UCSB NanoFab Microscope Training - Revision history

John d: /* Bright/Dark Field Explanation */ added example DF image, explanation image, and DIC example image

2025-04-07T20:30:59Z

Bright/Dark Field Explanation: added example DF image, explanation image, and DIC example image

← Older revision		Revision as of 20:30, 7 April 2025
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	===DIC/Nomarksi Imaging===		===DIC/Nomarksi Imaging===
			[[File:Microscope DIC-Nomarski Example v1.jpg\|alt=microscope photos of Birght-Field and DIC of photoresist residues\|thumb\|247x247px\|Comparison of Bright-Field versus DIC imaging of photoresist residues left after a lift-off. ''[[Demis D. John]], 2019.'']]

	==== Uses ====		==== Uses ====
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	* Converts nanometer-level topography/height differences into color.		* Converts nanometer-level topography/height differences into color.

	[https://en.wikipedia.org/wiki/Differential_interference_contrast_microscopy Differential Interference Contrast] (aka. "DIC") converts nanometer-level height differences into color differences, operating similarly to a [https://en.wikipedia.org/w/index.php?title=Polariscope polariscope]. This allows the user to observe and identify small residues, height differences or particulates. Photoresist~~/fluorocarbon~~ residues are best observed with this method. Very small etch depths (eg. few-nm unintended etching by O2 plasma) can also be observed.		[https://en.wikipedia.org/wiki/Differential_interference_contrast_microscopy Differential Interference Contrast] (aka. "DIC") converts nanometer-level height differences into color differences, operating similarly to a [https://en.wikipedia.org/w/index.php?title=Polariscope polariscope]. This allows the user to observe and identify small/thin residues, height differences or particulates. Photoresist residues are best observed with this method. Very small etch depths (eg. few-nm layers, or unintended etching by O2 plasma) can also be observed.

	Many of our scopes have DIC imaging capabilities, although the filters that need to be inserted are arranged differently on each.		Many of our scopes have DIC imaging capabilities, although the filters that need to be inserted are arranged differently on each.
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	3) Output light (towards the observer) to be polarized, with adjustable rotation		3) Output light (towards the observer) to be polarized, with adjustable rotation

			The user should '''rotate the polarization''' to obtain the best image (eg. with highest contrast).
⚫	'''<u>NOTE</u>''': The DIC prism creates a slight double-image when inserted - make sure to pull it out to it's detent for normal imaging!

		⚫	'''<u>NOTE</u>''': The DIC prism creates a slight double-image when inserted - make sure to pull it '''out''' to it's detent for normal imaging!

	====DIC on Microscopes 3/4====		====DIC on Microscopes 3/4====
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	=== Dark Field Imaging ===		=== Dark Field Imaging ===
			[[File:Dark Field Microscopy - High Particle Count example 2025-03-25 W1 particle check Demis.jpg\|alt=microscope image showing bright dots indicating particles\|thumb\|205x205px\|Example of a High particle count wafer on Microscope #4, at 5x magnification. This confirmed [[Surface Analysis (KLA/Tencor Surfscan)\|Surfscan particle counts]].

			([[Demis D. John]], 2025).]]

	==== Uses ====		==== Uses ====
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	* Estimating particle count vs. size		* Estimating particle count vs. size

			==== Enabling Dark Field ====
	[[File:Microscope Training - BF-DF Slider.jpg\|alt=photo of slider\|none\|thumb\|The Bright Field / Dark Field slider on Microscope #3]]		[[File:Microscope Training - BF-DF Slider.jpg\|alt=photo of slider\|none\|thumb\|The Bright Field / Dark Field slider on Microscope #3]]
	Dark Field can be enabled by pulling the BF/DF slider to the "DF" position.		Dark Field can be enabled by pulling the BF/DF slider to the "DF" position. "BF" puts it back into standard "Bright Field" mode.

