https://wiki.nanofab.ucsb.edu/w/index.php?action=history&feed=atom&title=Surfscan_SOP_for_small_substratesSurfscan SOP for small substrates - Revision history2026-04-04T16:53:51ZRevision history for this page on the wikiMediaWiki 1.43.6https://wiki.nanofab.ucsb.edu/w/index.php?title=Surfscan_SOP_for_small_substrates&diff=162610&oldid=prevBiljana: Surfscan for small samples2024-11-20T22:57:32Z<p>Surfscan for small samples</p>
<p><b>New page</b></p><div>==== IMPORTANT: Mount Substrates on a 4” Carrier Wafer ====<br />
● Use a '''drop of water''' to mount the substrate onto the 4” wafer.<br />
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● Ensure total thickness ('''carrier + substrate''') is ~1 mm.<br />
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=== Steps ===<br />
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==== 1. Log In ====<br />
● '''Access Code:''' fab [new password from 2025].<br />
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● If the keyboard isn’t functional, use the '''virtual keyboard''' on the monitor.<br />
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==== 2. Launch the Software ====<br />
● Double-click the '''SCAN''' icon.<br />
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==== 3. Load a Recipe ====<br />
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# Select '''Recipe''' > '''Load''' (top-left corner).<br />
# Choose:<br />
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○ '''UCSB GAIN4 0.16-1.6''' (for 0.16-1.6 µm).<br />
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○ '''UCSB GAIN2 1.6-28''' (for 1.6-28 µm).<br />
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# Press '''OK''' (recipe name will display at the top).<br />
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==== 4. Modify Recipe ====<br />
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# Select '''Recipe''' > '''Save as''', and rename the recipe (e.g., your name/company name).<br />
# Go to '''Recipe/View/Modify''' to adjust:<br />
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○ '''Wafer diameter''' for 2”/3” wafers.<br />
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○ '''Edge exclusion''' (exclude areas outside the substrate).<br />
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○ Other parameters: '''gain, threshold, indexer''', etc.<br />
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# Under '''Bin Split''', click '''Default Bin''' to apply updates.<br />
# Save the changes.<br />
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==== 5. Mount the Substrate ====<br />
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# Apply a '''small drop of water''' to the center of a 4” carrier wafer.<br />
# Position the substrate over the water drop, center it, and ensure it is secure and immobile.<br />
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==== 6. Load the Wafer ====<br />
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# Place the '''4” carrier wafer with the mounted substrate''' into the '''right indexer cassette''' (substrate facing up).<br />
# Verify the cassette is properly seated.<br />
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==== 7. Scanning ====<br />
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# On the monitor, select '''CASS (Cassette)''' and wait for the tool to detect wafers.<br />
# '''To scan:'''<br />
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○ '''Single Wafer:''' Select the wafer, click '''START''' (upper bar), and record results.<br />
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○ '''Multiple Wafers:''' Select '''AUTO''', then click '''START'''.<br />
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==== 8. Completion ====<br />
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# Once the scan is finished:<br />
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○ Press '''ENTER''' on the small laptop to save data as a '''photo''':<br />
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■ Location: Desktop/Local Disk(C)/Users/Public/Public Documentation.<br />
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○ Photos can be accessed/downloaded via the '''Nanofab server'''.<br />
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○ '''Note:''' A feature to save full scan data will be available in '''January 2025'''.<br />
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# Click '''HOME''', then select '''RECIPE/Exit''', and log off.<br />
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==== 9. Log Book ====<br />
● Record scan details and note any issues in the '''Log Book'''.<br />
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'''Reminder:''' Always log off after using the tool!</div>Biljana