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Combined display of all available logs of UCSB Nanofab Wiki. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).
(newest | oldest) View (newer 250 | older 250) (20 | 50 | 100 | 250 | 500)- 16:34, 27 April 2022 John d talk contribs created page Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer (added Tips, copied from DUV Liftoff page) Tag: Visual edit
- 13:31, 26 April 2022 Pakala talk contribs created page File:Oxford 60c 07 CS 001.jpg
- 13:31, 26 April 2022 Pakala talk contribs uploaded File:Oxford 60c 07 CS 001.jpg
- 13:30, 26 April 2022 Pakala talk contribs created page File:Oxford 60c 07 45D 002.jpg
- 13:30, 26 April 2022 Pakala talk contribs uploaded File:Oxford 60c 07 45D 002.jpg
- 13:26, 26 April 2022 Pakala talk contribs created page File:ICP2 06 CS 001.jpg
- 13:26, 26 April 2022 Pakala talk contribs uploaded File:ICP2 06 CS 001.jpg
- 13:26, 26 April 2022 Pakala talk contribs created page File:ICP2 06 45D 002.jpg
- 13:26, 26 April 2022 Pakala talk contribs uploaded File:ICP2 06 45D 002.jpg
- 13:23, 26 April 2022 Pakala talk contribs created page File:ICP1 06 CS 002.jpg
- 13:23, 26 April 2022 Pakala talk contribs uploaded File:ICP1 06 CS 002.jpg
- 13:22, 26 April 2022 Pakala talk contribs created page File:ICP1 06 45D 002.jpg
- 13:22, 26 April 2022 Pakala talk contribs uploaded File:ICP1 06 45D 002.jpg
- 11:01, 26 April 2022 Sawyer l talk contribs created page File:Tape Station SOP Rev A.pdf
- 11:01, 26 April 2022 Sawyer l talk contribs uploaded File:Tape Station SOP Rev A.pdf
- 17:32, 25 April 2022 User account Ahlers j talk contribs was created
- 11:08, 21 April 2022 Pakala talk contribs created page File:SiO2 Fl 07 CS 004.jpg
- 11:08, 21 April 2022 Pakala talk contribs uploaded File:SiO2 Fl 07 CS 004.jpg
- 11:07, 21 April 2022 Pakala talk contribs created page File:SiO2 Fl 07 45D 003.jpg
- 11:07, 21 April 2022 Pakala talk contribs uploaded File:SiO2 Fl 07 45D 003.jpg
- 11:01, 21 April 2022 Pakala talk contribs created page File:ICP2 05 CS 001.jpg
- 11:01, 21 April 2022 Pakala talk contribs uploaded File:ICP2 05 CS 001.jpg
- 11:00, 21 April 2022 Pakala talk contribs created page File:ICP2 05 45D 003.jpg
- 11:00, 21 April 2022 Pakala talk contribs uploaded File:ICP2 05 45D 003.jpg
- 10:57, 21 April 2022 Pakala talk contribs created page File:ICP1 05 CS 002.jpg
- 10:57, 21 April 2022 Pakala talk contribs uploaded File:ICP1 05 CS 002.jpg
- 10:56, 21 April 2022 Pakala talk contribs created page File:ICP1 05 45D 001.jpg
- 10:56, 21 April 2022 Pakala talk contribs uploaded File:ICP1 05 45D 001.jpg
- 11:33, 20 April 2022 Pakala talk contribs created page File:Unaxis 02 CS 002.jpg
- 11:33, 20 April 2022 Pakala talk contribs uploaded File:Unaxis 02 CS 002.jpg
- 11:30, 20 April 2022 Pakala talk contribs created page File:Unaxis 02 CS 004.jpg
- 11:30, 20 April 2022 Pakala talk contribs uploaded File:Unaxis 02 CS 004.jpg
