Difference between revisions of "Lithography Recipes"
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| Line 11: | Line 11: | ||
*{{fl|SPR950-Positive-Resist-Datasheet.pdf|SPR950-0.8}} | *{{fl|SPR950-Positive-Resist-Datasheet.pdf|SPR950-0.8}} | ||
*{{fl|SPR955-Positive-Resist-Datasheet.pdf|SPR955CM (SPR955CM-0.9, SPR955CM-1.8)}} | *{{fl|SPR955-Positive-Resist-Datasheet.pdf|SPR955CM (SPR955CM-0.9, SPR955CM-1.8)}} | ||
| + | ;Negative Photoresists | ||
| + | *{{fl|AZ5214-Negative-Resist-Datasheet.pdf|AZ5214}} | ||
| + | *{{fl|AZnLOF5510-Negative-Resist-Datasheet.pdf|AZnLOF5510}} | ||
| + | *{{fl|AZnLOF2020-Negative-Resist-Datasheet.pdf|AZnLOF2020}} | ||
| + | ;Underlayers | ||
| + | *{{fl|PMGI-Underlayer-Datasheet.pdf|PMGI (PMGI SF-11, PMGI SF-13, PMGI SF-15}} | ||
| + | *{{fl|LOL2000-Underlayer-Datasheet.pdf|Shipley LOL2000}} | ||
==Recipes== | ==Recipes== | ||
Revision as of 17:00, 8 November 2012
Lift-Off Techniques
Chemical Datasheets
| To Do: Ask Brian where these should go... |
- Positive Photoresists
- AZP4000 (AZ4110, AZ4210, AZ4330)
- OCG825
- SPR220 (SPR220-2, SPR220-7)
- SPR950-0.8
- SPR955CM (SPR955CM-0.9, SPR955CM-1.8)
- Negative Photoresists
- Underlayers
Recipes
- R = Recipe is available. Clicking this link will take you to the recipe.
- A = Material is available for use, but no recipes are provided.