Wafer Thickness: Do not use wafers thicker than 1 mm.'''<br />
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● '''Log all scans and issues in the logbook.'''<br />
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● '''Always log off after completing your session.'''<br />
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=== Procedure ===<br />
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==== 1. Login Instructions ====<br />
· '''Access Code: fab (new password from 2025).'''<br />
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● '''If the keyboard isn’t functional, use the virtual keyboard on the monitor.'''<br />
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● '''Double-click the SCAN icon to launch the software.'''<br />
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==== 2. Loading a Recipe ====<br />
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# '''Navigate to Recipe > Load (upper-left corner).'''<br />
# '''Select one of the standard recipes for 6-inch wafers:'''<br />
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○ '''STD_UCSB_6inch_G4: For thicknesses 0.16–1.6 µm.'''<br />
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○ '''STD_UCSB_6inch_G2: For thicknesses 1.6–28 µm.'''<br />
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# '''Click OK. The recipe name will appear at the top of the screen.'''<br />
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==== 3. Customizing a Recipe ====<br />
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# '''Select Recipe > Save as and name the recipe (e.g., your name or company name).'''<br />
# '''Go to Recipe > View/Modify to adjust parameters:'''<br />
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○ '''Wafer diameter'''<br />
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○ '''Edge exclusion'''<br />
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○ '''Gain'''<br />
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○ '''Threshold'''<br />
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# '''Under Bin Split, click Default Bin to apply changes.'''<br />
# '''Save the updated recipe.'''<br />
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==== 4. Load Wafers into the Cassette ====<br />
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# '''Use the white cassette for 6-inch wafers.'''<br />
# '''Load wafers with the face up; the major flat can face either direction.'''<br />
# '''Secure the cassette in the right indexer (specific for 6-inch wafers).'''<br />
# '''On the monitor, select CASS (Cassette) and wait for the tool to detect the wafers.'''<br />
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==== 5. Start Scanning ====<br />
'''To Scan a Single Wafer:'''<br />
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● '''Select the desired wafer from the monitor.'''<br />
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● '''Click START (upper menu bar).'''<br />
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● '''Wait for the scan to finish and record the results.'''<br />
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'''To Scan Multiple Wafers:'''<br />
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● '''Select AUTO mode.'''<br />
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● '''Click START to begin scanning all wafers in the cassette.'''<br />
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==== 6. Completion ====<br />
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# '''Once the scan is complete:'''<br />
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○ '''Press ENTER on the small laptop to save the scan as a photo.'''<br />
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○ '''Location: Desktop/Local Disk(C)/Users/Public/Public Documentation.'''<br />
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○ '''Photos can be accessed/downloaded via the Nanofab server.'''<br />
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○ '''Note: Full data-saving functionality will be available in January 2025.'''<br />
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# '''Click HOME, select RECIPE/Exit, and log off.'''<br />
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==== 7. Log Book ====<br />
● '''Ensure the cassette is properly seated in the right indexer.'''<br />
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● '''Always log off after completing your session.'''</div>Biljana