- 11:30, 20 April 2022 Pakala talk contribs created page File:Unaxis 02 45D 002.jpg
- 11:30, 20 April 2022 Pakala talk contribs uploaded File:Unaxis 02 45D 002.jpg
- 11:29, 20 April 2022 Pakala talk contribs created page File:Unaxis 01 45D 002.jpg
- 11:29, 20 April 2022 Pakala talk contribs uploaded File:Unaxis 01 45D 002.jpg
- 11:29, 20 April 2022 Pakala talk contribs created page File:Unaxis 01 CS 001.jpg
- 11:29, 20 April 2022 Pakala talk contribs uploaded File:Unaxis 01 CS 001.jpg
- 11:17, 20 April 2022 Pakala talk contribs created page File:Oxford 60c 06 45D 002.jpg
- 11:17, 20 April 2022 Pakala talk contribs uploaded File:Oxford 60c 06 45D 002.jpg
- 11:16, 20 April 2022 Pakala talk contribs created page File:Oxford 60c 06 CS 005.jpg
- 11:16, 20 April 2022 Pakala talk contribs uploaded File:Oxford 60c 06 CS 005.jpg
- 11:12, 20 April 2022 Pakala talk contribs created page File:SiO2 Fl 03 CS 004.jpg
- 11:12, 20 April 2022 Pakala talk contribs uploaded File:SiO2 Fl 03 CS 004.jpg
- 12:56, 19 April 2022 Pakala talk contribs created page File:SiO2 Fl 06 CS 002.jpg
- 12:56, 19 April 2022 Pakala talk contribs uploaded File:SiO2 Fl 06 CS 002.jpg
- 12:56, 19 April 2022 Pakala talk contribs created page File:SiO2 Fl 06 45D 002.jpg
- 12:56, 19 April 2022 Pakala talk contribs uploaded File:SiO2 Fl 06 45D 002.jpg
- 12:48, 19 April 2022 Pakala talk contribs created page File:Oxford 60c 05 CS 002.jpg
- 12:48, 19 April 2022 Pakala talk contribs uploaded File:Oxford 60c 05 CS 002.jpg
- 12:48, 19 April 2022 Pakala talk contribs created page File:Oxford 60c 05 45D 004.jpg
- 12:48, 19 April 2022 Pakala talk contribs uploaded File:Oxford 60c 05 45D 004.jpg
- 13:08, 15 April 2022 John d talk contribs created page Unaxis VLR Etch - Process Control Data (pasted table from Oxford ICP) Tag: Visual edit: Switched
- 10:30, 14 April 2022 Pakala talk contribs created page File:ICP2 004 CS 003.jpg
- 10:30, 14 April 2022 Pakala talk contribs uploaded File:ICP2 004 CS 003.jpg
- 10:29, 14 April 2022 Pakala talk contribs created page File:ICP2 004 45D 001.jpg
- 10:29, 14 April 2022 Pakala talk contribs uploaded File:ICP2 004 45D 001.jpg
- 10:25, 14 April 2022 Pakala talk contribs created page File:ICP1 004 CS 001.jpg
- 10:25, 14 April 2022 Pakala talk contribs uploaded File:ICP1 004 CS 001.jpg
- 10:25, 14 April 2022 Pakala talk contribs created page File:ICP1 004 45D 004.jpg
- 10:25, 14 April 2022 Pakala talk contribs uploaded File:ICP1 004 45D 004.jpg
- 08:23, 11 April 2022 User account Stevenwman talk contribs was created
- 21:08, 7 April 2022 John d talk contribs created page ASML Stepper 3 - Job Creator (initial description of usage and caveats) Tag: Visual edit
- 10:14, 4 April 2022 Thibeault talk contribs created page Michael Barreraz (Created page with "{{staff|{{PAGENAME}} |position = Equipment Engineer |room = 1109F |phone = (805) 893- 4147 |email = mikebarreraz@ece.ucsb.edu }} = About = . . . =Tools= {{PAGENAME}} is th...")