	==== Bright/Dark Field Explanation ====		==== Bright/Dark Field Explanation ====
			[[File:Dark Field Microscopy explanation v1.jpg\|alt=schematic showing light path for a smooth surface vs. particle, thro microscope objective\|thumb\|242x242px\|Schematic explaining Dark Field microscopy mechanism''[[Demis D. John]], 2025'']]
	The default microscope mode is Bright-Field imaging, where flat reflective surfaces on your sample are "bright" (illuminated). Incoming light hitting a flat surface is reflected straight back through the microscope objective, to reach the eyepieces/camera.		The default microscope mode is Bright-Field imaging, where flat reflective surfaces on your sample are "bright" (illuminated). Incoming light hitting a flat surface is reflected straight back through the microscope objective, to reach the eyepieces/camera.

	Dark Field imaging instead sends light through the sides of the microscope objective, so incoming light hits the sample at an angle. Light that hits a flat surface thus misses the optical path back to the eyepieces/camera, appearing "dark". Only light that hits curved/non-flat surfaces will be scattered back up through the microscope objectives, producing a bright spot.		Dark Field imaging instead sends light through the sides of the microscope objective, so incoming light hits the sample at an angle. Light that hits a flat surface thus misses the optical path back to the eyepieces/camera, appearing "dark". Only light that hits curved/non-flat surfaces will be scattered back up through the microscope objectives, producing a bright spot.
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	==== Tips for particle estimations using Dark Field ====		==== Tips for particle estimations using Dark Field ====

John d: /* Dark Field Imaging */ temp

2024-11-26T00:22:33Z

Dark Field Imaging: temp

@@ Line 163: / Line 163: @@
 [[File:Microscope Training - BF-DF Slider.jpg|alt=photo of slider|none|thumb|The Bright Field / Dark Field slider on Microscope #3]]
 The default microscope mode is Bright-Field imaging, where flat reflective surfaces on your sample are "bright" (illuminated). Incoming light hitting a flat surface is reflected straight back through the microscope objective, to reach the eyepieces/camera.
 Dark Field imaging instead sends light through the sides of the microscope objective, so incoming light hits the sample at an angle. Light that hits a flat surface thus misses the optical path back to the eyepieces/camera, appearing "dark".  Only light that hits curved/non-flat surfaces will be scattered back up through the microscope objectives, producing a bright spot.
 ==== Tips for particle estimations using Dark Field ====

John d: /* Dark Field Imaging */

2024-11-25T23:50:56Z

Dark Field Imaging

← Older revision		Revision as of 23:50, 25 November 2024
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	The default microscope mode is Bright-Field imaging, where flat reflective surfaces on your sample are "bright" (illuminated). Incoming light hitting a flat surface is reflected straight back through the microscope objective, to reach the eyepieces/camera.		The default microscope mode is Bright-Field imaging, where flat reflective surfaces on your sample are "bright" (illuminated). Incoming light hitting a flat surface is reflected straight back through the microscope objective, to reach the eyepieces/camera.

	Dark Field imaging instead sends light through the sides of the microscope objective, so incoming light hits the sample at an angle. Light that hits a flat surface thus misses the optical path back to the eyepieces/camera, appearing "dark". Only light that hits ~~curves~~/non-flat surfaces will be scattered back up through the microscope objectives, producing a bright spot.		Dark Field imaging instead sends light through the sides of the microscope objective, so incoming light hits the sample at an angle. Light that hits a flat surface thus misses the optical path back to the eyepieces/camera, appearing "dark". Only light that hits curved/non-flat surfaces will be scattered back up through the microscope objectives, producing a bright spot.

	Dark Field can be enabled by pulling the BF/DF slider to the "DF" position.		Dark Field can be enabled by pulling the BF/DF slider to the "DF" position.

