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John d: added Blumenthal: 250C Process for < 2dB/m Ultra-Low Loss Silicon Nitride Integrated Photonic Waveguides

2022-08-18T16:36:14Z

added Blumenthal: 250C Process for < 2dB/m Ultra-Low Loss Silicon Nitride Integrated Photonic Waveguides

← Older revision		Revision as of 16:36, 18 August 2022
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			== [https://opg.optica.org/abstract.cfm?uri=CLEO_SI-2022-SF3O.1 250C Process for < 2dB/m Ultra-Low Loss Silicon Nitride Integrated Photonic Waveguides] ==
			''Debapam Bose, Jiawei Wang, and Daniel J. Blumenthal''

			[https://doi.org/10.1364/CLEO_SI.2022.SF3O.1 Conference on Lasers and Electro-Optics (CLEO), Technical Digest Series (Optica Publishing Group, 2022), paper SF3O.1]

	== [https://doi.org/10.1109/TED.2021.3057598 0.5T0.5R—An Ultracompact RRAM Cell Uniquely Enabled by van der Waals Heterostructures] ==		== [https://doi.org/10.1109/TED.2021.3057598 0.5T0.5R—An Ultracompact RRAM Cell Uniquely Enabled by van der Waals Heterostructures] ==

Thibeault at 00:21, 4 November 2021

2021-11-04T00:21:32Z

← Older revision		Revision as of 00:21, 4 November 2021
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	[https://doi.org/10.1063/5.0054005 Appl. Phys. Lett., '''118''', 261104, 2021]		[https://doi.org/10.1063/5.0054005 Appl. Phys. Lett., '''118''', 261104, 2021]

			== [https://doi.org/10.1021/acsphotonics.0c00766 Room-Temperature Continuous-Wave Electrically Driven Semipolar (202̅1) Blue Laser Diodes Heteroepitaxially Grown on a Sapphire Substrate] ==
			''Haojun Zhang, Hongjian Li ... James Speck, Shuji Nakamura, Steve DenBaars''

			[https://doi.org/10.1021/acsphotonics.0c00766 ACS Photonics, '''7''' (7), 1662–1666, 2020]

	== [https://doi.org/10.1116/6.0001030 Highly Selective and Vertical Etch of Silicon Dioxide using Ruthenium Films as an Etch Mask] ==		== [https://doi.org/10.1116/6.0001030 Highly Selective and Vertical Etch of Silicon Dioxide using Ruthenium Films as an Etch Mask] ==

Thibeault at 00:09, 4 November 2021

2021-11-04T00:09:23Z

← Older revision		Revision as of 00:09, 4 November 2021
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	[https://doi.org/10.35848/1882-0786/ac1230 Appl. Phys. Express A, '''14''', 086502, 2021]		[https://doi.org/10.35848/1882-0786/ac1230 Appl. Phys. Express A, '''14''', 086502, 2021]

			== [https://doi.org/10.1063/5.0054005 Demonstration of high efficiency cascaded blue and green micro-light-emitting diodes with independent junction control] ==
			''Panpan Li, Hongjian Li ... James Speck, Shuji Nakamura, Steve DenBaars''

			[https://doi.org/10.1063/5.0054005 Appl. Phys. Lett., '''118''', 261104, 2021]

	== [https://doi.org/10.1116/6.0001030 Highly Selective and Vertical Etch of Silicon Dioxide using Ruthenium Films as an Etch Mask] ==		== [https://doi.org/10.1116/6.0001030 Highly Selective and Vertical Etch of Silicon Dioxide using Ruthenium Films as an Etch Mask] ==

Thibeault at 00:01, 4 November 2021

2021-11-04T00:01:04Z

← Older revision		Revision as of 00:01, 4 November 2021
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	[https://doi.org/10.1038/s41566-021-00831-w Nature Photonics, '''15''', 588–593 (2021)]		[https://doi.org/10.1038/s41566-021-00831-w Nature Photonics, '''15''', 588–593 (2021)]

			== [https://doi.org/10.35848/1882-0786/ac1230 Demonstration of high wall-plug efficiency III-nitride micro-light-emitting diodes with MOCVD-grown tunnel junction contacts using chemical treatments] ==
			''Matthew S. Wong, Matthew S. Wong ... James Speck, Shuji Nakamura, Steve DenBaars''

			[https://doi.org/10.35848/1882-0786/ac1230 Appl. Phys. Express A, '''14''', 086502, 2021]

	== [https://doi.org/10.1116/6.0001030 Highly Selective and Vertical Etch of Silicon Dioxide using Ruthenium Films as an Etch Mask] ==		== [https://doi.org/10.1116/6.0001030 Highly Selective and Vertical Etch of Silicon Dioxide using Ruthenium Films as an Etch Mask] ==

Thibeault at 00:29, 3 November 2021

2021-11-03T00:29:07Z

← Older revision		Revision as of 00:29, 3 November 2021
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			== [https://doi.org/10.1109/TED.2021.3057598 0.5T0.5R—An Ultracompact RRAM Cell Uniquely Enabled by van der Waals Heterostructures] ==
			''D. Zhang, C. -H. Yeh, W. Cao and K. Banerjee''