- 12:51, 31 March 2022 John d talk contribs uploaded a new version of File:IBD SiO-FP - long 1100nm - Reflectivity Spectrum (EMpy).png (fixed "110nm" to "1100nm")
- 12:49, 31 March 2022 John d talk contribs created page IBD: Calibrating Optical Thickness (initial version, full method described, images inserted.) Tag: Visual edit
- 12:43, 31 March 2022 John d talk contribs created page File:IBD 9-period DBR - Reflectivity Spectrum (EMpy).png
- 12:43, 31 March 2022 John d talk contribs uploaded File:IBD 9-period DBR - Reflectivity Spectrum (EMpy).png
- 12:36, 31 March 2022 John d talk contribs created page File:IBD SiO-FP - long 1100nm - Reflectivity Spectrum (EMpy).png
- 12:36, 31 March 2022 John d talk contribs uploaded File:IBD SiO-FP - long 1100nm - Reflectivity Spectrum (EMpy).png
- 08:45, 31 March 2022 Pakala talk contribs created page File:Oxford 60c 04 CS 004.jpg
- 08:45, 31 March 2022 Pakala talk contribs uploaded File:Oxford 60c 04 CS 004.jpg
- 08:44, 31 March 2022 Pakala talk contribs created page File:Oxford 60c 04 45D 001.jpg
- 08:44, 31 March 2022 Pakala talk contribs uploaded File:Oxford 60c 04 45D 001.jpg
- 10:26, 30 March 2022 Pakala talk contribs created page File:SiO2 Fl 05 CS 002.jpg
- 10:26, 30 March 2022 Pakala talk contribs uploaded File:SiO2 Fl 05 CS 002.jpg
- 10:25, 30 March 2022 Pakala talk contribs created page File:SiO2 Fl 03 45D 002.jpg
- 10:25, 30 March 2022 Pakala talk contribs uploaded File:SiO2 Fl 03 45D 002.jpg
- 10:16, 30 March 2022 Pakala talk contribs created page File:ICP2 03 45D 002.jpg
- 10:16, 30 March 2022 Pakala talk contribs uploaded File:ICP2 03 45D 002.jpg
- 10:15, 30 March 2022 Pakala talk contribs created page File:ICP2 03 CS 003.jpg
- 10:15, 30 March 2022 Pakala talk contribs uploaded File:ICP2 03 CS 003.jpg
- 10:02, 30 March 2022 Pakala talk contribs created page File:ICP1 03 CS 005.jpg
- 10:02, 30 March 2022 Pakala talk contribs uploaded File:ICP1 03 CS 005.jpg
- 10:01, 30 March 2022 Pakala talk contribs created page File:ICP1 03 45D 002.jpg
- 10:01, 30 March 2022 Pakala talk contribs uploaded File:ICP1 03 45D 002.jpg
- 11:28, 22 March 2022 Sawyer l talk contribs created page File:EB2 SOP Rev D.pdf
- 11:28, 22 March 2022 Sawyer l talk contribs uploaded File:EB2 SOP Rev D.pdf
- 13:48, 21 March 2022 Sawyer l talk contribs created page File:ADT SOP Rev E.pdf
- 13:48, 21 March 2022 Sawyer l talk contribs uploaded File:ADT SOP Rev E.pdf
- 16:53, 17 March 2022 Reynolds t talk contribs deleted page Goniometer (Rame-Hart A-100) (Equipment is not available anymore: removed by Tom Reynolds)
- 14:40, 16 March 2022 User account Lloyd b talk contribs was created
- 10:42, 9 March 2022 Pakala talk contribs created page File:ICP2 02 CS 004.jpg
- 10:42, 9 March 2022 Pakala talk contribs uploaded File:ICP2 02 CS 004.jpg
- 10:41, 9 March 2022 Pakala talk contribs created page File:ICP2 02 45D 001.jpg
- 10:41, 9 March 2022 Pakala talk contribs uploaded File:ICP2 02 45D 001.jpg
- 10:38, 9 March 2022 Pakala talk contribs created page File:ICP1 02 CS 002.jpg
- 10:38, 9 March 2022 Pakala talk contribs uploaded File:ICP1 02 CS 002.jpg
- 10:38, 9 March 2022 Pakala talk contribs created page File:ICP1 02 45D 001.jpg
- 10:38, 9 March 2022 Pakala talk contribs uploaded File:ICP1 02 45D 001.jpg
- 10:34, 9 March 2022 Pakala talk contribs created page File:SiO2 Fl 04 CS 005.jpg
- 10:34, 9 March 2022 Pakala talk contribs uploaded File:SiO2 Fl 04 CS 005.jpg
- 10:33, 9 March 2022 Pakala talk contribs created page File:SiO2 FL 04 45D 001.jpg
- 10:33, 9 March 2022 Pakala talk contribs uploaded File:SiO2 FL 04 45D 001.jpg