John d: added Dark Field, Illumination Aperture, ND filter, yellow filter

2024-11-25T23:44:44Z

added Dark Field, Illumination Aperture, ND filter, yellow filter

@@ Line 78: / Line 78: @@
 **There are many other useful plugins, for particle counting, creating animations etc.
-==Optical Filters==
+==Imaging Modes & Optical Filters==
 Numerous imaging modes can be enabled or enhanced via optical filters available on the scopes.
-The filters have a [https://en.wikipedia.org/wiki/Detent detent] (you can feel a "click" when they reach this position) so that they can be pulled out to a "stop" where they are not interacting with the lightpath, while remaining in the tool.
+The filters have a [https://en.wikipedia.org/wiki/Detent detent] (you can feel a "click" when they reach this position) so that they can be pulled out to a "stop" where they are not affecting with the lightpath, while remaining in the tool.
-Do not pull the filters past the detent, or they may block the light path, and please don't remove them fully from the microscope.
+Do not pull the filters past the detent, or they may block the light path, and please '''don't remove them fully from the microscope'''.
 [[File:Microscopes - Filter Out position-detent.png|none|thumb|Microscope filters in the "out" position.]]
 ===DIC/Nomarksi Imaging===
 [https://en.wikipedia.org/wiki/Differential_interference_contrast_microscopy Differential Interference Contrast] (aka. "DIC") converts nanometer-level height differences into color differences, operating similarly to a [https://en.wikipedia.org/w/index.php?title=Polariscope polariscope].  This allows the user to observe and identify small residues, height differences or particulates.  Photoresist/fluorocarbon residues are best observed with this method. Very small etch depths (eg. few-nm unintended etching by O2 plasma) can also be observed.
@@ Line 115: / Line 153: @@
 The Input polarizer has motorized rotation, controlled by the controller pendant.
  • Epi/Dia illum.

John d: Text replacement - "Amscope Quickstart Usage Guide" to "Measurements and Imaging with Amscope Camera - Quickstart Usage Guide"

2023-10-16T19:41:58Z

Text replacement - "Amscope Quickstart Usage Guide" to "Measurements and Imaging with Amscope Camera - Quickstart Usage Guide"

← Older revision		Revision as of 19:41, 16 October 2023
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	For our scopes that have AmScope cameras and software installed, please see the following tutorial for making/saving measurements:		For our scopes that have AmScope cameras and software installed, please see the following tutorial for making/saving measurements:

	*[[Amscope Quickstart Usage Guide\|'''Amscope Quickstart Usage Guide''']]		*[[Measurements and Imaging with Amscope Camera - Quickstart Usage Guide\|'''Measurements and Imaging with Amscope Camera - Quickstart Usage Guide''']]

	===Measurements outside the lab===		===Measurements outside the lab===
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	*AmScope Software - free microscope image analysis software, installed on many of our scopes.		*AmScope Software - free microscope image analysis software, installed on many of our scopes.
	**[[Amscope Quickstart Usage Guide]]		**[[Measurements and Imaging with Amscope Camera - Quickstart Usage Guide]]
	**AmScope Calibration File containing calibrations for all NanoFab microscopes: [https://wiki.nanotech.ucsb.edu/wiki/Images/uploads/2020/AmScopeCalsAll.magn Download Here]		**AmScope Calibration File containing calibrations for all NanoFab microscopes: [https://wiki.nanotech.ucsb.edu/wiki/Images/uploads/2020/AmScopeCalsAll.magn Download Here]
	**Also available on '''''Nanofiles-SFTP / Manuals / Amscope'''''		**Also available on '''''Nanofiles-SFTP / Manuals / Amscope'''''

John d: /* Measurements */

2023-07-08T03:43:56Z

Measurements

← Older revision		Revision as of 03:43, 8 July 2023
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	Some objectives may actually have "WD" printed on them. For example, "'''WD 1.0'''" means that the sample will be in focus when it is approx. '''1.0mm''' away from the objective. This is very helpful when estimating, by eye, whether you need to move the sample stage up or down to get into focus. If the objective says "WD 0.2" that means it has to be so close that you really should just start at low mag. and work your way up, keeping the sample in focus at each successive magnification!		Some objectives may actually have "WD" printed on them. For example, "'''WD 1.0'''" means that the sample will be in focus when it is approx. '''1.0mm''' away from the objective. This is very helpful when estimating, by eye, whether you need to move the sample stage up or down to get into focus. If the objective says "WD 0.2" that means it has to be so close that you really should just start at low mag. and work your way up, keeping the sample in focus at each successive magnification!

