Logitech WBS7 - Procedure for Wax Mounting with Spin-On Crystalbond

Work In Progress This article is still under construction. It may contain factual errors. Content is subject to change.

Draft only - in progress. Based on Don Freeborn's procedure for the Logitech Bonder. -- Demis 2018-10-16

• Mix a fresh squirt bottle of CrystalBond diluted with Acetone (see Don Freeborn for method).
  • 100 grams of crystalbond, mixed into
  • 200 mL of Acetone, in dedicated squirt bottle
  • Shake/stir to completely dissolve the wax
• Place 4-inch silicon carrier wafer on POLOS spinner in solvent bench, with non-vacuum 4-inch chuck installed.
• Set up POLOS recipe
  • Spin at 2000 rpm, there should be a recipe for this, eg. “Backside” recipe.
• Squirt wax solution onto wafer
• Press [>] to spin.
  • Optionally dispense during the spin to prevent wax getting on back of wafer
• Stop dispensing and Press [>] to stop spinning.
• Clean POLOS Chuck by spinning with no wafer and dispensing ACE via squirt bottle
• Place wafer Face DOWN and POLOS spin at ~1000-3000rpm while spraying ACE then ISO in wafer center, to clean wax off back side.
• Place carrier wafer on Logitech bonder surface
• Place sample to be bonded on top
• Place 110mm chemical filter paper on top
• Close lid, secure lid clamp
• Run recipe:
  • XYZ °C
  • XYZ seconds
  • Vacuum etc.?