- 12:57, 8 March 2022 John d talk contribs changed group membership for Millerski w from (none) to staff (new staff added)
- 12:09, 8 March 2022 Pakala talk contribs created page File:ICP2 01 CS 007.jpg
- 12:09, 8 March 2022 Pakala talk contribs uploaded File:ICP2 01 CS 007.jpg
- 12:08, 8 March 2022 Pakala talk contribs created page File:ICP2 01 45D 002.jpg
- 12:08, 8 March 2022 Pakala talk contribs uploaded File:ICP2 01 45D 002.jpg
- 12:04, 8 March 2022 Pakala talk contribs created page File:ICP1 01 CS 003.jpg
- 12:04, 8 March 2022 Pakala talk contribs uploaded File:ICP1 01 CS 003.jpg
- 12:04, 8 March 2022 Pakala talk contribs created page File:ICP1 01 45D 001.jpg
- 12:04, 8 March 2022 Pakala talk contribs uploaded File:ICP1 01 45D 001.jpg
- 11:55, 8 March 2022 Pakala talk contribs created page File:SiO2 Fl 03 CS 001.jpg
- 11:55, 8 March 2022 Pakala talk contribs uploaded File:SiO2 Fl 03 CS 001.jpg
- 11:55, 8 March 2022 Pakala talk contribs created page File:SiO2 Fl 03 45D 001.jpg
- 11:55, 8 March 2022 Pakala talk contribs uploaded File:SiO2 Fl 03 45D 001.jpg
- 11:37, 8 March 2022 User account Millerski w talk contribs was created
- 12:28, 3 March 2022 John d talk contribs moved page PECVD2 Recipes to OLD - PECVD2 Recipes without leaving a redirect (this page is not linked anywhere, looks like 2014 data only)
- 10:57, 2 March 2022 Pakala talk contribs created page File:SiO2 Fl 01 45D 002.jpg
- 10:57, 2 March 2022 Pakala talk contribs uploaded File:SiO2 Fl 01 45D 002.jpg
- 10:55, 2 March 2022 Pakala talk contribs created page File:SiO2 Fl 02 CS 001.jpg
- 10:55, 2 March 2022 Pakala talk contribs uploaded File:SiO2 Fl 02 CS 001.jpg
- 10:55, 2 March 2022 Pakala talk contribs created page File:SiO2 Fl 02 45D 001.jpg
- 10:55, 2 March 2022 Pakala talk contribs uploaded File:SiO2 Fl 02 45D 001.jpg
- 15:06, 1 March 2022 John d talk contribs moved page Wafer Cleaver (PELCO LatticeAx) to Wafer Cleaver (PELCO Flip-Scribe) without leaving a redirect (wrong name)
- 09:35, 1 March 2022 John d talk contribs created page File:LatticeAx.jpg (Image of PELCO LAtticeAx tool)
- 09:35, 1 March 2022 John d talk contribs uploaded File:LatticeAx.jpg (Image of PELCO LAtticeAx tool)
- 09:27, 1 March 2022 John d talk contribs created page Wafer Cleaver (PELCO LatticeAx) (new tool page)
- 09:07, 22 February 2022 Lingg talk contribs created page File:EB-1 operation instructions rev2.pdf
- 09:07, 22 February 2022 Lingg talk contribs uploaded File:EB-1 operation instructions rev2.pdf
- 08:33, 15 February 2022 Pakala talk contribs created page File:Oxford Cal 01 26 22 New002 CS 002.jpg
- 08:33, 15 February 2022 Pakala talk contribs uploaded File:Oxford Cal 01 26 22 New002 CS 002.jpg
- 08:10, 15 February 2022 Pakala talk contribs created page File:Oxford Cal 01 26 22 031New CS 001.jpg
- 08:10, 15 February 2022 Pakala talk contribs uploaded File:Oxford Cal 01 26 22 031New CS 001.jpg
- 08:07, 15 February 2022 Pakala talk contribs created page File:Oxford Cal 01 26 22 003New 45d 001.jpg
- 08:07, 15 February 2022 Pakala talk contribs uploaded File:Oxford Cal 01 26 22 003New 45d 001.jpg
- 15:18, 14 February 2022 User account Etrageser talk contribs was created
- 11:48, 14 February 2022 John d talk contribs moved page File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx to File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx (Rename to include reticle barcode in filename)
- 11:47, 14 February 2022 John d talk contribs uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx (More comments to help users fill this out.)
