Category:Tools: Difference between revisions
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Latest revision as of 16:41, 27 June 2012
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Pages in category "Tools"
The following 106 pages are in this category, out of 106 total.
A
C
D
E
F
I
M
O
- Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX)
- Optical Film Thickness & Wafer-Mapping (Filmetrics F50)
- Optical Film Thickness (Filmetrics)
- Optical Film Thickness (Nanometric)
- Oven 4 (Thermo-Fisher HeraTherm)
- Oven 5 (Labline)
- Ovens 1, 2 & 3 (Labline)
- Oxford ICP Etcher (PlasmaPro 100 Cobra)
P
R
S
- SEM 1 (JEOL IT800SHL)
- SEM Sample Coater (Hummer)
- Spin Rinse Dryer (SemiTool)
- Sputter 1 (Custom)
- Sputter 2 (SFI Endeavor)
- Sputter 3 (AJA ATC 2000-F)
- Sputter 4 (AJA ATC 2200-V)
- Sputter 5 (AJA ATC 2200-V)
- Step Profilometer (DektakXT)
- Step Profilometer (KLA Tencor P-7)
- Stepper 1 (GCA 6300)
- Stepper 2 (AutoStep 200)
- Stepper 3 (ASML DUV)
- Strip Annealer
- Surface Analysis (KLA/Tencor Surfscan)
- Suss Aligners (SUSS MJB-3)