Suss MA-6 Backside Alignment QuickStart - Revision history

John d: how to expose more wafers

2018-11-28T21:52:58Z

how to expose more wafers

← Older revision		Revision as of 21:52, 28 November 2018
Line 9:		Line 9:
	## Sample holder should be inserted during Grab, or it will error.		## Sample holder should be inserted during Grab, or it will error.
	## Mask plate image will be frozen on the computer. You will align to this image using a digital overlay of the live BSA microscope.		## Mask plate image will be frozen on the computer. You will align to this image using a digital overlay of the live BSA microscope.
	# [Load] to insert sample, with sample alignment marks face down.		# [Load] to insert sample, with sample alignment marks face down. [Enter] to turn on vacuum and/or perform WEC.
	## Photoresist should be on the top side, which will be exposed through the mask plate.		## Photoresist should be on the top side, which will be exposed through the mask plate.
	## Set up your Contact parameters (contact type, exposure time etc.) beforehand if needed.		## Set up your Contact parameters (contact type, exposure time etc.) beforehand if needed.
	# Align using only sample movement micrometer knobs.		# Align using only sample movement micrometer knobs.
	## Knobs: "BSA/IR" illumination and "Bottom Substrate" are light & focus, respectivitly.		## Knobs: "BSA/IR" illumination and "Bottom Substrate" are light & focus, respectivitly.
	# [Expose] to shoot your exposure program.		# [Expose] to shoot your exposure program.
			# To expose more wafers, unload exposed wafer, and push empty wafer slide back in. Press [Grab Image] to store image again, and proceed with [Load] command for next wafer.

John d: added illumination knob setting

2018-11-28T21:42:07Z

added illumination knob setting

← Older revision		Revision as of 21:42, 28 November 2018
Line 2:		Line 2:
	# Load mask plate into tool. No sample inserted yet. Empty Sample holder with cutouts for back-side microscope should be fully inserted.		# Load mask plate into tool. No sample inserted yet. Empty Sample holder with cutouts for back-side microscope should be fully inserted.
	# Enable [BSA MICROSCOPE] soft button, which sets the arrow keys to move the back-side aligning microscope.		# Enable [BSA MICROSCOPE] soft button, which sets the arrow keys to move the back-side aligning microscope.
	## Knobs: ~~"Top~~ ~~Substrate~~" ~~is focus on Mask,~~ "~~BSA~~ ~~Mag" is high/low,~~ "BSA/IR" ~~is illumination~~		## Knobs: Set "Illumination" to "BSA/IR".
			## "Top Substrate" is focus on Mask, "BSA Mag" is high/low mag., "BSA/IR" is illumination strength
	# Use Arrow Soft Buttons: Drive BS uScope around until can see alignment marks on your mask plate.		# Use Arrow Soft Buttons: Drive BS uScope around until can see alignment marks on your mask plate.
	## "Top/Bottom" should be enabled to focus on "top" substrate, which is the mask plate.		## "Top/Bottom" should be enabled to focus on "top" substrate, which is the mask plate.

John d: explain "BSA"

2018-08-30T14:45:25Z

explain "BSA"

← Older revision		Revision as of 14:45, 30 August 2018
Line 1:		Line 1:
	''Quick Instructions – for users that are already familiar with the tool – for aligning your mask plate to the back side of a wafer.''		''Quick Instructions – for users that are already familiar with the tool – for aligning your mask plate to the back side of a wafer. "BSA" stands for "Back Side Alignment".''
	# Load mask plate into tool. No sample inserted yet. Empty Sample holder with cutouts for back-side microscope should be fully inserted.		# Load mask plate into tool. No sample inserted yet. Empty Sample holder with cutouts for back-side microscope should be fully inserted.
	# Enable [BSA MICROSCOPE] soft button, which sets the arrow keys to move the back-side aligning microscope.		# Enable [BSA MICROSCOPE] soft button, which sets the arrow keys to move the back-side aligning microscope.

John d: Demis' backside alignmetn quick-start instructions

2018-07-03T22:58:58Z

Demis' backside alignmetn quick-start instructions

New page

''Quick Instructions – for users that are already familiar with the tool – for aligning your mask plate to the back side of a wafer.''
# Load mask plate into tool. No sample inserted yet. Empty Sample holder with cutouts for back-side microscope should be fully inserted.
# Enable [BSA MICROSCOPE] soft button, which sets the arrow keys to move the back-side aligning microscope.
## Knobs: "Top Substrate" is focus on Mask, "BSA Mag" is high/low, "BSA/IR" is illumination
# Use Arrow Soft Buttons: Drive BS uScope around until can see alignment marks on your mask plate.
## "Top/Bottom" should be enabled to focus on "top" substrate, which is the mask plate.
# Get it in good focus in High mag, then press the [Grab Image] soft button.
## Sample holder should be inserted during Grab, or it will error.
## Mask plate image will be frozen on the computer. You will align to this image using a digital overlay of the live BSA microscope.
# [Load] to insert sample, with sample alignment marks face down.
## Photoresist should be on the top side, which will be exposed through the mask plate.
## Set up your Contact parameters (contact type, exposure time etc.) beforehand if needed.
# Align using only sample movement micrometer knobs.
## Knobs: "BSA/IR" illumination and "Bottom Substrate" are light & focus, respectivitly.
# [Expose] to shoot your exposure program.