- 13:22, 11 February 2022 John d talk contribs created page MediaWiki:Deletereason-dropdown (added common NanoFab reasons for deletion)
- 13:20, 11 February 2022 John d talk contribs deleted page Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Florine etch of the underneath layer) (pasted data into https://wiki.nanotech.ucsb.edu/wiki/Test_Data_of_etching_SiO2_with_CHF3/CF4-ICP1)
- 13:12, 11 February 2022 John d talk contribs deleted page SiO2 Etch Test using CF4/CHF3 (old FL-ICP data - consolidated into new page "https://wiki.nanotech.ucsb.edu/wiki/Test_Data_of_Etching_SiO2_with_CHF3/CF4-Fluorine_ICP_Etcher")
- 11:09, 8 February 2022 Pakala talk contribs created page File:Oxford Cal 1 26 22 003 CS007.jpg
- 11:09, 8 February 2022 Pakala talk contribs uploaded File:Oxford Cal 1 26 22 003 CS007.jpg
- 11:05, 8 February 2022 Pakala talk contribs created page File:Oxford Cal 1 26 22 001 CS 004.jpg
- 11:05, 8 February 2022 Pakala talk contribs uploaded File:Oxford Cal 1 26 22 001 CS 004.jpg
- 11:03, 8 February 2022 Pakala talk contribs created page File:Oxford Cal 1 26 22 003 45D 002.jpg
- 11:03, 8 February 2022 Pakala talk contribs uploaded File:Oxford Cal 1 26 22 003 45D 002.jpg
- 10:59, 8 February 2022 Pakala talk contribs created page File:Oxford Cal 1 26 22 001 45D 005.jpg
- 10:59, 8 February 2022 Pakala talk contribs uploaded File:Oxford Cal 1 26 22 001 45D 005.jpg
- 10:49, 3 February 2022 John d talk contribs moved page REMOVED - Optical Profilometer - White-Light/Phase-Shift Interference (Filmetrics Profilm3D) to UNAVAILABLE - Optical Profilometer - White-Light/Phase-Shift Interference (Filmetrics Profilm3D) without leaving a redirect (change title to "unavailable")
- 10:46, 3 February 2022 John d talk contribs moved page Optical Profilometer - White-Light/Phase-Shift Interference (Filmetrics Profilm3D) to REMOVED - Optical Profilometer - White-Light/Phase-Shift Interference (Filmetrics Profilm3D) without leaving a redirect (tool is removed from lab)
- 14:09, 2 February 2022 Sawyer l talk contribs created page File:MLA150 SOP Rev K (LS).pdf
- 14:09, 2 February 2022 Sawyer l talk contribs uploaded File:MLA150 SOP Rev K (LS).pdf
- 12:09, 1 February 2022 Pakala talk contribs created page File:Oxford Etch InP Cal SEM - quarter wafer - CS 005.jpg
- 12:09, 1 February 2022 Pakala talk contribs uploaded File:Oxford Etch InP Cal SEM - quarter wafer - CS 005.jpg
- 11:35, 1 February 2022 Pakala talk contribs created page File:Oxford InP Cal - SEM 45D 001.jpg
- 11:35, 1 February 2022 Pakala talk contribs uploaded File:Oxford InP Cal - SEM 45D 001.jpg
- 11:24, 1 February 2022 John d talk contribs changed group membership for Pakala from staff to staff (temporary, until 10:24, 1 August 2022)
- 11:24, 1 February 2022 John d talk contribs changed group membership for Pakala from (none) to staff (NanoFab undergrad staff)
- 11:23, 1 February 2022 User account Pakala talk contribs was created
- 09:37, 1 February 2022 John d talk contribs created page File:Vernier Template.gds (Vernier Registration/Alignment Test structure for lithography. Designed by Demis D. John, 2008.)