	==Measurements==		==Digital Imaging & Measurements==
	Many of our microscopes have cameras and software for image capture.		Many of our microscopes have cameras and software for image capture.

John d: /* Measurements */

2022-08-26T19:59:05Z

Measurements

John d: measurements section, mostly copy/pasted from parent page

2022-08-26T19:23:49Z

measurements section, mostly copy/pasted from parent page

← Older revision		Revision as of 19:23, 26 August 2022
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	Some objectives may actually have "WD" printed on them. For example, "'''WD 1.0'''" means that the sample will be in focus when it is approx. '''1.0mm''' away from the objective. This is very helpful when estimating, by eye, whether you need to move the sample stage up or down to get into focus. If the objective says "WD 0.2" that means it has to be so close that you really should just start at low mag. and work your way up, keeping the sample in focus at each successive magnification!		Some objectives may actually have "WD" printed on them. For example, "'''WD 1.0'''" means that the sample will be in focus when it is approx. '''1.0mm''' away from the objective. This is very helpful when estimating, by eye, whether you need to move the sample stage up or down to get into focus. If the objective says "WD 0.2" that means it has to be so close that you really should just start at low mag. and work your way up, keeping the sample in focus at each successive magnification!

	== ~~Optical Filters~~ ==		== Measurements ==
			Many of our microscopes have cameras and software for image capture.

			For our scopes that have AmScope cameras and software installed, please see the following tutorial for making/saving measurements:

			* [[Amscope Quickstart Usage Guide]]

			=== Measurements outside the lab ===
			If you know the ''microscope and objective'' used for acquiring a photo, you can make calibrated measurements on the photos at your own desktop using the following software:

			* AmScope Software - free microscope image analysis software, installed on many of our scopes.
			** [[Amscope Quickstart Usage Guide]]
			** AmScope Calibration File containing calibrations for all NanoFab microscopes: [https://wiki.nanotech.ucsb.edu/wiki/Images/uploads/2020/AmScopeCalsAll.magn Download Here]
			** Also available on '''''Nanofiles-SFTP / Manuals / Amscope'''''
			* FIJI - scientific image analysis software - for stand-alone image analysis after acquiring images.
			** [[FIJI - Microscope Measurement Tools\|The Microscope Measurement Tools plugin]] has pre-configured calibrations for NanoFab microscopes & SEMs, and allows you to draw length measurements.
			*** ''Calibrations in this plugin repository are out of date as of microscope upgrades in 2019''.
			** There are many other useful plugins, for particle counting, creating animations etc.

			==Optical Filters==
	Numerous imaging modes can be enabled or enhanced via optical filters available on the scopes.		Numerous imaging modes can be enabled or enhanced via optical filters available on the scopes.

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	Do not pull the filters past the detent, or they may block the light path, and please don't remove them fully from the microscope.		Do not pull the filters past the detent, or they may block the light path, and please don't remove them fully from the microscope.
	[[File:Microscopes - Filter Out position-detent.png\|none\|thumb~~\|348.6000061035156x348.6000061035156px~~\|Microscope filters in the "out" position.]]		[[File:Microscopes - Filter Out position-detent.png\|none\|thumb\|Microscope filters in the "out" position.]]

	=== DIC/Nomarksi Imaging ===		===DIC/Nomarksi Imaging===
	[https://en.wikipedia.org/wiki/Differential_interference_contrast_microscopy Differential Interference Contrast] (aka. "DIC") converts nanometer-level height differences into color differences, operating similarly to a [https://en.wikipedia.org/w/index.php?title=Polariscope polariscope]. This allows the user to observe and identify small residues, height differences or particulates. Photoresist/fluorocarbon residues are best observed with this method. Very small etch depths (eg. few-nm unintended etching by O2 plasma) can also be observed.		[https://en.wikipedia.org/wiki/Differential_interference_contrast_microscopy Differential Interference Contrast] (aka. "DIC") converts nanometer-level height differences into color differences, operating similarly to a [https://en.wikipedia.org/w/index.php?title=Polariscope polariscope]. This allows the user to observe and identify small residues, height differences or particulates. Photoresist/fluorocarbon residues are best observed with this method. Very small etch depths (eg. few-nm unintended etching by O2 plasma) can also be observed.

