Difference between revisions of "ICP Etching Recipes"
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==Si Etch (XeF2 Etch (Xetch))== |
==Si Etch (XeF2 Etch (Xetch))== |
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| − | *[[media:|Si Etch Recipe]] |
+ | *[[media:06-XeF2-etch-recipe.pdf|Si Etch Recipe]] |
Revision as of 10:37, 17 September 2013
Back to Dry Etching Recipes.