- 09:37, 1 February 2022 John d talk contribs uploaded File:Vernier Template.gds (Vernier Registration/Alignment Test structure for lithography. Designed by Demis D. John, 2008.)
- 16:44, 26 January 2022 Freeborn d talk contribs uploaded a new version of File:EB -3 OPERATING INSTRUCTIONS docx.pdf
- 23:03, 13 January 2022 John d talk contribs created page File:2022-01-12 Oxford InP Ridge Wiki Post - Cal03.pdf (Oxford ICP Etch Cals03)
- 23:03, 13 January 2022 John d talk contribs uploaded File:2022-01-12 Oxford InP Ridge Wiki Post - Cal03.pdf (Oxford ICP Etch Cals03)
- 22:55, 13 January 2022 John d talk contribs created page File:2022-01-12 Oxford InP Ridge Wiki Post - Cal02.pdf (Oxford ICP Cal SEMs)
- 22:55, 13 January 2022 John d talk contribs uploaded File:2022-01-12 Oxford InP Ridge Wiki Post - Cal02.pdf (Oxford ICP Cal SEMs)
- 22:51, 13 January 2022 John d talk contribs created page File:2022-01-11 Oxford InP Ridge Wiki Post - Cal01.pdf (Oxford ICP Etch Cal SEMs)
- 22:51, 13 January 2022 John d talk contribs uploaded File:2022-01-11 Oxford InP Ridge Wiki Post - Cal01.pdf (Oxford ICP Etch Cal SEMs)
- 14:21, 13 January 2022 John d talk contribs created page Oxford ICP Etcher - Process Control Data (pasted ICP2 data table) Tag: Visual edit: Switched
- 08:43, 7 January 2022 John d talk contribs created page Video Training - Introduction (Internal) (general methods - Demis) Tag: Visual edit
- 11:48, 6 January 2022 Freeborn d talk contribs created page File:EB -3 OPERATING INSTRUCTIONS docx.pdf
- 11:48, 6 January 2022 Freeborn d talk contribs uploaded File:EB -3 OPERATING INSTRUCTIONS docx.pdf
- 11:15, 5 January 2022 Sawyer l talk contribs created page File:MLA150 SOP Rev J (LS).docx.pdf
- 11:15, 5 January 2022 Sawyer l talk contribs uploaded File:MLA150 SOP Rev J (LS).docx.pdf
- 12:50, 4 January 2022 John d talk contribs created page File:ADT Dicing - Blade Exposure diagram.png
- 12:50, 4 January 2022 John d talk contribs uploaded File:ADT Dicing - Blade Exposure diagram.png
- 10:14, 4 January 2022 Bosch t talk contribs deleted page File:Oxford Plasma Pro Cobra 300 Operating Instructions.docx (Wouldn't open this file format)
- 10:12, 4 January 2022 Bosch t talk contribs created page File:Oxford Cobra 300 SOP v2021-12-14.pdf
- 10:12, 4 January 2022 Bosch t talk contribs uploaded File:Oxford Cobra 300 SOP v2021-12-14.pdf
- 09:41, 4 January 2022 Bosch t talk contribs created page File:Oxford Plasma Pro Cobra 300 Operating Instructions.docx
- 09:41, 4 January 2022 Bosch t talk contribs uploaded File:Oxford Plasma Pro Cobra 300 Operating Instructions.docx
- 15:21, 3 January 2022 User account Sunghoonkim talk contribs was created
- 10:58, 3 January 2022 Sawyer l talk contribs created page File:EB2 SOP Rev C.pdf
- 10:58, 3 January 2022 Sawyer l talk contribs uploaded File:EB2 SOP Rev C.pdf
- 10:24, 3 January 2022 Sawyer l talk contribs created page File:EVG Plasma Activation SOP Rev C.pdf
- 10:24, 3 January 2022 Sawyer l talk contribs uploaded File:EVG Plasma Activation SOP Rev C.pdf
- 16:10, 21 December 2021 John d talk contribs uploaded a new version of File:Out of Focus Exposures - Carl Peterson (Krisnamoorthy Group, 2021-12).png (Added scale bars 200µm)
- 11:50, 21 December 2021 John d talk contribs created page File:Out of Focus Exposures - Carl Peterson (Krisnamoorthy Group, 2021-12).png
- 11:50, 21 December 2021 John d talk contribs uploaded File:Out of Focus Exposures - Carl Peterson (Krisnamoorthy Group, 2021-12).png
- 14:26, 16 December 2021 User account Yjchoi talk contribs was created