	Many of our scopes have DIC imaging capabilities, although the filters that need to be inserted are arranged differently on each.		Many of our scopes have DIC imaging capabilities, although the filters that need to be inserted are arranged differently on each.

	==== DIC Filters Needed ====		====DIC Filters Needed====
	To enable DIC imaging, your scope needs		To enable DIC imaging, your scope needs

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	'''<u>NOTE</u>''': The DIC prism creates a slight double-image when inserted - make sure to pull it out to it's detent for normal imaging!		'''<u>NOTE</u>''': The DIC prism creates a slight double-image when inserted - make sure to pull it out to it's detent for normal imaging!

	==== DIC on Microscopes 3/4 ====		====DIC on Microscopes 3/4====
	For Microscope #3, all three of these filters may be inserted/removed as indicated:		For Microscope #3, all three of these filters may be inserted/removed as indicated:
	[[File:Microscopes - DIC filters and light path.png\|alt=Image/schematic of the 3 DIC filters on Microscope 2\|none\|thumb\|410x410px\|The 3 filters needed for DIC imaging (Microscope 3). Other Microscopes also have these 3 filters, but located in different positions or sometimes combined.]]		[[File:Microscopes - DIC filters and light path.png\|alt=Image/schematic of the 3 DIC filters on Microscope 2\|none\|thumb\|410x410px\|The 3 filters needed for DIC imaging (Microscope 3). Other Microscopes also have these 3 filters, but located in different positions or sometimes combined.]]

	==== DIC on FL-Scope ====		====DIC on FL-Scope====
	On the Fluoroscope, the rotatable filter wheel sets both the input & output polarizers simultaneously when you set it to "''DIC''", but you still need to insert/remove the DIC Prism.		On the Fluoroscope, the rotatable filter wheel sets both the input & output polarizers simultaneously when you set it to "''DIC''", but you still need to insert/remove the DIC Prism.

	==== DIC on µScope-2 ====		====DIC on µScope-2====
	The DIC prisms are located directly on the microscope objectives, and are not intended to be manually inserted/removed. We have left the DIC prisms only on the lower-mag objectives, and removed them from the 100x/150x objectives (where DIC imaging doesn't really work that well), in order to provide better high-mag imaging.		The DIC prisms are located directly on the microscope objectives, and are not intended to be manually inserted/removed. We have left the DIC prisms only on the lower-mag objectives, and removed them from the 100x/150x objectives (where DIC imaging doesn't really work that well), in order to provide better high-mag imaging.

John d: Added Optical Filters & DIC sections

2022-07-06T15:16:36Z

Added Optical Filters & DIC sections

@@ Line 59: / Line 59: @@
 Some objectives may actually have "WD" printed on them.  For example, "'''WD 1.0'''" means that the sample will be in focus when it is approx. '''1.0mm''' away from the objective.  This is very helpful when estimating, by eye, whether you need to move the sample stage up or down to get into focus. If the objective says "WD 0.2" that means it has to be so close that you really should just start at low mag. and work your way up, keeping the sample in focus at each successive magnification!
  This page is in-progress - More to come!
  • Bright/Dark Field
  • Digital Cameras and measurements

John d: added not about turning obj turrets by hand

2022-03-26T12:19:34Z

added not about turning obj turrets by hand

← Older revision		Revision as of 12:19, 26 March 2022
Line 3:		Line 3:

	However, almost all of these microscopes share common features, even if the knob to enable the feature is in a different location. This "training" is intended to give the user an overview of these features, which are very useful for general observations, measurements, inspections after etching/other processing steps, distinguishing residues vs. delamination, to name a few.		However, almost all of these microscopes share common features, even if the knob to enable the feature is in a different location. This "training" is intended to give the user an overview of these features, which are very useful for general observations, measurements, inspections after etching/other processing steps, distinguishing residues vs. delamination, to name a few.
			'''DO NOT TURN MICROSCOPE OBJECTIVES BY HAND''' for motorized microscopes!