			[https://doi.org/10.1109/TED.2021.3057598 IEEE Transactions on Electron Devices, '''68''' (4), 2033-2040 (2021)]

	== [https://doi.org/10.1126/science.abh2076 Laser soliton microcombs heterogeneously integrated on silicon] ==		== [https://doi.org/10.1126/science.abh2076 Laser soliton microcombs heterogeneously integrated on silicon] ==

Thibeault at 00:46, 2 November 2021

2021-11-02T00:46:33Z

← Older revision		Revision as of 00:46, 2 November 2021
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	[https://doi.org/10.1126/science.abh2076 Science, '''373''' (650), 99-103 (2021)]		[https://doi.org/10.1126/science.abh2076 Science, '''373''' (650), 99-103 (2021)]

			== [https://doi.org/10.1103/PRXQuantum.2.010337 Ultrabright Entangled-Photon-Pair Generation from an AlGaAs-On-Insulator Microring Resonator] ==
			''Trevor J. Steiner, Joshua E. Castro, Lin Chang ... John E. Bowers, and Galan Moody''

			[https://doi.org/10.1103/PRXQuantum.2.010337 PRX Quantum, '''2''' 010337 (2021)]

	== [https://doi.org/10.1038/s41467-021-24926-8 Visible light photonic integrated Brillouin laser] ==		== [https://doi.org/10.1038/s41467-021-24926-8 Visible light photonic integrated Brillouin laser] ==

Thibeault at 00:34, 2 November 2021

2021-11-02T00:34:57Z

← Older revision		Revision as of 00:34, 2 November 2021
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			== [https://doi.org/10.1126/science.abh2076 Laser soliton microcombs heterogeneously integrated on silicon] ==
			''Chao Xiang, Junqiu Liu, .... Bowers, J.''

			[https://doi.org/10.1126/science.abh2076 Science, '''373''' (650), 99-103 (2021)]

	== [https://doi.org/10.1038/s41467-021-24926-8 Visible light photonic integrated Brillouin laser] ==		== [https://doi.org/10.1038/s41467-021-24926-8 Visible light photonic integrated Brillouin laser] ==

Thibeault at 22:43, 1 November 2021

2021-11-01T22:43:03Z

← Older revision		Revision as of 22:43, 1 November 2021
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	A similar process flow can be found at the [[ICP_Etching_Recipes#SiO2_Etching_.28Fluorine_ICP_Etcher.29\|Fluorine-ICP Recipe Page]].		A similar process flow can be found at the [[ICP_Etching_Recipes#SiO2_Etching_.28Fluorine_ICP_Etcher.29\|Fluorine-ICP Recipe Page]].

			== [https://doi.org/10.1103/PhysRevLett.126.113601 Stimulated Raman Adiabatic Passage in Optomechanics] ==
			''Vitaly Fedoseev, Fernando Luna, Ian Hedgepeth, Wolfgang Löffler, and Dirk Bouwmeester''

			[https://doi.org/10.1103/PhysRevLett.126.113601 Phys. Rev. Lett., '''126''', 113601, March 19th 2021]

	== [https://doi.org/10.1364/OL.394121 Deuterated silicon dioxide for heterogeneous integration of ultra-low-loss waveguides] ==		== [https://doi.org/10.1364/OL.394121 Deuterated silicon dioxide for heterogeneous integration of ultra-low-loss waveguides] ==

Thibeault at 22:23, 1 November 2021

2021-11-01T22:23:35Z

← Older revision		Revision as of 22:23, 1 November 2021
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	[https://doi.org/10.1038/s41467-021-24926-8 Nature Communications, '''12''', p.4685 (2021)]		[https://doi.org/10.1038/s41467-021-24926-8 Nature Communications, '''12''', p.4685 (2021)]

			== [https://doi.org/10.1038/s41566-021-00831-w Optically synchronized fibre links using spectrally pure chip-scale lasers] ==
			''Brodnik, G.M., Harrington, M.W., Dallyn, J.H. .... Blumenthal, D.''

			[https://doi.org/10.1038/s41566-021-00831-w Nature Photonics, '''15''', 588–593 (2021)]

	== [https://doi.org/10.1116/6.0001030 Highly Selective and Vertical Etch of Silicon Dioxide using Ruthenium Films as an Etch Mask] ==		== [https://doi.org/10.1116/6.0001030 Highly Selective and Vertical Etch of Silicon Dioxide using Ruthenium Films as an Etch Mask] ==

Thibeault at 21:27, 28 October 2021

2021-10-28T21:27:07Z

← Older revision		Revision as of 21:27, 28 October 2021
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			== [https://doi.org/10.1038/s41467-021-24926-8 Visible light photonic integrated Brillouin laser] ==
			''Chauhan, N., Isichenko, A., Liu, K. ... Blumenthal, D.''

			[https://doi.org/10.1038/s41467-021-24926-8 Nature Communications, '''12''', p.4685 (2021)]


	== [https://doi.org/10.1116/6.0001030 Highly Selective and Vertical Etch of Silicon Dioxide using Ruthenium Films as an Etch Mask] ==		== [https://doi.org/10.1116/6.0001030 Highly Selective and Vertical Etch of Silicon Dioxide using Ruthenium Films as an Etch Mask] ==