- 07:35, 15 December 2021 John d talk contribs created page Old Deposition Data - 2021-12-15 (Created page with "OLD Data: Copied on 2021-12-14 {{recipes|Vacuum Deposition}} =PECVD 1 (PlasmaTherm 790)= ====Historical Particulate Data==== *[https://docs.google.com/spreadsheets/d...") Tag: Visual edit: Switched
- 07:31, 15 December 2021 John d talk contribs created page Deposition Data - temporary 2021-12-15 (pasted old data)
- 12:16, 8 December 2021 John d talk contribs created page MA6 Backside Alignment - Allowed Mark Locations (100-mm BSA chuck with cutouts measurements) Tag: Visual edit
- 12:15, 8 December 2021 John d talk contribs created page File:MA-6 4-inch BSA chuck - 2631 - measurements.jpg
- 12:15, 8 December 2021 John d talk contribs uploaded File:MA-6 4-inch BSA chuck - 2631 - measurements.jpg
- 09:57, 30 November 2021 Freeborn d talk contribs created page File:Cleaning Rules for Fluorine ICP Etch tool.pdf
- 09:57, 30 November 2021 Freeborn d talk contribs uploaded File:Cleaning Rules for Fluorine ICP Etch tool.pdf
- 09:51, 30 November 2021 Freeborn d talk contribs created page File:Editing a Recipe on Plasma.pdf
- 09:51, 30 November 2021 Freeborn d talk contribs uploaded File:Editing a Recipe on Plasma.pdf
- 11:22, 24 November 2021 John d talk contribs created page Photolithography - Manual Edge-Bead Removal Techniques (added razor, EBR100 and lithographic methods) Tag: Visual edit
- 11:12, 24 November 2021 John d talk contribs moved page Photolithography - HMDS Process for Improving Adhesion to Photolithography - Improving Adhesion Photoresist Adhesion without leaving a redirect (more generalized page title)
- 11:11, 24 November 2021 John d talk contribs created page Photolithography - HMDS Process for Improving Adhesion (added Underlayers for PR adhesion) Tag: Visual edit
- 13:45, 22 November 2021 John d talk contribs created page Old Deposition Data - NastaziaM 2021-11-22 (Created page with "Testing") Tag: Visual edit
- 13:39, 22 November 2021 John d talk contribs changed group membership for Nastazia from (none) to administrator (temporary, until 13:39, 22 November 2022) and staff (temporary, until 13:39, 22 November 2022)
- 15:07, 18 November 2021 John d talk contribs created page File:Surfscan Low-Particle Example - G2.png
- 15:07, 18 November 2021 John d talk contribs uploaded File:Surfscan Low-Particle Example - G2.png
- 15:05, 18 November 2021 John d talk contribs created page File:Surfscan Low-Particle Example - G4.png
- 15:05, 18 November 2021 John d talk contribs uploaded File:Surfscan Low-Particle Example - G4.png
- 15:26, 9 November 2021 Ningcao talk contribs created page SiO2 Etch Test using CF4/CHF3 (add a table) Tag: Visual edit
- 15:17, 9 November 2021 Ningcao talk contribs created page File:SOFL0103.pdf
- 15:17, 9 November 2021 Ningcao talk contribs uploaded File:SOFL0103.pdf
- 13:29, 9 November 2021 Ningcao talk contribs created page SiO2 Etching Test using CF4/CHF3 (add a table) Tag: Visual edit
- 17:59, 8 November 2021 Ningcao talk contribs created page File:IP210212.pdf
- 17:59, 8 November 2021 Ningcao talk contribs uploaded File:IP210212.pdf
- 17:56, 8 November 2021 Ningcao talk contribs created page File:IP210201.pdf
- 17:56, 8 November 2021 Ningcao talk contribs uploaded File:IP210201.pdf
- 08:51, 1 November 2021 John d talk contribs uploaded a new version of File:MLA Quarter-Wafer Alignment.jpg (Moved left AlMk to left corner, instead of along edge. User JeurgenM from FP said this is better.)
