DSE is Down
After installing our backup spool the system ran for approximately 15 minutes and then failed again due to a leak in the chamber. I took apart the chamber and found a crack on the backup spool.
I spoke to an engineer at PlasmaTherm and he told me this issue was indicative of a failing lamp (or lamps) that was causing a large delta of heat across the ceramic spool.
I requested to have a couple new spools to be overnighted but they most likely won’t ship out until Monday. I tested the lamps and found two that were pretty heavily oxidized on the leads.
I’ll install all new lamps and the new spool when it gets in next week.
//Vraj Mehalana 13:02, 16 September 2024 (PDT)
IBD is UP
Replaced bad PLC controller on Depo beam. I then tested the beam with a 15 min gridclean recipe without issue.
I then ran an SiO2 dep, and a 1 hour gridclean without issue.
System UP - Mike Barreraz
// Demis D. John 14:18, 12 September 2024 (PDT)
Focused Ion Beam (Raith Velion) - TOOL DOWN for Raith Service
Raith service need to work on the Velion a little longer than anticipated. I'll keep the tool down until 2pm tomorrow (Tuesday). I'll send further updates if anything changes.
-Dan
//Vraj Mehalana 10:58, 12 September 2024 (PDT)
Lab Closure Monday the 16th
Fire Drill completed. Lab open.
// Vraj Mehalana 10:57, 12 September 2024 (PDT)
MLA150: UP
Optical AF has been calibrated and Defocus + Dose values are the same as before. PneuAF has not been checked et, but we expect a shift in PneuAF Defocus due to the Pneumatic nozzle replacement.
// Demis D. John 18:14, 11 September 2024 (PDT)
Stepper #3 (ASML DUV) - Down, update
The alignment laser has now fully failed (no laser output at all), so we can't perform any exposures.
ASML engineers will be on site Monday Tues (Sept 16th) to perform the repair.
// Demis D. John 18:14, 11 September 2024 (PDT)
Suss SB6-8E
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.
-Aidan
//Vraj Mehalana 12:43, 3 September 2024 (PDT)
EBeam#2: Up
Bell jar mount is in place. Hoist has been tested several times. System is ready to use.
// Demis D. John 18:14, 11 September 2024 (PDT)
YES is available
The error has been cleared and I ran a shorter 5 minute recipe with no warning/error.
This seems to be exclusive to the longer (8+ minute recipes), which are throwing warnings for every wafer run this long. It also appears that running 3 wafers on a longer recipe will result in an error and aborted run on the 3rd wafer. We are just going to have to live with this until we have our other generator back. So until then, please limit the longer runs to 2 wafers max. If you have more than 2 wafers to run on a longer recipe then wait about 5-10 minutes in between batches.
// Vraj Mehalana 14:16, 18 September 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
//Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)
