Difference between revisions of "ICP Etching Recipes"
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=[[Si-Etch (XeF2 Etch (Xetch))]]= |
=[[Si-Etch (XeF2 Etch (Xetch))]]= |
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| − | ==Si Etch (XeF2 Etch (Xetch))== |
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| − | ===Si Etch === |
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*[[media:06-XeF2-etch-recipe.pdf|Si Etch Recipe]] |
*[[media:06-XeF2-etch-recipe.pdf|Si Etch Recipe]] |
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Revision as of 10:42, 17 September 2013
Back to Dry Etching Recipes.