- 12:15, 22 October 2021 John d talk contribs created page Template:StaffInfoSecondary DJ (Copy of NickL's "StaffInfoSecondary" template)
- 12:13, 22 October 2021 John d talk contribs created page Template:Tool2 DJ (copy of NickL's "Tool2" template)
- 12:12, 22 October 2021 John d talk contribs created page Template:StaffInfo DJ (copy of original StaffInfo tempalte)
- 11:49, 12 October 2021 John d talk contribs created page File:Bay 4 toxic Corrosive - wafer sample holders - IMG 4243.jpg
- 11:49, 12 October 2021 John d talk contribs uploaded File:Bay 4 toxic Corrosive - wafer sample holders - IMG 4243.jpg
- 13:59, 8 October 2021 John d talk contribs created page File:Oxford Etcher - InP Ridge Etch using Oxford PlasmaPro 100 Cobra - 2021-09-08.pdf (Oxford Etcher - InP Ridge Etch using Oxford PlasmaPro 100 Cobra - 2021-09-08 Ning Cao, 2021-09-08)
- 13:59, 8 October 2021 John d talk contribs uploaded File:Oxford Etcher - InP Ridge Etch using Oxford PlasmaPro 100 Cobra - 2021-09-08.pdf (Oxford Etcher - InP Ridge Etch using Oxford PlasmaPro 100 Cobra - 2021-09-08 Ning Cao, 2021-09-08)
- 13:55, 8 October 2021 John d talk contribs created page File:Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26.pdf (Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26 Ning Cao)
- 13:55, 8 October 2021 John d talk contribs uploaded File:Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26.pdf (Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26 Ning Cao)
- 09:41, 5 October 2021 User account Cpivard talk contribs was created
- 10:42, 29 September 2021 John d talk contribs uploaded a new version of File:OxfordPlasmaPro.jpg (shrunk to 400px)
- 10:41, 29 September 2021 John d talk contribs created page File:OxfordPlasmaPro.jpg (Photo from User Manual)
- 10:41, 29 September 2021 John d talk contribs uploaded File:OxfordPlasmaPro.jpg (Photo from User Manual)
- 19:16, 28 September 2021 John d talk contribs created page File:MLA Quarter-Wafer Alignment.jpg
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- 17:23, 21 September 2021 John d talk contribs created page File:CAD Tutorial for ASML Reticle v1 GDS.gds
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- 11:28, 10 September 2021 Sawyer l talk contribs created page File:ICP -1 Rules & Important Notes.pdf
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- 11:27, 10 September 2021 Sawyer l talk contribs created page File:ICP -1 Gas Change N2-He-N2.pdf
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- 11:27, 10 September 2021 Sawyer l talk contribs created page File:ICP -1 Gas Change CHF3-Ar-CHF3.pdf
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- 15:38, 9 September 2021 John d talk contribs created page File:GCA Local Alignment Mark Dotted.gds
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- 15:36, 9 September 2021 John d talk contribs created page File:GCA Local Alignment Mark.gds
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