Difference between revisions of "ICP Etching Recipes"
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=[[ICP-Etch (Unaxis VLR)]]= |
=[[ICP-Etch (Unaxis VLR)]]= |
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| + | ==InP Etch (Unaxis VLR)== |
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| + | ===InP Etch === |
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| + | *[[media:UNAXIS-VLR-InP-Etch-200C-Recipe.pdf|InP Etch Recipe (200C)]] |
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| + | ===InP Etch (H<sub>2</sub> Ar)=== |
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| + | *[[media:UNAXIS-VLR-InP-Etch-Ar-200C-Recipe.pdf|InP Etch Recipe (H<sub>2</sub> Ar 200C)]] |
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Revision as of 12:12, 20 August 2012
Back to Dry Etching Recipes.