https://wiki.nanofab.ucsb.edu/w/index.php?action=history&feed=atom&title=Surfscan_SOP_for_8inch_wafersSurfscan SOP for 8inch wafers - Revision history2026-07-19T02:34:08ZRevision history for this page on the wikiMediaWiki 1.43.9https://wiki.nanofab.ucsb.edu/w/index.php?title=Surfscan_SOP_for_8inch_wafers&diff=162614&oldid=prevBiljana: Surfscan 8 inch2024-11-20T23:00:11Z<p>Surfscan 8 inch</p>
<p><b>New page</b></p><div>==== Important Guidelines ====<br />
● '''Wafer Thickness: Do not use wafers thicker than 1 mm.'''<br />
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● '''Always log off after completing your session.'''<br />
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● '''Log all scans and issues in the logbook after use.'''<br />
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=== Procedure ===<br />
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==== 1. Login Instructions ====<br />
● '''Access Code: fab (new password from 2025].'''<br />
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● '''If the keyboard isn’t functional, use the virtual keyboard on the monitor.'''<br />
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● '''Double-click the SCAN icon to launch the software.'''<br />
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==== 2. Loading a Recipe ====<br />
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# '''Navigate to Recipe > Load (upper-left corner).'''<br />
# '''Select one of the standard recipes for 8-inch wafers:'''<br />
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○ '''STD_UCSB_8INCH_G2 (1.6–28 µm).'''<br />
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○ '''STD_UCSB_8INCH_G4 (0.16–1.6 µm).'''<br />
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# '''Do not make any changes in the recipe.'''<br />
# '''Click OK. The recipe name will appear at the top of the screen.'''<br />
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==== 3. Customizing a Recipe ====<br />
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# '''Select Recipe > Save as and name the recipe (e.g., your name or company name).'''<br />
# '''Select Recipe > View/Modify to adjust the following parameters:'''<br />
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○ '''Wafer diameter'''<br />
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○ '''Edge exclusion'''<br />
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○ '''Gain'''<br />
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○ '''Threshold'''<br />
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○ '''Indexer'''<br />
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# '''Under Bin Split, click Default Bin to apply changes.'''<br />
# '''Save the updated recipe.'''<br />
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==== 4. Loading Wafers ====<br />
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# '''Use the black cassette for 8-inch wafers.'''<br />
# '''Load the wafers with the face up, and the major flat away from you.'''<br />
# '''Place the cassette in the left indexer (specific for 8-inch wafers).'''<br />
# '''Ensure the cassette is seated properly.'''<br />
# '''On the monitor, select CASS (Cassette) and wait for the tool to detect the wafers.'''<br />
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==== 5. Scanning Wafers ====<br />
'''To Scan a Single Wafer:'''<br />
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● '''Select the desired wafer from the monitor.'''<br />
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● '''Click START (upper menu bar).'''<br />
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● '''Wait for the scan to finish and record the results.'''<br />
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'''To Scan Multiple Wafers:'''<br />
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● '''Select AUTO mode.'''<br />
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● '''Click START to begin scanning all wafers in the cassette.'''<br />
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==== 6. After Scanning ====<br />
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# '''Once the scan is complete:'''<br />
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○ '''Press ENTER on the small laptop to save the scan as a photo.'''<br />
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○ '''Location: Desktop/Local Disk(C)/Users/Public/Public Documentation.'''<br />
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○ '''Photos can be accessed/downloaded via the Nanofab server.'''<br />
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○ '''Note: Full data-saving functionality will be available in January 2025.'''<br />
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# '''Click HOME, select RECIPE/Exit, and log off.'''<br />
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==== Reminders ====<br />
● '''Always ensure the cassette is seated properly in the left indexer.'''<br />
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● '''Log off after completing your session.'''</div>Biljana