Difference between revisions of "ICP Etching Recipes"
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{{recipes|Dry Etching}} | {{recipes|Dry Etching}} | ||
| + | =[[RIE Etch 5 (RIE#5)]]= | ||
| + | ==GaN Etching (RIE#5)== | ||
| + | *[[media:|GaN Etch Recipe]] | ||
| + | |||
=[[ICP Etch 1 (Panasonic E626I)]]= | =[[ICP Etch 1 (Panasonic E626I)]]= | ||
==SiO<sub>2</sub> Etching (Panasonic 1)== | ==SiO<sub>2</sub> Etching (Panasonic 1)== | ||
Revision as of 15:38, 19 September 2013
Back to Dry Etching Recipes.
RIE Etch 5 (RIE#5)
GaN Etching (RIE#5)
- [[media:|GaN Etch Recipe]]