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	<title>Template talk:Nav - Revision history</title>
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	<updated>2026-04-21T02:50:14Z</updated>
	<subtitle>Revision history for this page on the wiki</subtitle>
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	<entry>
		<id>https://wiki.nanofab.ucsb.edu/w/index.php?title=Template_talk:Nav&amp;diff=659&amp;oldid=prev</id>
		<title>Zwarburg: Created page with &quot;&lt;div align=center style=&quot;font-size:110%;&quot;&gt;Tools&lt;/div&gt; * Lithography * Vacuum Deposition  * Dry Etch * Wet Processing * Thermal Processing * [[Pa…&quot;</title>
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		<updated>2012-07-10T16:20:20Z</updated>

		<summary type="html">&lt;p&gt;Created page with &amp;quot;&amp;lt;div align=center style=&amp;quot;font-size:110%;&amp;quot;&amp;gt;&lt;a href=&quot;/wiki/Tool_List&quot; title=&quot;Tool List&quot;&gt;Tools&lt;/a&gt;&amp;lt;/div&amp;gt; * &lt;a href=&quot;/wiki/Lithography&quot; class=&quot;mw-redirect&quot; title=&quot;Lithography&quot;&gt;Lithography&lt;/a&gt; * &lt;a href=&quot;/wiki/Vacuum_Deposition&quot; class=&quot;mw-redirect&quot; title=&quot;Vacuum Deposition&quot;&gt;Vacuum Deposition&lt;/a&gt;  * &lt;a href=&quot;/wiki/Dry_Etch&quot; class=&quot;mw-redirect&quot; title=&quot;Dry Etch&quot;&gt;Dry Etch&lt;/a&gt; * &lt;a href=&quot;/wiki/Wet_Processing&quot; class=&quot;mw-redirect&quot; title=&quot;Wet Processing&quot;&gt;Wet Processing&lt;/a&gt; * &lt;a href=&quot;/wiki/Thermal_Processing&quot; class=&quot;mw-redirect&quot; title=&quot;Thermal Processing&quot;&gt;Thermal Processing&lt;/a&gt; * [[Pa…&amp;quot;&lt;/p&gt;
&lt;p&gt;&lt;b&gt;New page&lt;/b&gt;&lt;/p&gt;&lt;div&gt;&amp;lt;div align=center style=&amp;quot;font-size:110%;&amp;quot;&amp;gt;[[Tool List|Tools]]&amp;lt;/div&amp;gt;&lt;br /&gt;
* [[Lithography]]&lt;br /&gt;
* [[Vacuum Deposition]] &lt;br /&gt;
* [[Dry Etch]]&lt;br /&gt;
* [[Wet Processing]]&lt;br /&gt;
* [[Thermal Processing]]&lt;br /&gt;
* [[Packaging]]&lt;br /&gt;
* [[Inspection, Test and Characterization]]&lt;br /&gt;
| style=&amp;quot;width:15%; font-size:90%; padding-right:1em;&amp;quot; |&lt;br /&gt;
&amp;lt;div align=center style=&amp;quot;font-size:110%;&amp;quot;&amp;gt;Recipes&amp;lt;/div&amp;gt;&lt;br /&gt;
* [[Lithography Recipes|Lithography]]&lt;br /&gt;
*[[Vacuum Deposition Recipes|Vacuum Deposition]]&lt;br /&gt;
*[[Dry Etching Recipes|Dry Etching]]&lt;br /&gt;
*[[Wet Etching Recipes|Wet Etching]]&lt;br /&gt;
*[[Thermal Processing Recipes|Thermal Processing]]&lt;/div&gt;</summary>
		<author><name>Zwarburg</name></author>
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