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Equipment Info Recipes + Processes Data + Info Other Links: SignUpMonkey Get into the Lab Fabrication Services NanoTech Homepage UCSB ECE Dept. Lithography Deposition Dry Etch Wet Process Thermal Process Packaging/Bonding Metrology/Test Lithography Deposition Dry Etching Wet Etching Thermal Process Packaging/Bonding Process Control Data Calculators + Utilities Nanofab Data + Info Research + Publications Tech Talks Year End Shutdown We will be shutting down lab operations Tuesday Dec 26th at 9 am for year end maintenance activities. The current plan is to be back open for operations Thursday Dec 28th at 2 pm. The staff will be on Holiday Dec 25th & 26th, and January 1st & 2nd. //Vraj Mehalana 14:39, 16 November 2023 (PST) PECVD2 is up for SiO2 and Std SiN Only We have adjusted recipes for SiO2 and Std SiN. These are available for use. Read the emails first. Low Stress SiN and a-Si are not yet adjusted and are not ready for use. We hope to have these done the week of 11/20 // Thibeault 09:10, 16 November 2023 (PST) Job Opening: Process Engineer The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the NanoFab Job Openings page for details. //Vraj Mehalana 14:52, 30 October 2023 (PDT) Lab Access Changes: Symmetry App Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. IMPORTANT: check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled "Invitation to Access Symmetry App". // John d 13:49, 7 November 2023 (PST) ProbeStation scheduled IT maintenance The probe station is up, only the computer is down. Standard electrical probe measurements are still available, just not automated plotting //Vraj Mehalana 14:29, 3 November 2023 (PDT) Wafer Bonder, (Suss SB6-8E) The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update. //Vraj Mehalana 09:59, 20 September 2023 (PDT) News & Announcements News from the U.C. Santa Barbara Nanofabrication Facility. NanoFab staff awarded Goleta's Innovator of the Year 2023 NanoFab staff member Demis D. John has been awarded the City of Goleta's "Innovator of the Year" for 2023! The award stems from the UCSB Nanofab's impact on the communities of Santa Barbara County and surrounding regions, in enabling cutting edge technology companies to thrive, which also enables many local careers in advanced high-tech. See the full announcement by the Santa Barbara South Coast Chamber of Commerce. //John d 13:58, 7 November 2023 (PST) NanoFab Featured in Regional Tech Videos The UCSB NanoFab is showcased as a driver of innovation and enabler of the regional high-tech industry. See the videos here: Santa Barbara County: This is TechTopia UCSB NanoFab: An Innovation Center // John d 09:26, 1 November 2023 (PST) CHIPS Act Award Announced to USC and UCSB NanoFab U.S. Congressman Salud Carbajal congratulates UCSB and the NanoFab on receiving a CHIPS & Science Act award, as part of the California DREAMS Hub (Microelectronics Commons) led by USC. // Demis 12:06, 4 October 2023 (PDT) JEOL SEM's Installed Both SEM's have been replaced with new JEOL SEM's #1 and SEM #2. SEM#1 has the NABITY lithography system installed, and SEM #2 has always-on EDAX elemental analysis. Contact the supervisor, Aidan Hopkins, for more information. // John d 18:31, 20 September 2023 (PDT) Wide FOV Microscope Installed We have installed an AmScope stereo microscope in Bay 4 for wide field-of-view digital imaging/capture, with >2cm of FOV currently available. Wiki page here: AmScope Wide Field of View Stereoscope // John d 14:52, 19 April 2023 (PDT) Loomis Scribe & Break installed We have installed a new Loomis LSD-155LT Automated Scribe & Break Cleaving tool in the Back-End Processing lab. Qualifications are underway. Contact supervisor, Aidan Hopkins, for more information. // John d 09:41, 16 April 2023 (PDT) Dektak XT installed We have replaced the old Dektak 6M with a new Dektak XT profilometer. This tool will provide robust, fast metrology for rapid in-process topography inspection. // John d 10:41, 25 January 2023 (PST) New Process Control data tables We have added "Process Control Data" - data on deposition/etch repeatability - to a number of our highest used etchers and deposition tools. The datasheets are linked in multiple places, mainly on the Recipes pages for each tool, or on the general Recipes pages for Deposition Recipes or Etch Recipes. // John d 16:07, 5 January 2023 (PST) See older articles at this link General Information NanoFab Users are responsible for understanding their chemistry, risks and usage of various chemicals. Please read the MSDS sheets for the chemicals you use! Users can add qualified processing data to the Wiki pages; see the Editing_Tutorials for how to do that. Supervisors of individuals using the facility, e.g., UCSB Principal Investigators and external user managers are ultimately responsible for ensuring that their supervisees have the appropriate knowledge and training to work safely in the facility. They are also responsible for ensuring that all applicable regulatory requirements are met. This includes having a compliant "Chemical Hygiene Plan" per OSHA regulations. The information on this site should be considered as providing "general supporting information" to the Chemical Hygiene Plan of a particular supervisor. Supervisors can reference all or some of this site information within their Plans. UCSB EH&S can provide assistance to supervisors in preparing their Plans.

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