View source for ASML 5500: Choose Marks for Prealignment

How to edit your job and choose which alignment marks the system will use for optical prealignment, performed on the P-Chuck (before wafer is moved to the exposure E-Chuck).

# Edit your job with Modify Job
# Go to '''''Layer Layout > Process Data'''''
# Use Layer: '''''(Prev)''''' / '''''(Next)''''' to select the layer you need to change alignment marks for
# Under  '''''Prealignment Mode''''': '''''Selection: Mark 1___ & Mark 2___''''' choose the alignment marks to align to, and use a microscope to make sure these alignment marks are (a) present on your wafer and (b) look ok with no defects.
## The wafer schematic shows which alignment marks you are choosing.
## The alignment marks, defined on a previous layer (usually combined with the first litho), are programmed/named in: ''<to be added: where in the program the AlMks are defined>''