View source for Filmetrics F40-UV Microscope-Mounted

[[File:Filmetrics F40-UV - system pic 01.jpg|alt=Photograph of the system.|thumb|300x300px|Photograph of the F40-UV microsscope.]]

== About ==
The Filmetrics F40-UV is a microscope-mounted thin-film measurement system, allowing you to non-destructively measure thin-film thicknesses in small (patterned) areas on your sample.  It is an optical reflectometer, acquiring reflection spectra between 400-900nm optical wavelengths (Vis to Near-IR) with a regular halogen microscope light source. The Filmetrics software then performs curve-fitting to determine the thickness and/or refractive index of the measured films.

== Capabilities ==
* Measure optically transparent thin-films down to ~30nm thickness.
* Microscope Objectives: 10x, 20x, 50x, 100x, 150x
* Acquire Optical Reflection Spectra from 400-900nm
* Spectrometer/Detector is capable of detecting down to UV ~190nm, but light source does not support this wavelength.
* Reflectivity curve-fitting for thin-film thickness analysis, supporting many common materials (Si<sub>3</sub>N<sub>4</sub>, SiO<sub>2</sub> dielectrics, Si, GaAs, InP semiconductors, metals, photoresists etc.)

== Operating Procedures ==
* [[Filmetrics F40-UV Quick Start|Quick Start Procedure]]