			Most of our scopes have motorized objective turrets, use the electronic buttons instead.
	__TOC__		__TOC__

← Older revision		Revision as of 19:59, 26 August 2022
Line 59:		Line 59:
	Some objectives may actually have "WD" printed on them. For example, "'''WD 1.0'''" means that the sample will be in focus when it is approx. '''1.0mm''' away from the objective. This is very helpful when estimating, by eye, whether you need to move the sample stage up or down to get into focus. If the objective says "WD 0.2" that means it has to be so close that you really should just start at low mag. and work your way up, keeping the sample in focus at each successive magnification!		Some objectives may actually have "WD" printed on them. For example, "'''WD 1.0'''" means that the sample will be in focus when it is approx. '''1.0mm''' away from the objective. This is very helpful when estimating, by eye, whether you need to move the sample stage up or down to get into focus. If the objective says "WD 0.2" that means it has to be so close that you really should just start at low mag. and work your way up, keeping the sample in focus at each successive magnification!

	== Measurements ==		==Measurements==
	Many of our microscopes have cameras and software for image capture.		Many of our microscopes have cameras and software for image capture.

	For our scopes that have AmScope cameras and software installed, please see the following tutorial for making/saving measurements:		For our scopes that have AmScope cameras and software installed, please see the following tutorial for making/saving measurements:

	* [[Amscope Quickstart Usage Guide]]		*[[Amscope Quickstart Usage Guide\|'''Amscope Quickstart Usage Guide''']]

	=== Measurements outside the lab ===		===Measurements outside the lab===
	If you know the ''microscope and objective'' used for acquiring a photo, you can make calibrated measurements on the photos at your own desktop using the following software:		If you know the ''microscope and objective'' used for acquiring a photo, you can make calibrated measurements on the photos at your own desktop using the following software:

	* AmScope Software - free microscope image analysis software, installed on many of our scopes.		*AmScope Software - free microscope image analysis software, installed on many of our scopes.
	** [[Amscope Quickstart Usage Guide]]		**[[Amscope Quickstart Usage Guide]]
	** AmScope Calibration File containing calibrations for all NanoFab microscopes: [https://wiki.nanotech.ucsb.edu/wiki/Images/uploads/2020/AmScopeCalsAll.magn Download Here]		**AmScope Calibration File containing calibrations for all NanoFab microscopes: [https://wiki.nanotech.ucsb.edu/wiki/Images/uploads/2020/AmScopeCalsAll.magn Download Here]
	** Also available on '''''Nanofiles-SFTP / Manuals / Amscope'''''		**Also available on '''''Nanofiles-SFTP / Manuals / Amscope'''''
	* FIJI - scientific image analysis software - for stand-alone image analysis after acquiring images.		*FIJI - scientific image analysis software - for stand-alone image analysis after acquiring images.
	** [[FIJI - Microscope Measurement Tools\|The Microscope Measurement Tools plugin]] has pre-configured calibrations for NanoFab microscopes & SEMs, and allows you to draw length measurements.		**[[FIJI - Microscope Measurement Tools\|The Microscope Measurement Tools plugin]] has pre-configured calibrations for NanoFab microscopes & SEMs, and allows you to draw length measurements.
	*** ''Calibrations in this plugin repository are out of date as of microscope upgrades in 2019''.		***''Calibrations in this plugin repository are out of date as of microscope upgrades in 2019''.
	** There are many other useful plugins, for particle counting, creating animations etc.		**There are many other useful plugins, for particle counting, creating animations etc.

	==Optical Filters==		==Optical Filters==